JPH06232239A - Loading lift for sheet member - Google Patents

Abstract

PURPOSE:To make it possible to hold a sheet member in an upright state and load the member safely and definitely. CONSTITUTION:A recessed groove 15 of a center support part 13 and a recessed groove 16 of a side support part are laid out in such a fashion that their phases may be deviated, thereby forming a clearance G equivalent to the thickness of a sheet member between one side of the recessed groove 15 of the center support pat 13 and the other side of the recessed groove 16 of the side support part in the arrangement direction X of the sheet member.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer lift used when transferring a thin plate member such as a semiconductor wafer, a compact disc, or a glass substrate, in a so-called thin plate member manufacturing process or processing process. Is.

[0002]

2. Description of the Related Art FIG. 4 is a perspective view illustrating a conventional lift for transferring thin plate members. In the illustrated transfer lift 50, 51 is a support arm, and a fixed plate 52 is attached to the upper end of the support arm 51. A center support portion 53 and a pair of left and right side support portions 54 are provided on the fixed plate 52, and the center support portion 53 and the side support portions 54 are integrally formed on the fixed plate 52. Has been formed.

Further, as shown in FIG. 5, each of the center support portion 53 and the side support portion 54 has a plurality of recessed grooves 55 at a constant pitch with respect to the longitudinal direction thereof, that is, the arrangement direction X of the thin plate members. , 56 are formed, and the lower side portion of the thin plate member 57 is fitted into these concave grooves 55, 56, so that the thin plate member 57 is supported by the transfer lift 50.

[0004]

However, in the above-described conventional transfer lift 50, when forming the recessed grooves 55 and 56 in the center support portion 53 and the side support portion 54, consideration is given to variations in processing accuracy. Since the widths of the recessed grooves 55 and 56 must be set, a clearance is inevitably generated between the recessed grooves 55 and 56 and the thin plate member 57 by the variation in the processing accuracy. Therefore, the transfer lift 50
Since the upper thin plate member 57 is tilted and supported as shown in FIG. 6, there is a problem that the thin plate member 57 cannot be transferred safely and reliably in the state as it is.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a transfer lift capable of safely and reliably transferring a thin plate member in an upright state. .

[0006]

The present invention has been made in order to achieve the above-mentioned object, and has a center support portion having a plurality of concave grooves formed at a constant pitch in the arrangement direction of the thin plate members. A pair of left and right side support portions provided on both sides of the center support portion and having a plurality of recess grooves formed at the same pitch as the recess grooves of the center support portion, and the recess groove and the side of the center support portion. In the transfer lift that supports the thin plate member by the concave groove of the support portion, by arranging the concave groove of the center support portion and the concave groove of the side support portion out of phase, the center support in the arrangement direction of the thin plate members is performed. A gap corresponding to the thickness of the thin plate member is formed between one side surface of the concave groove of the side portion and the other side surface of the concave groove of the side support portion. Also, of the center support portion and the side support portion,
At least one of them can be moved and adjusted in the arrangement direction of the thin plate members.

[0007]

In the lift for transferring the thin plate member of the present invention,
By arranging the recessed groove of the center support portion and the recessed groove of the side support portion out of phase, one side surface of the recessed groove of the center support portion and the other of the recessed groove of the side support portion in the arrangement direction of the thin plate members Since a gap corresponding to the thickness of the thin plate member is formed between the side surface and the side surface, the thin plate member which is the supported member has a concave shape of the side supporting portion and one side surface of the concave groove of the center supporting portion in the arrangement direction. It is held upright by being sandwiched between the other side surface of the groove. Further, in the transfer lift of the present invention, at least one of the center support portion and the side support portion is movable and adjustable with respect to the arrangement direction of the thin plate members, whereby the concave groove of the center support portion is formed. The gap between one side surface and the other side surface of the concave groove of the side support portion can be changed according to the thickness of the thin plate member to be handled.

[0008]

Embodiments of the present invention will now be described in detail with reference to the drawings. 1A and 1B are views for explaining an embodiment of a transfer lift for thin plate members according to the present invention, in which FIG. 1A is a perspective view thereof, and FIG. 1B is a plan sectional view thereof. In the illustrated transfer lift 10, 11 is a support arm, and a fixed plate 12 is attached to the upper end of the support arm 11. Further, on the fixing plate 12, the center support portion 1
3 and a pair of left and right side support portions 14 are provided,
The side support portions 14 are arranged on both sides of the center support portion 13, respectively.

Further, each of the center support portion 13 and the side support portion 14 has a plurality of concave grooves 15 and 1 at a constant pitch in the longitudinal direction thereof, that is, in the arrangement direction X of the thin plate members.
6 is formed. Further, substantially V-shaped tapered surfaces 17 and 18 are formed on the upper sides of the concave grooves 15 and 16, respectively.

Here, in the transfer lift 10 of this embodiment,
As can be seen from the fact that the positions of the center lines (dashed lines) of the concave grooves 15 and 16 shown in FIG.
The concave groove 15 of the center support portion 13 and the concave groove 16 of the side support portion 14 are arranged so as to be out of phase with each other. Then, the concave groove 1 of the center support portion 13 in the arrangement direction X of the thin plate members
A gap G corresponding to the thickness of the thin plate member (not shown) is formed between the one side surface 19 of No. 5 and the other side surface 20 of the concave groove 16 of the side support portion 14. The above-mentioned gap G is set based on the thickness of the thin plate member to be handled, and is actually set to be slightly larger than the thickness of the thin plate member.

In addition, in the transfer lift 10 of this embodiment, the center support portion 13 arranged at the center of the fixed plate 12 can be moved and adjusted in the arrangement direction X of the thin plate members by the following configuration. ing. That is, as shown in the exploded perspective view of FIG. 2, first, the fixed plate 12 is screwed to the upper end surface of the support arm 11. The pair of side support portions 14 are set along both ends of the fixed plate 12 and fixed by screwing from the lower surface side of the fixed plate 12.

On the other hand, the center support portion 13 is once fixed to the intermediate plate 21 by screwing, and is attached to the fixed plate 12 via the intermediate plate 21.
At that time, the intermediate plate 21 passes through the elongated hole 22 and the screw 23
And the washer 24 are attached to the fixed plate 12, so that the center support portion 13 fixed to the intermediate plate 21
Can be moved in the arrangement direction X of the thin plate members by the clearance between the elongated holes 22 and the screws 23.

With the transfer lift 10 thus constructed, the thin plate member 25 serving as a supported member is formed on one side surface 19 of the concave groove 15 of the center support 13 as shown in FIG. The side support portion 14 is supported by being sandwiched by the other side surface 20 of the concave groove 16 of the side support portion 14.
In this embodiment, each side surface 1 in the arrangement direction X of the thin plate members
Since the gap G (see FIG. 1) of 9 and 20 is set to the thickness of the thin plate member 25 as described in the above configuration, the gap between the thin plate member 25 and each of the side surfaces 19 and 20 is almost the same. There is no clearance, so that the thin plate member 25 is held in an upright state without tilting.

Further, in the transfer lift 10 of this embodiment,
Since the center support portion 13 can be moved and adjusted in the arrangement direction X of the thin plate members, the gap G between the side surfaces 19 and 20 can be changed according to the thickness of the thin plate member to be handled.

In the structure of the above embodiment, only the center support portion 13 can be moved and adjusted in the arrangement direction X of the thin plate members. However, the present invention is not limited to this, and the arrangement direction X can be adjusted. The side support portion 14 side may be movable and adjustable, or both the center support portion 13 and the side support portion 14 may be movable and adjustable.

[0016]

As described above, in the present invention, since the thin plate member can be supported by the concave groove of the center supporting portion and the concave groove of the side supporting portion with almost no clearance, the transfer is performed. Since the thin plate member is held upright on the lift, it is possible to prevent the transfer error and the damage accident of the thin plate member due to the inclination of the thin plate member, and to transfer the thin plate member safely and securely. It will be possible. In particular, when a thin plate member such as a semiconductor wafer is transferred, the inclination of the thin plate member is corrected to avoid contact between products or contact between a product and a jig. Generation is greatly reduced, leading to improved yield. Further, according to the present invention, the gap between one side surface of the concave groove of the center support portion and the other side surface of the concave groove of the side support portion in the arrangement direction of the thin plate members is changed according to the thickness of the thin plate member to be handled. Therefore, even if the thickness of the thin plate member to be handled changes due to the change of the model of the product or the like, one transfer lift is sufficient.

[Brief description of drawings]

FIG. 1 is a diagram illustrating an example of a lift for transferring a thin plate member according to the present invention.

FIG. 2 is an exploded perspective view of the transfer lift shown in FIG.

FIG. 3 is a schematic diagram illustrating a support form of a thin plate member in an example.

FIG. 4 is a perspective view illustrating a conventional lift for transferring a thin plate member.

FIG. 5 is a plan view illustrating a conventional lift for transferring a thin plate member.

FIG. 6 is a schematic side view for explaining a conventional problem.

[Explanation of symbols]

 10 Transfer Lift 13 Center Support 14 Side Support 15 Recessed Groove 16 Recessed Groove G Gap X Thin Plate Member Arrangement Direction

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Fukuhiro Sato 1937 Atsui, Atsugi, Kanagawa Masakazu Engineering Co., Ltd.

Claims (2)

[Claims] 1. A center support portion having a plurality of concave grooves formed at a constant pitch in the arrangement direction of the thin plate members,
A pair of left and right side support parts provided on both sides of the center support part and having a plurality of recess grooves formed at the same pitch as the recess grooves of the center support part; In a transfer lift that supports a thin plate member with a concave groove of a side support portion, by arranging the concave groove of the center support portion and the concave groove of the side support portion with a phase shift, arrangement of the thin plate members A thin plate member having a thickness corresponding to the thickness of the thin plate member is formed between one side surface of the concave groove of the center support portion and the other side surface of the concave groove of the side support portion in the horizontal direction. Loading lift. 2. The transfer of the thin plate member according to claim 1, wherein at least one of the center support portion and the side support portion is movable and adjustable with respect to the arrangement direction of the thin plate members. Loading lift.