JPH0622981Y2 - プラズマ発生装置 - Google Patents

プラズマ発生装置

Info

Publication number
JPH0622981Y2
JPH0622981Y2 JP1985091515U JP9151585U JPH0622981Y2 JP H0622981 Y2 JPH0622981 Y2 JP H0622981Y2 JP 1985091515 U JP1985091515 U JP 1985091515U JP 9151585 U JP9151585 U JP 9151585U JP H0622981 Y2 JPH0622981 Y2 JP H0622981Y2
Authority
JP
Japan
Prior art keywords
plasma generator
waveguide
microwave
short
circuit plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985091515U
Other languages
English (en)
Japanese (ja)
Other versions
JPS622244U (enrdf_load_stackoverflow
Inventor
昇 栗山
祐一 富高
幸則 津島
Original Assignee
株式会社芝浦製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社芝浦製作所 filed Critical 株式会社芝浦製作所
Priority to JP1985091515U priority Critical patent/JPH0622981Y2/ja
Publication of JPS622244U publication Critical patent/JPS622244U/ja
Application granted granted Critical
Publication of JPH0622981Y2 publication Critical patent/JPH0622981Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1985091515U 1985-06-19 1985-06-19 プラズマ発生装置 Expired - Lifetime JPH0622981Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985091515U JPH0622981Y2 (ja) 1985-06-19 1985-06-19 プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985091515U JPH0622981Y2 (ja) 1985-06-19 1985-06-19 プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPS622244U JPS622244U (enrdf_load_stackoverflow) 1987-01-08
JPH0622981Y2 true JPH0622981Y2 (ja) 1994-06-15

Family

ID=30647474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985091515U Expired - Lifetime JPH0622981Y2 (ja) 1985-06-19 1985-06-19 プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPH0622981Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6404111B2 (ja) * 2014-12-18 2018-10-10 東京エレクトロン株式会社 プラズマ処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147438A (en) * 1980-04-16 1981-11-16 Fujitsu Ltd Microplasma treatment apparatus

Also Published As

Publication number Publication date
JPS622244U (enrdf_load_stackoverflow) 1987-01-08

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