JPH06224245A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH06224245A
JPH06224245A JP24761693A JP24761693A JPH06224245A JP H06224245 A JPH06224245 A JP H06224245A JP 24761693 A JP24761693 A JP 24761693A JP 24761693 A JP24761693 A JP 24761693A JP H06224245 A JPH06224245 A JP H06224245A
Authority
JP
Japan
Prior art keywords
semiconductor device
resin
sealing member
resin sealing
mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24761693A
Other languages
Japanese (ja)
Inventor
Shoichi Machida
祥一 町田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP24761693A priority Critical patent/JPH06224245A/en
Publication of JPH06224245A publication Critical patent/JPH06224245A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To protect an outer mold resin sealing member for a double-molded semiconductor device from any possible damage. CONSTITUTION:In a semiconductor device where semiconductor elements 1 and 2 are double-transfer-molded, a corner part 7 or a projected part of an inner side first transfer mold resin sealing member 5 is a curved surface. This construction makes it possible to prevent the concentration of local stress on an outer side second resin member 6 and protect the outside resin from damage and provide a semiconductor device whose product quality is stabilized and equalized.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は半導体装置に関し、特に
半導体素子を二重封止する半導体装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, and more particularly to a semiconductor device having a semiconductor element double-sealed.

【0002】[0002]

【従来の技術】従来の半導体装置は、半導体素子を樹脂
封止するにあたりトランスファモールド金型を用い製造
している。この素子用の樹脂層としては素子を直接封止
する第一の樹脂封止部材とこの第一の樹脂封止部材の上
から被覆する第二の樹脂封止部材とからなっており、特
に第一の樹脂部材の角は半径が0.1〜0.2mm以下
の角に近い曲面より成っている。
2. Description of the Related Art A conventional semiconductor device is manufactured by using a transfer mold die for sealing a semiconductor element with a resin. The resin layer for this element is composed of a first resin sealing member that directly seals the element and a second resin sealing member that covers from above the first resin sealing member. The corner of one resin member is formed of a curved surface having a radius of 0.1 to 0.2 mm or less and close to the corner.

【0003】図3は従来の一例を説明するための半導体
装置の断面図である。
FIG. 3 is a sectional view of a semiconductor device for explaining a conventional example.

【0004】図3に示すように、この半導体装置は発光
ダイオード11とホトトランジスタ12とをそれぞれ金
線13により電極部材14に接続し、これらを金型等に
入れ第一の樹脂封止部材15を注入してモールドしてい
る。次に、このモールドした第一の樹脂封止部材15の
上から第二の樹脂封止部材16を同様に被覆し装置とし
て形成している。尚、この場合第二の樹脂封止部材16
は収縮の際に第一の樹脂封止部材15の角部(コーナー
部)17により破損個所19が生ずることがある。
As shown in FIG. 3, in this semiconductor device, a light emitting diode 11 and a phototransistor 12 are connected to an electrode member 14 by a gold wire 13, respectively, and these are put in a mold or the like to form a first resin sealing member 15. Is injected and molded. Next, the second resin sealing member 16 is similarly coated on the molded first resin sealing member 15 to form a device. In this case, the second resin sealing member 16
At the time of contraction, a damaged portion 19 may occur due to a corner portion (corner portion) 17 of the first resin sealing member 15.

【0005】従来、上述した樹脂封止のためのトランス
ファモールド金型の製作には、割り型による方法と放電
加工による方法がある。以下、前者を図4を参照し、後
者を図5を参照して説明する。
Conventionally, there are two methods for manufacturing the above-mentioned transfer mold die for resin encapsulation: a split die method and an electric discharge machining method. The former will be described below with reference to FIG. 4 and the latter with reference to FIG.

【0006】まず、図4は従来の半導体装置の製造にお
いて割り型により形成される金型の断面図である。
First, FIG. 4 is a sectional view of a metal mold formed by a split mold in manufacturing a conventional semiconductor device.

【0007】図4に示すように、金型のキャビティ21
の角の部分は二つの金属ブロック22,23を合わせた
稜線にあたり、この部分は半径0.05mm以下の鋭い
エッジをなしている。そのため、モールドされた樹脂,
特に第一の樹脂部材の角部は尖った形状になってしま
う。
As shown in FIG. 4, the mold cavity 21 is formed.
The corner portion of is a ridge line that joins the two metal blocks 22 and 23, and this portion forms a sharp edge with a radius of 0.05 mm or less. Therefore, the molded resin,
In particular, the corners of the first resin member are sharpened.

【0008】また、図5は図4と同様に従来の半導体装
置の製造において放電加工により形成される金型の断面
図である。
Further, FIG. 5 is a sectional view of a mold formed by electric discharge machining in the manufacture of a conventional semiconductor device, like FIG.

【0009】図5に示すように、この放電加工による方
法は、金型の材料31とこの金型31に空けようとする
キャビティーの形状に加工した金属電極32とを油33
の中に浸し、この金属電極32を金型の材料31に押し
つけた状態で定電流源34より電極32と材料31との
間に電流を流すものである。この電流によりジュール熱
が発生し、金型材料31を溶融加工することができる。
この場合、当然金属電極32も同時に溶融変形するの
で、通常新しい電極を3回取替えて必要な形状を得てい
る。この放電加工による方法では、原理的にキャビティ
ーの角の形状を任意に形成することができるが、電極を
切削加工により作るため、従来は一番作り易い形状、す
なわち角が鋭いエッジとなった電極を用いていた。かか
る電極を用いた3回の放電加工により作った金型の場
合、空間に形成されるキャビティーの角は半径0.2m
m以下(通常は約0.1mm)の曲面によりなってい
た。
As shown in FIG. 5, in the method using the electric discharge machining, the material 31 of the mold and the metal electrode 32 processed into the shape of the cavity to be opened in the mold 31 are oil 33.
In this state, the metal electrode 32 is pressed against the material 31 of the mold, and a current is caused to flow from the constant current source 34 between the electrode 32 and the material 31. Joule heat is generated by this current, and the die material 31 can be melt-processed.
In this case, of course, the metal electrode 32 is also melted and deformed at the same time, so a new electrode is usually replaced three times to obtain the required shape. In principle, the electric discharge machining method can arbitrarily form the corner shape of the cavity, but since the electrode is made by cutting, the shape that has been the easiest to make in the past, that is, the edge has a sharp corner, was used. Used electrodes. In the case of a mold made by electric discharge machining three times using such an electrode, the corner of the cavity formed in the space has a radius of 0.2 m.
It had a curved surface of m or less (usually about 0.1 mm).

【0010】[0010]

【発明が解決しようとする課題】上述した従来の二重封
止された半導体装置は、第一の樹脂封止部材の角が半径
0.2mm以下の曲面より成っているので、第二の樹脂
封止部材をトランスファモールドにより作るとき、外側
の樹脂収縮により外側の樹脂に加わる応力が第一の樹脂
封止部材の角に集中し、外側の樹脂の厚さ等の条件によ
って図3の個所19のように第二の樹脂封止部材16の
破損を招くという問題があった。
In the conventional double-sealed semiconductor device described above, since the corners of the first resin sealing member are formed by curved surfaces having a radius of 0.2 mm or less, the second resin When the sealing member is formed by transfer molding, the stress applied to the outer resin due to the outer resin shrinkage concentrates on the corners of the first resin sealing member, and the location 19 in FIG. As described above, there is a problem that the second resin sealing member 16 is damaged.

【0011】また、成形直後に破損のない製品であって
も、製品を半田付けする際に加わる熱により、熱膨張に
差のある第一の樹脂封止部材と第二の樹脂封止部材との
間に応力が加わり、第一の樹脂封止部材が前述と同様
に、第二の樹脂封止部材を破損させるという問題があっ
た。
Further, even if the product is not damaged immediately after molding, the first resin sealing member and the second resin sealing member having different thermal expansions due to the heat applied when the product is soldered. There is a problem that stress is applied between the two and the first resin sealing member damages the second resin sealing member as in the above.

【0012】本発明の目的は、従来のかかる第二の樹脂
封止部材が破損することなく且つ安定した均一品質の半
導体装置を提供することにある。
It is an object of the present invention to provide a semiconductor device of stable and uniform quality without damaging the conventional second resin sealing member.

【0013】[0013]

【課題を解決するための手段】本発明の半導体装置は、
半導体素子と、前記半導体素子を搭載し金属配線により
接続した電極部材と、前記半導体素子および前記電極部
材を封止し外形コーナー部もしくは突出部に所定半径以
上の面をトランスファモールド形成した第一の樹脂封止
部材と、前記第一の樹脂封止部材をほぼ覆って封止する
第二の樹脂封止部材とを含んで構成される。
The semiconductor device of the present invention comprises:
A semiconductor element, an electrode member on which the semiconductor element is mounted and connected by metal wiring, a semiconductor element and the electrode member are sealed, and a surface having a predetermined radius or more is transfer-molded on an outer corner portion or a protruding portion. It is configured to include a resin sealing member and a second resin sealing member that substantially covers and seals the first resin sealing member.

【0014】[0014]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0015】図1は本発明の第一の実施例を説明するた
めのホトカップラの断面図である。
FIG. 1 is a sectional view of a photocoupler for explaining the first embodiment of the present invention.

【0016】図1に示すように、発光ダイオード1およ
びこのダイオード1に対向配置されたホトトランジスタ
2は電極部材4上に設置され、金線3により配線されて
いる。これら発光ダイオード1やホトトランジスタ2の
半導体素子と電極部材4とを覆い且つ外形のコーナー部
7が最小半径0.4mm以上の曲面を形成するように第
一の透光性樹脂封止材5により封止する。この第一の透
光性樹脂封止材5の金型は電極の角を丸めた放電加工に
より形成する。更に、この透光性樹脂封止材5の全面は
第二の不透光性樹脂封止材6により封止される。従っ
て、発光ダイオード1からの光は透光性樹脂中を通りホ
トトランジスタ2に受光されるが、外部に対しては不透
光性樹脂により光が洩れないようにしている。
As shown in FIG. 1, the light emitting diode 1 and the phototransistor 2 arranged to face the diode 1 are installed on an electrode member 4 and wired by a gold wire 3. The first light-transmissive resin encapsulant 5 covers the light emitting diode 1 and the semiconductor element of the phototransistor 2 and the electrode member 4, and the outer corner portion 7 forms a curved surface having a minimum radius of 0.4 mm or more. Seal. The mold of the first translucent resin encapsulant 5 is formed by electric discharge machining with rounded corners of electrodes. Further, the entire surface of the translucent resin sealing material 5 is sealed with the second non-translucent resin sealing material 6. Therefore, the light from the light emitting diode 1 passes through the transparent resin and is received by the phototransistor 2, but the light is prevented from leaking to the outside by the nontransparent resin.

【0017】このように、第一の透光性樹脂封止材5の
外形のコーナー部7を従来の最小半径0.05mmの割
り型から本実施例のように変更することにより、ホトカ
ップラの不透光性封止樹脂が透光性封止樹脂のコーナー
部によって破損していた問題を解消することができる。
例えば、このホトカップラの耐熱温度は220切歯から
380℃に向上し、半田付け等で必要とされる300℃
以上の耐熱性を得ることができる。
As described above, the corner portion 7 of the outer shape of the first light-transmissive resin encapsulant 5 is changed from the conventional split mold having the minimum radius of 0.05 mm as in the present embodiment, so that the photocoupler is not damaged. It is possible to solve the problem that the translucent sealing resin is damaged by the corner portion of the translucent sealing resin.
For example, the heat-resistant temperature of this photocoupler has increased from 220 incisors to 380 ° C, which is 300 ° C required for soldering.
The above heat resistance can be obtained.

【0018】次に、図2は本発明の第二の実施例を説明
するための光反射センサーの断面図である。
Next, FIG. 2 is a sectional view of a light reflection sensor for explaining a second embodiment of the present invention.

【0019】図2に示すように、発光ダイオード1およ
びホトトランジスタ2は同一方向に向くようにそれぞれ
別々に電極部材4上に設置され、金線3により配線され
ている。これら半導体素子と電極部材4とを別々に覆い
且つ外形のコーナー部7および突出部8が最小半径0.
4mm以上の曲面を形成するように第一の透光性樹脂封
止材5により封止する。更に、この別々に形成した透光
性樹脂封止材5の突出部8を除く部分を第二の不透光性
樹脂封止材6により封止する。かかる発光ダイオード1
およびホトトランジスタ2からなる光反射センサーの光
の送受はそれぞれの突出部8を通して行われる。
As shown in FIG. 2, the light emitting diode 1 and the phototransistor 2 are separately installed on the electrode member 4 so as to face the same direction, and are wired by the gold wire 3. The semiconductor element and the electrode member 4 are separately covered, and the outer corner portion 7 and the protruding portion 8 have a minimum radius of 0.
The first light-transmissive resin sealing material 5 is used for sealing so as to form a curved surface of 4 mm or more. Further, the separately formed translucent resin encapsulant 5 is sealed with the second non-translucent resin encapsulant 6 except for the protruding portion 8. Such a light emitting diode 1
Light is transmitted and received by the light reflection sensor including the phototransistor 2 through the respective protruding portions 8.

【0020】このように形成された光反射センサーにお
ける第一の透光性樹脂封止材5の金型は、前記第一の実
施例と同様に、電極の角を丸めた放電加工により形成さ
れ、また光反射センサーの耐熱温度および半田付けの際
の耐熱性も同様の機能向上が得られる。
The mold of the first light-transmissive resin encapsulant 5 in the light reflection sensor thus formed is formed by electric discharge machining in which the corners of the electrodes are rounded, as in the first embodiment. Further, the same function improvement can be obtained in the heat resistant temperature of the light reflection sensor and the heat resistance during soldering.

【0021】以上、本実施例について説明したが、本発
明はホトカップラや光反射センサー等の光学的半導体装
置に限定されることなく、通常のトランジスタを含む半
導体装置に置き換えても同様に実施することができる。
尚、そのときは第一の封止樹脂材は透光性樹脂である必
要はない。
Although the present embodiment has been described above, the present invention is not limited to an optical semiconductor device such as a photocoupler or a light reflection sensor, and may be similarly implemented even if it is replaced with a semiconductor device including a normal transistor. You can
At that time, the first sealing resin material does not have to be a light-transmitting resin.

【0022】[0022]

【発明の効果】以上説明したように、本発明の半導体装
置は半導体素子および電極部材を封止した第一の樹脂封
止部材の外形コーナー部もしくは突出部に所定半径以上
の曲面を形成することにより、二重樹脂封止を行ったと
きの応力集中、すなわち成形収縮や熱膨張の差により第
二の樹脂封止部材に加わる応力が第一の樹脂封止部材の
角へ集中することが無くなったので、第二の樹脂封止部
材の破損を防止することができるとともに、多少の応力
集中があっても樹脂部を破壊しないため耐熱性をも向上
させることができるという効果がある。
As described above, in the semiconductor device of the present invention, a curved surface having a predetermined radius or more is formed at the outer corner portion or the protruding portion of the first resin sealing member that seals the semiconductor element and the electrode member. As a result, stress concentration during double resin encapsulation, that is, stress applied to the second resin encapsulation member due to difference in molding shrinkage or thermal expansion does not concentrate on the corners of the first resin encapsulation member. Therefore, there is an effect that the second resin sealing member can be prevented from being damaged, and the heat resistance can be improved because the resin portion is not broken even if some stress concentration occurs.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第一の実施例を説明するためのホトカ
ップラの断面図。
FIG. 1 is a sectional view of a photo coupler for explaining a first embodiment of the present invention.

【図2】本発明の第二の実施例を説明するための光反射
センサーの断面図。
FIG. 2 is a sectional view of a light reflection sensor for explaining a second embodiment of the present invention.

【図3】従来の一例を説明するための半導体装置の断面
図。
FIG. 3 is a cross-sectional view of a semiconductor device for explaining a conventional example.

【図4】従来の半導体装置の製造において割り型により
形成される金型の断面図。
FIG. 4 is a cross-sectional view of a mold formed by a split mold in manufacturing a conventional semiconductor device.

【図5】図4と同様に従来の半導体装置の製造において
放電加工により形成される金型の断面図。
FIG. 5 is a cross-sectional view of a mold formed by electric discharge machining in manufacturing a conventional semiconductor device, similar to FIG.

【符号の説明】[Explanation of symbols]

1 発光ダイオード 2 ホトトランジスタ 3 金線 4 電極部材 5 第一の樹脂封止材 6 第二の樹脂封止材 7 コーナー部 8 突出部 1 Light Emitting Diode 2 Phototransistor 3 Gold Wire 4 Electrode Member 5 First Resin Sealing Material 6 Second Resin Sealing Material 7 Corner 8 Protrusion

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 B29C 45/26 7158−4F H01L 23/28 D 8617−4M 23/29 23/31 31/12 A 7210−4M ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 5 Identification number Office reference number FI technical display location B29C 45/26 7158-4F H01L 23/28 D 8617-4M 23/29 23/31 31/12 A 7210-4M

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 半導体素子と、前記半導体素子を搭載し
金属配線により接続した電極部材と、前記半導体素子お
よび前記電極部材を封止し外形コーナー部もしくは突出
部に所定半径以上の曲面をトランスファモールド形成し
た第一の樹脂封止部材と、前記第一の樹脂封止部材をほ
ぼ覆って封止する第二の樹脂封止部材とを含むことを特
徴とする半導体装置。
1. A semiconductor device, an electrode member on which the semiconductor device is mounted and connected by metal wiring, a semiconductor device and the electrode member are sealed, and a curved surface having a predetermined radius or more is formed at an outer corner portion or a protruding portion by transfer molding. A semiconductor device comprising a formed first resin sealing member and a second resin sealing member that substantially covers and seals the first resin sealing member.
【請求項2】 前記外形コーナー部もしくは突出部に形
成する曲面を半径0.3mm以上の曲面に形成した請求
項1記載の半導体装置。
2. The semiconductor device according to claim 1, wherein the curved surface formed on the outer corner portion or the protruding portion is formed into a curved surface having a radius of 0.3 mm or more.
JP24761693A 1993-08-26 1993-08-26 Semiconductor device Pending JPH06224245A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24761693A JPH06224245A (en) 1993-08-26 1993-08-26 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24761693A JPH06224245A (en) 1993-08-26 1993-08-26 Semiconductor device

Publications (1)

Publication Number Publication Date
JPH06224245A true JPH06224245A (en) 1994-08-12

Family

ID=17166164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24761693A Pending JPH06224245A (en) 1993-08-26 1993-08-26 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH06224245A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006015618A (en) * 2004-07-02 2006-01-19 Hitachi Ltd Structure of component made of at least two members and its production method
US20150069422A1 (en) * 2013-09-11 2015-03-12 Kabushiki Kaisha Toshiba Photocoupler and light emitting element
US10903130B2 (en) 2016-10-20 2021-01-26 Fuji Electric Co., Ltd. Semiconductor apparatus and manufacturing method of semiconductor apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019358A (en) * 1973-06-11 1975-02-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019358A (en) * 1973-06-11 1975-02-28

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006015618A (en) * 2004-07-02 2006-01-19 Hitachi Ltd Structure of component made of at least two members and its production method
US20150069422A1 (en) * 2013-09-11 2015-03-12 Kabushiki Kaisha Toshiba Photocoupler and light emitting element
US9425350B2 (en) * 2013-09-11 2016-08-23 Kabushiki Kaisha Toshiba Photocoupler and light emitting element
US10903130B2 (en) 2016-10-20 2021-01-26 Fuji Electric Co., Ltd. Semiconductor apparatus and manufacturing method of semiconductor apparatus

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