JPH0622271B2 - Semiconductor integrated circuit device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor integrated circuit device, and more particularly to a semiconductor integrated circuit device provided with a highly accurate dividing resistor.

[Conventional technology]

The conventional dividing resistor is formed as a single linear resistor and is divided. The voltage is taken out from the take-out electrodes placed at equal intervals, or the resistor 1 of the same shape as shown in FIG.
Arrange many 1's so that these resistors become one. Metal wiring 1
The electrodes 4 were connected to each other, the extraction electrodes 13 were arranged at equal intervals so as to have the same resistance, and the potential was taken out by using the extraction wiring 13.

[Problems to be solved by the invention]

The above-mentioned conventional dividing resistors have a very high relative accuracy for each of the arranged resistors, but on the other hand, there is a drawback that the relative accuracy deteriorates because of the persistent resistance that occurs when they are connected by metal wiring. .

This will be described with reference to the equivalent circuits shown in FIGS. Normally, in order to divide a certain voltage into K equal parts, K resistors are connected in series, and an output is obtained from these connection points. However, if this is done on an actual integrated circuit, the area is increased, so the above-mentioned second As shown in the figure, several resistors are grouped together to form a resistor string, and several resistors are grouped together to form the required split resistors. However, in this case, since extra connection resistances of r _{1 to} rm to rm _{+ α} enter, for example, the number of resistances is 256, and the voltage V (Nl ₊₁ ) of Nl ₊₁ when the voltage Vc is applied to both ends of the resistances.
And ask Is actually the ideal value Will be.

An object of the present invention is to provide a semiconductor integrated circuit device provided with a dividing resistor which eliminates an error due to a connection resistance generated when connecting a resistor string with a metal wiring and which can be highly integrated.

[Means for solving problems]

The semiconductor integrated circuit device of the present invention is a semiconductor integrated circuit device having a resistive element on a substrate, in which one resistor is periodically bent and arranged, and the resistance values between adjacent extraction electrodes are substantially the same. It has a dividing resistor configured as above.

〔Example〕

Next, the present invention will be described with reference to the drawings. FIG. 1 is a schematic plan view of an embodiment of the present invention. In FIG. 1, the resistor 1 is one resistor which is periodically bent, and the resistance value between the extraction electrodes 2 is designed to be the same. At this time, the resistance value at the bent portion is also taken into consideration. However, this can be accurately obtained by a two-dimensional analysis program by computer simulation. Therefore, making the resistance between the extraction electrodes the same can be easily solved. Denoted at 3 is a take-out wiring taken out from each take-out electrode 2.

As described above, one resistor formed on the substrate is periodically bent and arranged, and the semiconductor integrated circuit device having the dividing resistors configured such that the resistance values between the adjacent extraction electrodes 2 are substantially the same. Therefore, the continuous metal wiring is not formed unlike the conventional example.

〔The invention's effect〕

As described above, the present invention not only escapes from an error due to connection resistance generated when connecting a resistance string in which several resistances are combined with a metal wiring by bending one long resistance, but also connects the resistance string. Since there is no metal wiring, this portion also serves as a passage area for the take-out wiring, so that there is an effect that higher integration can be achieved.

[Brief description of drawings]

FIG. 1 is a schematic plan view of an embodiment of the present invention, FIG. 2 is a schematic plan view of a conventional example, and FIG. 3 is an equivalent circuit of the conventional example. 1, 11, R _{n + 1 to} R _{n + 12} ... Resistance, 2, 12, N _{l + 1}
~ N _{l + 11} …… Extraction electrode, 3, 13 …… Extraction wiring, 1
4 ... Metal wiring, rm _{+1 to} rm ₊₈ ...... Connection resistance.

Claims (1)

[Claims] 1. A semiconductor integrated circuit device having a single resistor that is periodically bent on a substrate, wherein the resistor has a plurality of first straight line portions arranged at equal intervals and the first straight line portions. A plurality of second straight line portions that connect between the ends of two adjacent first straight line portions so as to form a series connection body, and a plurality of electrodes are provided from each of the plurality of first straight line portions. The electrodes are taken out from each of the plurality of second linear portions while being taken out, and the corners of each of the plurality of second linear portions are chamfered so that the resistance values between the electrodes are equal to each other. A semiconductor integrated circuit device.