JPH062198Y2 - 微細ビーム成形装置 - Google Patents
微細ビーム成形装置Info
- Publication number
- JPH062198Y2 JPH062198Y2 JP1837988U JP1837988U JPH062198Y2 JP H062198 Y2 JPH062198 Y2 JP H062198Y2 JP 1837988 U JP1837988 U JP 1837988U JP 1837988 U JP1837988 U JP 1837988U JP H062198 Y2 JPH062198 Y2 JP H062198Y2
- Authority
- JP
- Japan
- Prior art keywords
- collimator
- energy
- slit
- ion
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 20
- 238000010884 ion-beam technique Methods 0.000 claims description 18
- 102100027340 Slit homolog 2 protein Human genes 0.000 claims description 13
- 101710133576 Slit homolog 2 protein Proteins 0.000 claims description 13
- 229910052734 helium Inorganic materials 0.000 description 11
- 239000001307 helium Substances 0.000 description 11
- -1 helium ion Chemical class 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 238000007493 shaping process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000003779 heat-resistant material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 101700004678 SLIT3 Proteins 0.000 description 1
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000004846 x-ray emission Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1837988U JPH062198Y2 (ja) | 1988-02-15 | 1988-02-15 | 微細ビーム成形装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1837988U JPH062198Y2 (ja) | 1988-02-15 | 1988-02-15 | 微細ビーム成形装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01122254U JPH01122254U (en, 2012) | 1989-08-18 |
| JPH062198Y2 true JPH062198Y2 (ja) | 1994-01-19 |
Family
ID=31232974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1837988U Expired - Lifetime JPH062198Y2 (ja) | 1988-02-15 | 1988-02-15 | 微細ビーム成形装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062198Y2 (en, 2012) |
-
1988
- 1988-02-15 JP JP1837988U patent/JPH062198Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01122254U (en, 2012) | 1989-08-18 |
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