JPH06201633A - Method and apparatus for detecting conductive particle - Google Patents
Method and apparatus for detecting conductive particleInfo
- Publication number
- JPH06201633A JPH06201633A JP217393A JP217393A JPH06201633A JP H06201633 A JPH06201633 A JP H06201633A JP 217393 A JP217393 A JP 217393A JP 217393 A JP217393 A JP 217393A JP H06201633 A JPH06201633 A JP H06201633A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- insulator
- conductive particles
- electrode
- waveform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims abstract description 32
- 238000000034 method Methods 0.000 title abstract description 21
- 239000012212 insulator Substances 0.000 claims abstract description 24
- 238000007689 inspection Methods 0.000 description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 239000011889 copper foil Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、平板状またはシート状
の絶縁体に含まれている導電性粒子の検出方法及びその
検出装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of detecting conductive particles contained in a flat plate-shaped or sheet-shaped insulator and a detection device for the same.
【０００２】[0002]
【従来の技術】従来、印刷配線板は、例えば平面状絶縁
体の両側に銅箔を重ね、加熱・加圧して積層一体化し、
その銅箔の必要な箇所に穴をあけ、その穴内を金属化し
た後、銅箔に回路加工するものと、平面状絶縁体と銅箔
を予め貼り合わせた内層板を用いて、各層の回路をその
銅箔を加工して作成した後、各層間に平面状絶縁体を挿
入して加熱・加圧して積層一体加し、最外層の銅箔の必
要な箇所に穴をあけ、その穴内を金属化した後、銅箔に
回路加工する多層印刷配線板とが知られている。2. Description of the Related Art Conventionally, a printed wiring board is formed by, for example, laminating copper foil on both sides of a planar insulator and heating and pressing to laminate and integrate them.
The holes of the copper foil are made in the necessary places, the inside of the holes is metallized, and then the circuit processing is performed on the copper foil, and the inner layer plate in which the planar insulator and the copper foil are pasted together is used to make the circuit of each layer. After processing the copper foil, insert a planar insulator between each layer, heat and pressurize to laminate and add, and make holes in the required places of the outermost copper foil, A multilayer printed wiring board in which a circuit is formed on a copper foil after being metallized is known.
【０００３】いずれの印刷配線板においても、絶縁層を
形成する平面状絶縁体に導電性粒子が混入していると、
回路間でショートまたは稼動中に電食を生じ、印刷配線
板として使用できなくなる。In any printed wiring board, if conductive particles are mixed in a planar insulator forming an insulating layer,
Short circuit between circuits or electrolytic corrosion during operation makes it unusable as a printed wiring board.
【０００４】この導電性粒子は、平面状絶縁体を製造す
る過程または平面状絶縁体の原材料を製造・加工する過
程で、絶縁体の表・裏面に付着したり、内部に混入する
ものである。したがって、平面状絶縁体の絶縁性を維持
・向上するには、この導電性粒子を検出し、除去できる
導電性粒子であればそれを除去し、除去できない場合に
は不良品として処理しなければならない。The conductive particles adhere to the front and back surfaces of the insulator or are mixed in the inside in the process of manufacturing the planar insulator or in the process of manufacturing and processing the raw material of the planar insulator. . Therefore, in order to maintain and improve the insulating property of the planar insulator, the conductive particles should be detected, and if they can be removed, they should be removed, and if they cannot be removed, they should be treated as defective products. I won't.
【０００５】従来、このような平面状絶縁体に混入され
た導電性粒子を検出するには、上下に電極を当てて電圧
を印加する耐電圧検査法と、Ｘ線を当てて影を検出する
Ｘ線検査法が採用されている。Conventionally, in order to detect conductive particles mixed in such a planar insulator, a withstand voltage inspection method of applying a voltage by applying electrodes to the upper and lower sides and a shadow by applying an X-ray. The X-ray inspection method is adopted.
【０００６】[0006]
【発明が解決しようとする課題】ところが、耐電圧検査
法では、導電性粒子の表面が絶縁体で一定量以上覆われ
ている場合は検出不可能であった。また、Ｘ線検査法で
は、検査時間が膨大なため全数検査が不可能であった。However, in the withstand voltage inspection method, it was impossible to detect when the surface of the conductive particles was covered with an insulator in a certain amount or more. Further, in the X-ray inspection method, it is impossible to perform 100% inspection because the inspection time is huge.
【０００７】本発明は、このような事情に鑑みてなされ
たものであり、その目的とするところは、平面状または
シート状の絶縁体に含まれている導電性粒子をきわめて
短時間で検出することにある。The present invention has been made in view of the above circumstances, and an object thereof is to detect conductive particles contained in a planar or sheet-like insulator in an extremely short time. Especially.
【０００８】[0008]
【課題を解決するための手段】本発明は、一平面状に平
行して配置され一つ置きに接地される複数の電極を設
け、この接地された電極を挾んで隣接する電極に互いに
逆位相の矩形波電圧を引加するとともに、この電極を被
検査体に接近させて、電極間の静電容量の変化により絶
縁体に含まれている導電性粒子の検出を行うことを特徴
とする導電性粒子の検出方法である。また、絶縁性を有
する平面状保持部材の１平面上に出力端子を引出してな
る電極とアース電極を複数組配置することを特徴とする
ものである。SUMMARY OF THE INVENTION According to the present invention, a plurality of electrodes arranged in parallel on one plane and grounded at every other place are provided, and the electrodes which are grounded are opposite in phase to each other. Of the conductive particles contained in the insulator by changing the electrostatic capacitance between the electrodes while applying the rectangular wave voltage of It is a method of detecting sexual particles. Further, the invention is characterized in that a plurality of sets of electrodes and ground electrodes each having an output terminal drawn out are arranged on one plane of an insulating planar holding member.
【０００９】[0009]
【作用】平面状絶縁体に混入された導電性粒子の検出
は、平面状絶縁体の表面に、１平面上に配置した電極を
接近させ、等価な正相・逆相の矩形波を印加し、かつキ
ャンセルさせてＯＶとし、この状態で電極を被検査体に
接近させる。被検査体に導電性粒子があると、電極間の
静電容量の微分値が変化する。導電性粒子が存在してい
る場合、この微分波形の変化により導電性粒子の有無を
検出する。したがって、被検査体を破壊せず短時間で導
電性粒子の有無を調べることができる。[Function] To detect the conductive particles mixed in the planar insulator, the electrodes arranged on one plane are brought close to the surface of the planar insulator, and an equivalent square wave of positive phase / negative phase is applied. Then, the OV is canceled and the electrodes are brought close to the object to be inspected in this state. When conductive particles are present on the device under test, the differential value of the electrostatic capacitance between the electrodes changes. When the conductive particles are present, the presence or absence of the conductive particles is detected by the change in the differential waveform. Therefore, it is possible to check the presence or absence of the conductive particles in a short time without destroying the inspection object.
【００１０】[0010]
【実施例】以下、本発明の実施例を図面を参照しつつ説
明する。図１は、本発明に係る導電性粒子の検出装置の
一部破砕平面図であり、帯状の電極１，１，…が所定間
隔を隔てて、絶縁性を有する平板状の電極保持材２の片
側面に複数列取付けられている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a partially fragmented plan view of a conductive particle detection device according to the present invention, in which strip-shaped electrodes 1, 1, ... Mounted in multiple rows on one side.
【００１１】この電極１，１，…の所定電極からＡ，Ｂ
の出力端子３，３が引出され、隣接する電極１，１，…
は接地電極とされている。そして、この電極１，１，…
を平面状絶縁体４の表面に接近させ（図３参照）、図５
のようにＡ，Ｂの出力端子３，３から正相・逆相の矩形
波形電圧を印加して、相互の電位をキャンセルさせてＯ
Ｖとする（図５参照）。この状態で、電極１，１間の静
電容量の変化を微分波形で検出すると、導電性粒子が存
在する場合、この微分波形が変化する。From the predetermined electrodes of the electrodes 1, 1, ...
Output terminals 3 and 3 are drawn out, and adjacent electrodes 1, 1, ...
Is a ground electrode. And these electrodes 1, 1, ...
Is brought close to the surface of the planar insulator 4 (see FIG. 3), and
As described above, positive and negative phase rectangular waveform voltages are applied from the A and B output terminals 3 and 3 to cancel each other's electric potential and O
V (see FIG. 5). In this state, when the change in the electrostatic capacitance between the electrodes 1 and 1 is detected by the differential waveform, this differential waveform changes when conductive particles are present.
【００１２】図６は、この微分波形の変化を増幅した波
形図であり、導電性粒子が存在しない正常部は、波形Ｔ
1 で表れ、導電性粒子の混入部は、波形Ｔ2 で表れ、Ｔ
1 ＞Ｔ2 の関係となる。FIG. 6 is a waveform diagram in which the change in the differential waveform is amplified, and the normal portion where the conductive particles are not present has the waveform T.
1 and the mixed portion of the conductive particles is represented by the waveform T 2 ,
The relationship is 1 > T 2 .
【００１３】この方法による識別時間は、１電極面当た
り１ｍ／秒であり、短時間に導電性粒子の混入部を検出
できるとともに、その部分を除去することができ、平面
状絶縁体の表・裏面に付着したり、混入された導電性粒
子の検出を可能とするものである。The identification time by this method is 1 m / sec per electrode surface, and it is possible to detect the mixed portion of the conductive particles in a short time and remove the portion. This makes it possible to detect conductive particles that are attached to or mixed with the back surface.
【００１４】本発明者らは、平面状絶縁体に導電性粒子
を付着・混入させたサンプルを用いて、前記する従来の
耐電圧検査法、Ｘ線検査法及び本発明方法により、その
検出精度を確認した。また同時に、一定面積当たりの検
査時間と実用性の可否を調べた。The inventors of the present invention used a sample prepared by adhering and mixing conductive particles to a planar insulator, and performed the above-mentioned conventional withstand voltage inspection method, X-ray inspection method, and the method of the present invention to detect the detection accuracy. It was confirmed. At the same time, the inspection time per fixed area and the feasibility of practicality were examined.
【００１５】その結果、本発明の検出精度はＸ線検査法
と同等以上で、耐電圧検査法に比べ著しく優れていた。
また、１，０００×１，０００ｍｍあたりの検査所要時
間は、Ｘ線検査法では１０時間／に対し、本発明方法で
は１０秒以下であり、耐電圧検査法では３０秒であっ
た。さらに、Ｘ線検査法及び本発明方法では、非検査体
の厚さ及び導電性粒子が絶縁体の表面、裏面又は内部の
いずれに混入していても検出可能であったが、耐電圧検
査法では、絶縁層が厚くなったり、導電性粒子が表面又
は裏面に付着していると検出できなかった。As a result, the detection accuracy of the present invention was equal to or higher than that of the X-ray inspection method, and was significantly superior to that of the withstand voltage inspection method.
The inspection time per 1,000 × 1,000 mm was 10 hours / in the X-ray inspection method, 10 seconds or less in the method of the present invention, and 30 seconds in the withstand voltage inspection method. Furthermore, in the X-ray inspection method and the method of the present invention, it was possible to detect whether the thickness of the non-inspection object and the conductive particles were mixed on the surface, the back surface, or the inside of the insulator. Then, it could not be detected that the insulating layer was thick or that the conductive particles were attached to the front surface or the back surface.
【００１６】[0016]
【発明の効果】以上説明したように、本発明によれば、
絶縁体に含まれている導電性粒子を短時間で検出するこ
とができ、その導電性粒子の混入部分を除去することに
より、平面状またはシート状の絶縁体の絶縁性を維持・
向上することができる。As described above, according to the present invention,
The conductive particles contained in the insulator can be detected in a short time, and the insulating property of the planar or sheet-like insulator can be maintained by removing the mixed part of the conductive particles.
Can be improved.
【図１】本発明に一実施例に係る検出装置の要部平面図
である。FIG. 1 is a plan view of a main part of a detection device according to an embodiment of the present invention.
【図２】図１のａ−ａ線断面図である。FIG. 2 is a sectional view taken along line aa of FIG.
【図３】本発明に係る導電性粒子検出方法の説明図であ
る。FIG. 3 is an explanatory diagram of a conductive particle detection method according to the present invention.
【図４】本発明に係る検出装置の等価回路図である。FIG. 4 is an equivalent circuit diagram of the detection device according to the present invention.
【図５】印加する正相・逆相の矩形波である。FIG. 5 is a square wave of positive phase / negative phase to be applied.
【図６】出力される微分波形図である。FIG. 6 is a differential waveform diagram that is output.
１ 電極 ２ 電極保持部材 1 electrode 2 electrode holding member
Claims (2)
接地される複数の電極を設け、この接地された電極を挾
んで隣接する電極に互いに逆位相の矩形波電圧を引加す
るとともに、この電極を被検査体に接近させて、電極間
の静電容量の変化により絶縁体に含まれている導電性粒
子の検出を行うことを特徴とする導電性粒子の検出方
法。1. A plurality of electrodes which are arranged in parallel in one plane and grounded at intervals of one another are provided, and rectangular electrodes having opposite phases are applied to adjacent electrodes by sandwiching the grounded electrodes. At the same time, the conductive particles contained in the insulator are detected by bringing this electrode close to the object to be inspected and detecting a change in the capacitance between the electrodes.
上に出力端子を引出してなる電極とアース電極を複数組
配置することを特徴とする導電性粒子の検出装置。2. A conductive particle detecting device comprising a plurality of sets of electrodes and ground electrodes each having an output terminal drawn out on one plane of a planar holding member having an insulating property.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP217393A JPH06201633A (en) | 1993-01-11 | 1993-01-11 | Method and apparatus for detecting conductive particle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP217393A JPH06201633A (en) | 1993-01-11 | 1993-01-11 | Method and apparatus for detecting conductive particle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06201633A true JPH06201633A (en) | 1994-07-22 |
Family
ID=11521978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP217393A Pending JPH06201633A (en) | 1993-01-11 | 1993-01-11 | Method and apparatus for detecting conductive particle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06201633A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008051715A (en) * | 2006-08-25 | 2008-03-06 | Yoshiharu Nagamatsu | Wireless tag type sensor |
| JP2008525821A (en) * | 2004-12-27 | 2008-07-17 | ベクトン・ディキンソン・アンド・カンパニー | Detection method and apparatus for detecting the growth of microorganisms |
-
1993
- 1993-01-11 JP JP217393A patent/JPH06201633A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008525821A (en) * | 2004-12-27 | 2008-07-17 | ベクトン・ディキンソン・アンド・カンパニー | Detection method and apparatus for detecting the growth of microorganisms |
| US8815574B2 (en) | 2004-12-27 | 2014-08-26 | Becton, Dickinson And Company | Detection method and apparatus for detecting microbial growth |
| US9400272B2 (en) | 2004-12-27 | 2016-07-26 | Becton, Dickinson And Company | Detection method and apparatus for detecting microbial growth |
| JP2008051715A (en) * | 2006-08-25 | 2008-03-06 | Yoshiharu Nagamatsu | Wireless tag type sensor |
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