JPH0620084Y2 - Height standard - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention comprises a housing, a holder, a plurality of blocks, and a means for measuring the relative movement distance between the housing and the holder, and is held by the holder in a so-called ringing state. The present invention relates to a height reference device for measuring the height of an object to be measured based on a distance obtained from a plurality of blocks and a distance due to relative movement of a holder and a housing. More specifically, the present invention relates to an improvement in measurement accuracy while keeping the size and weight of the entire device within a certain range, and further, the movement of the holder with respect to the housing and the measurement of the movement can be easily performed.

[Prior Art] As shown in FIG. 4, a conventional height reference device 1α has a feed screw 11α for relatively moving with respect to a housing (not shown) screwed onto an upper portion of a holder 4α and a feed screw. It was configured by connecting a micrometer head 25α to 11α.

[Problems to be Solved by the Invention] In the height reference device 1α, the holder 4α for the housing is used.
The moving distance of was obtained by reading the measurement value of the micrometer head 25α.

Now, the accuracy of the movement distance is determined by the measurement accuracy of the micrometer head 25α. Therefore, in order to obtain higher measurement accuracy, it is necessary to set the reading scale more finely, and in order to set the reading scale more finely, the diameter of the thimble 26α to which the scale is attached must be made larger. there were. That is, for example, the feed screw 11
Using a screw with a pitch of 0.5 mm for α, the minimum reading (graduation) is 0.001 mm and the scale is 0.5 mm.
In this case, the circumference of thimble 26α is 0.5 × 0.5 ÷ 0.001 = 250 mm. This means that the diameter is about 80 mm. If the reading accuracy (measurement accuracy) is increased by keeping the screw pitch and the distance between the scales unchanged and setting the minimum reading value to 0.0005 mm, the circumference of the thimble 26α is 0.5 × 0.5 ÷ 0.
With 0005 = 500 mm, the diameter is about 159 mm.
In addition, the distance between graduations is required to be at least 0.5 mm for reading, and it is desirable to have a distance of about 0.7 to 1.0 mm for easy reading, and the diameter of thimble 26α will be larger and it will be suitable for it. Moreover, the housing becomes large and the entire apparatus becomes large, and the total weight becomes large, which makes the handling troublesome, and the problem was serious.

Further, in the height reference device 1α, the housing and the casing 4 are
Since the movement operation of α and the measurement of the movement amount are performed at the micrometer head 25α, that is, at the upper part of the device,
There was a problem that it was difficult to handle. In particular, when the vertical distance (height) of the entire device is large, operation and measurement (reading) must be performed at a higher position, and reading errors of measured values are likely to occur, which is a serious problem. Met.

The present invention has been made in view of the above circumstances, and it is possible to improve the accuracy of measurement while keeping the size and weight of the entire device within a certain range, and the operation of moving the casing with respect to the housing and the operation thereof. (EN) Provided is a height reference device capable of easily measuring a moving distance.

[Means for Solving the Problems] The present invention has a main scale attached to one of a housing and a casing that can move relative to each other, a detection head attached to the other, and the housing and the casing are detected by the detection head. A height reference device configured to determine a distance of relative movement.

The detailed structure is composed of a housing, a plurality of blocks each having a pair of two surfaces facing each other in parallel and a desired distance between the two surfaces, and a plurality of blocks. A holder that holds the ringing state that is in close contact, a main scale and a detection head that detect the distance of the relative movement when they move relative to each other, and a main scale and a detection head that are based on a signal from the detection head. Computation display means for computing and displaying the distance of relative movement of is provided, and between the holder and the housing,
A height reference device is provided with moving means for making the holder and the housing relatively movable, and one of the main scale and the detection head is attached to the housing and the other is attached to the holder.

In addition, the height reference device is configured with a plurality of blocks held in the casing and means for indicating, when a specific block is used for height measurement, which block is used for the measurement. can do. The means for indicating which block is used for measurement is
An example is one including LEDs arranged at a portion of the casing that is at the same height as a plurality of blocks held by the casing.

Furthermore, the height reference device, from the surface of the surface plate on which the device is placed,
That is, the height of the DUT is automatically calculated based on the distance from the lower end of the housing to the upper surface of the block used for measurement and the movement distance when the casing is moved with respect to the reference position of the housing. It can be configured to obtain. The means for obtaining the distance from the lower end of the housing to the upper surface of the block used for measurement is specifically provided with a storage means for storing the height of each block, that is, the distance between two parallel surfaces. , A configuration obtained by calling the distance from the storage means to the upper surface of the block to be used.

In addition, the moving means for relatively moving the holder and the housing is provided with a set of bevel gears between the shaft connected to the holder and the shaft connected to the operation knob, so that the vertical movement of the holder and the housing can be laterally moved. It can be configured to be operated by.

[Operation] The main scale and the detection head for detecting the distance of relative movement between the housing and the casing have substantially constant sizes without depending on the detection accuracy.

The position where the housing and the casing are moved relative to each other and the position where the relative movement is measured are not limited to the upper end of the device.

[Embodiment] This invention will be described in detail based on an embodiment shown in FIGS. However, the present invention is not limited to this embodiment.

The height reference device 1 has a housing 2 as shown in FIGS.
, A plurality of blocks 3, 3a, 3b ... And a holder 4
The main scale 5, the detection head 6, the calculation display means 7, and the moving means 8 are provided.

As for the housing 2, the holder 4 is moved in the vertical direction (arrow A direction).
It is installed inside so that it can be moved.

Each of the blocks 3, 3a, 3b ... Has a top surface and a bottom surface that are parallel to each other, and is formed with a desired distance between the surfaces so that a reference dimension can be obtained. Blocks 3, 3a, 3b
Is made of ceramics obtained by sintering with zirconium oxide as a main component and yttrium oxide and aluminum oxide as auxiliary agents.

The holder 4 holds the blocks 3, 3a, 3b ... In a ringing state.

The main scale 5 is attached to the upper portion of the holder 4 in an upright state so that the detection direction is the arrow A direction.

The detection head 6 is configured to include an index scale, a light emitting element, a light receiving element, a holding member (above, not shown), and the like, and when the detection head 6 moves relative to the main scale 5, the detection head 6 cooperates with the main scale 5 to move the relative movement. It is to detect the distance. The detection head 6 is fixed to a portion (not shown) of the housing 2 facing the main scale 5.

The calculation display means 7 is based on the signal from the detection head 6,
The relative movement distance between the main scale 5 and the detection head 6 is calculated. An operation / display panel 9 is provided on the front surface of the calculation display means 7.

The moving means 8 includes a female screw portion 10 provided on the upper portion of the holder 4, a screw rod 11 screwed with the female screw portion 10, and a bevel gear 12 fixed to the screw rod 11 with an axis common to the screw rod 11. And an operation shaft 14 provided with a bevel gear 13 that meshes with the bevel gear 12. The height reference 1 is provided with a guide mechanism (not shown) for guiding the holder 3 that moves with respect to the housing 2 in the direction of arrow A. Reference numeral 15 denotes a guide member having a V-shaped groove portion, which constitutes the guide mechanism and is fixed to the holder 4.

In the height reference device 1, when the holder 4 holds a plurality of blocks 3, 3a, 3b ...
LEDs on the same level as the upper surface of b ...
16, 16a, 16b ... Are arranged. LED1
The lighting operation of 6, 16a, 16b, ... Is performed by designating with the designating switch 17 of the operation / display panel 9.

Further, in the height reference device 1, when the holder 4 holds a plurality of blocks 3, 3a, 3b ... In the ringing state, the height of the held blocks 3, 3a, 3b. 2 from the bottom, which is the bottom end of the block 3,
A RAM 18 for storing the distances to 3a, 3b ...

Moreover, the designated switch 17 can be used to switch the LEDs 16, 16a, 16
When any one of b ... Is designated to be lit, the designated lit LED in the LEDs 16, 16a, 16b ... and a block whose top surface position is the same among the blocks 3, 3a, 3b. , The height to the top is RAM
18 is called by the CPU 19 which is the calculation unit of the calculation display means 7.

In addition, in the height reference device 1, when the signal from the detection head 6 is input to the CPU 19 via the counting circuit 20, the distance of relative movement between the main scale 5 and the detection head 6 is calculated,
Further, the distance is added to the height (distance) to the upper surface of the block designated in the blocks 3, 3a, 3b, ... Called by the CPU 19. Then, the addition result is that from the bottom surface of the housing 2 to the blocks 3, 3a,
The distance to the upper surface of the block designated in 3b ... Is displayed on the liquid crystal display unit 21. In addition, RO
M22 stores the calculation process.

FIG. 3 is a structural explanatory diagram related to the measurement operation of the height reference device 1.

The height reference device 1 is configured as described above. In the following, the use of the height reference 1 will be explained.

First, the height reference device 1, the object to be measured (not shown), and the support stand (not shown) are placed on a fixed ban (not shown). The minimum reading value on the support stand is 0.1.
A μm displacement detector (not shown) is supported.

Next, the height reference 1 is calibrated.
That is, by moving the holder 4 with respect to the housing 2 in the direction of arrow A, the height of the upper surface of the block 3 held at the lowermost position of the holder 4 of the height reference device 1 can be adjusted by a separately prepared block gauge. Set to the standard height. Similarly, the displacement detector held on the stand is calibrated. After that, the position of the displacement detector is adjusted with respect to the stand so that the tip position (detection position) of the probe becomes the height of the measured portion of the measured object, and the display of the displacement detector is set to zero.

Further, the block whose height of the upper surface is closest to the measured part of the object to be measured is visually selected from the blocks 3, 3a, 3b ... And the LED whose height position is the same as the upper surface of the selected block is selected. , LED16, 16a, 16b ... Are designated by the designation switch 17 and lighted. By the designation operation of the designation switch 17, the distance from the RAM 18 to the CPU 19 is called from the RAM 18 to the distance from the bottom surface of the housing 2 to the top surface of the block having the same height as the designated LED.

Here, by sliding the stand on the surface plate, the tip of the probe of the displacement detector is moved to the vicinity of the upper surface of the designated block. If the height of the probe tip is higher than the top surface of the designated block when moved, slide the stand further on the surface plate so that the tip of the probe is above the designated block. And height standard 1
Position the stand against. On the other hand, when the height of the tip of the probe is lower than the upper surface of the designated block, the operating shaft 14 is operated to move the holder 4 in the downward direction of the arrow A with respect to the housing 2 to move the designated position. Position the upper surface of the block so that it is lower than the height of the tip of the probe.

Then, the operation shaft 14 is gradually operated little by little, and the upper surface of the designated block slightly contacts the tip of the probe, and the holder 4 is moved relative to the housing 2 until the display of the displacement detector becomes zero. Move upward in arrow A. The movement distance of the movement of the holder 4 with respect to the housing 2 is detected by the detection head 6 as a relative movement distance between the main scale 5 and the detection head 6, and the detection head 6 sends a signal indicating the movement distance via the counting circuit 20. And sends it to the CPU 19.

Here, the CPU 19 is based on the height of the designated block from the RAM 18 and the distance of the relative movement of the holder 4 and the housing 2 from the detection head 6, that is, the distance of the relative movement of the designated block and the housing 2 substantially. , Calculate the position height of the upper surface of the specified block. The calculation result is sent to the liquid crystal display unit 21 by a signal, and the liquid crystal display unit 21 digitally displays the position height of the designated block. This digitally displayed value is the height of the upper surface of the designated block from the surface plate, and the height position of the upper surface of the designated block is the same as the height position of the measured portion of the measured object. Is the height from the surface plate of the measured part of the measured object.
Therefore, the measurer can obtain the height of the measured portion of the measured object by reading the measured value displayed on the liquid crystal display unit 21.

Now, in the height reference device 1, the means for detecting the relative movement distance between the housing 2 and the holder 4 is composed of the main scale 5, the detection head 6 and the like as described above. Then, the main scale 5 and the detection head 6 do not have to be upsized in accordance with the accuracy of the detection, and have a substantially constant size. Therefore, in the height reference device 1, like the conventional height reference device, by increasing the detection accuracy, the size of the entire device becomes large, the weight becomes heavier, and further, the handling such as carrying is hindered. Such a problem does not occur. Further, the detection result of the relative movement distance between the housing 2 and the holder 4 is finally displayed on the liquid crystal display unit 21 based on the signal from the detection head 6, so that it is easy to read and no reading error occurs.

On the other hand, the operation knob of the operation shaft 14 for moving the holder 4 in the arrow A direction with respect to the housing 2 is located on the side portion of the housing 2. Therefore, the relative movement of the holder 4 in the direction of arrow A with respect to the housing 2 can be performed on the side portion of the housing 2.

In the prior art, the means for moving the holder with respect to the housing is configured to include a micrometer head, and the micrometer head is configured to measure the distance of movement of the holder with respect to the housing. Therefore, it is necessary to manufacture and assemble the moving means with extremely high precision, and it is necessary to consider backlash. On the other hand, the height standard 1
The moving means 8 for moving the holder 4 with respect to the housing 2 does not require highly accurate members or assembling as in the conventional height reference device, and does not need to consider backlash. Has been.

The height reference device 1 is provided with LEDs 16, 16a, 16b ... Corresponding to the respective upper surface positions of the blocks 3, 3a, 3b ... And used for measurement from among the blocks 3, 3a, 3b. When a specific block for doing so is designated, the LED is turned on in correspondence with the height position of the designated block, so that the measurement can be performed easily and reliably.

The height reference device 1 may have a configuration in which the RAM 18 can be appropriately rewritten so that when the blocks 3, 3a, 3b ... Have an instrumental error, the instrumental error can be corrected. In addition, the RAM 18 and the ROM 22 which are storage means are the only RAM or R.
The configuration may be OM.

In the height reference device 1, the relative movement of the main scale 5 and the detection head 6 is detected optically, but the detection may be magnetic.

The height reference device 1 may be configured so that a desired operation speed can be obtained by adding a speed reducing mechanism to the moving means 8, and by adding a transmission mechanism, the position of the operation knob can be set to a desired position. It may be configured. Further, the moving means 8 is configured by using the bevel gears 12 and 13 for connecting the screw rod 11 and the operating shaft 14 in a non-coaxial state, but the moving means 8 may be configured by using a spring joint, a universal joint or the like. Good.

The height reference device 1 can directly send the measurement result from the calculation display means 7 to a separately prepared host computer, thereby configuring a measurement management system.

[Advantage of the Invention] According to the present invention, since the detection means for detecting the relative movement distance between the housing and the holder holding the block is configured to include the main scale and the detection head, the detection can be performed with high accuracy. It is not necessary to increase the size of the detection means itself even in the case of obtaining, therefore, the size and weight of the entire device can be kept substantially constant,
In addition, it is possible to obtain the effect that there is no problem in handling such as carrying. Further, it is possible to obtain the effect that the reading of the measurement result is simple and there is no error in reading.

On the other hand, in this invention, the means for performing relative movement between the housing and the holder is not configured to include the micrometer head as in the conventional case, and therefore the operation of the moving means is not limited to the upper part of the device, so that the operation is simple and easy. The effect that there is is obtained. Further, the precision of the moving means itself and the precision of assembly do not have to be increased more than necessary, so that the effect that the manufacturing and assembling can be simplified is obtained. Furthermore, the effect that the backlash does not have to be taken into consideration for the moving means is obtained.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention, FIG. 2 is an exploded perspective view excluding the housing of this embodiment, and FIG. 3 is a structural explanatory view showing a measuring operation of this embodiment, and FIG. Is a view corresponding to FIG. 2 of the prior art. 1 ... Height reference device, 2 ... Housing, 3,3a, 3b ... Block, 4 ... Holder, 5 ... Main scale, 6 ... Detection head, 7 ... Calculation display unit, 8 ... Moving means, 10 ... Female screw part, 11 ... Screw rod, 12, 13 ... Bevel gear, 16, 16a, 16b ... LED, 17 ... Designation switch, 18 ... RAM, 19 ... CPU, 20 ... Counting circuit, 21 ... Liquid crystal display section, 22 ... ROM.

Claims (2)

[Scope of utility model registration request] 1. A housing, a plurality of blocks each of which has a pair of mutually facing surfaces that are parallel to each other and a distance between the two surfaces is formed at a desired distance. A holder that holds the ringing state that is in close contact, a main scale and a detection head that detect the distance of the relative movement when they move relative to each other,
Computation display means for computing and displaying the distance of relative movement between the main scale and the detection head based on the signal from the detection head is provided, and the movement means capable of relatively moving the holder and the housing between the holder and the housing. And a height reference device in which one of the main scale and the detection head is attached to the housing and the other is attached to the holder. 2. A storage means for storing the height from the bottom surface of the housing to the top surface of each block when the holder holds a plurality of blocks in a ringing state, and is stored in the storage means. The height according to claim 1, wherein the height can be measured based on the height from the bottom surface of the housing to the top surface of each block and the relative movement distance between the holder and the housing obtained by the cooperation of the main scale and the detection head. Reference device.