CN103217252B - Movable container type high-precision micro-pressure detection device - Google Patents
Movable container type high-precision micro-pressure detection device Download PDFInfo
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- CN103217252B CN103217252B CN201310096321.1A CN201310096321A CN103217252B CN 103217252 B CN103217252 B CN 103217252B CN 201310096321 A CN201310096321 A CN 201310096321A CN 103217252 B CN103217252 B CN 103217252B
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Abstract
The invention relates to a micro-pressure detection device, belongs to the detection field, and provides a movable container type high-precision micro-pressure detection device. The movable container type high-precision micro-pressure detection device is characterized in that the movable container type high-precision micro-pressure detection device comprises a fixed container and a movable container, the fixed container and the movable container are communicated through a soft pipe, the movable container is arranged on a lifting platform, the lifting platform is arranged on a lifting guide rail and is driven by a lifting screw to descend or ascend on the lifting guide rail, the lifting screw is driven by a stepping motor, a grating ruler is arranged beside the lifting platform, laser displacement meters used for metering liquid level heights are arranged on the top of the movable container and the top of the fixed container, the fixed container or the movable container is provided with a pressure connector, the stepping motor, the grating ruler and the laser displacement meters are in electric connection with a controller, and the controller comprises a pressure measurement module and a pressure control module. The grating ruler and the laser displacement meters send measured data to the pressure measurement module for micro-pressure measurement and computation, and the pressure control module is connected with the stepping motor and the pressure connector to control the pressure to be stable and starting and stopping of the stepping motor.
Description
Technical field
The present invention relates to minute-pressure pick-up unit, particularly relate to a kind of mobile containers formula high precision minute-pressure pick-up unit.
Background technology
Micro pressure measuring is widely used in the fields such as modern agriculture, manufacturing industry, pharmacy industry, transportation, space flight, aviation, national defence.In recent years, in micro-pressure measurement, research is a lot of in the world, but mainly straight pipe type fluid column differential liquid manometer and minute-pressure piston gage.The category of research also mainly concentrates on National primary standard stage pressure meter.And the microbarograph being similar to working standard level and first-class gets off not have too large change decades.The microbarograph cost of reference level is high bulky, cannot be applicable to the secondary standard of One's name is legion and the transmission of quantity value of working measuring instrument.The first-class compensate-type micropressure meter that first-class micro-pressure measurement equipment domestic at present mainly designs for 60 ~ seventies, the development of micro-pressure measurement has been hindered owing to there are some geneogenous shortcomings, also do not catch up with the development trend of international micro-pressure measurement, the research therefore carrying out the microbarograph of pin-point accuracy is necessary very much.
The first-class compensate-type micropressure meter of current use is the pressure measuring principle based on balancing the pressure differential on two liquid levels by liquid level difference, primarily of greatly, small container liquid conduits is connected, form liquid-column height under pressure poor, the position of a movable container is changed by rotating a graduated screw rod of band, and pass through the position of the inverted image observing circular cone tip and the water surface in container, make liquid level again reach equilibrium position, the water colunm height difference corresponding according to scale carries out reading.The application of compensate-type micropressure meter is very extensive, but mainly has the following disadvantages:
1. necessary manual adjustments screw mandrel, work is required great effort very much, also can cause the wearing and tearing of screw body, causes the accuracy of measuring to reduce.
2. the range estimation of reading needs is carried out, and its accuracy depends on the working experience of verification worker.
3. be subject to the restriction of screw mandrel processing technology, the mechanical precision of screw mandrel is difficult to be improved again, causes compensate-type micropressure meter accuracy of measurement further to improve.
4. in actual measurement, liquid can produce wall cling phenomenon, and connecting fluid body canal compressive deformation also can make the volume of liquid change, and owing to only observing the liquid level position of one end, volume change can cause measuring error.
5. do not have temperature survey update the system, the density of such liquid and volume all can change, and cause measuring error.
6. range ability cannot be met larger, or the higher instrument of accuracy carries out verification test.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of mobile containers formula high precision micro pressure measuring device, solves present micro pressure measuring equipment or cost is high, or the defect that accuracy of measurement is low.
Technical scheme
A kind of mobile containers formula high precision minute-pressure pick-up unit, it is characterized in that: comprise the fixed container and movable container that adopt liquid conduits to be communicated with each other, described movable container is arranged on a hoistable platform, described hoistable platform is arranged on riser guide, the lifting screw driven by stepper motor drives and declines or rising on riser guide, described hoistable platform side is provided with grating scale, described movable container and fixed container top are provided with the laser displacement gauge measuring liquid level, described fixed container or movable container are provided with pressure interface, described stepper motor, grating scale and laser displacement gauge electrical connection controller, described controller comprises pressure measurement module and pressure control module, described grating scale and laser displacement gauge send counting to pressure measurement module, carry out micro pressure measuring and calculating, described pressure control module connects stepper motor and pressure interface, the pressure stability of controlled pressure interface and the keying of control step motor.
In described movable container and fixed container, liquid level is provided with float, described float is corresponding with described laser displacement gauge to be arranged, to detect liquid level change.
Described float comprises buoyancy aid and "T"-shaped measuring head, and buoyancy aid adopts aluminium alloy buoyancy aid, and the "T"-shaped top end face of measuring head is polytetrafluoro diffuse reflection plane.
Described movable container top is provided with a laser displacement gauge, the upper surface at the two ends, left and right of described fixed container is respectively arranged with a laser displacement gauge, measures the liquid level at two ends respectively.
Be equipped with temperature sensor in described fixed container, movable container and liquid conduits, described temperature sensor is all electrically connected with controller, and described controller carries out temperature control by patrolling and examining described temperature sensor.
Described grating scale adopts moire frenge grating, chi.
Described fixed container is provided with pressure interface.
Described fixed container and movable container are provided with pressure interface.
Described riser guide is arranged on horizontal base, and described fixed container is also arranged on described horizontal base.
A kind ofly apply the device that above-mentioned mobile containers formula high precision minute-pressure pick-up unit carries out pressure gauge detection, it is characterized in that: comprise testing pressure meter and described minute-pressure pick-up unit, the fixed container of described minute-pressure pick-up unit and movable container are provided with pressure interface, the pressure interface of fixed container is test lead, the pressure interface of movable container is reference edge, described test lead connects compression system and testing pressure meter, described compression system connects the controller of described minute-pressure pick-up unit, the pressure control module electrical connection stepper motor of described controller and laser displacement take into account grating scale, the voltage stabilizing of described minute-pressure pick-up unit is controlled by controller, described controller is connected with host computer, calculate and show difference or the rate of testing pressure meter and observed pressure value.
Beneficial effect
The present invention adopts Moire fringe interpolation grating scale, accuracy of measurement reaches ± 2 μ, the liquid level in movable and fixed container is measured with two laser displacement gauges, reading is directly carried out like this with regard to not needing to observe the sharp position of cone with human eye, controller adopts computer system to be made up of single-chip data acquisition device and industrial computer, the data of each sensor can be directly changed into pressure reading, also by topworks, pressure gauge is stabilized in set pressure working point, realize automatically measuring, pressure can remain in the fluctuation range of denier by the present invention for a long time, there is indispensable effect in micro-pressure measurement.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is grating measuring mechanism structure schematic diagram of the present invention.
Fig. 3 is the optic triangle method measuring principle schematic diagram of laser displacement gauge of the present invention.
Fig. 4 is float mechanism schematic diagram of the present invention.
Fig. 5 is the single unit system schematic diagram detected pressure gauge.
Wherein: 1-step motor, 2-guide rail train wheel bridge, 3-lifting screw, 4-laser displacement gauge, 5-hoistable platform, 6-grating scale, 7-fixed guide, 8-liquid conduits, 9-fixed container, 10-movable container, 11-buoyancy aid, 12-measuring head, the "T"-shaped top end face of 13-measuring head, 14-stable hook, 15-center rest, 16-pressure transmitting medium liquid level, 17-semiconductor laser, eyeglass before 18-laser instrument, 19-collects eyeglass, 20-CCD array, 21-signal processor, 22-testee, 23-test lead, 24-reference edge.
Embodiment
Below in conjunction with specific embodiment, set forth the present invention further.
In view of the shortcoming of above-mentioned analysis, the present invention devises a kind of measurement range for ± 8kPa, and accuracy of measurement reaches ± the micro pressure measuring device of 0.1Pa.This cover micro pressure measuring device adopts Moire fringe interpolation grating scale, and accuracy of measurement reaches ± 2 μ, for the measurement of movable container displacement.Measuring the liquid level in movable and fixed container with two laser displacement gauges, directly carrying out reading with regard to not needing to observe the sharp position of cone with human eye like this.All insert temperature sensor in each container and pipeline carry out temperature monitoring and revise in real time.The movement of movable container drives moving up and down of container with step motor and lifting screw, avoids the trouble that hand turns index dial.
1. one-piece construction principle
The range of the high-precision liquid micro-pressure measurement of developing in the present invention is ± 8kPa, accuracy of measurement is ± 0.1Pa, its structural principle is similar to compensate-type micropressure meter, pressure, in respect of following a few major part composition, is container conduit, float mechanism, elevating mechanism, grating measuring mechanism, laser displacement measurement mechanism, temperature survey mechanism, pedestal, full-automatic compression system, controller and single-chip data acquisition and action executing system and industrial computer operating system respectively.
As shown in Figure 1,1 is step motor, and 2 is guide rail train wheel bridge, and 3 is lifting screws, and 4 is laser displacement gauge, is separately positioned on movable container 10 and fixed container 9, and 5 is hoistable platform, and 6 is grating scale, and 7 is fixed guide, and 8 is liquid conduits.During practical operation, first carry out zero pressure difference balanced adjustment, the liquid level by movable container 10 is consistent with the liquid level of fixed container 9, and grating scale 6 and laser displacement gauge 4 reading is reset respectively.The position of movable container 10 is calculated according to the set pressure point being input to computer interface, by digital communication, data are sent to single-chip data acquisition and the action executing system of controller, drive step motor 1 to rotate, drive the movable container 10 be fixed on hoistable platform 5 to move up and down by rotation and lifting screw rod 3.At this moment, the grating reading head be fixed in movable container 10 counts according to Moire fringe, reads the distance of actual displacement.Pressure (gas) is put in fixed container 9, liquid is pressed into movable container 10, after stable, be fixed on laser displacement gauge 4 in movable container 10 readable go out the displacement of float on liquid level and reference position, the laser displacement gauge 4 be simultaneously fixed on fixed container 9 also reads the displacement of a liquid level, and such pressure gauge just can calculate the actual pressure of input gas according to above-mentioned three displacement meters.Pressure gauge, in order to ensure that whole liquid is in an almost identical warm field, adopts foamed aluminium to be incubated, and in movable container 9, fixed container 10 and liquid conduits 8, inserts multiple temperature sensor respectively and carry out monitoring temperature and temperature compensation.Manometric pressure reproduction calculating formula should be:
In formula: Δ p---is pressurization mouth and the pressure differential with reference to mouth, Pa;
G
l---be local gravitational acceleration;
ξ (t)---be the temperature funtion of Media density, kg/m
3/ DEG C;
H
0---be mouth and fluid column state time equal with reference to mouth pressure of pressurizeing, during use, get h
0=0;
H
1---the liquid-column height of real work point is poor, m;
In above-mentioned formula, h
1=H+h
a-h
b
In formula: the reading of H----grating scale, m;
H
a----movable/container float difference in height, m;
H
b----fixed container float difference in height, m.
But consider that temperature variation can serve impact to the buoyant belt of float in container, therefore:
In formula: h
al---the reading of laser displacement gauge in-movable container, m;
V
0---the immersion volume of-float when equilibrium position, m
3;
ρ
0, ρ
1density at the temperature of-----actuating medium when balancing and when measuring, kg/m
3;
The external diameter of d----float, m.
Equally
In formula: h
bl---the laser displacement gauge reading on-fixed container, m;
When homogeneous temperature, the buoyancy correction term of two floats is just in time offset, and so just produces formula:
h
1＝H+h
al-h
bl
2. grating measuring mechanism
Grating measuring mechanism adopts moire frenge grating, chi, and grating scale displacement transducer is made up of scale grating and grating reading head two parts.Grating scale displacement transducer is the measurement feedback assembly of the optical principle work utilizing grating.Scale grating is fixed on hoistable platform 5, and grating reading head is contained on grating scale anchor post, and indication grating is contained in grating reading head.Its structure principle chart is see Fig. 2.The key component of Grating examinations device is grating reading head, and it is made up of light source, convergent lens, indication grating, photovalve and adjusting mechanism etc.This programme adopts silicon photocell read head.It carries out work according to the formation basic theory of physically Moire fringe.
The essence of grating measuring displacement is that a standard ruler contraposition amount of putting is measured with grating pitch.It measures the signal exported is digit pulse, and have sensing range large, accuracy of detection is high, the feature of fast response time.The general cost of high-resolution grating scale is more expensive, and manufactures difficulty.In order to improve systemic resolution, need to segment Moire fringe, current grating scale displacement transducer system adopts electronic fine-grained method.When two blocks of gratings are overlapping with tiny inclination angle, the direction substantially vertical with grating line will produce Moire fringe, and along with the movement of grating, Moire fringe also moves up and down thereupon.So just the measurement be converted to the measurement of grating pitch Moire fringe number.
In a Moire fringe width, according to certain intervals place 4 photoelectric devices just can realize electronic fine-grained with sentence to function.Such as, the grating scale that this programme uses, grid line be 200 lines right/grating scale of mm, its grating pitch is 0.005mm, and just can obtain according to after four segmentations the count pulse that resolution is 1.25 μm, this has reached very high precision in the common observing and controlling of industry.In order to eliminate common mode interference, DC component and even-order harmonic, usually adopt the differential amplifier be made up of low drifting amplifier.The 4 road photosignals obtained by four photosensitive devices deliver to 2 differential amplifier inputs respectively, its phase differential of two paths of signals exported from differential amplifier is pi/2, for obtain sentencing to and count pulse, shaping need be carried out to this two paths of signals, first they are shaped as the square wave that dutycycle is 1:1.Then, comparing by carrying out differentiation to the phase place of square wave, just can obtain the moving direction of grating scale.By counting square-wave pulse, the displacement of grating scale can be obtained.
3. laser displacement measurement mechanism (laser displacement gauge measures float displacement, measures liquid level change)
Displacement measurement based on principle of triangulation is a kind of method be widely adopted at present, this programme adopts optic triangle method measuring principle (referring to accompanying drawing 3), by the monochromatic light that semiconductor laser 17 penetrates, focused on the T of testee 22(and float mechanism by the eyeglass 18 before laser instrument " shape top polytetrafluoro diffuse reflection plane).Reflected light is collected eyeglass 19 and collects, and projects on ccd array 20; Signal processor 21 obtains the distance apart from object by the trigonometric function light spot position calculated on ccd array 20.Its uncertainty of measurement is less than 7 μ (k=2), and measurement range is 10mm.Because fixed container 9 is arranged on the pedestal of device, for stopping the problem that possible pedestal does not measure up, a laser displacement gauge 4 and corresponding float mechanism are respectively set in the left and right of fixed container 9, thus by calculating elimination of level impact.
4. float mechanism
Fixed container 9 and the movable container 10 of built-in float mechanism adopt Teflon coating, and to reduce the adhesion of inner surface of container to medium, make adhesion be less than cohesion between fluid molecule like this, liquid medium not easily produces wall cling phenomenon.Described float comprises buoyancy aid 11 and "T"-shaped measuring head 12, buoyancy aid 11 adopts aluminium alloy buoyancy aid, the "T"-shaped top end face 13 of measuring head is polytetrafluoro diffuse reflection plane, and design stability support 15 limits float rotation and waves, buoyancy aid 11 two ends have the gutter 14 stretched out respectively, described gutter 14 be enclosed within be fixed on liquid manometer container (movable container 10 or fixed container 9) in two center rests 14 in left and right vertical column in, described two center rests 14 to be vertically arranged in described container between lower planes, described buoyancy aid 11 is symmetrical arranged with center line, "T"-shaped measuring head 12 is arranged on this center line axis of symmetry, see accompanying drawing 4.Laser displacement gauge 4 above container, by the plane of reflection of laser beam directive diffuse reflection surface, carries out range observation according to the corresponding different reflection angle of different distances.
5. compression system
Full-automatic compression system adopts two step motor to drive small one and large one two pressure regulators respectively, carries out pressure coarse adjustment and fine setting.Single-chip data acquisition and the action executing system of controller carry out A/D conversion primarily of MCS51 single-chip microcomputer to the output signal of laser displacement gauge 4, the square wave that grating scale exports is counted, the instruction simultaneously transmitted according to controller carries out elevating control to the step motor 1 connecting lifting screw 3, with routine inspection mode, data acquisition is carried out to point temperature sensor be located in fixed container 9, movable container 10, liquid conduits 8, and send above-mentioned image data to controller by the mode of digital communication.Single Chip Microcomputer (SCM) system also adopts pid control mode to carry out Automatic Control to compression system in addition.The industrial computer operating system of controller can founding mathematical models on computers, carries out comprising temperature adjustmemt, density revision and the correction of float buoyancy.
Liquid manometer is a kind of very classical micro-pressure measurement equipment, and pressure can remain in the fluctuation range of denier by for a long time, has indispensable effect in micro-pressure measurement.It is an innovative point that this project adopts the method for designing of self-poise and Self-pressurizing agri to be applied to liquid manometer.Grating scale and laser displacement gauge measuring technique is adopted to be applied to the design that liquid manometer is also a kind of novelty.Practical laser displacement gauge and grating scale, its measurement accuracy not as laser interferometer, but is all more suitable for for daily calibrating than laser interferometer in price, serviceable life, practical and reliable.
The measurement device accuracy of the present invention program's design can reach ± 0.1Pa, can as the accuracy pick-up unit of existing pressure gauge or pressure transducer etc., as shown in Figure 5.The fixed container and movable container of this minute-pressure pick-up unit are all provided with pressure interface, the pressure interface of fixed container is test lead 23, the pressure interface of movable container is reference edge 24, described test lead 23 connects compression system and testing pressure meter, described compression system connects the controller of described minute-pressure pick-up unit, the pressure control module electrical connection stepper motor of described controller and laser displacement take into account grating scale, the voltage stabilizing of described minute-pressure pick-up unit is controlled by controller, described controller is connected with computer system, calculate and show difference or the rate of testing pressure meter and observed pressure value, also can design on the computer systems by the instruction of the virtual meter panel executable operations personnel of a display.
Gauge pressure, differential pressure measuring and absolute pressure can be divided into detect the accuracy detection of existing pressure gauge or pressure transducer.Gauge pressure, differential pressure measuring are with atmospheric pressure as a reference, and therefore reference edge 24 directly connects atmospheric pressure, and test lead 23 connects compression system and testing pressure meter (see Fig. 5).When absolute pressure detects, reference edge 24 and test lead 23 all need to dredge empty to quite close to the state of zero absolute pressure, and pressure control module and the testing pressure meter of test lead 23 and compression system and controller are connected, and carry out absolute pressure adjustment and measurement.
Described controller can drive step motor until the spot pressure of setting carries out pressure survey, the mode controlled pressure generating means that also can be regulated by PID according to the position of float, make pressure stability arrange on working point, also can both combine, accurate controlled pressure is stablized.The control system of controller is made up of single-chip data acquisition device and industrial computer, the data of each sensor can be directly changed into pressure reading, also by topworks, pressure gauge be stabilized in set pressure working point, realizes automatically measuring.
The development of this project research to minute-pressure piston gage from now on creates necessary condition, can transmit useful area to minute-pressure piston gage or carry out the checking research work of pressure magnitude reproduction.Be subject to all restrictions of length metering aspect for a long time, the microbarograph product seldom having high accuracy and practicality very strong comes out, the change that the development of this project is remoulded oneself thoroughly to traditional liquid microbarograph, filled up electric measuring type and compensated manometric blank, its mentality of designing, computation model and error correcting method are also a kind of brand-new thinkings simultaneously.The sustainable development of the micro-pressure measurement cause of China is significant.
Claims (8)
1. a mobile containers formula high precision minute-pressure pick-up unit, it is characterized in that: comprise the fixed container and movable container that adopt liquid conduits to be communicated with each other, described movable container is arranged on a hoistable platform, described hoistable platform is arranged on riser guide, the lifting screw driven by stepper motor drives and declines or rising on riser guide, described hoistable platform side is provided with grating scale, described movable container and fixed container top are provided with the laser displacement gauge measuring liquid level, described fixed container or movable container are provided with pressure interface, described stepper motor, grating scale and laser displacement gauge electrical connection controller, described controller comprises pressure measurement module and pressure control module, described grating scale and laser displacement gauge send counting to pressure measurement module, carry out micro pressure measuring and calculating, described pressure control module connects stepper motor and pressure interface, the pressure stability of controlled pressure interface and the keying of control step motor, in described movable container and fixed container, liquid level is provided with float, described float is corresponding with described laser displacement gauge to be arranged, to detect liquid level change, described float comprises buoyancy aid and "T"-shaped measuring head, buoyancy aid adopts aluminium alloy buoyancy aid, the "T"-shaped top end face of measuring head is polytetrafluoro diffuse reflection plane.
2. mobile containers formula high precision minute-pressure pick-up unit as claimed in claim 1, it is characterized in that: described movable container top is provided with a laser displacement gauge, the upper surface at the two ends, left and right of described fixed container is respectively arranged with a laser displacement gauge, measures the liquid level at two ends respectively.
3. mobile containers formula high precision minute-pressure pick-up unit as claimed in claim 1, it is characterized in that: in described fixed container, movable container and liquid conduits, be equipped with temperature sensor, described temperature sensor is all electrically connected with controller, and described controller carries out temperature control by patrolling and examining described temperature sensor.
4. mobile containers formula high precision minute-pressure pick-up unit as claimed in claim 1, is characterized in that: described grating scale adopts moire frenge grating, chi.
5. mobile containers formula high precision minute-pressure pick-up unit as claimed in claim 1, is characterized in that: described fixed container is provided with pressure interface.
6. mobile containers formula high precision minute-pressure pick-up unit as claimed in claim 1, is characterized in that: described fixed container and movable container are provided with pressure interface.
7. mobile containers formula high precision minute-pressure pick-up unit as claimed in claim 1, it is characterized in that: described riser guide is arranged on horizontal base, described fixed container is also arranged on described horizontal base.
8. apply the device that mobile containers formula high precision minute-pressure pick-up unit as claimed in claim 1 carries out pressure gauge detection for one kind, it is characterized in that: comprise testing pressure meter and described minute-pressure pick-up unit, the fixed container of described minute-pressure pick-up unit and movable container are provided with pressure interface, the pressure interface of fixed container is test lead, the pressure interface of movable container is reference edge, described test lead connects compression system and testing pressure meter, described compression system connects the controller of described minute-pressure pick-up unit, the pressure control module electrical connection stepper motor of described controller and laser displacement take into account grating scale, the voltage stabilizing of described minute-pressure pick-up unit is controlled by controller, described controller is connected with host computer, calculate and show difference or the rate of testing pressure meter and observed pressure value.
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| CN106225885A (en) * | 2016-07-29 | 2016-12-14 | 上海航天设备制造总厂 | Liquid level sensor dynamic calibration apparatus and method |
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| CN111345790B (en) * | 2020-02-13 | 2023-03-21 | 北京信息科技大学 | Method, device and system for measuring human body pulse wave |
| CN112254870B (en) * | 2020-09-30 | 2022-07-05 | 武汉德塞仪器仪表科技有限公司 | High-precision gas micro-differential pressure gauge |
| CN113063544B (en) * | 2021-03-17 | 2022-07-19 | 内江市计量测试研究所 | Dynamometer calibrating device |
| CN115499970A (en) * | 2021-06-18 | 2022-12-20 | 长春理工大学 | Monochromatic light source based on high-power LED optical fiber coupling output |
| CN114544078B (en) * | 2022-03-02 | 2022-10-25 | 黑龙江永创科技有限公司 | Self-calibration platform and calibration method for calibration of compensation type micro-manometer |
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