JPH06194255A - Air leakage detection method - Google Patents

Air leakage detection method

Info

Publication number
JPH06194255A
JPH06194255A JP31257192A JP31257192A JPH06194255A JP H06194255 A JPH06194255 A JP H06194255A JP 31257192 A JP31257192 A JP 31257192A JP 31257192 A JP31257192 A JP 31257192A JP H06194255 A JPH06194255 A JP H06194255A
Authority
JP
Japan
Prior art keywords
air
pinhole
item
detected
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31257192A
Other languages
Japanese (ja)
Inventor
Masashi Kurokawa
正志 黒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP31257192A priority Critical patent/JPH06194255A/en
Publication of JPH06194255A publication Critical patent/JPH06194255A/en
Pending legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE:To provide a method for judging the presence or absence of pinhole in an object by detecting the acoustic wave generating when an air passes through the pinhole, by using a sensor. CONSTITUTION:An object 1 is pressurized or evacuated from an air feed/ discharge port 5 to make any pressure difference between its inside and the outside, thereby detecting by a sensor 6 acoustic wave generating when the air passes through a pinhole, 3 and judging the presence or absence of the pinhole 3 in the object 1.

Description

【発明の詳細な説明】 この発明は、品物(1)に対してピンホール(3)の有
無を空気を使用して判定する方法である。空気供給(排
出)口(5)より加圧又は、減圧することにより内部空
気(2)と、外部の間に圧力差を設けることにより、ピ
ンホール(3)を空気が通過し、そのとき発生する音波
を、センサー(6)により検出する方法である。品物
(1)の形状及び性質により、内部空気(2)を伝達す
る音波をセンサー(6)により検出する方法と、品物
(1)又は、治具(4)を伝達する音波を治具(4)又
は品物(1)に取り付けたセンサー(6)により検出す
る方法である。叉、品物(1)の酸化等の関係で空気の
使用不可能な場合、空気以外の気体を使用しても同等の
検出が可能である。音波が発生することは、ピンホール
(3)を微小ノズルと考えることにより、流体力学の
「完全ガスのノズルからの流出」の項目によると流出速
度は、ノズル内外の圧力比により変化。圧力比1.1の
時でも、約30m/secもの速度となります。この様
な高速で流出する空気は、ノズル入り口及び出口で乱流
となり、その上ノズルとの摩擦で音波を発生する物であ
る。その流量により音波の大小はあるが、検出可能であ
る。従来、この種の検出には、「水没テスト」と「空気
圧の差」それと「質量分析計形」で検出する方法が有り
ますが、前者は、目視により検出する以上人為的ミスが
有り、装置の自動化も不可能です。「空気圧の差」で検
出する場合は、検出物体により変形する物の検出は、非
常に難しく、不可能な物もある。その上、検出時間が数
十秒もかかる欠点が有る。これでは、弾性体の検出は不
可能であり、治具に使用するパッキン等(2)について
も、材質及び硬度が微妙に影響するものである。「質量
分析計形」で検出する方法は、ヘリウムガスを使用し
て、検出部を真空状態にして、外部から侵入したヘリウ
ムガスを測定する方法です。この方法では、ヘリウムガ
スが、自然空気中に少し含まれるため高真空にする必要
が有るため、品物(1)の材質及び、形状が限られてく
る。その上、装置も高価で取り扱いも難しい。今回の発
明は、空気を使用して洩れるとき発生する音波を検出す
ることにより、簡単な装置で、品物(1)の材質及び形
状に関係なく瞬時に検出可能である。又、空気の使用に
より地球環境及び人為的にも無害である。
DETAILED DESCRIPTION OF THE INVENTION The present invention is a method for determining the presence or absence of a pinhole (3) on an item (1) using air. By passing pressure through the air supply (exhaust) port (5) or by reducing the pressure, a pressure difference is created between the internal air (2) and the outside, so that the air passes through the pinhole (3) and is generated at that time. This is a method of detecting the sound wave generated by the sensor (6). Depending on the shape and properties of the item (1), a method of detecting a sound wave transmitting the internal air (2) by the sensor (6) and a method of detecting the sound wave transmitting the item (1) or the jig (4) by the jig (4) ) Or a sensor (6) attached to the article (1). Further, when air cannot be used due to oxidation of the product (1), the same detection can be performed by using a gas other than air. The sound wave is generated by considering the pinhole (3) as a minute nozzle, and according to the item of "outflow of perfect gas from nozzle" in fluid dynamics, the outflow rate changes depending on the pressure ratio inside and outside the nozzle. Even if the pressure ratio is 1.1, the speed will be about 30 m / sec. The air flowing out at such a high speed becomes a turbulent flow at the inlet and outlet of the nozzle, and the acoustic waves are generated by friction with the nozzle. Depending on the flow rate, the sound waves are large or small, but can be detected. Conventionally, this type of detection has a method of detecting by "water immersion test", "difference in air pressure" and "mass spectrometer type", but the former has human error since it is detected visually. Automation of is also impossible. When detecting by "air pressure difference", it is very difficult to detect an object that is deformed by a detection object, and some objects cannot be detected. In addition, there is a drawback that the detection time is several tens of seconds. In this case, the elastic body cannot be detected, and the material and hardness of the packing (2) used for the jig are slightly affected. The “mass spectrometer type” method is a method in which helium gas is used, the detection part is placed in a vacuum state, and helium gas invading from the outside is measured. In this method, the helium gas is contained in the natural air in a small amount, and thus it is necessary to make a high vacuum, so that the material and shape of the product (1) are limited. Moreover, the equipment is expensive and difficult to handle. According to the present invention, the sound wave generated when leaking is detected by using air and can be instantly detected by a simple device regardless of the material and shape of the item (1). Moreover, the use of air is harmless to the global environment and artificially.

【図面の簡単な説明】[Brief description of drawings]

【図1】品物が、平板の場合の断面図FIG. 1 is a cross-sectional view when the product is a flat plate

【図2】品物が、容器の場合の断面図FIG. 2 is a cross-sectional view when the item is a container

【符号の説明】[Explanation of symbols]

1は品物 2は内部空気 3はピンホール 4は治具 5は空気供給(排出)口 6はセンサー 7はバルヅ 8はパッキン 1 is an article 2 is internal air 3 is a pinhole 4 is a jig 5 is an air supply (exhaust) port 6 is a sensor 7 is a valve 8 is a packing

【手続補正書】[Procedure amendment]

【提出日】平成5年12月27日[Submission date] December 27, 1993

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】発明の詳細な説明[Name of item to be amended] Detailed explanation of the invention

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【発明の詳細な説明】 この発明は、品物(1)に対して、ピンホール(3)の
有無を空気を使用して判定する方法である。空気供給
(排出)口(5)より加圧又は、減圧することにより内
部空気(2)と、外部の間に圧力差を設けることによ
り、ピンホール(3)を空気が通過し、そのとき発生す
る音波を、センサー(6)により検出する方法である。
叉、品物(1)の酸化等の関係で空気の使用不可能な場
合、空気以外の気体を使用しても同等の検出が可能であ
る。音波が発生することは、ピンホール(3)を微小ノ
ズルと考えることにより、流体力学の「完全ガスのノズ
ルからの流出」の項目によると流出速度は、ノズル内外
の圧力比により変化。圧力比1.1の時でも、約30m
/secもの速度となります。この様な高速で流出する
空気は、ノズル入り口及び出口で乱流となり、その上ノ
ズルとの摩擦で音波を発生する物である。その流量によ
り音波の大小はあるが、検出可能である。従来、この種
の検出には、「水没テスト」と「空気圧の差」それと
「質量分析計形」で検出する方法が有りますが、前者
は、目視により検出する以上人為的ミスが有り、装置の
自動化も不可能です。「空気圧の差」で検出する場合
は、検出物体により変形する物の検出は、非常に難し
く、不可能な物もある。その上、検出時間が数十秒もか
かる欠点が有る。これでは、弾性体の検出は不可能であ
り、治具(4)に使用するパッキン等(8)に ついて
も、材質及び硬度が微妙に影響するものである。「質量
分析計形」で検出する方法は、ヘリウムガスを使用し
て、検出部を真空状態にして、外部から侵入したヘリウ
ムガスを測定する方法です。この方法では、ヘリウムガ
スが、自然空気中に少し含まれるため高真空にする必要
が有るため、品物(1)の材質及び、形状が限られてく
る。その上、装置も高価で取り扱いも難しい。今回の発
明は、空気を使用して洩れるとき発生する音波を検出す
ることにより、簡単な装置で、品物(1)の材質及び形
状に関係なく瞬時に検出可能である。又、空気の使用に
より地球環境及び人為的にも無害である。
DETAILED DESCRIPTION OF THE INVENTION The present invention is a method for determining the presence or absence of a pinhole (3) in an item (1) by using air. By passing pressure through the air supply (exhaust) port (5) or by reducing the pressure, a pressure difference is created between the internal air (2) and the outside, so that the air passes through the pinhole (3) and is generated at that time. This is a method of detecting the sound wave generated by the sensor (6).
Further, when air cannot be used due to oxidation of the product (1), the same detection can be performed by using a gas other than air. The sound wave is generated by considering the pinhole (3) as a minute nozzle, and according to the item of "outflow of perfect gas from nozzle" in fluid dynamics, the outflow rate changes depending on the pressure ratio inside and outside the nozzle. Approximately 30m even when the pressure ratio is 1.1
The speed is as high as / sec. The air flowing out at such a high speed becomes a turbulent flow at the inlet and outlet of the nozzle, and the acoustic waves are generated by friction with the nozzle. Depending on the flow rate, the sound waves are large or small, but can be detected. Conventionally, this type of detection has a method of detecting by "water immersion test", "difference in air pressure" and "mass spectrometer type", but the former has human error since it is detected visually. Automation of is also impossible. When detecting by "air pressure difference", it is very difficult to detect an object that is deformed by a detection object, and some objects cannot be detected. In addition, there is a drawback that the detection time is several tens of seconds. With this, the elastic body cannot be detected, and the packing and the like (8) used for the jig (4) are slightly affected by the material and hardness. The “mass spectrometer type” method is a method in which helium gas is used, the detection part is placed in a vacuum state, and helium gas invading from the outside is measured. In this method, the helium gas is contained in the natural air in a small amount, and thus it is necessary to make a high vacuum, so that the material and shape of the product (1) are limited. Moreover, the equipment is expensive and difficult to handle. According to the present invention, the sound wave generated when leaking is detected by using air and can be instantly detected by a simple device regardless of the material and shape of the item (1). Moreover, the use of air is harmless to the global environment and artificially.

【手続補正3】[Procedure 3]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】全図[Correction target item name] All drawings

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図1】 [Figure 1]

【図2】 [Fig. 2]

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】(イ)品物(1)を、内部空気(2)を有
する様に密閉する。 (ロ)内部空気(2)と外部の間に、圧力差を付ける。 (ハ)ピンホール(3)を空気が通過することにより発
生する音波を検出。 (ニ)空気は他の気体に置き換えることも可能。 (ホ)内部空器(2)を伝達する音波をセンサー(6)
で検出。 音波を検出することにより品物(1)に対してピンホー
ル(3)の有無を判定する方法。
1. An item (1) is sealed so as to have an internal air (2). (B) A pressure difference is created between the internal air (2) and the outside. (C) Detects sound waves generated by air passing through the pinhole (3). (D) Air can be replaced with other gases. (E) Sensor (6) for sound waves transmitted through the internal air container (2)
Detected by. A method of determining the presence or absence of a pinhole (3) on an item (1) by detecting a sound wave.
【請求項2】品物(1)又は、治具(4)を伝達する音
波を、治具(4)又は品物(1)に取付たセンサー
(6)で検出する、「精求項1」の(ホ)以外の「精求
項1」の品物(1)に対してピンホール(3)の有無を
判定する方法。
2. The "determination claim 1" according to claim 1, wherein a sound wave transmitted through the article (1) or the jig (4) is detected by a sensor (6) attached to the jig (4) or the article (1). A method for determining the presence or absence of a pinhole (3) in an item (1) of "demand item 1" other than (e).
JP31257192A 1992-10-09 1992-10-09 Air leakage detection method Pending JPH06194255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31257192A JPH06194255A (en) 1992-10-09 1992-10-09 Air leakage detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31257192A JPH06194255A (en) 1992-10-09 1992-10-09 Air leakage detection method

Publications (1)

Publication Number Publication Date
JPH06194255A true JPH06194255A (en) 1994-07-15

Family

ID=18030823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31257192A Pending JPH06194255A (en) 1992-10-09 1992-10-09 Air leakage detection method

Country Status (1)

Country Link
JP (1) JPH06194255A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0894480A (en) * 1994-09-20 1996-04-12 Hitachi Ltd Method and apparatus for vacuum inspection
US6212942B1 (en) 1997-10-21 2001-04-10 Denso Corporation Leakage inspection method and apparatus
JP2003106926A (en) * 2001-09-27 2003-04-09 Hitachi Ltd Gas leak inspection method and device therefor
JP2015017894A (en) * 2013-07-11 2015-01-29 株式会社デンソー Defect inspection method for honeycomb structure

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0894480A (en) * 1994-09-20 1996-04-12 Hitachi Ltd Method and apparatus for vacuum inspection
US6212942B1 (en) 1997-10-21 2001-04-10 Denso Corporation Leakage inspection method and apparatus
JP2003106926A (en) * 2001-09-27 2003-04-09 Hitachi Ltd Gas leak inspection method and device therefor
JP2015017894A (en) * 2013-07-11 2015-01-29 株式会社デンソー Defect inspection method for honeycomb structure

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