JPH0618748Y2 - 真空式吸着装置における吸着検出装置 - Google Patents

真空式吸着装置における吸着検出装置

Info

Publication number
JPH0618748Y2
JPH0618748Y2 JP1987089454U JP8945487U JPH0618748Y2 JP H0618748 Y2 JPH0618748 Y2 JP H0618748Y2 JP 1987089454 U JP1987089454 U JP 1987089454U JP 8945487 U JP8945487 U JP 8945487U JP H0618748 Y2 JPH0618748 Y2 JP H0618748Y2
Authority
JP
Japan
Prior art keywords
passage
vacuum
diaphragm
throttle orifice
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987089454U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63197026U (US06272168-20010807-M00014.png
Inventor
弘幸 西村
Original Assignee
ロ−ム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロ−ム株式会社 filed Critical ロ−ム株式会社
Priority to JP1987089454U priority Critical patent/JPH0618748Y2/ja
Publication of JPS63197026U publication Critical patent/JPS63197026U/ja
Application granted granted Critical
Publication of JPH0618748Y2 publication Critical patent/JPH0618748Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Sensing Apparatuses (AREA)
  • Automatic Assembly (AREA)
  • Feeding Of Workpieces (AREA)
JP1987089454U 1987-06-09 1987-06-09 真空式吸着装置における吸着検出装置 Expired - Lifetime JPH0618748Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987089454U JPH0618748Y2 (ja) 1987-06-09 1987-06-09 真空式吸着装置における吸着検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987089454U JPH0618748Y2 (ja) 1987-06-09 1987-06-09 真空式吸着装置における吸着検出装置

Publications (2)

Publication Number Publication Date
JPS63197026U JPS63197026U (US06272168-20010807-M00014.png) 1988-12-19
JPH0618748Y2 true JPH0618748Y2 (ja) 1994-05-18

Family

ID=30948452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987089454U Expired - Lifetime JPH0618748Y2 (ja) 1987-06-09 1987-06-09 真空式吸着装置における吸着検出装置

Country Status (1)

Country Link
JP (1) JPH0618748Y2 (US06272168-20010807-M00014.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0688226B2 (ja) * 1989-01-11 1994-11-09 アロカ株式会社 ビーズ移送装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5111073Y2 (US06272168-20010807-M00014.png) * 1971-06-19 1976-03-25

Also Published As

Publication number Publication date
JPS63197026U (US06272168-20010807-M00014.png) 1988-12-19

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