JPH0618232Y2 - Vacuum heat treatment furnace - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION "Industrial field of application" The present invention relates to a vacuum heat treatment furnace, and more particularly to a vacuum heat treatment furnace capable of sealing an opening of a heating chamber.

“Prior Art” Conventionally, the vacuum heat treatment furnace shown in FIG. 5 has been widely used. This conventional vacuum heat treatment furnace includes a vacuum container 1
The object 3 to be processed is loaded into the heating chamber 2 disposed inside the heating chamber 2, and the inside of the heating chamber 2 is heated in a vacuum state by the heaters 4 to perform heat treatment. A cooling gas is blown from the gas blowing port 5, and this gas is circulated by the fan 7 while passing through the cooler 6 to be processed 3
To cool down.

The heating chamber 2 is provided with openings 8 and 9 at its upper and lower portions, respectively, and these openings 8 and 9 are closed by a top bang 10 and a bottom bang 11 during the heat treatment, respectively, and are heated. In addition to preventing loss, it is opened during cooling so that the cooling gas can flow.

The bottom bang 11 is adapted to move up and down by a driving cylinder (not shown) to open and close the opening 9.
Further, since the top bang 10 cannot be moved up and down because the cooling gas blowing port 5 is located above, the top bang 10 is generally arranged along the upper wall surface 2a of the heating chamber 2 in the direction orthogonal to the paper surface of FIG. The opening 8 is opened and closed by sliding the opening.

A mechanism for opening and closing the top bang 10 will be described with reference to FIG. 6. The upper wall surface 2a of the heating chamber 2 will be described.
Guide rails 1 parallel to each other are provided on the periphery of the opening 8 of
2, 12 are attached so as to extend in a direction orthogonal to the paper surface,
On the other hand, the rollers 13 rolling on the guide rails 12, 12 are provided on both sides of the top bang 10.
It is attached via 4, 14. As a result, when the top bang 10 slides by a driving cylinder (not shown), its movement is guided by the guide rails 12, 12. A step portion 12a is provided at a predetermined position on the upper surface of the guide rails 12, 12, and the top bang 10 closes the opening portion 8 (a state shown on the left side from the center line in FIG. 6). When sliding and opening the opening 8 (state shown on the right side from the center line in FIG. 6), the rollers 13 ...
By riding on 2a, the top bang 10 can be lifted upward.

[Problems to be Solved by the Invention] In the opening / closing mechanism of the top bang 10 in the conventional vacuum heat treatment furnace as described above, the wall surface 2a of the heating chamber 2 and the top bang 10 are expanded during the heat treatment. Since thermal deformation occurs, it is necessary to anticipate the thermal deformation in advance. Therefore, the lower surface of the top bang 10 and the opening 8
A gap 15 of about several mm is secured between the peripheral portion and the top bang 10 even when the top bang 10 is closed. If this gap 15 is not provided, when the top bang 10 is slid and opened after the heat treatment is completed, the two come into contact with each other and the sliding is obstructed, so that the top bang 10 cannot be opened smoothly.

However, since the above-mentioned gap 15 is secured, the heating chamber 2 cannot be hermetically closed, and not only heat loss is generated from this gap 15 during the heat treatment, but also the temperature distribution inside the heating chamber 2 is increased. There was a problem that it was difficult to keep the temperature uniform. Further, in the vicinity of the gap 15, for example, the guide rail 12, the roller 13, the angle 14, etc.
It was sometimes deformed by the hot air blown from it.

The bottom bang 11 is pulled downward and opened without sliding.
Opening and closing is not hindered by thermal deformation, and there is no problem.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a vacuum heat treatment furnace provided with an opening / closing mechanism capable of sealing the opening of a heating chamber without a gap.

"Means for Solving Problems" This invention is directed to a vacuum container, a heating chamber provided therein, and an opening provided on the wall by moving along the wall surface of the heating chamber. In a vacuum heat treatment furnace comprising a bung that opens and closes, and a guide rail that is provided along the wall surface to support the bung and guide the movement of the bung, a rail support that constitutes the parallel link mechanism for the guide rail. For swingably connecting to the wall surface via a guide rail, and swinging the guide rail to raise and lower the rail support so that the guide rail together with the bang is brought into contact with the wall surface of the heating chamber. It is characterized by comprising a drive source.

[Embodiment] An embodiment of the present invention will be described below with reference to FIGS. 1 to 4. In the vacuum heat treatment furnace of this embodiment, the same components as those of the conventional vacuum heat treatment furnace described above are designated by the same reference numerals, and the description thereof will be omitted.

FIG. 1 is a side sectional view showing a schematic structure of an opening / closing mechanism of the vacuum heat treatment furnace of this embodiment, particularly the top bang 10, in which the top bang 10 is closed on the left side of the center line and the open state of the right side. Shows. 2 to 4 are
FIG. 3 is a front cross-sectional view showing each operating state of the top bang 10.

In these drawings, reference numerals 20 and 20 are a pair of guide rails each having a U-shaped cross section. These guide rails 20, 20 are attached to the reinforcing members 21, 21 and are connected in parallel to each other by the horizontal member 22 with their groove portions facing each other, and are arranged at the peripheral portion of the opening 8. . These guide rails 20 and 20 can be moved up and down with respect to the upper wall surface 2a of the heating chamber 2 by rail supports 23. That is, the reinforcing member 21,
The upper ends of rail supports 23 are rotatably supported on the lower surface of 21, and the lower ends thereof are rotatably supported on the upper wall surface 2a of the heating chamber 2, whereby the guide rails 2 are supported.
0, 20, rail supports 23, ... Form a parallel link mechanism. As shown in FIG. 2, at the central portion of the horizontal member 22, the tip of the rod 24a of the drive cylinder 24 attached to the vacuum container 1 is connected to the connecting member 2.
It is fixed through 5. Both ends of the connecting member 25 are rotatably supported by the rod 24a and the connecting member 22, respectively.

In the groove portions of the guide rails 20 and 20, the rollers 13 protrudingly attached to the side portions of the top bang 10 are attached.
Are arranged and the rollers 13 are rolled, whereby the top bang 10 is guided by the guide rails 20 and 20 and can move in a direction orthogonal to the paper surface in FIG. 1 (left and right direction in FIG. 2). Is being done. Further, the top end of the rod 26 a of the drive cylinder 26 is fixed to the top bang 10 via a connecting member 27. This connecting member 27, like the connecting member 25 described above,
Both ends are rotatably supported.

The configuration of the opening / closing mechanism of the top bang 10 of the vacuum heat treatment furnace has been described above. Next, the operation and use method thereof will be described.

This opening / closing mechanism connects the top bang 10 to the guide rail 2
The openings 8 are opened and closed by guiding the guide rails 0 and 20 to move along the upper wall surface 2a of the heating chamber 2 and moving up and down the guide rails 20 and 20 themselves.
That is, the procedure for opening the top bang 10 from the state in which the opening 8 is closed as shown in FIG. 2 will be described. First, the driving cylinders 24 of the guide rails 20, 20 are operated to operate the rods thereof. 24a is pulled to the right side in the figure. As a result, as shown in FIG. 3, the guide rails 20 and 20 move to the right and rise due to the rail supports 23 standing up, and the top bang 10 also rises accordingly, and the lower surface and the opening thereof. There is a gap 28 between the periphery of the portion 8. At this time, as the guide rails 20 and 20 and the top bang 10 rise, the connecting members 25 and 27 respectively rotate, and the rods 24a and 26a become linear.

Then, by operating the drive cylinder 26 of the top bang 10 and pulling its rod 26a to the right side in the drawing,
The top bang 10 is guided by the guide rails 20 and 20 and slides to open the opening 8 as shown in FIG.

When closing the top bang 10, the top bang 10 is slid above the opening 8 contrary to the above, and then the guide rails 20 and 20 are lowered to bring the lower surface of the top bang 10 to the peripheral edge of the opening 8. Make them adhere closely.

According to this, since the guide rails 20 and 20 are raised and the gap 28 is secured before the top bang 10 is slid, even if the upper wall surface 2a of the heating chamber 2 and the top bang 10 are thermally deformed, The slide of the top bang 10 is not hindered. Therefore, unlike the case where the conventional top bang 10 is simply slid, there is no need to secure a gap in advance in consideration of deformation, and the heating chamber 2 can be sealed.

If the lower surface of the top bang 10 is brought into close contact with the peripheral portion of the opening 8 and then the rod 26a of the cylinder 26 is pushed out slightly, the top bang 10 is pushed downward, so that the heating chamber 2 is closed. You can keep enough.

By sealing the heating chamber 2 by the opening / closing mechanism of the top bang 10 as described above, in this vacuum heat treatment furnace, heat treatment can be performed efficiently without causing heat loss. Therefore, the temperature distribution inside the heating chamber 2 can be made uniform, and further, the thermal deformation of the device around the opening 8 which occurs in the conventional heat treatment furnace can be prevented.

If the bung moves along the wall surface, the bottom bung or the bung provided on the vertical wall surface can be configured in the same manner as the top bung.

[Effect of Device] As described in detail above, the vacuum heat treatment furnace of the present invention is configured such that the guide rail is swingably connected to the wall surface of the heating chamber via the rail support that constitutes the parallel link mechanism. Since the guide rails are tilted up and down so that the guide rails separate from and contact the wall surface of the heating chamber, a gap is secured between the guide rails and the opening even when the bungs are closed in consideration of thermal deformation. There is no need to leave it, the bang can be brought into close contact with the opening, and the heating chamber can be sealed. Therefore, according to the vacuum heat treatment furnace of the present invention, heat loss from the heating chamber can be prevented and efficient processing can be performed, the temperature distribution in the heating chamber can be kept uniform, and the device around the opening can be heated. The effect that there is no fear of being deformed is achieved.

[Brief description of drawings]

1 to 4 are views showing an embodiment of the present invention. FIG. 1 is a side sectional view of an essential part of the vacuum heat treatment furnace of this embodiment, and FIGS. 2 to 4 are front sectional views thereof.
The figure shows a state in which the top bang is closed, FIG. 3 is a state in which the guide rail is raised, and FIG. 4 is a view in which the top bang is open. FIG. 5 is a side sectional view showing the overall schematic structure of the vacuum heat treatment furnace. FIG. 6 is a side sectional view of a main part of a conventional heat treatment furnace. 1 ... vacuum container, 2 ... heating chamber, 2a ... wall surface, 8 ...
Opening, 10 ... Top bang (bang), 20 ... Guide rail, 23 ... Rail support, 24 ... Driving cylinder (driving source).

Claims (1)

[Scope of utility model registration request] 1. A vacuum container, a heating chamber provided therein, a bang which moves along a wall surface of the heating chamber to open and close an opening provided in the wall surface, and a bang. In a vacuum heat treatment furnace comprising a guide rail provided along the wall surface for supporting and guiding the movement of the bung, the guide rail is shaken with respect to the wall surface via a rail support that constitutes a parallel link mechanism. A drive source is provided for movably connecting and rocking the guide rail to raise and lower the rail support to bring the guide rail together with the bang into and out of contact with the wall surface of the heating chamber. Characteristic vacuum heat treatment furnace.