JPS60194015A - Door device for vacuum heat treating furnace - Google Patents
Door device for vacuum heat treating furnaceInfo
- Publication number
- JPS60194015A JPS60194015A JP4832784A JP4832784A JPS60194015A JP S60194015 A JPS60194015 A JP S60194015A JP 4832784 A JP4832784 A JP 4832784A JP 4832784 A JP4832784 A JP 4832784A JP S60194015 A JPS60194015 A JP S60194015A
- Authority
- JP
- Japan
- Prior art keywords
- door
- door body
- seal ring
- opening
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/0006—Details, accessories not peculiar to any of the following furnaces
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は真空熱処理炉の扉装置にgo′1jる。[Detailed description of the invention] [Industrial application field] The present invention applies to a door device for a vacuum heat treatment furnace.
[従来技術]
金属等の熱処理に用いられる真空熱処理炉では炉内の真
空を保証する為、扉と炉本体間にゴム製のシールが設け
られる。このシールは扉の゛ 同閉作動或は扉開状態で
処理物を取出す際の処理物からの輻射熱により損傷を受
け易く、シールの寿命が短く真空シール不能となり易い
。ここで従来の真空熱処理炉の扉装置を第1図に於いて
説明する。[Prior Art] In a vacuum heat treatment furnace used for heat treating metals, etc., a rubber seal is provided between the door and the furnace body to ensure a vacuum inside the furnace. This seal is easily damaged by radiant heat from the processed material when the door is closed simultaneously or when the processed material is taken out with the door open, and the life of the seal is short and vacuum sealing is likely to fail. Here, a conventional door device for a vacuum heat treatment furnace will be explained with reference to FIG.
炉体1の内部には熱遮蔽体2によって加熱室3が設けら
れ、該加熱室3内に処理物4が収納され加熱される。5
は炉体1の内部を気密室とする隔壁であり、隔壁5には
処理物取出用の開口部θが設けられている。該開口部6
の上方、隔壁5の反加熱室側には駆動軸1が水平に設け
られ、又駆動軸1には扉体8が固着され、駆動軸1の回
転によって開閉する様になっている。A heating chamber 3 is provided inside the furnace body 1 by a heat shield 2, and a processed material 4 is housed in the heating chamber 3 and heated. 5
is a partition wall that makes the inside of the furnace body 1 an airtight chamber, and the partition wall 5 is provided with an opening θ for taking out the processed material. The opening 6
A drive shaft 1 is horizontally provided above the partition wall 5 on the opposite side of the heating chamber, and a door body 8 is fixed to the drive shaft 1 so as to be opened and closed by rotation of the drive shaft 1.
該扉体8には時計方向に回転付勢された平行リンク9を
介して遮蔽ドア10が設けられ、扉体8が前記開口部6
をrIJMする詩は遮蔽ドア10が加熱室3を閉塞する
様になっている。更に、前記駆動軸1にはアーム11が
固着されており、該アーム11と支点12を中心に傾動
自在なコンベア13とがリンクプレート14によって連
結されている。A shielding door 10 is provided on the door body 8 via a parallel link 9 that is biased to rotate in a clockwise direction, and the door body 8 is connected to the opening 6.
In the case of rIJM, a shielding door 10 closes off the heating chamber 3. Further, an arm 11 is fixed to the drive shaft 1, and a link plate 14 connects the arm 11 to a conveyor 13 which is tiltable about a fulcrum 12.
図中15はシールリングであり、隔壁5側に設けられ、
扉体8と隔壁5間を気密にシールするものである。又、
16はシールリングカバーであリ、シリンダ17によっ
て上下動され、扉体8開状態でシールリング15の上部
分を覆うものである。15 in the figure is a seal ring, which is provided on the partition wall 5 side,
This provides an airtight seal between the door body 8 and the partition wall 5. or,
A seal ring cover 16 is moved up and down by a cylinder 17 and covers the upper part of the seal ring 15 when the door body 8 is open.
第1図は真空熱処理炉の出口を扉装置によって閉塞して
いる状態を示しており、該出口を開放する場合は、駆動
軸1を時計方向に回転し、扉体8及び遮蔽ドア10を上
方に引上げ熱遮蔽体2の開口部及び隔壁5の開口部6を
開放J−る。FIG. 1 shows a state in which the outlet of the vacuum heat treatment furnace is closed by a door device. To open the outlet, rotate the drive shaft 1 clockwise and move the door body 8 and shielding door 10 upward. Open the opening of the heat shield 2 and the opening 6 of the partition wall 5.
扉体8が引上げられることによってリンクプレート14
を介してコンベア13が傾動し、扉体の全開状態(図中
2点鎖線で示す)で水平となり、処理物4の搬送用のコ
ンベアの機能を奏する。When the door body 8 is pulled up, the link plate 14
The conveyor 13 is tilted through the door body, becomes horizontal when the door body is fully open (indicated by a two-dot chain line in the figure), and functions as a conveyor for conveying the processed material 4.
更に、処理物4が搬出される際、加熱された処理物4か
らの輻射熱によりシールリング15が焼損する。この焼
損を防止する為シリンダ11によりシールリングカバー
16を降下させ、その上部を覆っている。Furthermore, when the processed material 4 is carried out, the seal ring 15 is burnt out due to radiant heat from the heated processed material 4. In order to prevent this burnout, the seal ring cover 16 is lowered by the cylinder 11 to cover its upper part.
然し上記した従来装置では以下に述べる欠点がある。However, the conventional device described above has the following drawbacks.
(+) シールリングが加熱室の遮蔽ドア及び搬送中の
処理物から直接熱を受ける位置にある為、シールリング
を保護するシールリングカバーを必要とし、該シールリ
ングカバーによってもシールリングを十分に保護するこ
とは構造上極めて困難である。その為、シールリングの
寿命が低下し、真空シールが不能となり易い。(+) Since the seal ring is in a position where it receives direct heat from the shield door of the heating chamber and the processed material being transported, a seal ring cover is required to protect the seal ring. It is structurally extremely difficult to protect. Therefore, the life of the seal ring is shortened and vacuum sealing is likely to become impossible.
(i) 扉体は円弧運動によって開閉される為、扉体開
閉時にドア上部の接触部近くですべりが生じ、このすべ
りによってシールリングの摩耗、損傷或は遮蔽ドアと加
熱室とのかじりが起き易い。(i) Since the door body is opened and closed by circular motion, slippage occurs near the contact area at the top of the door when the door body is opened and closed, and this slippage causes wear and damage to the seal ring or galling between the shielding door and the heating chamber. easy.
0ii1 扉体が処理物の移動する側の上方に開く為、
処理物の高さに制限が生じ、通過に供されるスペースが
少なくなる。0ii1 Since the door body opens above the side where the processed material moves,
This places restrictions on the height of the objects to be processed, reducing the space available for passage.
(へ)扉体の開閉、シールリングカバーの昇降等2以上
の複合作動となり、これら作動をさせる為のアクチュエ
ータの制御が複雑となる。(F) There are two or more combined operations such as opening and closing of the door body and lifting and lowering of the seal ring cover, and the control of the actuator for these operations becomes complicated.
[発明の目的1
本発明は、1のアクチュエータによって開閉作動が行わ
れ、且扉体側に設けたシールリングが開放状態では処理
物、遮蔽ドアからの輻射熱を受けない位置に移動すると
共に扉体自体の移動によってシールリングにすべりを生
じさせな′い様にした扉装置を提供し、前記した従来技
術の欠点を解消することを目的とするものである。[Objective of the Invention 1] The present invention is such that the opening/closing operation is performed by the actuator 1, and in the open state, the seal ring provided on the door side moves to a position where it does not receive radiant heat from the processing object or the shielding door, and the door body itself It is an object of the present invention to provide a door device which prevents the seal ring from slipping due to the movement of the seal ring, thereby solving the drawbacks of the prior art described above.
[発明の構成〕
本発明は、処理物の通路外に設けた回転自在な開閉軸に
開閉アームを固着し、該開閉アームにシールリングを取
付けた扉体を枢着し、扉体の開閉動によって扉体を回転
させる扉体反転装置を該扉体に係合させ、前記開閉軸を
回転させることにより扉の開閉が可能となると共に開放
状態では扉体が反転して処理物の通路外に移動する様に
したものである。[Structure of the Invention] The present invention has an opening/closing arm fixed to a rotatable opening/closing shaft provided outside the path of the processed material, a door body with a seal ring attached to the opening/closing arm, and the opening/closing movement of the door body. A door reversing device that rotates the door body is engaged with the door body, and by rotating the opening/closing shaft, the door can be opened and closed, and in the open state, the door body is reversed and the material to be processed is removed from the path. It is designed to move.
[実 施 例]
以下図面を参照しつつ本発明の実施例について説明する
。[Examples] Examples of the present invention will be described below with reference to the drawings.
第2図、第3図はそれぞれ本発明の実施例の立前面図、
正面図を示し、第3図の左半図は開状態、左半図は開状
態を示している。尚、第2図、第3図中第1図と同一の
ものには同一の符号を付しである。FIGS. 2 and 3 are front views of embodiments of the present invention, respectively;
A front view is shown, and the left half view of FIG. 3 shows the open state, and the left half view shows the open state. In FIGS. 2 and 3, the same parts as in FIG. 1 are given the same reference numerals.
隔壁5の廃用熱室3側、開口部6の下方に開閉軸20を
回転自在に設け、該開閉軸20の一端を炉体1より突出
させる。突出した端部にレバー21をvI着し、図示し
ないシリンダに連結してシリンダにより開閉軸20を所
要角度回転させ得る様にする。An opening/closing shaft 20 is rotatably provided below the opening 6 on the waste heat chamber 3 side of the partition 5, and one end of the opening/closing shaft 20 projects from the furnace body 1. A lever 21 is attached to the protruding end and connected to a cylinder (not shown) so that the cylinder can rotate the opening/closing shaft 20 by a required angle.
該開閉軸20の両端近傍にそれぞれ開閉アーム22を固
着し、該開閉アーム22の先端に連結軸23を介して扉
体8を枢支せしめる。扉体8の加熱室3側には平行リン
ク9を介して遮蔽ドア10が取付けられ、又廃用熱室側
にはコンベア24が取付けられている。該扉体8の両側
端面にそれぞれ2個宛のガイドローラ25を枢着し、後
述する揺動レール26の案内溝27に嵌合せしめる。An opening/closing arm 22 is fixed near both ends of the opening/closing shaft 20, and the door body 8 is pivotally supported at the tip of the opening/closing arm 22 via a connecting shaft 23. A shielding door 10 is attached to the heating chamber 3 side of the door body 8 via a parallel link 9, and a conveyor 24 is attached to the waste heat chamber side. Two guide rollers 25 are pivotally attached to both end faces of the door body 8, and are fitted into guide grooves 27 of a swing rail 26, which will be described later.
揺動レール26は滑かに屈曲したL字形状をしており、
開口部6より所要距離隔てて設けられている固定コンベ
ア28近傍に1端を枢支され揺動自在に設けられている
。該揺動レール26には前記した様に1字状の案内溝2
1が穿設され、ガイドローラ25が嵌合している。又、
揺動レール26の他端を、炉体1の側面に座29を介し
て取付けたレールサポート30で摺動可能に挾込み、揺
動レール26がガタッキなく揺動し得る鉦トする。The swing rail 26 has a smoothly bent L-shape,
One end is pivotally supported in the vicinity of a fixed conveyor 28 provided at a required distance from the opening 6 so as to be swingable. The swing rail 26 has a single-shaped guide groove 2 as described above.
1 is bored, and a guide roller 25 is fitted therein. or,
The other end of the swing rail 26 is slidably clamped by a rail support 30 attached to the side surface of the furnace body 1 via a seat 29, so that the swing rail 26 can swing without wobbling.
尚、図中31は加熱室内に設けた固定コンベアであり、
又シールリング32は扉体8に取付けである。In addition, 31 in the figure is a fixed conveyor installed in the heating chamber,
Further, the seal ring 32 is attached to the door body 8.
以下第4図〜第8図を併用して上記装置の作動について
説明する。The operation of the above device will be explained below with reference to FIGS. 4 to 8.
第2図は扉装置の開状態を示しているが、第2図の状態
から、図示しないシリンダによりレバー21を介しfl
llrIl軸20を反時軸方0に回転させる。開閉軸2
0の回転により開閉アーム20も反時iU方向に回動し
、連結@23も円弧を描いて移動する。FIG. 2 shows the door device in an open state, and from the state shown in FIG.
The llrIl axis 20 is rotated in the counter-time axis direction 0. Opening/closing shaft 2
0 rotation, the opening/closing arm 20 also rotates in the counterclockwise iU direction, and the connection @23 also moves in an arc.
連結0I123の移動によって連結軸23に枢支された
扉体8及び該扉体8に平行リンク9を介して取付けられ
た遮蔽ドア10は、それぞれ隔壁5、加熱室3より離反
する。扉体8の移動はガイドローラ25を介して揺動レ
ール26に伝達され、揺動レール26も反時計方向に揺
動する。揺動レール26の揺動により扉体8に設けられ
た下側のガイドローラ25が案内溝21の屈曲部に到り
扉体8自体は時計方向に回転する。By the movement of the connection 0I123, the door body 8 pivotally supported on the connection shaft 23 and the shielding door 10 attached to the door body 8 via the parallel link 9 are separated from the partition wall 5 and the heating chamber 3, respectively. The movement of the door body 8 is transmitted to the swing rail 26 via the guide roller 25, and the swing rail 26 also swings counterclockwise. As the swing rail 26 swings, the lower guide roller 25 provided on the door body 8 reaches the bent portion of the guide groove 21, and the door body 8 itself rotates clockwise.
而して、R閉アーム22の反時計方向の回動と扉体8の
時計方向の回転が相殺され、扉体8(シールリング32
)が隔壁5゛により離反する迄の動きは平行移動となり
、シールリング32と隔壁5との間のすべりがなくなる
(第4図)。As a result, the counterclockwise rotation of the R closing arm 22 and the clockwise rotation of the door body 8 are offset, and the door body 8 (seal ring 32
) until they are separated by the partition wall 5'' is a parallel movement, and there is no slippage between the seal ring 32 and the partition wall 5 (FIG. 4).
更に開閉軸20を回転させると、連結軸23は一層開口
部6より離れる。又ガイドローラ25は揺動レール2G
を反時計方向に押上げると共に揺動レール26との相対
関係では下側のガイドローラ25が案内溝21に沿って
水平方向に移動し、上側のガイドローラ25が下降する
。即ち、扉体8は開口部6より離反すると共に時計方向
に回って反転する(第5図、第6図)。When the opening/closing shaft 20 is further rotated, the connecting shaft 23 is further separated from the opening 6. Also, the guide roller 25 is the swing rail 2G.
is pushed up in the counterclockwise direction, and relative to the swing rail 26, the lower guide roller 25 moves horizontally along the guide groove 21, and the upper guide roller 25 descends. That is, the door body 8 is moved away from the opening 6 and rotated clockwise to be reversed (FIGS. 5 and 6).
開閉軸20の回転が更に行われると、上下2のガイドロ
ーラ25は共に案内溝27の水平部分に到り、又揺動レ
ール26は時晶1方向の動きに反転する(第7図)。When the opening/closing shaft 20 is further rotated, both the upper and lower guide rollers 25 reach the horizontal portion of the guide groove 27, and the swing rail 26 is reversed to move in the direction of the time crystal 1 (FIG. 7).
第8図は最終的な全開状態を示し、扉体8は″完全にシ
ールリング取付面を下方に向けて反転し、ガイドローラ
25が固定コンベア28に接続される。FIG. 8 shows the final fully open state, in which the door body 8 is completely turned over with the seal ring mounting surface facing downward, and the guide roller 25 is connected to the fixed conveyor 28.
全開状態ではコンベア24の上方には扉装置の構成物は
存在せず全くのスペースとなる。In the fully open state, there are no components of the door device above the conveyor 24, and there is no space above the conveyor 24.
扉を開として処理物4を抽出、又は装入する際、固定コ
ンベア28と31をコンベア24によって橋渡しするの
で処理物4の移動は円滑に行われる。又、扉体8のシー
ルリング取付面は処理物4の通路に対し背を向けており
、且遮蔽ドア10の加熱された面も前記シールリング取
付面に対して背を向けているので、シールリング32は
処理物4及び遮蔽ドア10からの輻射熱から完全に遮断
される。When the door is opened and the processed material 4 is extracted or loaded, the fixed conveyors 28 and 31 are bridged by the conveyor 24, so that the processed material 4 can be smoothly moved. Furthermore, since the seal ring mounting surface of the door body 8 faces away from the passage of the processed material 4, and the heated surface of the shielding door 10 also faces away from the seal ring mounting surface, the seal The ring 32 is completely shielded from the radiant heat from the workpiece 4 and the shield door 10.
間口部6を閉じる場合は、開閉軸20を時計方て第2図
の状態に到る。When closing the frontage part 6, the opening/closing shaft 20 is turned clockwise to reach the state shown in FIG. 2.
尚、上記実施例では扉体をコンベアと1体とし処理品の
通路の下方へ移動させ反転させたが、該通路の上方又は
側方へ移動させ反転させる様にしてもよく、必ずしも扉
体とコンベアとは一体でなくともよい。In the above embodiment, the door body is integrated with the conveyor and moved to the bottom of the passage for processed products and reversed. However, it may be moved upward or to the side of the passage and reversed, and the door body is not necessarily connected to the conveyor. It does not have to be integrated with the conveyor.
[発明の効果]
以上述べた如く本発明によれば、
(1) シールリングが処理物等により熱を受けないの
で寿命が長くなる、
Of) 開閉直前のドアの動きは隔壁接触面に直角であ
るので、すべりが起きず、シールリングの摩耗、損傷が
防止されると共に円滑な開閉ができる、
0 装置構成物が処理物通路の反対側に収納される為通
過スペースが広くなる、
(へ)開閉作動に要するアクチュエータは1でよいので
制御[l装置、構造が簡単になる、等の優れた効果を発
揮する。[Effects of the Invention] As described above, according to the present invention, (1) the seal ring does not receive heat from the processed material, etc., resulting in a longer service life; Of) the movement of the door immediately before opening/closing is perpendicular to the contact surface of the bulkhead; This prevents slippage, prevents abrasion and damage to the seal ring, and allows for smooth opening and closing.0 Since the equipment components are stored on the opposite side of the processing material passage, the passage space is widened. Since only one actuator is required for the opening/closing operation, excellent effects such as a simplified control system and structure can be achieved.
第1図は従来の装置の置所面図、第2図は本発明に係る
装置の置所面図、第3図は同装置の正面図で左半図は開
状態、右半図は開状態を示しており、又第4図〜第8図
は同装置の作動説明図である。Fig. 1 is a plan view of the location of a conventional device, Fig. 2 is a plan view of the device according to the present invention, and Fig. 3 is a front view of the same device, with the left half in the open state and the right half in the open state. 4 to 8 are explanatory views of the operation of the device.
4は処理物、8は扉体、20は開開軸、22は開閉アー
ム、26は揺動レールを示す。Reference numeral 4 indicates an object to be processed, 8 a door body, 20 an opening/closing shaft, 22 an opening/closing arm, and 26 a swing rail.
特 許 出 願 人 石川島播磨重工業株式会社 特 許 出 願 人 株式会社 岩国製作所 @1 図 7 @4図 第6−図 第5図 ンU 第7図Patent applicant Ishikawajima Harima Heavy Industries Co., Ltd. Patent applicant Iwakuni Manufacturing Co., Ltd. @1 Figure 7 @Figure 4 Figure 6 Figure 5 N U Figure 7
Claims (1)
ームを固着し、該開閉アームにシールリングを取付けた
扉体を枢着し、扉体の開閉動によって扉体を回転させる
扉体反転装置を該扉体に係合させたことを特徴とする真
空熱処理炉の扉装置。1) A door in which an opening/closing arm is fixed to a rotatable opening/closing shaft provided outside the path of the processed material, a door body with a seal ring is pivotally attached to the opening/closing arm, and the door body is rotated by the opening/closing movement of the door body. A door device for a vacuum heat treatment furnace, characterized in that a body reversing device is engaged with the door body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4832784A JPS60194015A (en) | 1984-03-14 | 1984-03-14 | Door device for vacuum heat treating furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4832784A JPS60194015A (en) | 1984-03-14 | 1984-03-14 | Door device for vacuum heat treating furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60194015A true JPS60194015A (en) | 1985-10-02 |
Family
ID=12800316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4832784A Pending JPS60194015A (en) | 1984-03-14 | 1984-03-14 | Door device for vacuum heat treating furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60194015A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62135094U (en) * | 1986-02-19 | 1987-08-25 | ||
WO2007147248A1 (en) * | 2006-06-20 | 2007-12-27 | Empco (Canada) Ltd. | Sealing apparatus for a slag door of a metallurgical furnace |
CN102159911A (en) * | 2008-10-15 | 2011-08-17 | Sms西马克股份公司 | Slagging door for metallurgic furnaces |
WO2011115919A1 (en) | 2010-03-16 | 2011-09-22 | Process Technology International, Inc. | Pivoting slag door |
CN113279088A (en) * | 2021-04-23 | 2021-08-20 | 福建立亚化学有限公司 | Processing equipment of polycarbosilane |
-
1984
- 1984-03-14 JP JP4832784A patent/JPS60194015A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62135094U (en) * | 1986-02-19 | 1987-08-25 | ||
WO2007147248A1 (en) * | 2006-06-20 | 2007-12-27 | Empco (Canada) Ltd. | Sealing apparatus for a slag door of a metallurgical furnace |
US7767137B2 (en) | 2006-06-20 | 2010-08-03 | Empco (Canada) Ltd. | Sealing apparatus for a slag door of a metallurgical furnace |
US8124004B2 (en) | 2006-06-20 | 2012-02-28 | Empco (Canada) Ltd. | Slag door assembly for an electric arc furnance |
CN102159911A (en) * | 2008-10-15 | 2011-08-17 | Sms西马克股份公司 | Slagging door for metallurgic furnaces |
WO2011115919A1 (en) | 2010-03-16 | 2011-09-22 | Process Technology International, Inc. | Pivoting slag door |
CN113279088A (en) * | 2021-04-23 | 2021-08-20 | 福建立亚化学有限公司 | Processing equipment of polycarbosilane |
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