JPH03102191A - Door device for vacuum heat treating furnace - Google Patents

Door device for vacuum heat treating furnace

Info

Publication number
JPH03102191A
JPH03102191A JP23717489A JP23717489A JPH03102191A JP H03102191 A JPH03102191 A JP H03102191A JP 23717489 A JP23717489 A JP 23717489A JP 23717489 A JP23717489 A JP 23717489A JP H03102191 A JPH03102191 A JP H03102191A
Authority
JP
Japan
Prior art keywords
opening
carrying
door body
cover
protective cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23717489A
Other languages
Japanese (ja)
Other versions
JP2749143B2 (en
Inventor
Masayoshi Ichikawa
市川 政義
Susumu Matsuoka
進 松岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP23717489A priority Critical patent/JP2749143B2/en
Publication of JPH03102191A publication Critical patent/JPH03102191A/en
Application granted granted Critical
Publication of JP2749143B2 publication Critical patent/JP2749143B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)

Abstract

PURPOSE:To reduce an installation space and to facilitate check and maintenance by moving a door body by rotating a hanging member attached at one end to the body by a rotary driver, operating a protective cover as its counterweight, and sealing with a sealing ring the peripheral wall of an opening. CONSTITUTION:Drivers are operated to rotate a lever 15 for pressing a door body 13 to a sealing ring 7 of the peripheral wall of a conveying opening 6, at a predetermined angle to be opened. Then a motor with a reduction gear brake is operated to rotate a rotary drive shaft 8 to raise the body 13, and to simultaneously lower a protective cover 14. When the cover 14 is moved to a position opposed to the ring 7, the motor is stopped. The cover 14 is pressed to the ring 7 by the rotation of the lever 15 by the drivers. Influence of radiation heat when a material 4 to be treated is passed through the opening 6 is effectively prevented by the cover 14. The cover 14 is also operated as a counterweight of the body 13. As a result, the load of the motor can be reduced.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、真空熱処理炉の加熱室や冷却室等の各室を独
立して密封的に閉塞するのに用いられる扉装置に関する
ものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a door device used to independently and hermetically close each chamber such as a heating chamber and a cooling chamber of a vacuum heat treatment furnace. .

[従来の技術] 従来、真空熱処理炉の扉装置としては、添付図面の第3
図に示すように、金属製の炉室A内に断熱材から成る熱
しゃへい体Bで囲まれた加熱室Cが設けられ、この加熱
室C内に処理物Dが収納され、加熱処理される。炉室A
内を気密にする隔壁Eには処理物Dを搬入、搬出するた
めの開口部Fが設けられている。またGは扉本体で、こ
の扉本体Gはその内側にゴム製のシールリングHを備え
、隔壁Eに対して気密にシールしている。また扉本体G
の下方端部にはシャッタIが回動自在に取付けられてい
る。
[Prior Art] Conventionally, as a door device for a vacuum heat treatment furnace,
As shown in the figure, a heating chamber C surrounded by a heat shield B made of a heat insulating material is provided in a metal furnace chamber A, and a processed material D is stored in this heating chamber C and subjected to heat treatment. . Furnace room A
The partition wall E, which makes the inside airtight, is provided with an opening F through which the processed material D is carried in and carried out. Further, G is a door body, and this door body G is provided with a rubber seal ring H on the inside thereof, and is airtightly sealed against the partition wall E. Also, the door body G
A shutter I is rotatably attached to the lower end of the shutter.

開口部Fの前面の上方位置には昇降用シリンダJが設け
られ、この昇降用シリンダJのシリンダロツドKの先端
には昇降台Lが取付けられ、扉本体Gはこの昇降台Lに
リンクMを介して取付けられており、昇降用シリンダJ
の作動により図面に実線で示す開口部Fを閉塞する位置
と図面に仮想線で示す退避位置との間を昇降するように
されている。
A lifting cylinder J is provided above the front surface of the opening F, and a lifting platform L is attached to the tip of the cylinder rod K of this lifting cylinder J, and the door body G is connected to this lifting platform L via a link M. The lifting cylinder J
The actuator is moved up and down between a position where the opening F is closed, which is shown by a solid line in the drawing, and a retracted position which is shown by a phantom line in the drawing.

扉本体Gの下方端部に設けられたシャッタIは、扉本体
Gが昇降用シリンダJの作動により昇降される際に扉本
体Gの内側のシールリングHの下方部分を覆ってそのシ
ールリング部分が加熱室Cからの輻射熱により焼損され
るのを防止する働きをしている。
The shutter I provided at the lower end of the door body G covers the lower part of the seal ring H inside the door body G when the door body G is raised and lowered by the operation of the lifting cylinder J. This serves to prevent the heat from being burned out by the radiant heat from the heating chamber C.

[発明が解決しようとする課題コ ところで、上述のように昇降用シリンダを用いて扉の開
閉を行うように構或された従来公知の装置では、昇降用
シリンダが開口部の平面に沿って伸びているため、昇降
用シリンダを開口部に対して上下方向に設けた場合には
高さ方向に、また昇降用シリンダを開口部に対して左右
方向に設けた場合には横方向にそれぞれ大きな設置スペ
ースが必要となる。
[Problems to be Solved by the Invention] However, in the conventionally known device configured to open and close a door using a lifting cylinder as described above, the lifting cylinder extends along the plane of the opening. Therefore, if the lifting cylinder is installed vertically with respect to the opening, the installation will be large in the height direction, and if the lifting cylinder is installed horizontally with respect to the opening, the installation will be large in the horizontal direction. Space is required.

また扉の閉塞時に気密を保持するためのシールリングが
扉本体の内側に設けられているため、シ−ルリングを寿
命、焼損などにより交換する場合には扉本体を炉室外へ
取り出す必要があり、メンテナンス作業が面倒である。
In addition, a seal ring is provided inside the door body to maintain airtightness when the door is closed, so if the seal ring has reached its end of life or is burnt out, it is necessary to take the door body out of the furnace room. Maintenance work is troublesome.

さらに、昇降用シリンダのシリンダロッドの往復摺動に
よりダストを巻き込む機会が多くなり、昇降用シリンダ
の軸シールの真空シールが不能となり易い。
Further, the reciprocating sliding of the cylinder rod of the lifting cylinder increases the chances of dust being drawn in, and the vacuum sealing of the shaft seal of the lifting cylinder is likely to become impossible.

さらにまた、上述のような公知の装置は構戊部品の数が
多く、構造が複雑となり、高価である。
Furthermore, the known devices as described above have a large number of structural parts, are complex in construction, and are expensive.

本発明の解決しようとする課題は、このような従来公知
の装置のもつ問題点を解消することにあり、従って本発
明は、扉本体を作動するのに昇降用シリンダ機構に代え
て回転駆動機構を使用し、設置スペースを削減でき、保
守点検の容易で構造の簡単な真空熱処理炉の扉装置を提
供することを目的としている。
The problem to be solved by the present invention is to eliminate the problems of such conventionally known devices. Therefore, the present invention provides a rotary drive mechanism for operating the door body instead of a lifting cylinder mechanism. The purpose of the present invention is to provide a door device for a vacuum heat treatment furnace that can reduce installation space, is easy to maintain and inspect, and has a simple structure.

[課題を解決するための手段] 上記の目的を達成するために、本発明による真空熱処理
炉の扉装置は、真空熱処理炉の加熱室の被処理物搬入、
搬出用開口の周壁にシールリングを装着し、上記被処理
物搬入、搬出用開口の上方位置に回転駆動体を設け、こ
の回転駆動体に、両端に上記被処理物搬入、搬出用開口
を覆う扉本体と保護覆体とをそれぞれ装着した吊り下げ
部材を装着し、上記回転駆動体の駆動により上記吊り下
げ部材を介して上記扉本体と保護覆体とを相互に昇降さ
せるように構成し、また扉本体及び保護覆体を上記被処
理物搬入、搬出用開口の閉塞時には扉本体をまた上記被
処理物搬入、搬出用開口の開放時には保護覆体を上記被
処理物搬入、搬出用開口の周壁のシールリングに対して
押圧する手段を設けたことを特徴としている。
[Means for Solving the Problems] In order to achieve the above object, a door device for a vacuum heat treatment furnace according to the present invention provides a door device for a vacuum heat treatment furnace that prevents workpieces from being carried into a heating chamber of a vacuum heat treatment furnace;
A seal ring is attached to the peripheral wall of the carrying-out opening, a rotary drive body is provided above the opening for carrying in and carrying out the processed material, and the rotating driving body has both ends covering the opening for carrying in and carrying out the processed material. A hanging member is attached to which a door body and a protective cover are respectively attached, and the door body and the protective cover are moved up and down relative to each other via the hanging member by driving the rotary drive body, In addition, when the opening for carrying in and carrying out the processed material is closed, the door main body and the protective covering are used to close the opening for carrying in and carrying out the processed material, and when the opening for carrying in and carrying out the processed material is opened, the protective covering is used to open the opening for carrying in and carrying out the processed material. It is characterized by providing means for pressing against the seal ring on the peripheral wall.

[作  用] このように構或した本発明による真空熱処理炉の扉装置
においては、一端に扉本体の装着された吊り下げ部材を
回転駆動体によって回動することにより扉本体は動かさ
れ、この場合吊り下げ部材の他端に装着された保護覆体
はカウンタウェイトとして作用する。また扉本体の昇降
動作と同時に保護覆体の昇降動作が行なわれるため、被
処理物搬入、搬出用開口の開閉を迅速かつスムースに行
うことができる。
[Function] In the vacuum heat treatment furnace door device according to the present invention constructed in this manner, the door body is moved by rotating the hanging member to which the door body is attached at one end by the rotary drive body. In this case, a protective covering mounted on the other end of the suspension member acts as a counterweight. Further, since the protective cover is raised and lowered simultaneously with the raising and lowering of the door body, openings for loading and unloading objects can be opened and closed quickly and smoothly.

披処理物搬入、搬出用開口の開放と同時にこの開口の周
壁部分は保護覆体で覆われ、それにょり周壁のシールリ
ングは処理室内からの輻射熱から保護される。
At the same time as the opening for loading and unloading the workpiece is opened, the peripheral wall of the opening is covered with a protective cover, thereby protecting the seal ring on the peripheral wall from radiant heat from the processing chamber.

さらに、シールリングは被処理物搬入、搬出用開口の周
壁に設けているので、そのメンテナンスを容易に行うこ
とができる。
Furthermore, since the seal ring is provided on the peripheral wall of the opening for carrying in and carrying out the processed material, its maintenance can be easily performed.

[実 施 例] 以下、添付図面の第1図及び第2図を参照して本発明の
実施例について説明する。
[Embodiments] Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 and 2 of the accompanying drawings.

第1図及び第2図には本発明の一実施例を示し、これら
の図面において1は金属製の炉室で、この炉室1内には
断熱材から成る熱しゃへい体2が配置され、加熱室3を
画定している。加熱室3内で処理物4が加熱処理される
。5は炉室1内を気密にする隔壁で、この隔壁5には処
理物4の搬入、搬出用開口6が設けられている。この搬
入、搬出用開口6の周壁5aの外表面にはシールリング
7が装着されている。
FIG. 1 and FIG. 2 show an embodiment of the present invention. In these drawings, 1 is a metal furnace chamber, and a heat shield 2 made of a heat insulating material is disposed inside the furnace chamber 1. A heating chamber 3 is defined. The object to be treated 4 is heat-treated within the heating chamber 3 . Reference numeral 5 denotes a partition wall that makes the inside of the furnace chamber 1 airtight, and this partition wall 5 is provided with an opening 6 for carrying in and out the processed material 4 . A seal ring 7 is attached to the outer surface of the peripheral wall 5a of the loading/unloading opening 6.

搬入、搬出用開口6の上方位置には回転駆動軸8が搬入
、搬出用開口6の面に平行にしかも水平に設けられ、回
転駆動軸8は鎖車9を備え、また回転駆動軸8の一端は
炉室1の炉壁を通って外部へ突出し、炉壁に設けた取付
けフランジlOに取付けられた減速機ブレーキ付電動機
11に連結されている。
A rotary drive shaft 8 is provided above the loading and unloading opening 6 parallel to and horizontally to the surface of the loading and unloading opening 6, and the rotary driving shaft 8 is equipped with a chain wheel 9. One end protrudes to the outside through the furnace wall of the furnace chamber 1, and is connected to an electric motor 11 with a speed reducer and brake attached to a mounting flange lO provided on the furnace wall.

回転駆動軸8上の鎖車9には吊り下げ部材を成す鎖l2
が掛けられており、鎖l2の一端には搬入、搬出用開口
6を覆う扉本体l3がまた鎖12の他端には保護覆体l
4がそれぞれ装着されている。保護覆体l4は第2図の
左半分に示すように、処理物4を通す中央開口14aを
備え、搬入、搬出用開口6の周壁5aのシールリング7
の全周を覆って処理物4が搬入、搬出用開口6を通過す
る際の輻射熱によるシールリング7が焼損されるのを防
止する働きをしている。
A chain l2 serving as a hanging member is attached to a chain wheel 9 on the rotation drive shaft 8.
is hung, and at one end of the chain l2 there is a door body l3 that covers the loading and unloading opening 6, and at the other end of the chain 12 there is a protective cover l3.
4 are installed respectively. As shown in the left half of FIG. 2, the protective cover l4 has a central opening 14a through which the material to be processed 4 passes, and a seal ring 7 on the peripheral wall 5a of the loading/unloading opening 6.
It covers the entire circumference of the seal ring 7 to prevent the seal ring 7 from being burnt out due to radiant heat when the processed material 4 passes through the loading/unloading opening 6.

また搬入、搬出用開口6の両側部には第2図に示すよう
に扉本体l3及び保護覆体14を搬入、搬出用開口6の
周壁5aのシールリング7に対して押圧するレバーl5
が設けられ、これらのレバーl5はそれぞれ炉室1の外
側に設けられた駆動装置1Bに連結されている。
Further, as shown in FIG. 2, on both sides of the loading/unloading opening 6, there are levers l5 for pressing the door main body l3 and the protective cover 14 against the seal ring 7 of the peripheral wall 5a of the loading/unloading opening 6.
are provided, and these levers l5 are each connected to a drive device 1B provided outside the furnace chamber 1.

このように構成した図示装置の動作について説明する。The operation of the illustrated apparatus configured in this way will be explained.

まず、加熱室3内で加熱処理した処理物4を加熱室3か
ら取り出す際、すなわち加熱室3の搬入、搬出用開口6
を開放する際には、各駆動装置l6を作動して、扉本体
l3を搬入、搬出用開口6の周壁5aのシールリング7
に対して押圧しているレバーl5を一定角度回動じて開
放する。その後減速機ブレーキ付電動機1lを作動して
回転駆動軸8を回転させ、第2図の右半分に示すように
、扉本体I3を上昇させ、同時に保護覆体l4を降下さ
せ、こうして保護覆体l4が搬入、搬出用開口6の周壁
5aのシールリング7に対向する位置まで降下すると、
図示してない位置センサーからの信号で減速機ブレーキ
付電動機11は停止される。そして保護覆体14は各駆
動装置l6によるレバー15の回動で搬入、搬出用開口
6の周壁5aのシールリング7に対して押圧される。こ
うして処理物4は加熱室3から搬入、搬出用開口6を通
って取り出される。処理物4が加熱室3の搬入、搬出用
開口6を通過する際の輻射熱の影響は保護覆体14によ
って有効に阻止され得る。また保護覆体l4は扉本体1
3のカウンタウェイトとして作用し、その結果電動機l
lの負荷を軽減させることができる。
First, when taking out the processed material 4 heat-treated in the heating chamber 3 from the heating chamber 3, that is, the opening 6 for carrying in and carrying out the heating chamber 3
When opening the door, each drive device l6 is operated to carry in the door body l3, and the seal ring 7 of the peripheral wall 5a of the carrying-out opening 6 is opened.
The lever l5 that is being pressed against the lever is rotated by a certain angle to release it. Thereafter, the electric motor 1l with a reducer brake is activated to rotate the rotary drive shaft 8, and as shown in the right half of FIG. When l4 descends to a position facing the seal ring 7 of the peripheral wall 5a of the loading/unloading opening 6,
The electric motor 11 with a reduction gear brake is stopped by a signal from a position sensor (not shown). The protective cover 14 is pressed against the seal ring 7 of the peripheral wall 5a of the loading/unloading opening 6 by rotation of the lever 15 by each drive device l6. In this way, the processed material 4 is taken out from the heating chamber 3 through the loading/unloading opening 6. The protective cover 14 can effectively prevent the influence of radiant heat when the processed material 4 passes through the loading/unloading opening 6 of the heating chamber 3 . In addition, the protective cover l4 is the door body 1
Acts as a counterweight for 3, and as a result the electric motor l
The load on 1 can be reduced.

一方、搬入、搬出用開口6を扉本体l3で閉塞する際に
は、保護覆体l4を搬入、搬出用開口6の周壁5aのシ
ールリング7に対して押圧しているレバ−15を開放し
、減速機ブレーキ付電動機11により回転駆動軸8を逆
方向に回転させ、第2図の左半分に示すように保護覆体
l4を上昇させると同時に扉本体l3を降下させ、こう
して扉本体13が搬入、搬出用開口6に対して所定の位
置まで降下すると、図示してない位置センサーからの信
号で減速機ブレーキ付電動機11は停止され、そして扉
本体13は各駆動装置l6によるレバーl5の回動で搬
入、搬出用開口6の周壁5aのシールリング7に対して
押圧され、密封される。
On the other hand, when closing the loading/unloading opening 6 with the door body l3, the lever 15 pressing the protective cover l4 against the seal ring 7 of the peripheral wall 5a of the loading/unloading opening 6 is released. , the rotary drive shaft 8 is rotated in the opposite direction by the electric motor 11 with a reducer brake, and as shown in the left half of FIG. When the door body 13 is lowered to a predetermined position relative to the loading/unloading opening 6, the electric motor 11 with a reducer brake is stopped by a signal from a position sensor (not shown), and the door body 13 is rotated by the lever l5 by each drive device l6. The loading/unloading opening 6 is pressed against the seal ring 7 of the peripheral wall 5a of the opening 6 for sealing.

ところで、図示実施例では、扉本体■3及び保護覆体l
4の昇降を回転駆動軸8における鎖車9と鎖12とによ
り行うようにしているが、鎖車9及び鎖l2の代わりに
、回転駆動体及び吊り下げ部材として他の適当な昇降手
段例えば巻取ドラム及びワイヤーロープを回転駆動軸8
に装着するようにすることもできる。
By the way, in the illustrated embodiment, the door body ■3 and the protective cover l
4 is lifted and lowered by a chain wheel 9 and a chain 12 on a rotary drive shaft 8, but instead of the chain wheel 9 and chain 12, other suitable lifting means such as a winding can be used as a rotary drive body and a hanging member. Driving shaft 8 that rotates the drum and wire rope
It may also be possible to attach it to the

[発明の効果] 以上説明してきたように本発明によれば、扉本体を電動
機による回転運動で昇降させるように構成しているので
、従来のシリンダ型の昇降機構に比べて昇降機構の高さ
方向の設置スペースを大幅に削減することができると共
に、摺動型軸シールに代わって回転型軸シールを使用で
き、炉の真空シールの維持が確実かつ容易となる。
[Effects of the Invention] As explained above, according to the present invention, the door body is configured to be raised and lowered by rotational movement by an electric motor, so the height of the lifting mechanism is lower than that of a conventional cylinder-type lifting mechanism. In addition to being able to significantly reduce the installation space in both directions, a rotating shaft seal can be used instead of a sliding shaft seal, and the vacuum seal of the furnace can be maintained reliably and easily.

また、加熱室の気密を保持するためのシールリングを搬
入、搬出用開口側に設けているので、シールリングの交
換や掃除などのメンテナンス作業が簡単かつ容易となる
Further, since a seal ring for keeping the heating chamber airtight is provided on the loading/unloading opening side, maintenance work such as seal ring replacement and cleaning becomes simple and easy.

さらに、扉本体の昇降に連動して保護覆体が作動し、搬
入、搬出用開口の開放時にはシールリングを全周保護し
て、それの焼損を確実に防止することができる。
Furthermore, the protective cover is operated in conjunction with the lifting and lowering of the door body, and when the loading/unloading opening is opened, the seal ring is protected all around, thereby reliably preventing it from being burnt out.

さらにまた、本発明によれば、装置の構戒部品の数を少
なくでき、構造を簡単化することが可能となる。
Furthermore, according to the present invention, the number of structural parts of the device can be reduced, and the structure can be simplified.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す概略断面図、第2図は
第1図の装置を正面から見た概略線図で8:回転駆動軸 9:鎖車 10:取付けフランジ ll:減速機ブレーキ付電動機 l2:鎖 l3:扉本体 14:保護覆体 l5:レバー 16:駆動装置 炉室 熱しゃへい体 加熱室 処理物 隔壁 周壁 搬入、搬出用開口 シールリング 第1図 第2図
Fig. 1 is a schematic sectional view showing one embodiment of the present invention, and Fig. 2 is a schematic diagram of the device shown in Fig. 1 seen from the front. Electric motor with machine brake 12: Chain 13: Door body 14: Protective cover 15: Lever 16: Drive device Furnace chamber heat shield body Heating chamber Partition wall of processed material Peripheral wall Opening seal ring for carrying in and out Fig. 1 Fig. 2

Claims (1)

【特許請求の範囲】[Claims] 真空熱処理炉の加熱室の被処理物搬入、搬出用開口の周
壁にシールリングを装着し、上記被処理物搬入、搬出用
開口の上方位置に回転駆動体を設け、この回転駆動体に
、両端に上記被処理物搬入、搬出用開口を覆う扉本体と
保護覆体とをそれぞれ装着した吊り下げ部材を装着し、
上記回転駆動体の駆動により上記吊り下げ部材を介して
上記扉本体と保護覆体とを相互に昇降させるように構成
し、また扉本体及び保護覆体を上記被処理物搬入、搬出
用開口の閉塞時には扉本体をまた上記被処理物搬入、搬
出用開口の開放時には保護覆体を上記被処理物搬入、搬
出用開口の周壁のシールリングに対して押圧する手段を
設けたことを特徴とする真空熱処理炉の扉装置。
A seal ring is attached to the peripheral wall of the opening for loading and unloading the workpiece in the heating chamber of the vacuum heat treatment furnace, and a rotary drive body is provided above the opening for loading and unloading the workpiece. Attach a hanging member to which a door body and a protective covering are respectively attached to cover the openings for carrying in and carrying out the processed material,
The door main body and the protective cover are configured to be moved up and down relative to each other via the hanging member by the drive of the rotary drive body, and the door main body and the protective cover are connected to the opening for carrying in and out the processed material. The apparatus is characterized in that means is provided for pressing the door body when the opening is closed and the protective cover against a seal ring on the peripheral wall of the opening for carrying in and carrying out the processing object when the opening for carrying in and carrying out the processing object is opened. Door device for vacuum heat treatment furnace.
JP23717489A 1989-09-14 1989-09-14 Door device for vacuum heat treatment furnace Expired - Lifetime JP2749143B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23717489A JP2749143B2 (en) 1989-09-14 1989-09-14 Door device for vacuum heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23717489A JP2749143B2 (en) 1989-09-14 1989-09-14 Door device for vacuum heat treatment furnace

Publications (2)

Publication Number Publication Date
JPH03102191A true JPH03102191A (en) 1991-04-26
JP2749143B2 JP2749143B2 (en) 1998-05-13

Family

ID=17011474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23717489A Expired - Lifetime JP2749143B2 (en) 1989-09-14 1989-09-14 Door device for vacuum heat treatment furnace

Country Status (1)

Country Link
JP (1) JP2749143B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100817280B1 (en) * 2001-10-26 2008-03-27 주식회사 포스코 Door opening and closing device of heating furnace
JP2011514960A (en) * 2008-02-28 2011-05-12 アイゼンマン アンラゲンバウ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディトゲゼルシャフト Gate unit and high-temperature furnace having the same

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6294995B2 (en) * 2017-04-28 2018-03-14 エスペック株式会社 Drying equipment
JP6294996B2 (en) * 2017-04-28 2018-03-14 エスペック株式会社 Drying equipment
JP6300986B2 (en) * 2017-04-28 2018-03-28 エスペック株式会社 Drying equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100817280B1 (en) * 2001-10-26 2008-03-27 주식회사 포스코 Door opening and closing device of heating furnace
JP2011514960A (en) * 2008-02-28 2011-05-12 アイゼンマン アンラゲンバウ ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディトゲゼルシャフト Gate unit and high-temperature furnace having the same

Also Published As

Publication number Publication date
JP2749143B2 (en) 1998-05-13

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