JP2557542Y2 - Oven with side opening - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION The present invention relates to an apparatus for performing a heat treatment in a processing chamber, for example, a heating unit provided on one end surface side of the processing chamber by means of an air supply means. An example is a clean oven that sends the gas that has been discharged, and is used for annealing, degassing, and drying processes of flat displays, memory disks, and the like.

[0002]

2. Description of the Related Art As a conventional clean oven, for example, as shown in FIG. 7, air-conditioned air is sent from an air-conditioning chamber 5 'to an air supply section 2a', and the processing chamber 2 'is passed through a filter 6'.
There is a known device that blows air into the air-conditioning chamber and returns the air to an air-conditioned room through a suction portion 21 formed by a door 11 'and a ventilation resistance plate 20 attached to the door 11' (Japanese Utility Model Publication No. 60-2367). Reference). When the airflow resistance plate 20 is provided on the opposite side of the filter in this manner, the air flow in the processing chamber becomes uniform as shown in the figure.

However, there are cases where it is structurally difficult to provide such a suction duct. For example,
When realizing unattended automation to prevent particles from the human body, such as in a semiconductor manufacturing plant, it is preferable to install a resistance plate on the door in order to provide an automatic opening / closing type door in a clean oven in relation to the automatic opening / closing mechanism. Absent. For this reason, when the door 11 is not provided with a duct in order to be automatically opened and closed, there is a problem that a drift occurs as shown in FIG. 8 and a uniform air flow cannot be obtained.

[0004]

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems in the prior art, and even when it is difficult to provide an air duct on the side opposite to the gas blowing direction, the gas flow in the processing chamber is made uniform. An object of the present invention is to provide an oven that can be converted into an oven.

[0005]

According to the present invention, in order to solve the above-mentioned problems, one end faces respectively opposed to each other by an air supply means.
And the other side, and the other side.
The duct provided in the one end face of the made a processing chamber
In an oven for sending a gas which has been heated prior Symbol processing chamber from substantially the entire surface substantially perpendicular direction to said one end surface, the suction side of the blowing means between the both sides covering the both side surfaces of the processing chamber A partition member that forms a conductive space
Te, substantially to between the other sides in the vicinity of the other end face side
A partition member generally with an opening, before the sides
A conducting duct for conducting the space, wherein the two other
Provided on either side of the side surface, and near the other end surface side
Opened into the processing chamber including the central part between both side surfaces
And a conducting duct having an additional opening .

[0006]

According to the first aspect of the present invention, both ends are connected to each other by an air supply means.
Applicable to an oven in which gas is sent out from the entire surface in a direction substantially perpendicular to one end surface from a duct provided on one end surface side of the processing chamber formed by the side surface and the other both side surfaces.
Is done. A partition member forming a space is provided on both side surfaces, and another partition member is provided near the other end surface of the partition portion .
Since the opening is provided entirely between the two side surfaces, the gas sent out as a substantially parallel flow in a direction perpendicular to one end surface,
The air enters the space almost uniformly from the opening provided entirely, and flows from one end face to the vicinity of the other end face while maintaining a substantially parallel flow state. Since this space communicates with the suction side of the air supply means, the air is sucked into the air supply means. Therefore, even when the partitioned gas passage is not provided on the other end surface itself , a uniform gas flow is formed from the one end surface side to the other end surface side in the processing chamber. Also, one of the other two sides
A conduction duct that connects the space on both sides
Including the central part between both sides near the other end side
An additional opening that opens into the room is provided, so the openings on both sides
The gas in the central part, which is difficult to be sucked into the
And the parallel flow of gas is maintained at that
Inhalation processing can be performed more completely.

[0007]

FIG. 1 is a perspective view showing a schematic structure of a clean oven as one embodiment of an oven.
Indicates the cross-sectional structure. The present device has a main body 10
0, and a control unit 200 disposed thereon, the main body 100 is covered with a heat insulating panel 1, and the upper part thereof is a processing chamber 2 for heat-treating a work such as a semiconductor product.
The lower part is an air-conditioning room 5 in which a heater 3 and a sirocco-type fan 4 as air supply means are arranged. Processing room 2
Both end faces consisting of one end face and the other end face facing each other, both
Formed on the sides and other sides consisting of the ceiling and bottom
Have been. A duct 2a and a filter 6 adjacent to the duct 2a are provided on the rear wall 1a side of the heat insulating panel, which is one end face of the processing chamber 2.
Are provided therein, and a shelf 7 on which a workpiece to be processed is placed and a cover plate 8 as a conduction duct are provided. A bottom plate 9 is provided below the cover plate 8, and an air passage is provided between the bottom plate 9 and a ventilation port 8a as an additional opening is provided in the front end direction. The bottom plate 9 has a vent 9a. In this example, the air supply means is below the bottom plate 9.
The cover plate 8 is provided in the air conditioning room 5 and the bottom plate 9
Is provided in the processing chamber 2 on the side.

The side walls 1b and 1b of the heat insulating panel constituting both sides of the processing chamber 2 are provided with side plates 10 and 10 as partition members so as to cover the side walls 1b and 1b, and spaces 10a and 10a are provided therebetween. Are formed. The inner surface 11a of the door 11 which is the other end surface (the door 11 in FIG.
(Shows a state in which the opening is lowered). As an example of the opening, three ventilation holes 10b each formed of a large number of small holes are formed on both sides. The vent 10b forms a bottom surface in this example.
Provided between the surface of the cover plate 8 and the ceiling surface
However, in this example, it is divided into three. In addition, ventilation of the cover plate 8
The mouth 8a is located on the inner surface 11a side of the door 11 which is the same as the space 10a.
While being located, the central part between both side plates 10, 10
It is open to the inside of the processing chamber 2.

FIG. 5 is a view showing the side plate 10, the cover plate 8 and the bottom plate 9 with a space therebetween, and further clarifying the arrangement and the conductive relationship between the openings. The bottom of the side plate 10 is cut away as shown in the figure to form a vent 10c. The ventilation port 10c is electrically connected to an opening 8b formed between the lid plate 8 and the bottom plate 9. As a result, the ventilation ports 8a and 10b and 10c are electrically connected to the ventilation port 9a and communicate with the suction side of the fan 4 in the air conditioning room 5.

FIG. 6 shows an example of the structure when the door 11 is automatically opened and closed. The door 11 is connected to the outer frame 12 by a link 13, and the door 11 is attracted to each other by a spring (not shown). The outer frame 12 is guided by guide rollers 14, and is moved up and down by a lifting device (not shown). At the upper end of the door 11, a roller (not shown) is provided. With such a configuration, when the outer frame 12 and the door 11 rise to the upper end and the roller presses against the upper end surface (not shown), the link 13 pushes the door 11 with the outer frame 12 as a fulcrum due to the pressing force, and the seal portion as shown in the drawing. 11b is pressed against the tip 1c of the heat insulating panel 1 of the main body, and the door 11 is closed. When the outer frame 12 is lowered, the pressure contact is released, the door 11 is pulled toward the outer frame 12 by the force of the spring, and the door 11 is lowered without the seal portion thereof being rubbed,
The processing chamber 2 is opened. In addition, in the automatic opening and closing door, since the door is opened and closed in this manner, it is structurally difficult to equip the inner surface with a resistance plate or the like.

With the above configuration, the present clean oven operates as follows. By operating the operation unit of the control unit 200, the door 11 is opened and closed by automatic or manual operation, and a work to be processed is put in and out of the shelf 7 in the processing chamber 2. When the work is put in and the door is closed to start the work process, the heater 3 is turned on and the fan 4 is operated.
After being heated, the air sucked into the fan 4
And is introduced from the air conditioning room 5 into the duct 2a,
After passing through the filter 6, it is sent into the post-processing chamber 2 after the dust has been removed and purified. In this case, since the filter has a large air resistance, a pressure difference is generated between the duct 2a and the processing chamber 2, and this pressure difference causes the air to flow into a uniform laminar flow from the duct to the processing chamber 2 as shown in the figure. Be blown out.

This air reaches the vicinity of the door 11 on the opposite side while maintaining a substantially parallel flow while contacting and applying heat to the work placed inside. Here, a part of the air directly enters the vent 10b, and the other part of the air
After hitting a, it enters the vent 10b or flows downward and enters the vent 8a. In particular, a large amount of air flowing on the lower cover plate 8 is introduced into the ventilation port 8a. The air that has entered the space 10a from the vent 10b is vented by the vent 10c and the opening 8b.
(FIG. 5), merges with the air entered through the vent 8a, passes through the vent 9a provided in the bottom plate 9, and
Is heated while passing through the portion of the heater 3,
It is sucked into the fan 4 again. Then, the air is sent out again from the fan 4 to form an air circulation system.

[0013] Due to such an air flow, there is no air drift or dead zone in the processing chamber, the temperature distribution in the chamber is improved, and a uniform air flow is achieved in the effective range where the workpiece is placed. In addition, uniform processing conditions are given to the work. As a result, the temperature distribution of the work is improved, and the yield for batch processing of many works is improved. Further, by providing the side plates on both side walls, direct contact with the heat-insulating wall hot air is cut off, so that there is also an effect that the influence of the outer wall temperature on the temperature near the indoor wall surface is prevented.

[0014] Further, and if the air in the central portion does not easily flow to the both side walls side spacing of the side walls is wide, for example, a flat plurality of workpieces when such is placed upright at intervals on the shelf 7 Although the air in the central part of the processing chamber hardly flows to the vents on both sides, since the cover plate 8 is also provided with the vent 8a ,
Such air is sucked into the vent 8a, and a uniform parallel flow
Can be further promoted. Although three vents are provided on both sides in this embodiment, the number and size of the vents are determined by the number and arrangement of shelves on which the work is placed, the dimensions of the processing chamber, the relationship with the lower vent, and the like. Is determined in consideration of the various conditions. For example, if necessary, it is also effective to make the upper ventilation port less resistant than the lower ventilation port.
Further, the ventilation holes may be provided continuously without being divided in the vertical direction. Further, when the space 10a has an appropriate width, the ventilation holes are provided on the surfaces parallel to both side walls as in the embodiment, or in place of the ventilation holes, the ventilation holes are parallel to the door surface at the end. A vent may be provided on the surface.

In the above embodiment, the case where the air-conditioning chamber 5 is provided below the processing chamber 2 has been described.
It may be provided at a place other than the illustration such as the upper part of the processing chamber or the end face side. Further, in this example, the case where the door 11 is lowered and opened is shown. However, the present invention can be applied to a case where the door is raised and opened or a clean oven that opens and closes in the left and right direction. . Further, the present invention can be effectively applied to a clean oven in which the door does not automatically open and close, for which it is not appropriate to equip the inner surface with a resistance plate.

As for the processing conditions of the work, the following operation or control may be performed. In other words, if the workpiece is painted, etc., applying high-speed air while the surface coating etc. is not dry will adversely affect the workpiece. Increase the air flow after drying. For that purpose, the rotation speed of the motor that drives the fan is made variable,
There are methods such as switching or continuous control, and adjusting the amount of wind bypass by providing a bypass system in the fan. In this case, the air volume adjustment may be performed by a timer, but if the automatic control is performed using a sensor for inspecting the work surface state such as light reflectance, gas generation, and odor, the processing result of the work can be further improved. Can be.

[0017]

[Effect of the Invention] As described above, according to the present invention, both sides are empty.
Near the other end face that forms the gap and is opposite to the gas blowing side
Conducting the suction side of the air means a partition member having a substantially entirely opened <br/> port to between the other two sides near the tip is near
By providing a partition member , almost one end surface
From the gas blown at almost right angles from
Maintain the partition member uniformly at the tip of both sides
Because it can be sucked into, even if there is no duct on the tip end surface, the gas flow in the processing chamber is made uniform,
Good processing conditions can be given to an object to be processed. or,
A space conduction duct with an additional opening including the center between both sides is provided, and the gas in the center of both sides is added.
Since the air can be sucked into the opening, the air on the other end
Parallel laminar flow of blown-out gas to improve body suction
Can be further promoted.

[Brief description of the drawings]

FIG. 1 is a perspective view of a clean oven according to an embodiment.

FIG. 2 is a side sectional view of the clean oven.

FIG. 3 is a view as viewed in the direction of arrows AA in FIG. 2;

FIG. 4 is a view taken in the direction of arrows BB in FIG. 2;

FIG. 5 is a perspective view showing an arrangement of vents of the clean oven.

FIG. 6 is a sectional view showing a door structure of the clean oven.

FIG. 7 is an explanatory view of a conventional clean oven.

FIG. 8 is an explanatory view of a conventional clean oven.

[Explanation of symbols]

1a Rear wall surface (one end surface) 1b Side wall surface (both sides) 2 Processing chamber 2a Duct 4 Fan (air supply means) 8 Cover plate (conduction duct) 8a Air port (additional opening) 10 Side plate (partition member) 10a Space Part 10b Vent (opening) 11a Inner surface (other end surface)

Claims (1)

(57) [Scope of request for utility model registration] 1. One end opposed to each other by air supply means
On both end faces consisting of a face and the other end face, on both side faces, and on both other side faces.
In an oven from the duct provided in the one end face of the formed processing chamber sends the gas which has been heated in the processing chamber from substantially the entire surface substantially perpendicular direction to said one end surface, covering the both side surfaces of the processing chamber A partition member that forms a space between the two sides and communicates with the suction side of the air supply means.
A is, between the other sides in the vicinity of the other end face side or
A partition member having an opening almost entirely, and a conducting duct for conducting the space on both sides.
The other end face provided on either side of the other side face.
Including the central portion between the two sides near the side
An oven , comprising: a conduction duct having an additional opening that opens into a room .