JPH06177006A - Projection aligner - Google Patents

Projection aligner

Info

Publication number
JPH06177006A
JPH06177006A JP4343539A JP34353992A JPH06177006A JP H06177006 A JPH06177006 A JP H06177006A JP 4343539 A JP4343539 A JP 4343539A JP 34353992 A JP34353992 A JP 34353992A JP H06177006 A JPH06177006 A JP H06177006A
Authority
JP
Japan
Prior art keywords
transmittance
light
pupil filter
adjusting film
projection lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4343539A
Other languages
Japanese (ja)
Other versions
JP3180133B2 (en
Inventor
Toshiyuki Horiuchi
敏行 堀内
Katsuyuki Harada
勝征 原田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP34353992A priority Critical patent/JP3180133B2/en
Publication of JPH06177006A publication Critical patent/JPH06177006A/en
Application granted granted Critical
Publication of JP3180133B2 publication Critical patent/JP3180133B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/7025—Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To prevent a pupil filter from scattering, peeling-off, etc., due to the deterioration of transmissivity adjusting film and protect a projection lens against adhering of fine scattering particles or peeled-off pieces by forming a pupil filter fitted on an aperture diaphragm of a projection lens by using two plane plates having light-transmissivity in a manner to hold it in-between. CONSTITUTION:A plane plate 22 made of glass with light-transmissivity is provided with a transmissivity adjusting film 23 and a light-shielding film 24 on the upper surface thereof, and further a plane plate 25 having different transmissivity is placed on the plate 22 to cover the films 23 and 24, thereby constituting a pupil filter 30. Then such a pupil filter 30 is fitted on the aperture diaphragm of projection lens in a projection aligner where a pattern on a master drawing board is projection-exposed and transferred on a board to be exposed by means of the projection lens. Thus, even if the transmissivity adjusting film is deteriorated due to accumulated exposure, its scattering, peeling-off, etc., can be prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、原図基板上の半導体集
積回路等の微細パターンを、半導体等の被露光基板上に
投影露光して転写する投影露光装置に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a projection exposure apparatus for projecting and transferring a fine pattern of a semiconductor integrated circuit or the like on an original substrate onto a substrate to be exposed such as a semiconductor.

【０００２】[0002]

【従来の技術】半導体集積回路等の微細パターンを、半
導体ウエハ等の被露光基板上に、安易、高速、低価格で
形成するため、短波長可視光ないし遠紫外線を用いる投
影露光法が用いられている。図５は、株式会社電気書院
発行「ＬＳＩ設計製作技術」２４８頁に記載された従来
の投影露光装置の光学系を示す。これを同図に基づいて
概略説明すると、水銀ランプ１から出た光は、楕円凹面
鏡２、コリメータレンズ３によって集光されて、単色化
のためのフィルタ４を通ってフライアイレンズ５に入
る。水銀ランプ１とコリメータレンズ３との間にはラン
プからの光を光源光軸と略直交する方向に変換すると共
に、熱線を裏側へ透過させる第１反射鏡６が配設されて
いる。フライアイレンズ５は、多くの小口径レンズの集
合体からなり、その各レンズから出る光が第２反射鏡７
によって反射され集光レンズ８によって集光されること
により、それぞれ原図基板であるレチクル９を照明し、
これにより照明の均一性を上げることができる。前記水
銀ランプ１が元々の光源（１次光源）であるのに対し、
フライアイレンズ５の射出側は、レチクル９を照明する
光の実質的な射出源となるため、２次光源と呼ばれる。
第２反射鏡７は、再度光線の向きを変えるためのもので
ある。レチクル９は、半導体集積回路等の微細パターン
の図柄が形成されてレチクル保持台１０上に設置されて
おり、集光レンズ系８を出た光により照明されると、前
記微細パターンは投影レンズ１１を通して被露光基板で
あるレジストを塗布したウエハ１２上に転写される。投
影レンズ１１は、各種収差を消すため多くの枚数のレン
ズを組合わせて作られているが、基本的にはレチクル９
側とウエハ１２側の２ブロックに分けられており、その
間に開口絞り１３が設置されている。レチクル９上の任
意の一点から出た光は、レチクル９側のレンズ群を透過
した後、略平行となって開口絞り１３を通過し、ウエハ
１２側のレンズ群に入る。その後、ウエハ１２側のレン
ズ群で集光され、ウエハ１２の表面上のレジスト位置で
一点に集光、結像される。ウエハ１２は、位置、および
投影レンズ１１に対する高さを調整、決定するための、
Ｘ移動ステージ１４、Ｙ移動ステージ１５、Ｚ移動ステ
ージ１６、回転ステージ１７上に設置されている。ウエ
ハ１２に転写されるパターンの解像性は、レチクル９上
に存在するパターンによる回折光が開口絞り１３に取り
込めるかどうかで決まり、最高解像度は、レチクル９上
のパターンから出る０次回折光と１次回折光とが、開口
絞り１３に取り込めるかどうかで概ね決まる。１次以上
の回折光が進む方向は、パターンの周期、パターンの細
かさによって決まり、細かいパターン程レチクル９の照
明光の進行方向に対して傾いた方向に出る。したがっ
て、レチクル９を垂直に照明した場合、細かいパターン
の時程投影レンズ１１の外側方向へ１次以上の回折光が
進むことになる。このため、開口絞り１３の開口が大き
い程細かいパターンからなる回折光まで取り込めること
になり、高解像となる。2. Description of the Related Art A projection exposure method using short-wavelength visible light or far-ultraviolet rays is used for forming a fine pattern of a semiconductor integrated circuit or the like on a substrate to be exposed such as a semiconductor wafer easily, at high speed and at low cost. ing. FIG. 5 shows an optical system of a conventional projection exposure apparatus described on page 248 of “LSI Design and Manufacturing Technology” published by Denki Shoin Co., Ltd. This will be roughly described with reference to FIG. 1. Light emitted from the mercury lamp 1 is condensed by the elliptic concave mirror 2 and the collimator lens 3, passes through the filter 4 for monochromaticity, and enters the fly-eye lens 5. A first reflecting mirror 6 is provided between the mercury lamp 1 and the collimator lens 3 to convert light from the lamp into a direction substantially orthogonal to the light source optical axis and to transmit heat rays to the back side. The fly-eye lens 5 is composed of an assembly of many small-diameter lenses, and the light emitted from each lens is the second reflecting mirror 7.
Is reflected by the condenser lens 8 and is condensed by the condenser lens 8 to illuminate the reticle 9 which is the original drawing substrate.
This can improve the uniformity of illumination. Whereas the mercury lamp 1 is the original light source (primary light source),
The emission side of the fly-eye lens 5 serves as a substantial emission source of light that illuminates the reticle 9, and is called a secondary light source.
The second reflecting mirror 7 is for changing the direction of the light ray again. The reticle 9 is provided on a reticle holding table 10 on which a pattern of a fine pattern such as a semiconductor integrated circuit is formed, and when illuminated by the light emitted from the condenser lens system 8, the fine pattern is projected onto the projection lens 11. Is transferred onto the wafer 12, which is a substrate to be exposed, coated with a resist. The projection lens 11 is made by combining a large number of lenses to eliminate various aberrations, but basically, the reticle 9 is used.
Side and the wafer 12 side are divided into two blocks, and an aperture stop 13 is installed between them. Light emitted from an arbitrary point on the reticle 9 passes through the lens group on the reticle 9 side, then becomes substantially parallel, passes through the aperture stop 13, and enters the lens group on the wafer 12 side. Then, the light is focused by the lens group on the wafer 12 side, and focused and imaged at one point at the resist position on the surface of the wafer 12. The wafer 12 is for adjusting and determining the position and the height with respect to the projection lens 11,
It is installed on the X moving stage 14, the Y moving stage 15, the Z moving stage 16, and the rotating stage 17. The resolution of the pattern transferred onto the wafer 12 is determined by whether or not the diffracted light due to the pattern existing on the reticle 9 can be taken into the aperture stop 13, and the highest resolution is 0 order diffracted light and 1 It is largely determined whether the second-order diffracted light can be taken into the aperture stop 13. The direction in which the first-order and higher-order diffracted light travels is determined by the cycle of the pattern and the fineness of the pattern. Therefore, when the reticle 9 is illuminated vertically, the diffracted light of the first order or more advances toward the outer side of the projection lens 11 when the pattern is fine. Therefore, the larger the aperture of the aperture stop 13, the more diffracted light having a fine pattern can be captured, resulting in high resolution.

【０００３】ところで、同一出願人によって既に出願さ
れた特願平３−９９８２２号、特願平３−１５７４０１
号等には、レチクルを斜めに照明して、レチクル上に存
在するパターンの０次回折光が、斜め照明光進行方向の
開口絞り外周付近を通るようにし、片側の１次回折光が
開口絞りの反対側の外周付近を通るようにすれば、レチ
クルを垂直に照明してレチクル上に存在するパターンの
両側の１次回折光が開口絞りを通るようにした場合に比
べて、入射光の方向に対して約２倍の角度で外側に広が
る１次回折光迄取り込めるため、非常に高解像になるこ
とが開示されている。また、このようにレチクルを斜め
に照明する方式をとると、０次回折光と片側の１次回折
光だけで転写像が形成されるため、２光束だけの干渉と
なり、従来の０次回折光と両側の１次回折光の合計３光
束の場合より、微細パターン転写時の焦点深度が大幅に
改善される利点も生じる。レチクルを斜めに照明するに
は、特願平５９−２１１２６９号に開示されているよう
に、フライアイレンズ５の射出側の中心部からの光をカ
ットして周辺部からの光で照明すればよい。すなわち、
円環状や多点状の２次光源により照明すればよい。しか
し、レチクル９を単に斜めに照明する場合、レチクル９
上に依存するパターンによる１次回折光は、片側分だけ
しか開口絞りに取り込めないのに対し、直進する０次回
折光が全て開口絞りを通過するため、１次回折光と０次
回折光とのバランスが崩れて０次回折光が多過ぎる状態
となり、レジスト位置にできる微細パターンの像のコン
トラストが低下してしまう。この欠点を補う目的で、特
願平３−１３５３１７号、特願平３−１５７４０１号等
には、斜め照明時に０次回折光の量を適切な量に調整す
るため、開口絞り１３の位置に、「開口部周辺の透過率
を調整した投影レンズ開口を有する」ようにした投影露
光装置および方法が開示されている。By the way, Japanese Patent Application Nos. 3-99822 and 3-157401 already filed by the same applicant.
For example, the reticle is obliquely illuminated so that the 0th-order diffracted light of the pattern existing on the reticle passes near the outer periphery of the aperture stop in the oblique illumination light traveling direction, and the 1st-order diffracted light on one side is opposite to the aperture stop. If the light passes through the outer periphery of the reticle, the reticle is illuminated vertically, and the first-order diffracted light on both sides of the pattern existing on the reticle passes through the aperture stop, compared to the direction of the incident light. It is disclosed that a very high resolution can be obtained because even the first-order diffracted light that spreads outward at an angle of about twice can be captured. In addition, when the method of illuminating the reticle obliquely is adopted as described above, a transfer image is formed only by the 0th-order diffracted light and the 1st-order diffracted light on one side. There is an advantage that the depth of focus at the time of transferring a fine pattern is significantly improved as compared with the case of a total of three light fluxes of the first-order diffracted light. In order to illuminate the reticle obliquely, as disclosed in Japanese Patent Application No. 59-212169, the light from the center of the fly-eye lens 5 on the exit side is cut off and the light from the periphery is illuminated. Good. That is,
Illumination may be performed by an annular or multipoint secondary light source. However, if the reticle 9 is simply illuminated at an angle, the reticle 9
The 1st-order diffracted light due to the pattern depending on the above can be taken into the aperture stop only for one side, whereas the 0-th order diffracted light that travels straight passes through the aperture stop. As a result, the 0th-order diffracted light becomes too much, and the contrast of the image of the fine pattern formed at the resist position decreases. For the purpose of compensating for this drawback, Japanese Patent Application Nos. 3-135317 and 3-157401, etc., adjust the amount of 0th-order diffracted light to an appropriate amount at the time of oblique illumination. Disclosed is a projection exposure apparatus and method having "a projection lens aperture whose transmittance is adjusted around the aperture".

【０００４】従来、上記の「透過率を調整した投影レン
ズ開口」である「瞳フィルタ」は、露光光線をよく透過
する平面板上に、所望の透過率を有する薄膜を付したも
のを使用していた。図６は、斜め照明と瞳フィルタとを
併用した、従来の投影露光光学系の例であり、図７は図
６に示したような投影露光装置において使用される従来
の瞳フィルタの断面模式図である。図５に示した従来の
一般的な投影露光光学系に対し、図６では斜め照明を得
るための円環状や多点状の２次光源射出開口２０と、単
なる開口絞り１３に替えて透過率を調整する瞳フィルタ
２１とを付け加えたものである。また、以上に示した図
５および図６においては、露光の１次光源を水銀ランプ
１としている。これに対し、「光技術コンタクト」Ｖｏ
ｌ．２８．Ｎｏ．３（１９９０）のＰ１７２〜Ｐ１７４
に開示されているように、エキシマレーザを１次側光源
としても、同様の露光ができる。２次光源を作るまでの
光源系が異なるだけで、２次光源入射口から後は、図
５、図６と同様である。透過率を調整する瞳フィルタ２
１は、波長４３６ｎｍの水銀ランプｇ線、波長３６５ｎ
ｍの水銀ランプｉ線、波長２４９ｎｍのＫｒＦエキシマ
レーザ光、波長１９３ｎｍのＡｒＦエキシマレーザ光、
等の短波長可視光ないし遠紫外光を露光光線とする場合
には、合成石英、溶融石英、合成蛍石、溶融蛍石等ガラ
ス材料からなる平面板２２の表面または裏面に、薄いク
ロム、酸化クロム、フッ化マグネシウム等の透過率調整
膜２３および開口を決定する遮光膜２４を形成して構成
されている。透過率調整膜２３を付ける開口内での位置
および形状は、照明２次光源の位置および形状と対応す
るようになされている。照明２次光源の射出側の像が瞳
フィルタ２１の位置にできるので、２次光源像の位置、
寸法、形状に略合わせて透過率調整膜２３を形成してあ
る。なお図７では透過率調整膜２３および遮光膜２４の
厚みは、平面板２２の厚さに対して誇張して描いてあ
る。Conventionally, the above-mentioned "pupil filter", which is the "projection lens aperture whose transmittance is adjusted", uses a flat plate on which a thin film having a desired transmittance is attached on a flat plate which transmits an exposure light beam well. Was there. FIG. 6 is an example of a conventional projection exposure optical system that uses both oblique illumination and a pupil filter, and FIG. 7 is a schematic sectional view of a conventional pupil filter used in the projection exposure apparatus as shown in FIG. Is. In contrast to the conventional general projection exposure optical system shown in FIG. 5, in FIG. 6, an annular or multipoint secondary light source exit aperture 20 for obtaining oblique illumination and a simple aperture stop 13 are used instead of the transmittance. And a pupil filter 21 for adjusting. Further, in FIGS. 5 and 6 described above, the primary light source for exposure is the mercury lamp 1. On the other hand, "optical technology contact" Vo
l. 28. No. 3 (1990) P172-P174
The same exposure can be performed by using an excimer laser as the primary side light source as disclosed in US Pat. The structure from the secondary light source entrance is the same as that shown in FIGS. 5 and 6 except that the light source system until the secondary light source is manufactured is different. Pupil filter 2 for adjusting the transmittance
1 is a mercury lamp g line with a wavelength of 436 nm, a wavelength of 365 n
Mercury lamp i line of m, KrF excimer laser light of wavelength 249 nm, ArF excimer laser light of wavelength 193 nm,
In the case of using short-wavelength visible light or far-ultraviolet light as the exposure light, thin chrome, oxidation on the front surface or the back surface of the flat plate 22 made of glass material such as synthetic quartz, fused quartz, synthetic fluorite, and fused fluorite. A transmittance adjusting film 23 made of chromium, magnesium fluoride or the like and a light shielding film 24 for determining the opening are formed. The position and shape in the opening to which the transmittance adjusting film 23 is attached correspond to the position and shape of the illumination secondary light source. Since the image on the exit side of the illumination secondary light source can be located at the position of the pupil filter 21, the position of the secondary light source image,
The transmittance adjusting film 23 is formed so as to substantially match the size and shape. In FIG. 7, the thicknesses of the transmittance adjusting film 23 and the light shielding film 24 are exaggerated with respect to the thickness of the plane plate 22.

【０００５】[0005]

【発明が解決しようとする課題】しかしながら、上記し
た従来の瞳フィルタ２１にあっては、瞳フィルタ２１の
入った投影レンズ１１を長く使用すると、露光光線の長
時間照射によって、瞳フィルタ２１の透過率調整膜２３
が劣化し、飛散したり、剥離したりするという問題があ
った。また、１次光源としてエキシマレーザ光を使用す
る場合は、光がパルス的に発生し、断続的に繰り返して
強いエネルギの光が瞳フィルタ２１に照明されるため、
特に劣化し易い。透過率調整膜２３が劣化して飛散した
り、剥離したりすると、透過率調整膜２３の付いた部分
の全域または一部の領域で、透過率が変化して適正に調
整された透過率でなくなる。この結果、瞳フィルタ２１
は本来の機能を発揮しなくなり、解像度の劣化、適正露
光量の変化、パターン形状の劣化、露光強度むら等を生
じる。また、透過率調整膜２３が飛散したり、剥離した
りすると、瞳フィルタ２１の上下の投影レンズ部材に、
飛散したり、剥離した膜材料の微細な飛散粒子や剥離片
が付着する。微細な飛散粒子が投影レンズ部材に付く
と、投影レンズの透過率の低下を生じ、また剥離片が投
影レンズ部材に付くと、局部的に光路長が変わって解像
度の悪い部分を生じたり、露光強度むらを生じたりす
る。さらに、最悪の場合には、これらの付着物は露光時
に転写欠陥を発生する原因となる。したがって、透過率
調整膜２３が劣化して飛散したり、剥離したりしないよ
うにすることが必要である。投影レンズ部材に一旦この
ような飛散粒子や剥離片が付着した場合、投影レンズを
分解してオーバーホールしない限り除去することができ
ない。しかし、投影レンズの各レンズ部材には、反射防
止コーティングを施してあるので、飛散粒子や剥離片の
みを除去することはきわめて困難であり、一旦透過率調
整膜２３の飛散粒子や剥離片が付くと、投影レンズ各レ
ンズ部材のコーティング迄やり直したり、最悪、投影レ
ンズ全体の寿命にもなりかねない。However, in the above-mentioned conventional pupil filter 21, when the projection lens 11 having the pupil filter 21 is used for a long time, the exposure light beam is transmitted for a long time by the irradiation of the exposure light beam. Rate adjustment film 23
Was deteriorated, and there was a problem of scattering or peeling. In addition, when excimer laser light is used as the primary light source, light is generated in a pulsed manner, and light of high energy is radiated intermittently and repeatedly to the pupil filter 21,
Especially easy to deteriorate. When the transmittance adjusting film 23 deteriorates and scatters or peels off, the transmittance changes in the entire area or a part of the area where the transmittance adjusting film 23 is attached, and the transmittance is appropriately adjusted. Disappear. As a result, the pupil filter 21
Does not exert its original function, resulting in deterioration of resolution, change of appropriate exposure amount, deterioration of pattern shape, unevenness of exposure intensity, and the like. Further, if the transmittance adjusting film 23 scatters or peels off, the projection lens members above and below the pupil filter 21 are
Fine scattered particles of the film material that has been scattered or peeled off, or peeled pieces adhere. If minute scattered particles attach to the projection lens member, the transmittance of the projection lens decreases, and if a peeling piece attaches to the projection lens member, the optical path length changes locally to cause poor resolution or exposure. It causes uneven strength. Furthermore, in the worst case, these deposits cause transfer defects during exposure. Therefore, it is necessary to prevent the transmittance adjusting film 23 from being deteriorated and scattered or peeled off. Once such scattered particles or peeled pieces adhere to the projection lens member, they cannot be removed unless the projection lens is disassembled and overhauled. However, since each lens member of the projection lens is coated with an antireflection coating, it is extremely difficult to remove only the scattered particles and the peeled pieces, and once the scattered particles and the peeled pieces of the transmittance adjusting film 23 are attached. Then, the coating of each lens member of the projection lens may have to be redone, or at the worst, the life of the entire projection lens may be extended.

【０００６】したがって、本発明は上記したような従来
の問題点に鑑みてなされたもので、その目的とするとこ
ろは、透過率調整膜の劣化に伴う飛散、剥離等を防止
し、投影レンズに微細な飛散粒子や剥離片が付着しない
ようにした投影露光装置を提供することにある。Therefore, the present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to prevent scattering, peeling and the like due to deterioration of the transmittance adjusting film, and to provide a projection lens. Another object of the present invention is to provide a projection exposure apparatus in which fine scattered particles and peeling pieces are prevented from adhering.

【０００７】[0007]

【課題を解決するための手段】上記目的を達成するため
本発明は、原図基板上のパターンを投影レンズを介して
被露光基板上に投影露光、転写する投影露光装置におい
て、前記投影レンズの開口絞り位置に、前記原図基板を
照明する２次光源の形状に対応させた瞳フィルタを配置
してなり、この瞳フィルタは任意の透過率分布を有する
透過率調整膜を透光性を有する２枚の平面板で挟んで形
成されているものである。In order to achieve the above object, the present invention provides a projection exposure apparatus for projecting and transferring a pattern on an original drawing substrate onto a substrate to be exposed through a projection lens, and the opening of the projection lens. A pupil filter corresponding to the shape of the secondary light source that illuminates the original drawing substrate is arranged at the diaphragm position, and the pupil filter has two transmissivity adjusting films having an arbitrary transmissivity distribution and having a light transmitting property. It is formed by sandwiching between the flat plates.

【０００８】[0008]

【作用】透光性を有する２枚の平面板は透過率調整膜を
挾み込んでいるので、たとえ調整膜が劣化しても、飛散
したり、剥離することがない。Since the two transparent flat plates sandwich the transmittance adjusting film, they do not scatter or peel even if the adjusting film deteriorates.

【０００９】[0009]

【実施例】以下、本発明を図面に示す実施例に基づいて
詳細に説明する。図１は瞳フィルタの断面模式図であ
る。なお、図中図５〜図７に示した従来装置の構成部材
と同一のものに対しては同一符号をもって示す。同図に
おいて、ガラス材料からなり透光性を有する平面板２２
の上面に透過率調整膜２３と遮光膜２４を形成し、更に
平面板２２の上に別の透光性を有する平面板２５を載置
して透過率調整膜２３および遮光膜２４を覆い、これら
により瞳フィルタ３０を構成したものである。すなわ
ち、本実施例は２枚の平面板２２，２５によって透過率
調整膜２３と遮光膜２４を挾み込み、サンドウイッチ構
造としたものである。平面板２５としては、平面板２２
と同様、合成石英、溶融石英、合成蛍石、溶融蛍石等の
ガラス材料からなる。そして、このような瞳フィルタ３
０は図６に示した投影レンズ１１の開口絞り位置に取付
けられる。その他の構成は図６に示した従来の投影露光
装置と同様である。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the embodiments shown in the drawings. FIG. 1 is a schematic sectional view of a pupil filter. In the figure, the same components as those of the conventional device shown in FIGS. 5 to 7 are designated by the same reference numerals. In the figure, a plane plate 22 made of a glass material and having translucency
A transmittance adjusting film 23 and a light shielding film 24 are formed on the upper surface of, and another flat plate 25 having translucency is placed on the flat plate 22 to cover the transmittance adjusting film 23 and the light shielding film 24, The pupil filter 30 is configured by these. That is, the present embodiment has a sandwich structure in which the transmittance adjusting film 23 and the light shielding film 24 are sandwiched by the two flat plates 22 and 25. As the flat plate 25, the flat plate 22
Similar to the above, it is made of a glass material such as synthetic quartz, fused quartz, synthetic fluorite, and fused fluorite. And such a pupil filter 3
0 is attached to the aperture stop position of the projection lens 11 shown in FIG. Other configurations are the same as those of the conventional projection exposure apparatus shown in FIG.

【００１０】図２（ａ），（ｂ）はそれぞれ瞳フィルタ
の他の実施例を示す断面模式図である。（ａ）図は図１
に示した瞳フィルタ３０を保持具３４と蓋３５とで保持
し、投影レンズの開口絞り位置に設置するようにしたも
のである。保持具３４と蓋３５との固定は、ねじ止め、
はめ込み等任意である。（ｂ）図は平面板２５と蓋３５
との間にパッキン等の緩衝部材３６を介在させ、保持部
材材３４と蓋３５で瞳フィルタ３０を押さえる際、平面
板２２，２５が割れたり歪んだりしないようにしたもの
である。但し、この場合は透過率調整膜２３と、保持具
３４または蓋３５の投影レンズへの取付面との距離が変
化しない位置に緩衝部材３６を挾み、透過率調整膜２３
が所望の投影レンズ開口絞り位置に来るようにする。例
えば、図２（ｂ）のように保持具３４を投影レンズの基
準となる面に合わせて固定するとし、所定の厚さの平面
板２２上に透過率調整膜２３を付けて、保持具３４の上
に置き、平面板２５をその上に重ねた後、緩衝部材３６
を置いて蓋３５で押さえて固定する。このようにすれ
ば、投影レンズ開口絞り位置への固定の基準となる保持
具３４と、透過率調整膜２３との相対関係は緩衝部材３
６の有無に関係ない。したがって、透過率調整膜２３を
正確に所望の投影レンズ開口絞り位置に設定することが
できる。保持具３４の蓋３５を投影レンズの基準となる
面に合わせて固定する場合は、蓋３５と透過率調整膜２
３とが所望の相対位置関係になるようにする。2A and 2B are schematic sectional views showing other embodiments of the pupil filter. (A) Figure is Figure 1
The pupil filter 30 shown in (1) is held by a holder 34 and a lid 35, and is installed at the aperture stop position of the projection lens. The holder 34 and the lid 35 are fixed with screws,
It is arbitrary such as fitting. (B) The figure shows the flat plate 25 and the lid 35.
A cushioning member 36 such as packing is interposed between and so that the flat plates 22 and 25 are not cracked or distorted when the pupil filter 30 is pressed by the holding member material 34 and the lid 35. However, in this case, the buffer member 36 is sandwiched at a position where the distance between the transmittance adjusting film 23 and the mounting surface of the holder 34 or the lid 35 on the projection lens does not change, and the transmittance adjusting film 23
Is at the desired projection lens aperture stop position. For example, as shown in FIG. 2B, the holder 34 is fixed to the reference surface of the projection lens, the transmittance adjusting film 23 is attached to the flat plate 22 having a predetermined thickness, and the holder 34 is fixed. The flat plate 25 on top of it, and then the cushioning member 36
Then, the lid 35 is pressed and fixed by the lid 35. By doing so, the relative relationship between the holder 34, which serves as a reference for fixing the aperture stop position of the projection lens, and the transmittance adjusting film 23 is set to the buffer member 3.
Regardless of the presence or absence of 6. Therefore, the transmittance adjusting film 23 can be accurately set at a desired projection lens aperture stop position. When the lid 35 of the holder 34 is fixed according to the reference surface of the projection lens, the lid 35 and the transmittance adjusting film 2
3 and 3 have a desired relative positional relationship.

【００１１】図３はさらに瞳フィルタの他の実施例を示
す断面模式図である。この実施例は平面板２２と２５の
露光光線が通らない周辺部を接着剤４０によって接着固
定したものである。露光光線が通る部分に接着剤を置け
ば、接着剤の厚さによって光路長が変わり、収差を発生
する。また、接着剤４０は、露光光線による劣化が早
く、透過率の低下等を引き起こす。したがって、接着剤
４０の塗布むらは、露光むらとなる。このため、平面板
２２と２５とを露光光線が通らない周辺部で接着するこ
とが望ましい。接着は、接着剤４０の厚さによって平面
板２２，２５との間に隙間ができないように行う。図３
のごとく、平面板２５の周辺部を薄くしておき、平面板
２２の最突出面と平面板２５とをぴったり合わせて接着
する時、接着剤４０が平面板２５の周辺部が薄いことに
よって形成される平面板２２と２５との隙間に広がるよ
うにする。図３では、接着剤４０を入れるための隙間を
平面板２５の周辺部に形成した例を示したが、平面板２
２の周辺部あるいは平面板２２、２５双方の周辺部を接
着剤用に薄く形成してもよい。また、平面板２２および
／または平面板２５の周辺部の露光光線が通らない部分
の任意位置に、任意の大きさ、任意の深さ、任意の数の
凹みまたは段差を設けてもよい。FIG. 3 is a schematic sectional view showing another embodiment of the pupil filter. In this embodiment, the peripheral portions of the flat plates 22 and 25 through which the exposure light beam does not pass are adhered and fixed by an adhesive 40. If an adhesive is placed on the portion through which the exposure light beam passes, the optical path length changes depending on the thickness of the adhesive, causing aberration. Further, the adhesive 40 deteriorates rapidly due to exposure light rays, and causes a decrease in transmittance. Therefore, uneven application of the adhesive 40 results in uneven exposure. For this reason, it is desirable to bond the flat plates 22 and 25 to each other at the peripheral portion where the exposure light beam does not pass. The bonding is performed so that there is no gap between the flat plates 22 and 25 due to the thickness of the adhesive 40. Figure 3
As described above, when the peripheral portion of the plane plate 25 is thinned and the most protruding surface of the plane plate 22 and the plane plate 25 are closely aligned and bonded, the adhesive 40 is formed by the peripheral portion of the plane plate 25 being thin. It spreads in the gap between the flat plates 22 and 25. Although FIG. 3 shows an example in which a gap for inserting the adhesive 40 is formed in the peripheral portion of the flat plate 25, the flat plate 2
The peripheral portion of 2 or the peripheral portions of both the flat plates 22 and 25 may be thinly formed for the adhesive. Further, an arbitrary size, an arbitrary depth, an arbitrary number of depressions or steps may be provided at an arbitrary position in the peripheral portion of the plane plate 22 and / or the plane plate 25 where the exposure light ray does not pass.

【００１２】図１〜図３において、透過率調整膜２３お
よび遮光膜２４とが同じ材料の場合、遮光膜２４の方が
透過率調整膜２３より厚いので、遮光膜２４の面が平面
板２５に接している。透過率調整膜２３と遮光膜２４と
の材料が異なり、透過率調整膜２３が遮光膜２４より厚
い場合は、透過率調整膜２３の面が平面板２５に接す
る。また、図には描いていないが、瞳フィルタの開口内
の全ての部分を通る露光光線の位相が透過率調整膜２３
の部分を通る露光光線の位相変化と等しい量変化するよ
うに、瞳フィルタの透過部に高透過率の位相調整材料を
付けてもよい。その場合には高透過率の位相調整材料を
付けてある透過部分、透過率調整膜２３の部分、遮光膜
２４の部分のうち、最も厚い部分の面が平面板２５に接
する。1 to 3, when the transmittance adjusting film 23 and the light shielding film 24 are made of the same material, the light shielding film 24 is thicker than the transmittance adjusting film 23, and thus the surface of the light shielding film 24 is a flat plate 25. Touches. When the materials of the transmittance adjusting film 23 and the light shielding film 24 are different and the transmittance adjusting film 23 is thicker than the light shielding film 24, the surface of the transmittance adjusting film 23 contacts the flat plate 25. Although not shown in the drawing, the phase of the exposure light beam that passes through all the portions inside the aperture of the pupil filter is the transmittance adjustment film 23.
A phase adjusting material having a high transmittance may be attached to the transmissive portion of the pupil filter so that the transmissive portion of the pupil filter changes by an amount equal to the change in the phase of the exposure light beam passing through the area. In that case, the surface of the thickest portion of the transparent portion, the portion of the transmittance adjusting film 23, and the portion of the light shielding film 24 to which the phase adjusting material having a high transmittance is attached is in contact with the flat plate 25.

【００１３】図４（ａ）〜（ｉ）は透過率調整膜の分布
形状の各種の例を示す図である。（ａ）図は開口の中に
円環状の透過率調整膜を設けた例、（ｂ）図は開口の中
に多点状の透過率調整膜を設けた例、（ｃ）図は開口の
中に透過率Ｔ1 ，Ｔ2 の異なる透過率調整膜を同心円状
に設けた例、（ｄ）図は開口の中に多点状の透過率調整
膜を設け、さらにその外側にも透過率調整膜を設けた
例、（ｅ）図も開口の中に多点状の透過率調整膜を設
け、さらにその外側にも透過率調整膜を設けた例、
（ｆ）図は（ｄ）の中心部にも透過率Ｔ3 を有する透過
率調整膜を設けた例、（ｇ）図は（ｅ）の中心部にも透
過率Ｔ3 を有する透過率調整膜を設けた例、（ｈ）図は
（ｆ）の中心部にも透過率Ｔ3 を有する透過率調整膜を
設けた例、（ｉ）図は図に示すように透過率が任意に連
続的に変化するようにした透過率調整膜を設けた例であ
る。なお、図中、遮光膜の付いている部分を黒色、透過
率調整膜２３の付いている部分、すなわち、意図的に透
過率を低下させている部分をハッチングまたはクロスハ
ッチングで示した。透過率調整膜２３の形状、分布は、
フライアイレンズ射出口の形状、すなわち２次光源の形
状に合わせて決める。フライアイレンズ射出口が円環状
の場合には、（ａ）図の円環状の透過率調整部は、フラ
イアイレンズ射出口の円環状の像の大きさに大略合わせ
る。また、（ｃ）、（ｆ）図の場合には、透過率Ｔ1 の
部分の形状をフライアイレンズ射出口の多点状の像の大
きさに大略または完全に合わせる。フライアイレンズ射
出口の形状が多点状の場合に、開口絞り位置にできる多
点状の像を包絡するような円環状の透過率調整膜２３を
持つ（ａ）、（ｃ）、（ｆ）図のような瞳フィルタを用
いてもよい。透過率調整膜２３の透過率は任意であり、
特別の場合として、Ｔ1 ＝Ｔ2 、Ｔ2 ＝Ｔ3 、Ｔ1 ＝Ｔ
3 、Ｔ1 ＝Ｔ2 ＝Ｔ3 等の条件の瞳フィルタも適用す
ることができる。FIGS. 4A to 4I are views showing various examples of distribution shapes of the transmittance adjusting film. (A) is an example in which an annular transmittance adjusting film is provided in the opening, (b) is an example in which a multi-point transmittance adjusting film is provided in the opening, and (c) is an example of the opening. An example in which transmittance adjusting films having different transmittances T 1 and T 2 are concentrically provided therein, (d) is a multipoint transmittance adjusting film provided in the opening, and the transmittance is further provided outside thereof. An example in which an adjusting film is provided, (e) also shows an example in which a multi-point transmittance adjusting film is provided in the opening, and a transmittance adjusting film is provided outside thereof.
(F) drawing the example in which a transmittance adjustment film also has the transmittance T 3 in the center of (d), (g) drawing transmittance adjusting having transmittance T 3 in the center of (e) An example in which a film is provided, (h) is an example in which a transmittance adjusting film having a transmittance T 3 is provided also in the central part of (f), and (i) is a continuous transmittance as shown in the figure. This is an example in which a transmittance adjusting film that is changed in a variable manner is provided. In the figure, the portion with the light shielding film is shown in black, and the portion with the transmittance adjusting film 23, that is, the portion in which the transmittance is intentionally lowered is shown by hatching or cross hatching. The shape and distribution of the transmittance adjusting film 23 are
It is determined according to the shape of the fly-eye lens exit, that is, the shape of the secondary light source. In the case where the fly-eye lens exit is annular, the annular transmittance adjusting section in FIG. 7A is approximately matched to the size of the annular image of the fly-eye lens exit. Further, in the case of FIGS. 7C and 7F, the shape of the portion having the transmittance T 1 is roughly or completely adjusted to the size of the multipoint image at the exit of the fly-eye lens. When the fly-eye lens exit has a multipoint shape, it has an annular transmittance adjusting film 23 that envelops a multipoint image formed at the aperture stop position (a), (c), (f). ) A pupil filter as shown may be used. The transmittance of the transmittance adjusting film 23 is arbitrary,
As a special case, T 1 = T 2 , T 2 = T 3 , T 1 = T
It is also possible to apply a pupil filter having conditions such as 3 , T 1 = T 2 = T 3 .

【００１４】ところで、透過率調整膜２３と開口の範囲
を決定する遮光膜２４は、必ずしも平面板２２に付けな
くてもよく、平面板２２または平面板２５の互いに接触
し合う何れかの面に付ければよい。さらに、透過率調整
膜２３と遮光膜２４を平面板２２または２５に分割して
付けてもよい。以上の（ｃ）〜（ｈ）図のように、透過
率が異なる透過率調整膜２３を有する瞳フィルタ３０に
おいては、１枚の平面板上に２つ以上の透過率が異なる
透過率調整膜２３を付けることは、容易にはできない。
例えば、（ｅ）の場合に多点状の透過率Ｔ1 の部分を付
けた後、透過率Ｔ1 の部分を保護してその周囲に透過率
Ｔ2 の部分を付けることはかなり困難である。By the way, the transmittance adjusting film 23 and the light-shielding film 24 for determining the range of the opening do not necessarily have to be attached to the flat plate 22, and may be provided on either of the flat plate 22 and the flat plate 25 which are in contact with each other. Just attach it. Further, the transmittance adjusting film 23 and the light shielding film 24 may be attached separately to the plane plate 22 or 25. As shown in (c) to (h) above, in the pupil filter 30 having the transmittance adjusting films 23 having different transmittances, two or more transmittance adjusting films having different transmittances are provided on one plane plate. It is not easy to attach 23.
For example, in the case of (e), it is quite difficult to attach a multipoint transmittance T 1 portion, and then protect the transmission T 1 portion and attach a transmittance T 2 portion around it. .

【００１５】かかる２つ以上の透過率が異なる透過率調
整膜２３を有する瞳フィルタが入用の場合に、本発明の
図１〜図３に示した２枚の平面板２２，２５を用いる瞳
フィルタを用いると、透過率調整膜２３の付け方が従来
よりかなり容易になる。例えば、上記の（ｅ）の場合、
先ず透過率Ｔ1 、透過率Ｔ2 の部分のうち、透過率の高
い方、例えば透過率Ｔ2 の透過率調整膜を平面板２２の
最終的に透過率Ｔ1 、透過率Ｔ2 となる部分の全域に付
ける。次に、透過率（Ｔ1 ／Ｔ2 ）の透過率調整膜を平
面板２５の最終的に透過率Ｔ1 となる部分に付ける。平
面板２２と平面板２５の透過率調整膜が付いて面同士を
内側にして密着させ、瞳フィルタとすれば、平面板２２
に透過率Ｔ2 の透過率調整膜が付き、平面板２５に透過
率（Ｔ1 ／Ｔ2 ）の透過率調整膜が付いて互いに重なる
部分は、透過率が、Ｔ2 ×（Ｔ1 ／Ｔ2 ）＝Ｔ1 とな
る。また、平面板２２に最初に透過率Ｔ2 の透過率調整
膜を付けた上記以外の部分の透過率がＴ2 となる。この
ように、透過率が異なる透過率調整膜は、平面板２２、
２５に膜付けを振り分けて形成することにより、容易に
製作できるようになる。When the pupil filter having the two or more transmittance adjusting films 23 having different transmittances is required, the pupil using the two plane plates 22 and 25 shown in FIGS. 1 to 3 of the present invention is used. When a filter is used, the method of attaching the transmittance adjusting film 23 becomes much easier than in the past. For example, in the case of (e) above,
First, of the portions having the transmittance T 1 and the transmittance T 2 , the one having the higher transmittance, for example, the transmittance adjusting film having the transmittance T 2 is finally the transmittance T 1 and the transmittance T 2 of the flat plate 22. Attach to the whole area. Next, a transmittance adjusting film having a transmittance (T 1 / T 2 ) is attached to a portion of the flat plate 25 which finally becomes the transmittance T 1 . If a flat plate 22 and a flat plate 25 are provided with a transmittance adjusting film so that the surfaces are in contact with each other so that they are in close contact with each other to form a pupil filter, the flat plate 22
Is provided with a transmittance adjusting film having a transmittance of T 2 , and the flat plate 25 is provided with a transmittance adjusting film having a transmittance of (T 1 / T 2 ), and the overlapped portions have a transmittance of T 2 × (T 1 / T 2 ) = T 1 . Further, the first transmittance of the portions other than the carrying thereon an transmittance adjusting film transmittance T 2 is T 2 in the plane plate 22. As described above, the transmittance adjusting films having different transmittances are formed by the flat plate 22,
By forming the film attachments on 25, it becomes possible to easily manufacture.

【００１６】図１〜図４の全ての場合において、平面板
２２，２５は露光光線に対して透光性を有するガラス材
料であればよく、任意である。また、透過率調整膜２３
は露光光線に対して所定の透過率を付与できる材料であ
れば任意であり、例えば、クロムの薄膜、酸化クロムの
薄膜、フッ化マグネシウムと硫化亜鉛の多層薄膜等とす
る。遮光膜２４も任意の材料でよいことは言うまでもな
い。In all the cases of FIGS. 1 to 4, the flat plates 22 and 25 may be made of any glass material having a light-transmitting property with respect to exposure light rays, and are optional. In addition, the transmittance adjusting film 23
Is any material as long as it can impart a predetermined transmittance to the exposure light beam, and is, for example, a thin film of chromium, a thin film of chromium oxide, a multilayer thin film of magnesium fluoride and zinc sulfide, or the like. It goes without saying that the light shielding film 24 may be made of any material.

【００１７】なお、平面板２２，２５の外形形状は、図
４では円形としたが、必ずしも円形である必要はなく、
正方形、長方形等任意の形状とすることができ、必要に
応じて両平面板の形状が異なってもよい。また、上記の
説明では、瞳フィルタ３０の透過率調整膜２３と開口の
範囲を決定する遮光膜２４を、正確に開口絞りの位置に
置くとしていたが、透過率調整膜２３の境界の段差が露
光光線の方向を変える等の悪影響を生じないように、透
過率調整膜２３の投影レンズ光軸方向の位置を２次光源
の結像位置から少しずらし、透過率調整膜２３の境界が
２次光源に対してぼけるようにした場合でも、本発明は
有効である。Although the outer shape of the flat plates 22 and 25 is circular in FIG. 4, it need not be circular.
The shape may be any shape such as a square or a rectangle, and the shapes of the two flat plates may be different as required. Further, in the above description, the transmittance adjusting film 23 of the pupil filter 30 and the light shielding film 24 that determines the range of the opening are placed at the position of the aperture stop accurately. The position of the transmittance adjusting film 23 in the optical axis direction of the projection lens is slightly shifted from the image forming position of the secondary light source so that the adverse effect such as changing the direction of the exposure light beam does not occur. The present invention is effective even when the light source is blurred.

【００１８】[0018]

【発明の効果】以上説明したように本発明に係る投影露
光装置によれば、原図基板を斜め入射照明して、かつ投
影レンズ開口絞り位置に透過率を調整した瞳フィルタを
有する投影露光装置において、透過率調整膜を２枚のガ
ラス材料からなる透光性の平面板で挟み込んでサンドウ
イッチ構造とした瞳フィルタを用いるように構成したの
で、露光の累計により透過率調整膜がたとえ劣化して
も、飛散したり、剥離したりするのを防止することがで
きる。したがって、原図基板を斜め入射照明し、投影露
光装置の投影レンズ開口絞り位置に瞳フィルタを置く、
高解像、大焦点深度の露光を連続して長時間行っても、
透過率調整膜が飛散した微粉末や剥離片が投影レンズ内
のレンズ部材に付着することがなくなり、局部的に光路
長が変わって解像度の悪い部分を生じたり、露光強度む
らを生じたりすることがない。また、投影レンズの透過
率の低下も生じ難くなる。さらに、投影レンズへの付着
物が原因の露光転写欠陥の発生も防止できる。さらに、
瞳フィルタが万一劣化して交換する場合にも、瞳フィル
タの透過率調整膜が投影レンズ内のレンズ部材に転移す
ることがなく、容易に瞳フィルタを交換できる。本発明
は、水銀ランプを光源とする投影露光装置のほか、エキ
シマレーザ等の任意の光源を露光光源とする投影露光装
置に適用可能である。エキシマレーザを光源とする場
合、パルス的に露光エネルギが印加されるため、瞳フィ
ルタには、一瞬に大エネルギが加わる動作が繰り返さ
れ、瞳フィルタ劣化が、水銀ランプを光源とする投影露
光装置の場合より早い。このため、本発明が特に有効で
ある。As described above, according to the projection exposure apparatus of the present invention, the original exposure substrate is obliquely illuminated and the projection exposure apparatus has the pupil filter having the transmittance adjusted at the projection lens aperture stop position. Since the transmittance adjusting film is sandwiched between two light-transmitting flat plates made of glass material and a sandwich-type pupil filter is used, the transmittance adjusting film is deteriorated due to cumulative exposure. Also, it is possible to prevent scattering and peeling. Therefore, the original drawing substrate is obliquely illuminated and the pupil filter is placed at the projection lens aperture stop position of the projection exposure apparatus.
Even if you perform high resolution and large depth of focus exposure continuously for a long time,
The fine particles and peeled pieces from which the transmittance adjusting film is scattered do not adhere to the lens member in the projection lens, and the optical path length is locally changed to cause poor resolution or uneven exposure intensity. There is no. In addition, the transmittance of the projection lens is less likely to decrease. Further, it is possible to prevent the occurrence of an exposure transfer defect caused by a deposit on the projection lens. further,
Even when the pupil filter is deteriorated and is replaced, the transmittance adjusting film of the pupil filter is not transferred to the lens member in the projection lens, and the pupil filter can be easily replaced. INDUSTRIAL APPLICABILITY The present invention is applicable not only to a projection exposure apparatus that uses a mercury lamp as a light source, but also to a projection exposure apparatus that uses an arbitrary light source such as an excimer laser as an exposure light source. When the excimer laser is used as the light source, since the exposure energy is applied in a pulsed manner, the operation in which a large amount of energy is instantaneously applied to the pupil filter is repeated, and the deterioration of the pupil filter is caused in the projection exposure apparatus using the mercury lamp as the light source. Faster than if. Therefore, the present invention is particularly effective.

【図面の簡単な説明】[Brief description of drawings]

【図１】瞳フィルタの断面模式図である。FIG. 1 is a schematic sectional view of a pupil filter.

【図２】（ａ），（ｂ）はそれぞれ瞳フィルタの他の実
施例を示す断面模式図である。2A and 2B are schematic sectional views showing other embodiments of the pupil filter.

【図３】さらに瞳フィルタの他の実施例を示す断面模式
図である。FIG. 3 is a schematic sectional view showing another embodiment of the pupil filter.

【図４】（ａ）〜（ｉ）は透過率調整膜の分布形状の各
種の例を示す図である。4A to 4I are views showing various examples of distribution shapes of a transmittance adjusting film.

【図５】従来の一般的な投影露光装置の光学系を示す図
である。FIG. 5 is a diagram showing an optical system of a conventional general projection exposure apparatus.

【図６】斜め照明と瞳フィルタとを併用した従来装置の
光学系を示す図である。FIG. 6 is a diagram showing an optical system of a conventional device that uses oblique illumination and a pupil filter together.

【図７】瞳フィルタの従来例を示す断面模式図である。FIG. 7 is a schematic cross-sectional view showing a conventional example of a pupil filter.

【符号の説明】[Explanation of symbols]

１ 水銀ランプ ９ レチクル １１ 投影レンズ １２ ウエハ １３ 開口絞り ２２ 平面板 ２３ 透過率調整膜 ２４ 遮光膜 ２５ 平面板 ３０ 瞳フィルタ 1 Mercury Lamp 9 Reticle 11 Projection Lens 12 Wafer 13 Aperture Stop 22 Plane Plate 23 Transmittance Adjustment Film 24 Light-Shielding Film 25 Plane Plate 30 Pupil Filter

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｇ０３Ｆ 7/20 ５２１ 9122−2Ｈ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location G03F 7/20 521 9122-2H

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】 原図基板上のパターンを投影レンズを介
して被露光基板上に投影露光、転写する投影露光装置に
おいて、前記投影レンズの開口絞り位置に、前記原図基
板を照明する２次光源の形状に対応させた瞳フィルタを
配置してなり、この瞳フィルタは任意の透過率分布を有
する透過率調整膜を透光性を有する２枚の平面板で挟ん
で形成されていることを特徴とする投影露光装置。1. A projection exposure apparatus for projecting and transferring a pattern on an original drawing substrate onto an exposed substrate via a projection lens, wherein a secondary light source for illuminating the original drawing substrate is located at an aperture stop position of the projection lens. A pupil filter corresponding to the shape is arranged, and the pupil filter is formed by sandwiching a transmittance adjusting film having an arbitrary transmittance distribution between two transparent flat plates. Projection exposure system.
JP34353992A 1992-12-01 1992-12-01 Projection exposure equipment Expired - Fee Related JP3180133B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34353992A JP3180133B2 (en) 1992-12-01 1992-12-01 Projection exposure equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34353992A JP3180133B2 (en) 1992-12-01 1992-12-01 Projection exposure equipment

Publications (2)

Publication Number Publication Date
JPH06177006A true JPH06177006A (en) 1994-06-24
JP3180133B2 JP3180133B2 (en) 2001-06-25

Family

ID=18362306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34353992A Expired - Fee Related JP3180133B2 (en) 1992-12-01 1992-12-01 Projection exposure equipment

Country Status (1)

Country Link
JP (1) JP3180133B2 (en)

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