JPH06175119A - Method for removing film from edge of lcd color filter substrate and device thereof - Google Patents

Abstract

PURPOSE:To provide the method for removing films from edges of LCD color filters and device therefor so that a thick film on an edge part of a substrate can be removed without giving inconvenience to the film to be left or without causing dust. CONSTITUTION:A film 22 formed on the surface of a color filter substrate 21 by coating is dried. Then a solvent is dropped from a nozzle 13a of a solvent discharging tube 13 to the film 22 on the edge of the substrate 21, and the film 22 with the solvent is removed with squeegees 12L, 12R.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an LCD used for forming a filter layer of a color filter for a liquid crystal display.
More specifically, the present invention relates to a method for removing a film on an end face of a color filter substrate, and more specifically, a film removing method and a film removing apparatus for removing a resist material which is thickened and adheres to a peripheral edge of the substrate in a step of applying a colored resin to a rectangular glass substrate. And about.

[0002]

2. Description of the Related Art A color filter for a liquid crystal display (LCD) has three primary colors (R, R) on one surface of a rectangular glass substrate.
The filter layers of G and B) are formed in a predetermined pattern by a dye dispersion method or a pigment dispersion method. In these dye dispersion methods and the like, generally, a colored resin material such as a colored polyimide resin in which a dye or a pigment is dispersed is applied to a glass substrate with a spin coater or the like to form a film, and then a positive film is formed on the film. A resist is applied, exposure, development and etching are performed to obtain a predetermined pattern.

[0003]

However, as shown in FIG. 5, the film 22 formed on the glass substrate 21 by a spin coater or the like in the dye dispersion method or the pigment dispersion method has a thickness smaller than that of the central portion of the substrate 21. Also tends to become large in the peripheral portion of the substrate 21 (A in the figure), and the thick film portion A in this peripheral portion falls off and peels off in the next step or the like and mixes into the coating film surface, causing a defect. There was a point. In particular, in the color filter using the rectangular glass substrate 21, this problem was remarkable because the film on the peripheral portion of the film 22 is likely to be thicker in relation to the shape of the glass substrate 21. The present invention has been made in view of the above problems, and an object of the present invention is to provide a film removing method and a film removing apparatus that can remove a thickened film on a peripheral edge of a substrate before causing a defect.

[0004]

In order to achieve the above object, a method for removing a film on an end surface of an LCD color filter substrate according to the present invention is a method in which a colored resin is applied to the surface of a color filter substrate 21 to form a film 22. , A drying step of drying the film 22, and then the color filter substrate 21.
A removing step of removing the coating film 22 on the edge portion while dropping the solvent on the coating film 22 on the edge portion of the surface. In addition,
In the above-mentioned drying process, it is sufficient that the film 22 is fluidized.

Further, the film removing device on the end surface of the LCD color filter substrate according to the present invention comprises a color filter substrate 2
1. A substrate holder 11 on which 1 can be placed, and this substrate holder 11
Arranged on both sides of the color filter substrate 2 to face each other.
A pair of squeegees 12 for scraping off the films 22 on both side edges of the squeegee 1.
L, 12R, a nozzle 13a for dropping a solvent onto the film 22 on the front side in the moving direction of the squeegees 12L, 12R, and a solvent disposed on both sides of the substrate holder 11 and dripping on the back side of the color filter substrate 21. A pair of suction rolls 15L and 15R to be wiped off is provided.

In the film removing device for the end surface of the LCD color filter substrate of the present invention, the squeegees 12L and 12R are inclined so that the scraping surface makes an angle θ of 10 ° to 50 ° with the film surface in the moving direction. Can be configured.

[0007]

According to the method of removing the film on the end surface of the LCD color filter substrate according to the present invention, the film 21 is formed by applying the film material to the substrate 21.
2, after this coating 22 has dried, that is,
After the film 22 on the substrate 21 loses fluidity, the substrate 2
1 To remove the solvent while dropping it on the film 22 at the peripheral edge,
The film 22 on the edge can be removed without adversely affecting the film 22 that remains in the central portion of the substrate 21 and forms the pattern, such as deformation, and without generating dust.

Further, in the film removing device for the end surface of the LCD color filter substrate of the present invention, the film 22 is scraped off by the squeegee 12 after the solvent is dropped to wet the film 22, and therefore the film 22 is removed. The film 22 can be removed without generating dust even when the squeegee is in a dry state, and the resistance of the squeegees 12L and 12R can be reduced. And
Since the dripping solution can be wiped off by the suction rolls 15L and 15R, the solution in which the film 22 is dissolved dries under the end surface of the substrate 21 to form a new film, and this film becomes a cause of defects in the subsequent steps. Can also be prevented.

In the film removing device for the end surface of the LCD color filter substrate of the present invention, the squeegees 12L, 12R are dropped by inclining the squeegees so that the scraping surface makes an angle of 10 ° to 50 ° with the film surface. The solvent can be widely diffused due to its surface tension, and the amount of solvent used can be reduced.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 show an embodiment in which the present invention is applied to the production of a color filter for LCD, FIG. 1 is a schematic view of a film removing device, FIG. 2 is a partially enlarged view of FIG. 1, and FIG. It is a flow chart.

In FIGS. 1 and 2, reference numeral 10 denotes a film removing device used in a removing process described later. The film removing device 10 includes a substrate holder 11, a pair of squeegees 12L, and a squeegee 12L.
12R and a pair of liquid absorption pads (suction roll) 15
It has L and 15R. The substrate holder 11 is configured such that a rectangular flat plate-shaped glass substrate 21 can be vacuum-sucked and mounted, and the glass substrate 2 conveyed from the drying step is placed on the substrate holder 11.
1 is placed with the coating 22 facing upward. The size of the substrate holder 11 is smaller than that of the glass substrate 21, and the glass substrate 21 placed on the substrate holder 11 has its rear surface peripheral edge exposed downward. The glass substrate 21 will be described later.
Forms a film 22 on the surface in the coating process, and the film 22 is dried in the drying process.
Transferred to the top.

The squeegees 12L and 12R are made of urethane, silicon rubber or the like, are disposed above the sides of the substrate holder 11, and are connected to a driving mechanism (not shown) that drives on a quadrilateral locus. These squeegee 12
Each of L and 12R has a flat plate shape with a tapered scraping surface (reference numeral is omitted) formed at its tip, and the scraping surface faces the outside of the substrate holder 11 and the substrate holder 11 and 10 °.
It is attached so as to form a tilt angle θ of 50 °, preferably a tilt angle θ of 20 ° to 30 °. Each of these squeegees 12L and 12R has a lower end blade portion driven by a drive mechanism to move a peripheral edge portion of the glass substrate 21 on the substrate holder 11 toward the outside as indicated by an arrow in the figure, and the glass substrate on the substrate holder 11 is moved. The film 22 on the peripheral portion of 21 is scraped off.

The squeegees 12L and 12R respectively have solvent discharge tubes 13L and 13R, which are connected to a solvent supply source (not shown), on the outer surfaces thereof in the direction perpendicular to the paper surface, that is, the glass substrate 21 placed on the substrate holder 11. It is installed parallel to the side edge. The solvent supply source supplies a solvent for the colored resin, for example, a solvent such as dimethylformamide or N-methyl-2-pyrrolidone in the case of a polyimide resin.
The solvent discharge tubes 13L and 13R are provided with a plurality of nozzles 13a that open downward along the lower edge blade surfaces of the squeegees 12L and 12R. This solvent discharge tube 1
3L and 13R are nozzles 1 on the coating 22 in front of the squeegees 12L and 12R when the squeegees 12L and 12R move outward on the glass substrate 21 to remove the coating 22 on the edges.
The solvent is dripped from 3a as shown by the arrow.

The liquid absorbing pads 15L and 15R are formed by forming a liquid absorbing material such as a non-woven fabric on a cylindrical roll, and below the both side portions of the substrate holder 11, the rear surface side portion of the glass substrate 21 on the substrate holder 11 is formed. It is arranged so as to be slidable on the periphery. These liquid absorption pads 15L and 15R are connected to a drive mechanism (not shown), and are rotated by being driven by this drive mechanism to wipe the peripheral edge of the back surface of the glass substrate 21 on the substrate holder 11.

Next, the operation of this embodiment will be described. In this embodiment, three primary color filter layers are formed on the surface of a rectangular glass substrate. Then, the filter layer is formed on the glass substrate 21 through the steps shown in FIG. That is, first, a cleaning process is performed to clean the glass substrate 21 with pure water or the like to clean foreign substances such as dust adhering to the glass substrate 21. Next, in a coating step, a colored resin in which a dye or a pigment is dispersed is used as a film material, and the colored resin is applied onto a glass substrate 21 by a spin coater or the like to form a film 22.
To form. Here, as described above, the glass substrate 21
A thick film is formed on the edge, that is, the film 2
No. 2 has a larger thickness in the peripheral portion than in the central portion of the glass substrate 21 (see A in FIG. 5 described above).

Subsequently, the glass substrate 21 is dried.
The upper film 22 is dried. This drying step is performed by housing the glass substrate 11 in a drying oven whose pressure is reduced or by heating the glass substrate 21. Then, after this drying step, the process proceeds to a removing step, and in this removing step, the film 22 on the peripheral portion of the glass substrate 21 is removed by using a film removing device 10 described later.

In this removing process, the glass substrate 21 transferred from the drying process is placed on the substrate holder 11 of the film removing device 10, and the film removing device 10 drops the solvent from the solvent discharge tube 13. Squeegee 12
L and 12R are glass substrates 2 on the substrate holder 11, respectively.
Scraping off the thickened film 22 on both side edge portions of 1.
The liquid absorbing pads 15L and 15R are wiped off the solvent dripping on the back surface. That is, the squeegees 12L and 12R move toward the outside of the glass substrate 21, and at the same time, the solvent discharge tube 13 causes the coating film 2 in front of the squeegees 12L and 12R.
2, the solvent is dropped from the solvent discharge tube 13 to the film 22 scraped off by the squeegees 12L and 12R, and the liquid absorption pads 15L and 15R.
Rotates and wipes off the solvent and the like dripping on the back surface of the glass substrate 21.

In this removing step, only the film 22 scraped off by the squeegees 12L and 12R is moistened, and the film 22 at the peripheral portion can be scraped in a moistened state to prevent dust generation. Further, since the film 22 forming the pattern in the central portion maintains a dry state, it is possible to prevent the film 22 forming the pattern from being damaged, and further, the resistance of the squeegees 12L and 12R can be reduced, which is used for driving the squeegee. The actuator can be miniaturized. Furthermore, in this removing step, the solvent dripping on the back surface side is wiped off by the liquid absorbing pads 15L and 15R, so that the inconvenience of forming a film on the back surface can be prevented. Particularly, in this embodiment, the squeegee 12L. 12R is inclined to form a gap between the surface of the coating 12 and the surface of the coating 12, so that the dropped solvent can be diffused by the surface tension and the solvent can be used economically.
Since R is composed of a non-woven fabric, liquid absorbing pads 15L, 15
It is also possible to prevent R from becoming a dust source.

Next, the film removing device 10 rotates the substrate holder 11 by 90 degrees to remove the film 22 on the opposite side edges of the glass substrate 21 in the same manner as described above.
Then, the glass substrate 21 from which the films 22 on the edge portions of the four sides are removed is transferred to a back rinse step, and the solution and the like (see B and C in FIG. 5) attached to the back surface and the like are washed and removed. Here, in this cleaning step, since the back surface of the glass substrate 21 is wiped off by the liquid absorption pads 15L and 15R in the removal step of the previous step, the cleaning can be simplified.

Thereafter, the above-described steps are similarly performed for other colors to form a color filter having a pattern of three primary colors. In the above-described embodiment, the flat plate-shaped squeegee 12 is used to diffuse the dropped solvent.
L and 12R are used by inclining, but squeegees 12L and 1
2R is not limited to a flat plate shape, and various shapes can be used.

FIG. 4 shows another embodiment of the present invention. In this embodiment, the same parts as those in the above-mentioned embodiment are designated by the same reference numerals and the description thereof will be omitted. In this embodiment, an extension portion 12a extending outward from the blade portion (squeegee scraping direction, arrow in the figure) is provided at the lower ends of the squeegees 12L and 12R.
And a supply hole (corresponding to a nozzle) 12b communicating with a solvent supply source is opened in the lower portion of the extending portion 12a. The extending portion 12a forms a minute gap s with the surface of the coating film 22 of the glass substrate 21.

Also in this embodiment, the squeegees 12L and 12R can be driven in the direction of the arrow while dropping the solvent from the supply hole 12b to remove the thickened film 22 on the peripheral edge of the glass substrate 21 in a wet state. it can. Further, in this embodiment, a gap s is formed between the surface of the film 22 and the extending portion 12a.
Thus, the solvent is easily diffused and held in the gap s, and a gap having an optimum dimension for the diffusion of the solvent can be easily formed, so that the amount of the solvent used can be further reduced.

In the above-mentioned embodiments, the case where the colored resin material is applied to form a film is illustrated, but it goes without saying that the same can be applied to the case where a top coat or the like is applied. The present invention is not limited to the color filter and can be applied to various film formations. Further, although the film removing apparatus of the above-described embodiment is used for a film removing method including a drying step, it is also applicable to a film removing method without a drying step, that is, for removing an undried film 22. You can

[0024]

As described above, according to the method of removing the film on the end surface of the LCD color filter substrate according to the present invention, after drying the film formed by applying the colored resin on the surface of the substrate, the film on the edge of the substrate is dried. Since the solvent is dropped onto the film to remove it, the equipment to be moved to the subsequent process is not contaminated, and an extra cleaning process is not required. In addition, an unnecessary film that causes defects in the subsequent process can be removed. The effect that the film to be left can be removed without adversely affecting the film such as damage and without generating dust.

Further, in the film removing device for the end surface of the LCD color filter substrate of the present invention, the film wetted with the solvent dropped from the nozzle is scraped off with a squeegee, and the dripping solution is wiped off with a suction roll. The resistance of the squeegee can be reduced, and the solution can be prevented from causing a defect in a subsequent process. And the LCD of this invention
By adopting a configuration in which the squeegee is inclined, the film removing device on the end surface of the color filter substrate can widely diffuse the dropped solvent and use it effectively, and the amount of solvent used can be reduced.

[Brief description of drawings]

FIG. 1 is a schematic view of a film removing device on an end surface of an LCD color filter substrate according to an embodiment of the present invention.

FIG. 2 is a partially enlarged view of the film removing device on the end surface of the LCD color filter substrate.

FIG. 3 is a process flow chart showing a method of removing a film on an end surface of an LCD color filter substrate according to an embodiment of the present invention.

FIG. 4 is an enlarged cross-sectional view of an essential part of a film removing device for an end surface of an LCD color filter substrate according to another embodiment of the present invention.

FIG. 5 is an enlarged cross-sectional view of a part of a substrate for explaining a conventional problem.

[Explanation of symbols]

 10 Coating Removal Device 11 Substrate Holder 12L, 12R Squeegee 12a Extending Part 12b Supply Hole (Nozzle) 13L, 13R Solvent Discharge Tube 13a Nozzle 15L, 15R Liquid Absorption Pad 21 Glass Substrate 22 Coating s Gap

Claims (3)

[Claims] 1. A drying step of applying a colored resin to the surface of a color filter substrate to form a film and then drying the film, and a solvent is applied to the film on the edge portion of the surface of the color filter substrate after the drying step. And a removing step of removing the film on the edge while dropping the liquid crystal.
Method for removing film from the end face of color filter substrate. 2. A substrate holder on which a color filter substrate can be mounted, a pair of squeegees which are arranged on both sides of the substrate holder so as to face each other, and scrapes off the coating film on both side edges of the color filter substrate, and a pair of squeegees of the squeegee. An LCD comprising: a nozzle for dropping a solvent onto the film in the front in the moving direction; and a pair of suction rolls disposed below both sides of the substrate holder and for wiping off the solvent dripping on the outer peripheral back surface side of the color filter substrate. Color filter substrate end face film removal device. 3. The LCD color filter substrate end surface according to claim 2, wherein the squeegee is inclined so that the scraping surface makes an angle θ of 10 ° to 50 ° with the film surface in the moving direction. Film removal device.