JPH06174656A - Inspection equipment of board - Google Patents

Abstract

PURPOSE:To realize reduction of a space and installations for an inspection line and simplification of a line assembling operation. CONSTITUTION:A board carry-in point 2 and a board carry-in and carryout point 3 are set at the front edge part of a table 15 of inspection equipment 1 of a board and two board carry-out points 4 and 5 at the rear edge part thereof, while carrying conveyors 7, 9 and 10 are made continuous. On the table 15, a board carry-in and carry-out mechanism 6 being movable in the direction of the axis Y is provided, and when a board is carried in, this board carry-in and carry-out mechanism 6 is positioned at a positioning point A and made to receive a board to be inspected from the carrying conveyor 7. After inspection is ended, the carry-in and carry-out mechanism 6 positions the inspected board being a good article at the positioning point A and carries it out from the board carry-out point 4, while it positions the inspected board being a bad article at a positioning point B and carries it out from the board carry-out Point 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component mounted on a printed wiring board (hereinafter simply referred to as a "substrate"), the presence / absence and attitude of the electronic component before soldering, and the soldering after soldering. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for loading and unloading a board to and from a board inspection apparatus.

[0002]

2. Description of the Related Art Conventionally, as a substrate inspection apparatus of this type, an image of a substrate to be inspected carried on a table is picked up by an image pickup device under predetermined illumination, and the data to be inspected obtained from the image pickup pattern is used as teaching data. By comparison, there is a device in which the mounting state of each mounted component on the inspected board and the quality of soldering are determined.

FIG. 15 shows an example of a board inspection line using such a board inspection apparatus. In the figure, the board inspection device 5
1, a substrate carry-in point 52 is set on the front edge side of the table, and a substrate carry-out point 53 is set on the trailing edge side, and the position corresponding to the substrate carry-in point 52 and the substrate carry-out point 53 is set as the origin position on the table. A substrate loading / unloading mechanism 54 is provided which is movable in a direction (Y-axis direction) orthogonal to the loading / unloading direction.

The substrate carry-in point 52 and the substrate carry-out point 53
The substrate transfer devices 55 and 5 each include a conveyor.
6 are continuous. First substrate transfer device 55 on the upstream side
Refers to the board to be inspected from the component mounting apparatus of the upstream board assembly line 50 or the board to be inspected from the automatic soldering apparatus 57.
The substrate inspecting device 51 moves the substrate loading / unloading mechanism 54 to the original position and receives the substrate to be inspected when loading the substrate, and then moves the substrate loading / unloading mechanism 54 in the Y-axis direction to By moving the image pickup device (not shown) in the horizontal direction, the entire inspection area of the substrate to be inspected is sequentially imaged and a predetermined inspection is performed.

When the inspection is completed, the substrate loading / unloading mechanism 54 returns to the original position again, the inspected substrate is unloaded to the second substrate transfer device 56 provided on the downstream side, and further to the sorting device 58 on the downstream side. Is carried. The sorting device 58 sorts the substrate to be inspected into a non-defective substrate and a defective substrate. The non-defective substrate is carried out to the substrate collecting line 61, and the defective substrate is carried to the repairing device 59 on the repairing line 60.

If the substrates to be inspected are supplied to the substrate inspecting apparatus 51 from a plurality of upstream assembling lines, the assembling lines are provided between the respective substrate assembling lines and the first substrate conveying apparatus 55. Substrate transfer device 55
A delivery device is provided for sending out upward.

[0007]

However, in the inspection system having the above-described structure, since the attached devices such as the sorting device 58 and the delivery device are installed on the inspection line, it is necessary to secure the installation space for that purpose. However, there is a problem that not only the inspection line becomes large and the cost becomes high, but also it takes time to connect and align each device.

The present invention has been made in view of the above problems. By providing a plurality of loading points for the substrate to be inspected or unloading the inspected substrate on the table, the inspection line space and equipment can be reduced. It is an object of the present invention to provide a board inspection device that realizes simplification of line assembly work.

[0009]

SUMMARY OF THE INVENTION The present invention is a substrate inspecting device having a substrate loading / unloading mechanism movably provided on a table, and a substrate for loading an inspected substrate set on the front edge side of the table. With respect to the carry-in point, another board carry-in point or a board carry-out point for carrying out the inspected board is set at a position displaced in the direction orthogonal to the board carry-in / out direction on the front edge side or the rear edge side of the table, Positioning control of the substrate loading / unloading mechanism is performed at the loading point and the substrate unloading point.

In the substrate inspection apparatus according to claim 2, the substrate loading / unloading mechanism is set to be movable in a direction orthogonal to the substrate loading / unloading direction, and in the substrate inspection apparatus according to claim 3,
It is set to be movable in two directions: a substrate loading / unloading direction and a direction orthogonal to the substrate loading / unloading direction.

According to another aspect of the substrate inspection apparatus of the present invention, a non-defective substrate unloading point for unloading a non-defective inspected substrate to the table,
Set the defective product board unloading point to carry out the inspected board of the defective product, set the good product board unloading point and the defective product board unloading point to the trailing edge side of the table, and set the good product board unloading point and the defective product board unloading point. One of the two is set at a position displaced from the substrate loading point in the direction orthogonal to the substrate loading / unloading direction.

According to another aspect of the substrate inspection apparatus of the present invention, a non-defective substrate unloading point for unloading a non-defective inspected substrate to the table,
A defective board unloading point for unloading a defective inspected board is set, and the good board unloading point is located on the front edge side of the table and displaced from the board loading point in a direction orthogonal to the board unloading direction. In addition, the defective substrate carry-out point is set on the trailing edge side of the table.

According to another aspect of the substrate inspection apparatus of the present invention, first and second substrate loading points for loading the substrate to be inspected are set in the table, and the second substrate loading point is on the front edge side of the table. The substrate carry-in point is set at a position displaced in the direction orthogonal to the substrate carry-in / out direction, and the substrate carry-out point is set on the trailing edge side of the table.

[0014]

Since a plurality of loading points for the substrates to be inspected or unloading points for the inspected substrates are set on the table, it is not necessary to provide a device for delivering and distributing the substrates on the upstream and downstream sides of the substrate inspecting device. And space can be reduced, and the assembly of the inspection line can be simplified.

According to the fourth aspect of the present invention, since the non-defective product and the defective product are carried out from different substrate carrying-out points respectively, after the inspection is completed, the non-defective product can be recovered and the defective product can be corrected smoothly.

According to the fifth aspect of the present invention, since the board loading point and the non-defective board unloading point are set on the front edge side of the table, it is possible to support a system in which the inspection line is separated from the board assembly line.

According to the invention of claim 6, a plurality of substrate carry-in points are set on the front edge side of the table and a plurality of substrate carry-out points are set on the trailing edge side of the table. The board inspection in the assembly line can be performed by one board inspection device.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the structure of an inspection line in which a substrate inspection apparatus 1 according to an embodiment of the present invention is introduced. This inspection line receives an inspected board on which a large number of components are mounted from an upstream board assembly line (not shown), and the board inspection apparatus 1 automatically inspects the mounting quality of each component such as the quality of soldering. It is a composition.

This board inspection apparatus 1 has a horizontal table 15
On the front edge side of the table 15, a board carry-in point 2 for carrying in the board to be inspected from the upstream board assembling step and either carrying in the board to be inspected or carrying out the board which has been inspected are provided. The possible substrate loading / unloading point 3 is set to be displaced in the direction (Y axis direction) orthogonal to the substrate loading / unloading direction (X axis direction). Substrate unloading points 4 and 5 used for unloading the inspected substrate are set at positions on the trailing edge side of the table 15 facing the substrate loading point 2 and the substrate loading / unloading point 3, respectively.

A substrate loading / unloading mechanism 6 movable in the Y-axis direction is provided on the table 15 of the substrate inspecting apparatus 1. This substrate loading / unloading mechanism 6 has a positioning point A in the figure.
Position, one end is located at the substrate loading point 2 on the front edge side, and the other end is located at the first substrate unloading point 4 on the trailing edge side.
Position, one end is located at the substrate loading / unloading point 3 on the front edge side, and the other end is located at the second substrate unloading point 5 on the trailing edge side.

On the upstream side of the board inspecting apparatus 1, it is possible to provide transfer conveyors 7 and 8 corresponding to the board carrying-in point 2 and the board carrying-in / out point 3, respectively. The exchange of the board between 1 and the upstream board assembly line is performed. Further, on the downstream side, it is possible to provide transfer conveyors 9 and 10 corresponding to the respective substrate unloading points 9 and 10, and transfer them to a post-processing line for collecting and correcting the inspected substrates. To do.

FIG. 2 shows the appearance of the board inspection apparatus 1. The board inspection apparatus 1 captures an image of the board 11 to be inspected fed from the upstream side by an image pickup device 13 under illumination by an illuminating device 12, processes the image by a controller (not shown), and inspects the board 11 to be inspected. The mounting quality of each component is automatically inspected and the inspected substrate is sent to the upstream side or the downstream side.

The image pickup device 13 is supported by the X-axis table portion 14 so as to be movable in the X-axis direction, and the substrate loading / unloading mechanism 6 is supported on the table 15 so as to be movable in the Y-axis direction. Therefore, by operating the X-axis table portion 14 and a drive mechanism 33 described later based on a control signal from the control device, the imaging device 13 can be moved to an arbitrary position on the inspected substrate 11.
The field of view can be set.

As shown in FIG. 3, the substrate loading / unloading mechanism 6 is linked to a driving mechanism 33 having a servomotor as a driving source. By operating the driving mechanism 33, the substrate loading / unloading mechanism 6 is moved to a table. It is moved in the Y-axis direction along the upper surface of 15 and positioned at an arbitrary position.

A cover 34 is placed over the table 15, and the front surface of the cover 34 is provided with the substrate loading point 2.
From the substrate loading / unloading point 3 to the opening 35, and on the rear surface, one substrate loading / unloading point 4 to the other substrate loading / unloading point 5.
Openings 36 each having a size ranging from 0 to 1 are provided.

The substrate loading / unloading mechanism 6 has horizontal and parallel rails 41 and 42 and a loading / unloading belt (not shown). By driving the loading / unloading belt,
The substrate 41 to be inspected is carried in and out of the conveyors 7, 8 using the rails 41, 42 as a guide for carrying in and out.

Returning to FIG. 2, the illuminating device 12 has three annular light sources 16 and 17 having different diameters and simultaneously emitting red light, green light and blue light based on a control signal from the control device. , 18, each light source 16,
17 and 18 are centered right above the center of the table 15 and positioned in different elevation angles when viewed from the center of the table 15.

The image pickup device 13 is a color television camera, and is positioned downward on the table 15. As a result, the reflected light on the surface of the substrate 11 to be inspected is picked up by the image pickup device 13, converted into color signals of the three primary colors, and supplied to the control device.

The controller determines the mounting quality of each mounted component on the board 11 to be inspected by processing the color signal and comparing the data to be inspected obtained from the imaged pattern with the teaching data. Further, the control device controls each operation of the X-axis table unit 14, the drive mechanism 33, the lighting device 12, and the imaging device 13 in series according to the control procedure (details will be described later) shown in FIGS. 12 to 14.

4 to 7 show examples of use of the board inspection apparatus 1 described above. In the embodiment of FIG. 4, a transfer conveyor 7 is provided corresponding to the substrate loading point 2 to load a substrate to be inspected from an upstream assembly line. At the time of loading, the substrate loading / unloading mechanism 6 has a first positioning point. Position it at A.

Further, in this embodiment, the respective substrate carry-out points 4, 5
Corresponding to the above, the transfer conveyors 9 and 10 are provided, and the substrate loading / unloading mechanism 6 moves the non-defective inspected substrate to the first positioning point A and unloads it from the substrate unloading point 4 to the transport conveyor 9. , The defective inspected board is moved to the second positioning point B, and is transferred from the board unloading point 5 to the conveyor 1
Carry out to 0.

The embodiment of FIG. 5 is applied to a type in which the inspection line is separated from the assembly line which is the main process, and the non-defective inspected substrate is returned to the upstream line again. Both the upstream transfer conveyors 7 and 8 are connected to the upstream assembly line. Therefore, the board carry-in / out point 3 is set to the carry-out point of a non-defective inspected board, and the carry conveyor 8 is used.
And the substrate transfer direction is set to the opposite direction. If the defective inspected board can be corrected by an automatic correction machine (not shown), it is carried out from the board unloading point 4 to the transfer conveyor 9 and guided to the automatic correction machine, which requires manual correction. With respect to, the sheet is unloaded from the substrate unloading point 5 to the transport conveyor 10 and guided to the hand correction line.

The embodiment of FIG. 6 is for inspecting two different types of substrates. The upstream transfer conveyors 7 and 8 are connected to independent substrate assembly lines, respectively, and the substrate loading point 2 is used.
Also, the transport directions of the transport conveyors 7 and 8 corresponding to the substrate loading / unloading point 3 are set to the same direction. As a result, the board to be inspected a from the first assembly line to the board loading / unloading point 2 and the board to be inspected b from the second assembly line to the board loading / unloading point 3,
Each is brought in.

The substrate loading / unloading mechanism 6 moves to one of the positioning points A and B to receive the substrate to be inspected from each of the conveyors 7 and 8, and a predetermined inspection according to the type of substrate is carried out. When the inspection is completed, the inspected substrates a of good product and defective product are transferred from the first substrate unloading point 4 to the transport conveyor 9, and the inspected substrates of good product and defective product b are transported from the second substrate unloading point 5 to the transfer conveyor 10. To, respectively. In the case of this embodiment, the judgment result of pass / fail is transmitted to the line on the downstream side.

The embodiment of FIG. 7 is for inspecting the same type of substrates supplied from two independent assembly lines.
Similar to the embodiment of FIG. 6, each of the transfer conveyors 7 and 8 receives the board to be inspected from the upstream assembly line and receives the board inspecting apparatus 1.
To the positioning point A,
It moves to one of B and receives the substrate to be inspected from each of the conveyors 7, 8. After the completion of the inspection, as in the embodiment of FIG. 4, the non-defective inspected substrate is transferred from the first substrate unloading point 4 to the transfer conveyor 9, and the defective inspected substrate is in the second substrate unloading point 5.
Each is carried out to the transport conveyor 10.

8 and 9 show another embodiment of the board inspection apparatus 1. In this board inspection device 1, the imaging device 13
Is fixedly arranged at an upper position in the center of the table 15. The substrate loading / unloading mechanism 6 is movable in both the X and Y directions, so that the entire inspection area of the inspected substrate 11 can be inspected. The rest of the configuration is the same as that of the above-described embodiment, and the corresponding components are designated by the same reference numerals and the description thereof is omitted.

10 and 11 show a third embodiment of the board inspection apparatus 1. In this embodiment, the substrate loading / unloading mechanism 6 is arranged in the center of the table 15 so as to be movable in the X-axis direction and the Y-axis direction, and the substrate is transferred between the transport conveyors 7 and 8 on the upstream side. The substrate transfer mechanism 20 for performing the transfer is provided on the downstream side, and the transfer mechanism 21 for transferring the substrate between the transfer conveyors 9 and 10 is provided on the downstream side.
It is arranged so that it can move in the axial direction.

The substrate loading / unloading mechanism 6 is located at a lower position than the upstream conveyors 7, 8 and the downstream conveyors 9, 10. Further, the substrate transfer mechanisms 20 and 21 are provided with elevating mechanisms 22 and 23, and have the same height as the transport conveyors 7 to 10 at the ascending point and the substrate loading / unloading mechanism 6 at the descending point. Therefore, each substrate transfer mechanism 2
When 0 and 21 are located at the ascending point, each board transfer mechanism 2
The movement of the substrate loading / unloading mechanism 6 in the X-axis direction is not hindered by 0 and 21.

Like the substrate loading / unloading mechanism 6, each of the substrate transfer mechanisms 20 and 21 has horizontal and parallel rails and a transport belt. By driving the transport belt, the rails are loaded / unloaded. A substrate can be carried in and out as a guide.

In this embodiment, when the substrate loading / unloading mechanism 6 is located at the positioning point A, one end is placed through the substrate delivery mechanism 20 to the substrate loading point 2 on the front edge side, and the other end is placed via the substrate delivery mechanism 21. When corresponding to the first board unloading point 4 on the trailing edge side and located at the positioning point B, one end is connected to the board unloading point 3 on the leading edge side via the board transferring mechanism 20, and the other end is the board transferring mechanism. The second substrate unloading points 5 on the trailing edge side are positioned correspondingly via 21.

When this embodiment is used in the method of use shown in FIG. 6 or 7, the substrate transfer mechanism 20 on the upstream side is in an ascended state and waits for the substrate to be inspected from any of the transport conveyors 7 and 8 Further, the substrate transfer mechanism 21 on the downstream side is in a raised state and stands by for carrying out the inspected substrate to one of the transport conveyors 9 and 10.

When the substrate 11 to be inspected is carried in from the upstream conveyors 7, 8, the substrate transfer mechanism 20 moves to the corresponding substrate loading / unloading point 2 or substrate loading / unloading point 3 to move the substrate 11 to be inspected. receive. After that, the substrate 11 to be inspected is once held by the substrate transfer mechanism 20 and waits for a substrate loading command to the substrate loading / unloading mechanism 6. When a board loading command is given to the board transfer mechanism 20, the board transfer mechanism 20 descends and then sends the inspected board 11 to the board transfer mechanism 6.
At this time, the substrate loading / unloading mechanism 6 has moved to the positioning points A and B corresponding to the substrate transfer mechanism 20. After the substrate is delivered, the substrate delivery mechanism 20 moves up again and stands by for the next loading of the inspected substrate 11.

When the substrate 11 to be inspected is introduced into the substrate loading / unloading mechanism 6, the substrate loading / unloading mechanism 6 moves in the X-axis direction and the Y-axis direction to perform the inspection. When the inspection is completed, the substrate loading / unloading mechanism 6 moves to one of the positioning points A and B, and the downstream substrate delivery mechanism 21 moves to the delivery destination and then descends to deliver the inspected substrate 11 between them. Done. Substrate delivery mechanism 21 that has received the inspected substrate 11
Holds the inspected substrate 11 until a substrate unloading instruction is issued.

It should be noted that any of the usages shown in FIGS. 4 to 7 can be applied to the second and third substrate inspection apparatuses 1 described above.

FIG. 12 shows steps 1 (indicated by "ST1" in the figure) to step 13 of the control procedure by the control device when the first embodiment is used in the method of use shown in FIG. First, in step 1 of FIG.
Is driven to move the substrate loading / unloading mechanism 6 in the Y-axis direction, the positioning is stopped at the first positioning point A shown in FIG. 4, and the loading of the substrate 11 to be inspected from the substrate loading point 2 is waited.

In the next step 2, after the substrate 11 to be inspected is carried in from the conveyor 7 to the substrate loading / unloading mechanism 6, the value of the counter n is initialized to "1" and the field of view of the image pickup device 13 is set to the nth position. (In this case, the first inspection position) is positioned (steps 3 and 4). Next, the board 11 to be inspected is imaged by the imaging device 13 under the illumination of the illuminating device 12 and predetermined image processing is performed to determine the mounting state and the quality of soldering, and the counter n is incremented (step 5). , 6).

In the next step 7, it is judged whether or not the content of the counter n exceeds the total number N of inspection positions,
If the determination is “NO”, the process returns to step 4 and the same inspection procedure is executed for the next inspection position.

When all the inspection points are inspected, step 7
If the result of the determination is “YES”, and as a result, it is determined that the product is a non-defective product, the determination of the next step 8 is “YES”, and the substrate loading / unloading mechanism 6 is first moved to the first step in the next steps 9 and 10.
The positioning is stopped at the positioning point A, and a non-defective inspected substrate is unloaded from the substrate unloading point 4 to the transport conveyor 9.

If the result of the inspection is that the product is defective, the determination in step 8 becomes "NO", the substrate loading / unloading mechanism 6 is stopped at the second positioning point B, and the substrate loading / unloading mechanism 6 is unloaded. A non-defective inspected substrate is carried out to the transfer conveyor 10 (steps 11 and 12).

In step 13, it is determined whether or not the inspection of the next substrate to be inspected 11 is continued. If the determination is "YES", the process returns to step 1 and the same procedure is executed. If the determination in step 13 is "NO", the inspection is ended.

FIG. 13 shows a control procedure when it is used in the usage method shown in FIG. In steps 1 to 7 of FIG.
After the procedure similar to steps 1 to 7 is executed, if the substrate to be inspected is determined to be non-defective, the determination in step 8 becomes “YES”, and then the substrate loading / unloading mechanism 6 is moved to the second positioning position. The positioning is stopped at the point B, and the non-defective inspected substrate is unloaded from the substrate loading / unloading point 3 to the transport conveyor 8 (steps 9 and 10).

When step 8 is "NO", step 1
Go to 1 and check the contents of defects. As a result, if the board is capable of automatic correction, step 11 returns “Y
ES ”, the substrate loading / unloading mechanism 6 is positioned and stopped at the first positioning point A, and the defective inspected substrate is unloaded from the first unloading point 4 to the transport conveyor 9 (step 1).
2, 13).

When step 11 is "NO", that is, when automatic correction is impossible, the process proceeds to step 14,
The substrate loading / unloading mechanism 6 is positioned and stopped at the second positioning point B, and the defective inspected substrate is unloaded from the second unloading point 5 to the transport conveyor 10 (step 15).

In step 16, it is determined whether or not the inspection of the next substrate to be inspected 11 is to be continued. If the determination is "YES", the process returns to step 1 and the same procedure is executed. If the determination in step 16 is "NO", the inspection ends.

FIG. 14 shows a control procedure when the method shown in FIG. 6 is used. First, the first steps 1 and 2
Then, the control device stands by for loading either of the inspection target substrates a and b. When the substrate a to be inspected a is transported onto the transport conveyor 7, step 1 becomes "YES" and the substrate loading / unloading mechanism 6 is positioned at the first positioning point A (step 3). On the other hand, when the substrate b to be inspected is carried on the carrying conveyor 8, step 1 is "NO" and step 2 is "YE."
S ”, and the substrate loading / unloading mechanism 6 moves to the second positioning point B.
(Step 4).

In the next step 5, either one of the substrates a and b to be inspected is carried into the substrate loading / unloading mechanism 6, and then step 6
Initially set the value of the counter n to "1" with
The procedure similar to steps 4 to 7 of 13 is executed (steps 7 to 10).

When the inspection of all the inspection points on the substrate is completed, step 10 becomes "YES", and the type of the substrate is checked in the next step 11. When the inspected substrate is the substrate a, step 11 is “YES”.
Then, the substrate loading / unloading mechanism 6 is positioned at the first positioning point A, and the substrate a is unloaded from the substrate unloading point 4 onto the transport conveyor 9 (steps 12 and 13). If the inspected substrate is the substrate b, step 11 becomes "NO", the substrate loading / unloading mechanism 6 is positioned and fixed at the second positioning point B, and the substrate b is unloaded from the substrate unloading point 5 (step 14). , 15).

In each of the above three embodiments, the substrate loading / unloading point 3 is provided on the front edge side of the table 15. However, this is provided on the trailing edge side of the table to carry in the modified substrate.
You may re-examine.

[0059]

According to the present invention, the substrate loading / unloading mechanism is movably provided on the table, and in addition to the substrate loading point on the leading edge side of the table, other substrate loading points and substrates are loaded on the leading edge side and the trailing edge side of the table. Since a carry-out point is provided and the board carry-in / carry-out mechanism is positioned at the corresponding board carry-in point or board carry-out point when the board is carried in and out, an apparatus for delivering and distributing the board is provided upstream and downstream of the board inspection device. Since it is not necessary to provide it, the inspection line space and equipment can be reduced, and the inspection line assembly is simplified.

According to the fourth aspect of the present invention, since the board unloading points for the non-defective products and the defective products are provided on the trailing edge side of the table, it is possible to smoothly shift to the recovery work of the non-defective products and the correction work of the defective products after the inspection.

According to the fifth aspect of the present invention, since the board carry-in point and the non-defective board carry-out point are provided on the front edge side of the table, it is possible to cope with a system in which the inspection line is separated from the board assembly line.

According to the sixth aspect of the present invention, a plurality of board carry-in points are provided on the front edge side of the table and a plurality of board carry-out points are provided on the trailing edge side, respectively. The inspection can be carried out by one board inspection device, and the remarkable effects of achieving the object of the invention are achieved.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a configuration of an inspection system in which a substrate inspection apparatus according to an embodiment of the present invention is introduced.

FIG. 2 is an explanatory diagram showing a schematic configuration of the substrate inspection apparatus of FIG.

FIG. 3 is a perspective view showing a configuration of a table and a substrate loading / unloading mechanism.

FIG. 4 is an explanatory diagram showing an example of use of the board inspection device of FIGS.

FIG. 5 is an explanatory diagram showing another example of use of the board inspection apparatus of FIGS.

FIG. 6 is an explanatory diagram showing another example of use of the substrate inspection apparatus of FIGS.

FIG. 7 is an explanatory diagram showing another example of use of the board inspection device of FIGS.

FIG. 8 is an explanatory diagram showing a configuration of a substrate inspection system according to a second embodiment of the present invention.

9 is an explanatory diagram showing a schematic configuration of the substrate inspection apparatus of FIG.

FIG. 10 is an explanatory diagram showing a configuration of a board inspection system according to a third embodiment of the present invention.

11 is an explanatory diagram showing a schematic configuration of the board inspection apparatus of FIG.

12 is a flowchart showing a control procedure of the control device for the use example of FIG.

13 is a flowchart showing a control procedure of the control device for the use example of FIG.

14 is a flowchart showing a control procedure of the control device for the use example of FIG.

FIG. 15 is an explanatory diagram showing a configuration of a conventional inspection line.

[Explanation of symbols]

 1 substrate inspection device 2 substrate loading port 3 substrate loading port 4 and 5 substrate loading port 6 substrate loading and unloading mechanism 15 table

Front page continuation (72) Inventor Shunsuke Matsuo 10 Odoroncho, Hanazono, Ukyo-ku, Kyoto

Claims (6)

[Claims] 1. A substrate inspecting device, wherein a substrate loading / unloading mechanism is movably provided on a table, a front edge side of the table or a substrate loading point for loading a substrate to be inspected set on the front edge side of the table or Set another board carry-in point or a board carry-out point for carrying out the inspected board at a position displaced in the direction orthogonal to the board carry-in / out direction on the trailing edge side,
A substrate inspection apparatus, wherein the substrate loading / unloading mechanism is positionally controlled at the substrate loading / unloading point. 2. The substrate inspection apparatus according to claim 1, wherein the substrate loading / unloading mechanism is movable in a direction orthogonal to the substrate loading / unloading direction. 3. The substrate inspection apparatus according to claim 1, wherein the substrate loading / unloading mechanism is movable in two directions: a substrate loading / unloading direction and a direction orthogonal to the substrate loading / unloading direction. 4. A non-defective substrate unloading point for unloading a non-defective inspected substrate and a defective substrate unloading point for unloading a defective inspected substrate are set in the table, and the non-defective substrate unloading point and the defective product are set. The board unloading point is set on the trailing edge side of the table, and either the good board unloading point or the defective board unloading point is displaced from the board loading point in the direction orthogonal to the board unloading direction. Claim 1 which is set to
The board inspection apparatus described in any one of 3 above. 5. A non-defective substrate unloading point for unloading a non-defective inspected substrate and a defective product unloading point for unloading a defective inspected substrate are set in the table, and the non-defective substrate unloading point is set in the table. 4. The front edge side is set at a position displaced from the substrate loading point in a direction orthogonal to the substrate loading / unloading direction, and the defective substrate loading point is set on the trailing edge side of the table. The board inspection device described in any one of 1. 6. The table is provided with first and second substrate loading points for loading a substrate to be inspected, and the second substrate loading point is on the front edge side of the table and is the first substrate loading point. The board inspection device according to claim 1, wherein the board carry-out point is set to a trailing edge side of the table, and the board carry-out point is set to a position displaced in a direction orthogonal to the board carry-in / out direction.