JPH0617298Y2 - ウエハカウンタ - Google Patents
ウエハカウンタInfo
- Publication number
- JPH0617298Y2 JPH0617298Y2 JP20022687U JP20022687U JPH0617298Y2 JP H0617298 Y2 JPH0617298 Y2 JP H0617298Y2 JP 20022687 U JP20022687 U JP 20022687U JP 20022687 U JP20022687 U JP 20022687U JP H0617298 Y2 JPH0617298 Y2 JP H0617298Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- plate
- detection plate
- guide
- switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 35
- 230000001105 regulatory effect Effects 0.000 claims description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 64
- 238000004140 cleaning Methods 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20022687U JPH0617298Y2 (ja) | 1987-12-29 | 1987-12-29 | ウエハカウンタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20022687U JPH0617298Y2 (ja) | 1987-12-29 | 1987-12-29 | ウエハカウンタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01104725U JPH01104725U (enExample) | 1989-07-14 |
| JPH0617298Y2 true JPH0617298Y2 (ja) | 1994-05-02 |
Family
ID=31490645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20022687U Expired - Lifetime JPH0617298Y2 (ja) | 1987-12-29 | 1987-12-29 | ウエハカウンタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617298Y2 (enExample) |
-
1987
- 1987-12-29 JP JP20022687U patent/JPH0617298Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01104725U (enExample) | 1989-07-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5096670A (en) | Automated patient sample analysis instrument | |
| CA2031223C (en) | Test strip evaluating instrument for multiple test strips | |
| EP0712269B1 (en) | Method and apparatus for mounting a part at a specfific position | |
| CN115015565B (zh) | 一种免疫测定装置的控制方法 | |
| US6610253B2 (en) | Liquid pin transfer assembly with common pin bias | |
| US4720130A (en) | Industrial robot hand with position sensor | |
| KR100443326B1 (ko) | 노치정렬장치 | |
| JPS5848836A (ja) | 光学式自動分析測定装置 | |
| EP0293336A3 (en) | Equipment for measuring the erythrosettling of blood using pipettes | |
| US4566325A (en) | Hands-on inspection board for printed circuit cards | |
| JPH0617298Y2 (ja) | ウエハカウンタ | |
| CN212659524U (zh) | 晶圆缺口整平装置 | |
| US4356909A (en) | Fraction collector | |
| JPH0637348Y2 (ja) | 電子部品の検査装置 | |
| EP4174495A1 (en) | Object stage and transfer platform for biological sample analyzer, and biological sample analyzer | |
| JPS624142A (ja) | 薄板材の移し替え装置 | |
| CN222267194U (zh) | 梯度稀释装置 | |
| JPH0719827B2 (ja) | ウエ−ハ移替装置 | |
| KR0137812B1 (ko) | 인쇄회로기판 고정장치 | |
| KR950000559Y1 (ko) | 분리기능을 갖는 칩 이송장치 | |
| JPH0961437A (ja) | 分注装置 | |
| JPH0823161A (ja) | リフロー装置 | |
| JPH0610688Y2 (ja) | ウエハ搬送装置 | |
| JP2762131B2 (ja) | 部品整列装置 | |
| JPH0750698Y2 (ja) | Ｌｅｄアレイの保持機構 |