JPH06167600A - Air exhaust device for electron beam irradiation device - Google Patents

Abstract

PURPOSE:To provide an air exhaust device for electron bear irradiation device capable of reducing ozone amount flowing out and lowering ozone concentration exhausting outside. CONSTITUTION:Provided for the device are an exhaust path for inlet 2 having an air inlet 4 provided as to cover the entrance of an irradiated object and formed at the bottom to take in the outside air and an outlet 6 formed at the top to exhaust the ozone flowing out of the entrance together with the external air sucked from the air inlet 4, an exhaust path for outlet 12 having an air inlet 14 provided as to cover the exit of the irradiated object and formed at the bottom to take in the outside air and an outlet 16 formed at the top to exhaust the ozone flowing out of the entrance together with the external air sucked from the air inlet 14, and an air exhaust means to exhaust the air and ozone in the exhaust path for inlet 2 and the exhaust path for outlet 12.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron beam irradiating device exhausting device for discharging ozone generated in an electron beam irradiating device to the outside or sending it to an ozone processing device.

[0002]

2. Description of the Related Art Conventionally, the inside of an irradiation section of an electron beam irradiation apparatus, which performs an electron beam irradiation process, is usually replaced with an inert gas such as nitrogen gas, thereby reducing the influence of oxygen on an object to be irradiated. . However, in some cases, such as laminating, it is not necessary to inactivate the interior of the irradiation section with nitrogen gas. In such a case, in order to save the nitrogen gas, the object to be irradiated is irradiated with the electron beam in the atmosphere without deactivating.

FIG. 4 is a schematic view of an electron beam irradiation apparatus having a conventional exhaust device. In FIG. 4, reference numeral 40 is an electron beam generator that generates an electron beam, and 30 is a conveyance path that has an irradiation unit 31 that irradiates the irradiation target A with an electron beam. Incidentally, 32 is a carry-in port of the irradiation target A, and 33 is a carry-out port. Electron beam generator 4
0 is provided substantially above the center of the transport path 30 and emits an electron beam from the window 41 to irradiate the irradiation target A passing through the irradiation unit 31 under the window 41 with the electron beam. Since the window 41 separates the vacuum atmosphere of the electron beam generator 40 from the atmosphere in the transfer path 30, the window 41 is made of titanium foil having high mechanical strength and good electron beam transmittance. I am using.

The carrier path 30 is usually provided with carry-in inlet side supply parts 34 and 35 for supplying nitrogen gas and a cooling supply part 36. The carry-in side supply part 34 is for forming a nitrogen curtain for preventing the inflow of outside air from the carry-in port 32 and at the same time supplying nitrogen gas into the transfer path 30 together with the carry-in side supply part 35. The cooling supply unit 36 is for cooling the window 41 through which the electron beam penetrates and for supplying the nitrogen gas into the transport path 30. It should be noted that the electron beam generator 40 and the transport path 30 are X-rays generated during electron beam irradiation.
Lead is shielded so that the wire does not leak outside.

In the above apparatus, when the electron beam is irradiated in the atmosphere without using nitrogen gas, air is blown from the cooling supply unit 36 for cooling the window foil. When the web-shaped irradiation target A transferred from the carry-in port 32 into the transfer path 30 in the air atmosphere passes through the irradiation unit 31 below the window 41, the irradiation target A is irradiated with the electron beam. At this time, a large amount of ozone is generated in the irradiation unit 31. The ozone generated in a large amount is discharged from the exhaust duct 50 to the outside by the fan 52. It should be noted that the irradiation target A for which the electron beam irradiation has been completed
Is conveyed to the outside from the carry-out port 33.

[0006]

By the way, in the conventional electron beam irradiation apparatus, if the concentration of a large amount of ozone is high, the ozone treatment apparatus (not shown) cannot lower the concentration to a predetermined reference value or less. There was a problem. Also,
In the conventional electron beam irradiation apparatus, there is a possibility that ozone may flow out from the carry-in port for loading the irradiation target. Further, when the irradiation target A is a web, ozone generated in the surface layer of the irradiation target is generated. However, there was a problem in that the material A and the object to be irradiated A flow out of the electron beam irradiation apparatus through the carry-out port and flow into the inside of a factory, a laboratory, or the like.

The present invention has been made based on the above circumstances, and is for an electron beam irradiation apparatus capable of reducing the amount of ozone flowing to the outside and reducing the concentration of ozone discharged to the outside. The purpose is to provide an exhaust system.

[0008]

In order to achieve the above object, an exhaust system for an electron beam irradiation apparatus according to the invention of claim 1 is provided so as to cover a carry-in port of an object to be irradiated, and to prevent external air. An inlet discharge passage having an intake port formed in the lower part for taking in, an exhaust port formed in the upper part for discharging ozone flowing out from the carry-in port together with the external air sucked from the intake port, and an object to be irradiated. An intake port provided to cover the carry-out port and formed in the lower part to take in external air,
An outlet discharge path having an exhaust port formed in an upper part for discharging ozone flowing out from the carry-out port together with the external air sucked from the intake port, and air in the inlet discharge path and the outlet discharge path. And exhaust means for exhausting ozone.

According to a second aspect of the present invention, in the exhaust device for an electron beam irradiating device, the object to be irradiated is in the form of a web,
The exit discharge path is provided with a discharge path carry-out port through which the irradiated object is carried out, and the ozone adhering to the surface of the web-like irradiated object is provided above the vicinity of the discharge path carry-out port. It is characterized in that an air ejection device for ejecting air for removing the air is provided.

According to a third aspect of the present invention, there is provided an exhaust device for an electron beam irradiation apparatus, which is located between the intake port and the exhaust port of the inlet exhaust passage, and the intake port and the exhaust of the outlet exhaust passage. An air volume adjusting mechanism for adjusting the air volume is provided in the middle of the mouth.

[0011]

The function of the present invention will be described below. According to the first aspect of the present invention, since the exhaust means forcibly sucks the ozone flowing out from the carry-in inlet and the outlet through the exhaust passage for the inlet and the exhaust passage for the outlet by the above-mentioned configuration, The amount can be reduced, and since the external air is taken in from the intake port and ozone is discharged together with the taken-in air, the concentration of ozone discharged from the exhaust port can be reduced.

According to the second aspect of the present invention, since it has the above-mentioned structure, it is possible to remove the ozone adhering to the surface of the web-shaped object to be irradiated by the air ejecting device.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a schematic view of an inlet discharge passage and an outlet discharge passage of an electron beam irradiation apparatus exhaust device according to an embodiment of the present invention, and FIG. 2 is a side view of an outlet discharge passage of the present embodiment apparatus. [Fig. 3] is a schematic overall view when the device of this example is attached to an electron beam irradiation device. In the present embodiment shown in FIGS. 1 to 3, those having the same functions as those shown in FIG. 4 are designated by the same reference numerals, and detailed description thereof will be omitted.

The exhaust system for the electron beam irradiation apparatus of this embodiment is
It is configured to include an inlet exhaust passage 2, an outlet exhaust passage 12, an air ejection device 20, and an exhaust unit 28. As shown in FIG. 3, the entrance discharge path 2 is attached to the electron beam irradiation device so as to cover the carry-in entrance 32 of the transfer path 30, and the exit discharge path 12 is provided so as to cover the carry-out exit 33 of the transfer path 30. It is attached to a beam irradiation device.

The outlet exhaust passage 12 is for an intake port 14 for taking in external air, an exhaust port 16 for exhausting ozone together with the air, a cylindrical exhaust pipe 17, and an exhaust passage for carrying out the irradiation object A to the outside. And an outlet 12a.

The horizontal width (size A in FIG. 3) of the outlet discharge path 12 near the carry-out port 33 is set so that a large amount of ozone generated in the irradiation section 31 is prevented from flowing out from the carry-out port 33 to the outside. It is formed sufficiently larger than the width of the outlet 33. Further, since the amount of ozone flowing out from the carry-out port 33 side to the outside is larger than the amount of ozone flowing out from the carry-in port 32 side to the outside, the outlet discharge passage 12 is larger than the inlet discharge passage 2. You need to breathe air. Therefore, the depth of the outlet discharge passage 12 (dimension B in FIG. 3) is formed larger than the depth of the inlet discharge passage 2.

In addition, the air taken in from the intake port 14,
The ozone flowing out from the carry-out port 33 to the outlet discharge passage 12 and the cylindrical exhaust pipe 17 formed in the upper portion of the outlet discharge passage 12
In order to efficiently exhaust air to the
The outlet discharge path to the lower end is formed in a substantially mountain shape.
Inside the exhaust pipe 17, an air volume adjusting mechanism 1 for adjusting the amount of external air and ozone sucked into the outlet exhaust passage 12.
8 are provided.

The air ejecting device 20 provided in the outlet discharge passage 12 includes an air blowing portion 21 having a nozzle for injecting air onto the surface of an object to be irradiated, and an air blower pipe 22 for feeding air to the air blowing portion 21. , And a blower 23.
The length of the air blowing portion 21 is made sufficiently longer than the width of the irradiated object in order to prevent ozone generated in the surface layer of the web-shaped irradiated object A from flowing out together with the irradiated object. Further, the direction of the air blown out from the air blowing port 21 is approximately 135 degrees with respect to the web in order to strip the ozone generated in the surface layer of the irradiation target by blowing the air toward the surface of the irradiation target A. Is tilted. The blower 23 blows air into the air blowing portion 21 through the air blowing pipe 22 and ejects the air from the nozzle.

The inlet exhaust passage 2 is substantially the same as the outlet exhaust passage 12 except for the point that the air outlet 21 and the air blower pipe 22 are not provided. The inlet exhaust passage 2 includes an intake port 4 for taking in external air, an exhaust port 6 for exhausting ozone together with the air, and a cylindrical exhaust pipe 7.
It is configured to include a discharge path carry-in port 2a for carrying in the irradiation target A from the outside.

The width of the inlet discharge passage 2 in the vicinity of the carry-in port 32 is the same as that of the outlet discharge passage 12 in order to prevent a large amount of ozone generated in the irradiation section 31 from flowing out from the carry-in inlet 32 to the outside. It should be sufficiently larger than the width of the carry-in port 32. Further, similarly to the outlet exhaust passage 12, the intake port 4 through the exhaust pipe 7
The inlet discharge path 2 up to the lower end is formed in a mountain shape.
Further, the inlet exhaust passage 2 is also provided with an air volume adjusting mechanism 8 like the outlet exhaust passage 12.

The exhaust means 28 exhausts the air and ozone in the inlet exhaust passage 2 and the outlet exhaust passage 12 to the outside of the electron beam irradiation device or an ozone treatment device (not shown) through the passage 26. The outlet discharge path 12 and the inlet discharge path 2
The attachment to the electron beam irradiation device is fixed with bolts in consideration of hermeticity so that ozone gas does not flow out from the attachment portions of both.

Next, the operation of the apparatus of this embodiment will be described. As an operation in the preparation stage, first, the exhaust means 28 is driven to take in external air from the intake ports 4 and 14 of the discharge passages 2 and 12 on the carry-in port 32 side and the carry-out port 33 side. The intake amount of external air can be adjusted by the air flow rate adjusting mechanisms 8 and 18 provided in the exhaust pipes 7 and 17. This makes it possible to adjust the concentration of ozone discharged to the ozone treatment device (not shown) corresponding to the ozone generated in the irradiation unit 31 so as to be diluted with air to a level that can be treated by the ozone treatment device. Further, the blower 23 is driven to eject air from the nozzle of the air outlet 24 into the outlet discharge passage 12.

Next, the object to be irradiated is conveyed from the carry-in port 32 into the irradiation chamber 31 of the electron beam irradiation apparatus, and the object to be irradiated A is transferred to the window portion 41.
An electron beam is emitted when passing through the lower irradiation unit 31. At this time, a large amount of ozone is generated in the irradiation unit 31. Irradiation unit 3
A large amount of ozone generated in 1 flows into the carry-in port 32 and the carry-out port 33 of the irradiation object.

The ozone flowing into the carry-in port 32 and the carry-out port 33 is sucked by the carry-in passage 2 for the entrance provided on the side of the carry-in port 32 and the discharge passage 12 for the outlet provided at the side of the carry-out port 33, and both ozone are also discharged. It is discharged from the exhaust ports 6 and 16 together with the air from the outside sucked by the paths 2 and 12. The concentration of ozone discharged at this time is adjusted by the air flow rate adjusting mechanisms 8 and 18, and is diluted to such an extent that it can be processed by an ozone processing device (not shown).

Further, in order to prevent the ozone generated on the surface of the web-shaped object to be irradiated from flowing out to the outside together with the object to be irradiated, air is blown from the nozzle of the air outlet 21 onto the surface of the web to be irradiated. The ozone adhering to the surface of A is peeled off and blown back to the outlet discharge passage 12. It should be noted that the air and ozone exhausted from the exhaust passages 2 and 12 on the carry-in side and the carry-out side by the exhaust means 28 are directly discharged to the outside through the passage 26 if the ozone concentration is low. When the ozone concentration is higher than a predetermined reference value, it is sent to an ozone treatment device (not shown) or the like, where it is reduced to a predetermined ozone concentration and then discharged to the outside.

After the irradiation processing of the electron beam to the object to be irradiated is completed and the object to be irradiated is carried out from the carry-out port 33, the driving of the electron beam irradiation device is stopped. After that, the drive of the blower 23 is stopped. Since the ozone generated in the irradiation unit 31 remains inside the electron beam irradiation apparatus even after the driving of the electron beam irradiation apparatus is stopped, the exhaust means 28 remains for a while even after the driving of the electron beam irradiation apparatus is stopped. Drive during. Exhaust pipe 7,1
7 or a detector attached to the passage 26 or the like (not shown)
Thus, after confirming that no ozone remains in each of the discharge paths 2 and 12, the driving of the exhaust means 28 is stopped.

According to the above-described present embodiment, by attaching each discharge path to the entrance and exit sides of the object to be irradiated of the existing electron beam irradiation apparatus, ozone generated by the electron beam irradiation process is externally supplied. Since it is discharged to the outside together with the taken air, the concentration of ozone discharged to the outside can be reduced. Further, according to the present embodiment, by providing the air ejection device in the outlet discharge passage, it is possible to prevent the ozone attached to the surface of the irradiation target object from being discharged to the outside together with the irradiation target object. By providing the inlet discharge passage not only on the carry-out side but also on the carry-in side, the amount of ozone flowing out can be reduced.

The present invention is not limited to the above embodiment, but various modifications can be made within the scope of the gist thereof. For example, in the above embodiment, the exhaust means 1
Although the case where the air and ozone in each discharge path are discharged has been described above, the present invention is not limited to this.
Exhaust means may be provided for each discharge passage. Further, in the above embodiment, the case where the air flow rate adjusting mechanism and the air jetting device are provided has been described, but these may be omitted.

[0029]

As described above, according to the first aspect of the present invention, with the above configuration, the amount of ozone flowing out can be reduced and the amount of ozone generated can be reduced as compared with the conventional device. Since the generated ozone is discharged to the outside together with the air taken in from the outside, it is possible to provide an exhaust device for an electron beam irradiation device that can reduce the concentration of ozone discharged to the outside.

According to the second aspect of the present invention, in addition to the above-mentioned effects, an exhaust device for an electron beam irradiation device capable of reducing the amount of ozone flowing out by providing an air ejecting device is provided. Can be provided.

According to the third aspect of the present invention, in addition to the above effects, by providing an air flow rate adjusting mechanism, there is provided an exhaust system for an electron beam irradiation apparatus capable of adjusting the concentration of ozone to be discharged. be able to.

[Brief description of drawings]

FIG. 1 is a schematic view of an exhaust device for an electron beam irradiation device that is an embodiment of the present invention.

FIG. 2 is a side view of an outlet discharge passage of the apparatus of this embodiment.

FIG. 3 is a schematic overall view when the apparatus of this embodiment is attached to an electron beam irradiation apparatus.

FIG. 4 is a schematic view of an electron beam irradiation apparatus having a conventional exhaust device.

[Explanation of symbols]

 2 Inlet exhaust passage 2a Exhaust passage carry-in inlet 4 Inlet exhaust passage intake port 6 Inlet exhaust passage exhaust port 7 Inlet exhaust passage exhaust pipe 8 Airflow adjusting mechanism provided in inlet exhaust passage 12 For outlet Exhaust passage 12a Exhaust passage outlet 14 Inlet of outlet exhaust passage 16 Exhaust outlet of outlet 17 Exhaust pipe of outlet exhaust passage 18 Air volume adjustment mechanism provided in outlet exhaust passage 20 Air jetting device 21 Air Blow-out port 23 Blower 26 Passage 28 Exhaust means 30 Conveyance path 40 Electron beam generator

Claims (3)

[Claims] 1. An intake port formed to cover a carry-in port of an object to be irradiated and formed in a lower part for taking in external air,
An inlet discharge path having an exhaust port formed at an upper part for discharging ozone flowing out from the carry-in port together with the external air sucked from the intake port; An outlet discharge path having an intake port formed at a lower part for taking in air, and an exhaust port formed at an upper part for discharging ozone flowing out from the carry-out port together with external air sucked from the intake port; And an exhaust means for exhausting air and ozone in the outlet exhaust passage and the outlet exhaust passage, and an exhaust device for an electron beam irradiation device, comprising: 2. The object to be irradiated is in the form of a web,
A discharge outlet for discharging the irradiated object is formed in the discharge path for outlet, and for removing ozone adhered to the surface of the irradiated object above the vicinity of the discharge outlet for discharge. The exhaust device for an electron beam irradiation device according to claim 1, further comprising an air ejection device for ejecting air. 3. An air volume adjusting mechanism for adjusting an air volume between the intake port and the exhaust port is provided in the inlet exhaust passage and the outlet exhaust passage. The exhaust device for an electron beam irradiation device according to 1 or 2.