JPH06162433A - Magnetic head and its manufacture - Google Patents

Abstract

PURPOSE:To improve production yield and mass-productivity in the manufacture of a magnetic head core chip. CONSTITUTION:A core composite body 7 where a pair of core blocks 6 in which a magnetic thin film and a slider 4 are alternately layered are connected is joined at the part with the length of track width (t) in a state where a pair of magnetic thin films 3 and 3 in the core chip 1 which is manufactured by being sliced at the part of the slider 4 is position-deviated in a thick film direction. The film thickness of the magnetic thin film 3 at the center of the core block 6 is set to be track width and the film thickness of the magnetic thin film 3 is stepwise set to be larger with corresponding to a distance from the center. When the pair of the core blocks 6 and 6 are connected with the central magnetic thin films 3 and 3 as a positioning reference point, the respective core blocks 6 and 6 are position-deviated in the longitudinal direction so that the corresponding pair of magnetic thin films 3 and 3 are position-deviated. Track width (t) between the magnetic thin films 3 and 3 which are position- deviated by film thickness setting, is adopted as an allowable value.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated magnetic head mounted on a VTR device or the like and a method of manufacturing the same.

[0002]

2. Description of the Related Art In a core chip of a laminated magnetic head for high density recording, a laminated layer of a magnetic metal film having a high saturation magnetic flux density and an insulating thin film or a single magnetic thin film is sandwiched between non-magnetic sliders. The integrated structure is common. The core chip is manufactured, for example, as shown in FIGS.

First, a flat plate-shaped core base material (10) as shown in FIG. 4 is manufactured. This is a magnetic thin film (1
1) and a plurality of non-magnetic sliders (12) each having a predetermined thickness are alternately laminated and glass-welded. The magnetic thin film (11) is a laminated layer in which a metal magnetic film (13) such as sendust and an insulating thin film (14) such as alumina are alternately laminated, and is deposited on the side surface of the slider (12) by sputtering.

The core base material (10) is sliced at a constant pitch in the chain line direction of FIG. 4, which is the laminating direction of the magnetic thin film (11) and the slider (12), to form a plurality of rectangular bar-shaped core blocks shown in FIG. Get (15). The core block (15) is mirror-polished and, if necessary, a winding groove (not shown) is formed on the side surface. Then, the pair of core blocks (15) are joined and integrated to obtain a core composite body (16) shown in FIG.

The pair of core blocks (15) (15) are butted against each other by forming a thin film gap spacer (not shown) serving as a magnetic gap between the corresponding magnetic thin films (11), and by glass welding. To be joined. The core composite (16) is sliced from the slider (12) part in the direction of the chain line arrow in FIG. 6 (a) to obtain a plurality of core chips (17) of a certain width as shown in FIG. 6 (b). Manufactured.

A pair of magnetic thin films (11) of the core chip (17)
A magnetic gap having a predetermined track width t is formed at the abutting portion of (11). The track width t is the magnetic thin film (11).
It is designed to correspond to the film thickness d of (11).

[0007]

When a pair of core blocks (15) and (15) shown in FIG. 6 (a) are abutted with corresponding magnetic thin films (11) and (11) having the same film thickness d. Due to the warp between both core blocks (15) (15) and the displacement in the longitudinal direction, the corresponding magnetic thin films (11)
It is not possible to match all of (11), and a positional deviation occurs between the corresponding magnetic thin films (11) and (11) in the film thickness direction. The amount of positional deviation between the corresponding magnetic thin films (11) (11) is
The core blocks (15) (15) are accumulated in the longitudinal direction and gradually increase in size.

Therefore, as shown in FIG. 6 (a), a pair of core blocks (15) and (15) are joined by using the central magnetic thin films (11 ') and (11') as positioning reference points, respectively. The amount y of displacement of the magnetic thin films (11 '') (11 '') at the extreme ends of the core blocks (15) (15) is reduced. FIG. 6B shows a core chip (17) obtained by slicing the central portion of the core composite (16), and the track width t of the core chip (17) of the magnetic thin films (11 ′) and (11 ′) matched. It corresponds to the film thickness d. FIG. 6 (c) shows a core chip (17 ') obtained by slicing the end portion of the core composite (16), and the track width t'of this is a magnetic thin film (11'')(11''). )
The film thickness d is smaller than the film thickness d by 2 times the displacement amount y.

The core chip (17) of FIG. 6B has a track width t within the normal range, and is sent to the next step as a good track width product. The core chip (17 ') of FIG. 6 (c) is
If the positional deviation amount y of the magnetic thin films (11 ″) (11 ″) exceeds the allowable range, the track width t ′ becomes too small and the product is disposed as a defective track width small product.

The rate of occurrence of defective core chips with a small track width as described above increases as the number of laminated magnetic thin films of the core base material and sliders in FIG. 4 increases, thus deteriorating the yield of core chip manufacturing. It was Further, if the number of laminated magnetic thin films and sliders in the core base material is reduced, the
The amount of displacement of the magnetic thin film at both ends of the core composite in (a) is reduced, and the incidence of defective core chips with a small track width is reduced, but the number of core chips obtained from one core composite is reduced. However, there has been a problem that the mass productivity of core chips is deteriorated.

Therefore, the object of the present invention is to
It is an object of the present invention to provide a magnetic head having a high yield of core chips and good mass productivity, and a manufacturing method thereof.

[0012]

In order to achieve the above object, the present invention joins and integrates a pair of core halves in which a magnetic thin film is sandwiched and integrated by a slider made of a non-magnetic material by abutting the respective magnetic thin films. In the magnetic head having the core chip, the magnetic thin films of the pair of core halves have the same film thickness exceeding the predetermined track width and are displaced in the film thickness direction with respect to each other, and the track width portions are butt-joined. It is characterized by being In this magnetic head, the positional deviation amount of the pair of core half magnetic thin films in the film thickness direction is 1 to 2 μm.
It is desirable to be within the range.

Further, according to the present invention, the above magnetic head is manufactured in the following steps.

A flat core base material in which a plurality of magnetic thin films having stepwise different thicknesses and a plurality of non-magnetic sliders having a constant thickness are alternately laminated and integrated, and a plurality of parallel magnetic thin films are formed. A step of manufacturing a core base material in which the thickness is gradually increased from the center to both ends in the stacking direction with the slider, and the core base material is laminated in the stacking direction of the magnetic thin film and the slider. Slicing into a plurality of square bar-shaped core blocks, and a pair of core blocks, the magnetic thin films at the center of each core are used as positioning reference points, and the corresponding magnetic thin films of the same thickness are butted. The method is characterized by including a step of manufacturing a core composite body by joining and integrating and a step of cutting the core composite body from a part of a slider to manufacture a plurality of core chips having a constant thickness.

[0015]

Operation: A pair of magnetic thin films that are joined at both ends of a core composite obtained by joining and integrating a pair of rectangular rod-shaped core blocks made of the same core base material with the magnetic thin film at the center of the core block joined to the positioning reference point The position shifts in the film thickness direction, and the amount of the position shift gradually increases toward the end of the core composite. Therefore, if the thickness of the magnetic thin films arranged in parallel in the longitudinal direction of the core block is set to be larger as it approaches the end of the core block according to the amount of displacement, the corresponding pair of ends of the core composite is set. The amount of positional deviation of the magnetic thin film is absorbed by the increase in film thickness that is larger than the specified value of the magnetic thin film, and the track width formed by the magnetic thin film at the end of the core composite is set within the allowable range. You can

[0016]

Embodiments Embodiments shown in FIGS. 1 to 3 will be described. The core composite (7) is shown in FIG.
1 (b) and 1 (c) show two core chips (1) (1 ') obtained from the core composite (7), and FIGS.
Is the core base material (5) in the previous step of manufacturing the core composite (7)
And the core block (6) is shown.

In the core chip (1) of FIG. 1 (b), each magnetic thin film (3) (3) of a pair of core halves (2) (2) sandwiching a magnetic thin film (3) between sliders (4) The core chip (1) shown in FIG.
7 ') is each magnetic thin film (3) of a pair of core halves (2) (2)
It is shown that (3) is bonded while being displaced in the film thickness direction. The manufacturing process of the core chips (1) (1 ') according to the present invention will be described below.

First, as shown in FIG. 2, a flat plate-shaped core base material (5) in which a plurality of magnetic thin films (3) and a plurality of square rod-shaped non-magnetic sliders (4) are alternately laminated is integrated. To manufacture.
The sliders (4) have the same size, and the magnetic thin films (3) sputtered on the respective side surfaces of the sliders (4) have stepwise different film thicknesses as described later. Magnetic thin film (3)
Is a laminated layer or a single layer in which a metal magnetic film such as sendust and an insulating thin film such as alumina are alternately laminated.

The magnetic thin film (3) of the core base material (5) and the magnetic thin film at the center in the stacking direction of the slider (4) are (3-0), and the magnetic thin films arranged on both sides of the magnetic thin film are arranged in order from the inside (3-1). ~ (3-n), the thickness d of the central magnetic thin film (3-0) is the smallest,
The film thickness of the two magnetic thin films (3-1) and (3-1) adjacent to both sides of the magnetic thin film (3-0) is set to the second smallest value. In this way, the film thickness of the magnetic thin film (3) is gradually increased as the core base material (5) is closer to both ends from the center. Thickness d of the magnetic thin film (3-0) in the center of the core base material (5)
Is set to a value corresponding to a predetermined track width t of the core chip product, and the magnetic thin films (3-1) to (3-n) separated from the central magnetic thin film (3-0) by one pitch in slider thickness. The rate of increase of the film thickness is made to correspond to the amount of positional deviation when the pair of core blocks (6) and (6) in FIG.

The core base material (5) is sliced at a constant pitch in the chain line direction of FIG. 2 to manufacture a plurality of rectangular bar core blocks (6) of the same size and shape shown in FIG. After mirror-polishing the core block (6) and forming winding grooves (not shown) on the side surfaces as necessary, a pair of core blocks (6) (6) are formed as shown in FIG. 1 (a). The core composite (7) is manufactured by positioning and joining via a gap spacer (not shown) and integrating them by glass welding.

Slicing each slider (4) of the core composite (7) in the direction of the chain line arrow in FIG.
The core chips (1) and (1 ') shown in (b) and (c) are manufactured. The core chip (1) of FIG. 1 (b) is obtained by slicing the central part of the core composite body (7).
The core chip (1 ') is a slice of the end of the core composite (7).

Here, one of the pair of core blocks (6) and (6) constituting the core composite body (7) of FIG. 1 (a) is the first core block (6a) and the other is the second core block (6b). ) Are magnetic thin films (3a-0) to (3a-n) extending from the center of the first core block (6a) to both ends, and the second core block (6a).
b) Magnetic thin films (3b-0) to (3b)
-n). The first core block (6a) and the second core block (6b) are joined by the magnetic thin film (3a-0) in the center of both.
Use (3b-0) as a positioning reference to make a match. In this case, other magnetic thin films (3a-1) to (3a-n), (3b-
The amount of positional deviation in the film thickness direction of the abutted portions of 1) to (3b-n) gradually increases as the distance from the central magnetic thin film (3a-0) (3b-0) increases, and the magnetic thin films at the outermost ends ( 3a-n)
The positional deviation amount x of (3b-n) becomes maximum.

The thicknesses of the magnetic thin films (3a-n) (3b-n) at the outermost ends are the same as those of the magnetic thin films (3a-n) (3b-n), and the central magnetic thin film (3a-0 ) (3b-0) is set to be larger than the film thickness d, and similarly, the film thickness of each of the other magnetic thin films (3) ... Is also set. By setting this thickness, the magnetic thin films (3a-n) at the extreme ends where the largest positional deviation appears.
The length of the junction of (3b-n), that is, the track width t
Becomes [t = (d + x) -x = d], which is the same specified value as the track width t of the central magnetic thin films (3a-0) (3b-0). Similarly, other magnetic thin films (3a-1) to (3a-
n), the track width t by (3b-1) to (3b-n) is also
The specified value is almost the same as the track width t of the magnetic thin films (3a-0) (3b-0) in the center.

Therefore, the core chip (1) of FIG. 1 (b) manufactured by slicing the central part of the core composite (7).
Also, the core chip (1 ') of FIG. 1 (c) manufactured by slicing the outermost ends of the core composite (7) is also a good product having substantially the same track width t.

The core chip (1 ') obtained by slicing the outermost ends of the core composite (7) has a good track width, but the thickness of the magnetic thin film (3a-0) (3b-0) is equal to or larger than that. If the amount of misalignment x increases, the track width may become a small defective product. The permissible range of the positional deviation amount x varies depending on the permissible range of the error of the track width. According to experiments, if the positional deviation amount x is within the range of 1 to 2 μm, a small track width defective product does not occur. I know it.

[0026]

According to the present invention, a pair of rectangular rod-shaped core blocks made of the same core base material are integrally bonded to a central portion of a magnetic thin film at the center of the core block to form a central portion of a core composite body. Even if the pair of magnetic thin films bonded at both ends are misaligned in the film thickness direction, the film thickness of the magnetic thin films is set stepwise according to this misalignment amount. The track width, which is the length of the joint, can be set within the allowable range, and the track width small defective products of multiple core chips manufactured by slicing the core composite are significantly reduced, The quality can be stabilized and the yield can be improved. Further, the number of laminated magnetic thin films of the core composite and the slider can be increased to facilitate mass production.

The magnetic thin film has a predetermined track width of 1 to
Since it can be formed in a film thickness range with a margin including a thickness of 2 μm, it is possible to increase the processing capacity (the number of processes) of equipment for forming a magnetic thin film on a slider by sputtering, etc. Mass production is possible.

[Brief description of drawings]

1A is a plan view showing an example of a core composite body manufactured by the method of the present invention, and FIGS. 1B and 1C are plan views manufactured by slicing the core composite body of FIG. 1A. Top view of two core chips with different shapes

FIG. 2 is a perspective view showing an example of a core base material manufactured by the method of the present invention.

FIG. 3 is a perspective view of a core block manufactured by slicing the core base material shown in FIG. 2;

FIG. 4 is a perspective view of a core base material used for manufacturing a conventional magnetic head.

FIG. 5 is a perspective view of a core block manufactured by slicing the core base material shown in FIG. 4;

6 (a) is a plan view of a core composite manufactured by joining the core blocks of FIG. 5, and (b) and (c) are manufactured by slicing the core composite of FIG. 6 (a). Plan view of two core chips with different planar shapes

[Explanation of symbols]

 1 core chip 1'core chip 2 core half body 3 magnetic thin film 4 slider 5 core base material 6 core block 7 core composite

Claims (3)

[Claims] 1. A magnetic head having a core chip in which a pair of core halves, in which a magnetic thin film is sandwiched between non-magnetic sliders and integrated, is joined and integrated by abutting the respective magnetic thin films, the pair of core halves. Of the magnetic thin film having the same film thickness exceeding a predetermined track width, and being displaced from each other in the film thickness direction, and the length portions of the track width are butted and joined. 2. The magnetic head according to claim 1, wherein the amount of positional deviation of the magnetic thin films of the pair of core halves in the film thickness direction is 1 to 2 μm. 3. A flat plate-shaped core base material in which a plurality of magnetic thin films having stepwise different film thicknesses and a plurality of non-magnetic sliders having a constant thickness are alternately laminated and integrated, and a plurality of parallel magnetic thin films are provided. The step of manufacturing the core base material in which the film thickness of the core base material is gradually increased from the center to both ends in the stacking direction with the slider, and A process of manufacturing a plurality of rectangular bar-shaped core blocks by slicing in the stacking direction, and using a pair of core blocks, with the magnetic thin films at the center of each core as positioning reference points, the corresponding magnetic thin films of the same thickness are formed. Manufacture of a magnetic head characterized by having a step of manufacturing a core composite body by butting and joining together, and a step of cutting the core composite body from a portion of a slider to manufacture a plurality of core chips having a certain thickness. Method.