JPH06152407A - Rubidium gas cell for rubidium atom oscillator - Google Patents

Rubidium gas cell for rubidium atom oscillator

Info

Publication number
JPH06152407A
JPH06152407A JP4303466A JP30346692A JPH06152407A JP H06152407 A JPH06152407 A JP H06152407A JP 4303466 A JP4303466 A JP 4303466A JP 30346692 A JP30346692 A JP 30346692A JP H06152407 A JPH06152407 A JP H06152407A
Authority
JP
Japan
Prior art keywords
rubidium
gas cell
cylindrical portion
cavity
face plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4303466A
Other languages
Japanese (ja)
Other versions
JPH0817329B2 (en
Inventor
Naoki Ishihara
直樹 石原
Hisami Yamahata
久美 山端
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP4303466A priority Critical patent/JPH0817329B2/en
Publication of JPH06152407A publication Critical patent/JPH06152407A/en
Publication of JPH0817329B2 publication Critical patent/JPH0817329B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To provide rubidium gas cell for a rubidium atom oscillator which can reduce Q inside a cavity part, eliminates the loss of light and can move the retaining of rubidium metal to the outside of a cavity part. CONSTITUTION:The rubidium gas cell is provided with duplex cylinder structure communicating a first small-diameter cylindrical part 10 with a second large- diameter cylindrical part 20, and a circular dielectric panel 8' is provided on the outer periphery of the first cylindrical part 10. Therefore, the Q inside a cavity part 1 can be reduced, the stability of a frequency against microwave level fluctuation can be improved, and the loss of light caused by the dielectric panel 8' is eliminated, as well. On the other hand, the rubidium gas cell is provided with a hollow projecting part 20 protruding from a part of the outer wall of the second cylindrical part 20 to the outside of the cavity part 1. Therefore, the hollow projecting part 3 is cooled down, undeseired rubidium metal is stocked at the hollow projecting part 3, and the diffusion of rubidium metal can be prevented, thus, characteristic stabilized for a long period can be provided. Further, the length of the cavity can be shortened by adding the dielectric panel 8'.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ルビジウム原子発振器
の光マイクロ波共鳴部に使用するルビジウムガスセルに
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rubidium gas cell used for an optical microwave resonance part of a rubidium atomic oscillator.

【0002】[0002]

【従来の技術】従来、図3のように、ルビジウム原子発
振器内のキャビティ部1内に、大小2つの円筒形が同軸
状に直列につながったルビジウムガスセル2を挿入して
おり、またキャビティ部1内のキャビティ長を短縮する
場合には、キャビティ部1の光透過孔11とルビジウム
ガスセル2との間に誘電体板12を挿入している。図に
おいて、7は光受光素子である。
2. Description of the Related Art Conventionally, as shown in FIG. 3, a rubidium gas cell 2 in which two large and small cylindrical shapes are coaxially connected in series is inserted in a cavity 1 in a rubidium atomic oscillator, and the cavity 1 When the cavity length inside is shortened, the dielectric plate 12 is inserted between the light transmission hole 11 of the cavity portion 1 and the rubidium gas cell 2. In the figure, 7 is a light receiving element.

【0003】[0003]

【発明が解決しようとする課題】ルビジウム原子発振器
内のキャビティ部1内に、ルビジウムガスセル2だけを
挿入した場合、キャビティ部1の内部のQが高くなるた
め、経時的なキャビティ部1の内部のマイクロ波レベル
変化が大きくなり、長期周波数安定度が悪くなるという
欠点があった。
When only the rubidium gas cell 2 is inserted into the cavity portion 1 of the rubidium atomic oscillator, the inside Q of the cavity portion 1 becomes high, so that the inside of the cavity portion 1 over time becomes high. There is a drawback that the microwave level change becomes large and the long-term frequency stability deteriorates.

【0004】又、キャビティ部1内のキャビティ長を短
縮するために、光透過孔11とルビジウムガスセル2と
の間に誘電体板12を挿入すると、誘電体板12による
光のロスは避けられず、ルビジウムガスセル2に至る光
のロスが多くなり、信号強度が低下する欠点がある。更
にルビジウム金属の溜まりがキャビティ部1の内部にく
るため、ルビジウム金属の溜まり部分の温度が上昇し、
ルビジウムガスセル2内に拡散し、長期的に使用する
と、キャビティ部1の内部のマイクロ波レベルが低下す
るという欠点があった。
If the dielectric plate 12 is inserted between the light transmission hole 11 and the rubidium gas cell 2 in order to shorten the cavity length in the cavity portion 1, light loss due to the dielectric plate 12 cannot be avoided. However, there is a drawback that the loss of light reaching the rubidium gas cell 2 increases and the signal strength decreases. Further, since the pool of the rubidium metal comes inside the cavity portion 1, the temperature of the pool portion of the rubidium metal rises,
When it diffuses in the rubidium gas cell 2 and is used for a long period of time, there is a drawback that the microwave level inside the cavity 1 is lowered.

【0005】本発明の第1の課題は、キャビティ部の内
部のQを低くでき、光のロスのないルビジウム原子発振
器用ルビジウムガスセルを提供することにある。
A first object of the present invention is to provide a rubidium gas cell for a rubidium atomic oscillator, which can reduce the Q in the cavity portion and has no light loss.

【0006】本発明の第2の課題は、不要なルビジウム
金属の溜まりをキャビティ部の外部に移し得るルビジウ
ム原子発振器用ルビジウムガスセルを提供することにあ
る。
A second object of the present invention is to provide a rubidium gas cell for a rubidium atomic oscillator, which can move unnecessary pools of rubidium metal to the outside of the cavity.

【0007】[0007]

【課題を解決するための手段】本発明によれば、一端に
円板状の面板を有し、他端が開放された、第1の内径及
び第1の外径を有する第1の円筒状部と、前記第1の内
径に等しい径の孔を持つ円環状の面板を一端に有し、他
端に円板状の面板を有し、前記第1の内径よりも大きい
第2の内径及び前記第1の外径よりも大きい第2の外径
を有する第2の円筒状部とを備え、前記第1及び前記第
2の円筒状部が同一軸上に配列されるように、前記第1
の円筒状部の前記他端と前記第2の円筒状部の前記一端
の前記円環状の面板とが接続されたルビジウム原子発振
器用ルビジウムガスセルにおいて、前記第1の円筒状部
の外周に設けられ、前記第1の外径に等しい内径を有し
且つ前記第2の外径に等しい外径を有する円環状の誘電
体板を備えたことを特徴とするルビジウム原子発振器用
ルビジウムガスセルが得られる。
According to the present invention, there is provided a first cylindrical shape having a first inner diameter and a first outer diameter, which has a disk-shaped face plate at one end and is open at the other end. A second inner diameter larger than the first inner diameter, and a circular face plate having a hole having a diameter equal to the first inner diameter at one end and a disc-shaped face plate at the other end. A second cylindrical portion having a second outer diameter larger than the first outer diameter, wherein the first and second cylindrical portions are arranged on the same axis. 1
In a rubidium gas cell for a rubidium atomic oscillator, wherein the other end of the cylindrical portion and the annular face plate at the one end of the second cylindrical portion are connected to each other, the rubidium gas cell is provided on the outer periphery of the first cylindrical portion. There is provided a rubidium gas cell for a rubidium atomic oscillator, comprising an annular dielectric plate having an inner diameter equal to the first outer diameter and an outer diameter equal to the second outer diameter.

【0008】更に本発明によれば、前記第2の円筒状部
の外壁には、突出先端に面板を有し、内部空間が前記第
2の円筒状部の内部空間と連通する中空突出部が形成さ
れていることを特徴とするルビジウム原子発振器用ルビ
ジウムガスセルが得られる。
Further, according to the present invention, the outer wall of the second cylindrical portion has a face plate at a protruding tip, and a hollow protruding portion whose inner space communicates with the inner space of the second cylindrical portion. A rubidium gas cell for a rubidium atomic oscillator, which is characterized in that it is formed.

【0009】また本発明によれば、前記中空突出部は、
前記第2の円筒状部の前記円環状の面板から前記円環状
の誘電体板を貫通して外方に突出していることを特徴と
するルビジウム原子発振器用ルビジウムガスセルが得ら
れる。
Further, according to the present invention, the hollow protrusion is
A rubidium gas cell for a rubidium atomic oscillator is obtained, which penetrates the annular dielectric plate from the annular face plate of the second cylindrical portion and projects outward.

【0010】更に本発明によれば、前記円環状の誘電体
板が、前記第2の円筒状部の前記円環状の面板に接した
状態に、前記第1の円筒状部の外周に設けられているこ
とを特徴とするルビジウム原子発振器用ルビジウムガス
セルが得られる。
Further, according to the present invention, the annular dielectric plate is provided on the outer periphery of the first cylindrical portion while being in contact with the annular face plate of the second cylindrical portion. A rubidium gas cell for a rubidium atomic oscillator is obtained.

【0011】[0011]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0012】図1は、本発明の一実施例によるルビジウ
ム原子発振器用ルビジウムガスセル2´の正面図であ
り、図2は、このルビジウムガスセル2´をキャビティ
部1の内部に装填した場合の断面図である。
FIG. 1 is a front view of a rubidium gas cell 2'for a rubidium atomic oscillator according to an embodiment of the present invention, and FIG. 2 is a sectional view of the rubidium gas cell 2'when it is loaded inside a cavity 1. Is.

【0013】このルビジウムガスセル2´は、第1及び
第2の円筒状部10及び20を備えている。第1の円筒
状部10は、一端に円板状の面板4を有し、他端が開放
されており、第1の内径及び第1の外径を有している。
第2の円筒状部20は、第1の内径に等しい径の孔を持
つ円環状の面板5を一端に有し、他端に円板状の面板6
を有し、第1の内径よりも大きい第2の内径及び第1の
外径よりも大きい第2の外径を有している。そして、第
1及び第2の円筒状部10及び20が同一軸上に配列さ
れるように、第1の円筒状部10の前記他端と第2の円
筒状部20の前記一端の円環状の面板5とが接続されて
いる。
The rubidium gas cell 2'includes first and second cylindrical portions 10 and 20. The first cylindrical portion 10 has a disc-shaped face plate 4 at one end, is open at the other end, and has a first inner diameter and a first outer diameter.
The second cylindrical portion 20 has an annular face plate 5 having a hole having a diameter equal to the first inner diameter at one end and a disc face plate 6 at the other end.
And has a second inner diameter larger than the first inner diameter and a second outer diameter larger than the first outer diameter. An annular shape of the other end of the first cylindrical part 10 and the one end of the second cylindrical part 20 is arranged so that the first and second cylindrical parts 10 and 20 are arranged on the same axis. Is connected to the face plate 5.

【0014】ルビジウムガスセル2´は、ルビジウム金
属が封入されたガラスでできており、また、ルビジウム
ガスセル2´の外壁の一部はキャビティ部1の内壁に固
定される。
The rubidium gas cell 2'is made of glass in which rubidium metal is enclosed, and a part of the outer wall of the rubidium gas cell 2'is fixed to the inner wall of the cavity 1.

【0015】円環状の誘電体板8´は、第1の外径に等
しい内径を有し且つ第2の外径に等しい外径を有し、円
環状の誘電体板8´が、第2の円筒状部20の円環状の
面板5に接した状態に、第1の円筒状部10の外周に設
けられている。
The annular dielectric plate 8'has an inner diameter equal to the first outer diameter and an outer diameter equal to the second outer diameter, and the annular dielectric plate 8'has a second outer diameter. It is provided on the outer periphery of the first cylindrical portion 10 in a state of being in contact with the annular face plate 5 of the cylindrical portion 20.

【0016】誘電体板8´の挿入により、キャビティ部
1内のキャビティ長を短縮することができる。また、テ
フロン材(誘電体)等にて作られた誘電体板8´によ
り、キャビティ部1の内部のQを下げることができ、マ
イクロ波レベル変動に対する周波数安定度を向上させる
ことができる。
By inserting the dielectric plate 8 ', the cavity length in the cavity portion 1 can be shortened. Further, the dielectric plate 8'made of Teflon material (dielectric) or the like can lower the Q in the cavity portion 1 and improve the frequency stability with respect to microwave level fluctuation.

【0017】第2の円筒状部20の円環状の面板5に
は、突出先端に面板40を有し、内部空間が第2の円筒
状部20の内部空間と連通する中空突出部3が形成され
ている。この中空突出部3は、第2の円筒状部20の円
環状の面板5から円環状の誘電体板8´を貫通して外方
に突出している。この中空突出部3の突出先端はキャビ
ティ部1の外側まで出ることが可能である。従って、中
空突出部3の突出先端は充分に冷却され、不要なルビジ
ウム金属は中空突出部3の突出先端部に溜まる。
The annular face plate 5 of the second cylindrical portion 20 has a face plate 40 at the projecting tip, and a hollow protrusion 3 is formed so that the inner space communicates with the inner space of the second cylindrical portion 20. Has been done. The hollow protruding portion 3 penetrates the annular dielectric plate 8 ′ from the annular face plate 5 of the second cylindrical portion 20 and projects outward. The protruding tip of the hollow protruding portion 3 can extend to the outside of the cavity portion 1. Therefore, the protruding tip of the hollow protruding portion 3 is sufficiently cooled, and unnecessary rubidium metal is collected in the protruding tip portion of the hollow protruding portion 3.

【0018】ルビジウムガスセル2´は光を受けてその
光を吸収した後、光受光素子7にて通過光を検出するた
め、光通過面は必要最低限のもので構成する必要があ
り、本実施例では、2つの面板4及び6のみに抑えられ
ている。このため、光の損失を最低限に抑えることが可
能である。
Since the rubidium gas cell 2'receives light and absorbs the light, and then detects the passing light by the light receiving element 7, it is necessary to configure the light passing surface by the minimum necessary. In the example, only two face plates 4 and 6 are used. Therefore, it is possible to minimize the loss of light.

【0019】[0019]

【発明の効果】以上説明したように本発明によるルビジ
ウムガスセルは、小径の第1の円筒状部と大径の第2の
円筒状部からなる2重円筒構造をとり、第1の円筒状部
の外周に円環状の誘電体板を備えているため、キャビテ
ィ部内のQを適度に下げることができ、マイクロ波レベ
ル変動に対する周波数安定度の向上が図れ、高性能化が
図れ、誘電体板8´による光のロスもない。
As described above, the rubidium gas cell according to the present invention has a double cylindrical structure composed of a small-diameter first cylindrical portion and a large-diameter second cylindrical portion, and has a first cylindrical portion. Since an annular dielectric plate is provided on the outer periphery of the dielectric plate, Q in the cavity can be appropriately lowered, frequency stability against microwave level fluctuation can be improved, performance can be improved, and dielectric plate 8 There is no loss of light due to ´.

【0020】また、本発明によるルビジウムガスセル
は、第2の円筒状部の外壁の一部から突出する中空突出
部を有する構造をとり、また、ルビジウムガスセルに誘
電体板を設けても、中空突出部が冷却されるため、不要
なルビジウム金属の溜まりをキャビティ部の外部に移し
得て、ルビジウム金属の拡散を防止でき、長期的に安定
した特性が得られ、品質及び特性の向上が図れる。
Further, the rubidium gas cell according to the present invention has a structure having a hollow projecting portion projecting from a part of the outer wall of the second cylindrical portion, and even if the rubidium gas cell is provided with a dielectric plate, the hollow projecting portion is hollow. Since the portion is cooled, an unnecessary pool of rubidium metal can be transferred to the outside of the cavity portion, diffusion of rubidium metal can be prevented, stable characteristics can be obtained for a long time, and quality and characteristics can be improved.

【0021】更に、誘電体板がルビジウムガスセルに付
加されているため、キャビティ部内のキャビティ長を短
縮することができる。
Further, since the dielectric plate is added to the rubidium gas cell, the cavity length inside the cavity can be shortened.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例によるルビジウム原子発振器
用ルビジウムガスセルの正面図。
FIG. 1 is a front view of a rubidium gas cell for a rubidium atomic oscillator according to an embodiment of the present invention.

【図2】図1のルビジウムガスセルをキャビティ部の内
部に装填した状態の断面図。
FIG. 2 is a cross-sectional view showing a state in which the rubidium gas cell of FIG. 1 is loaded inside a cavity.

【図3】従来のルビジウムガスセルをキャビティ部の内
部に装填した状態の断面図。
FIG. 3 is a cross-sectional view showing a state in which a conventional rubidium gas cell is loaded inside a cavity.

【符号の説明】[Explanation of symbols]

1 キャビティ部 2 ルビジウムガスセル 2´ ルビジウムガスセル 3 中空突出部 4 円板状の面板 5 円環状の面板 6 円板状の面板 7 光受光素子 8´ 誘電体板 10 第1の円筒状部 11 光透過孔 12 誘電体板 20 第2の円筒状部 40 面板 1 Cavity Part 2 Rubidium Gas Cell 2'Rubidium Gas Cell 3 Hollow Projection Part 4 Disc Face Plate 5 Annular Face Plate 6 Disc Face Plate 7 Light Receiving Element 8'Dielectric Plate 10 First Cylindrical Part 11 Light Transmission Hole 12 Dielectric plate 20 Second cylindrical portion 40 Face plate

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 一端に円板状の面板を有し、他端が開放
された、第1の内径及び第1の外径を有する第1の円筒
状部と、 前記第1の内径に等しい径の孔を持つ円環状の面板を一
端に有し、他端に円板状の面板を有し、前記第1の内径
よりも大きい第2の内径及び前記第1の外径よりも大き
い第2の外径を有する第2の円筒状部とを備え、 前記第1及び前記第2の円筒状部が同一軸上に配列され
るように、前記第1の円筒状部の前記他端と前記第2の
円筒状部の前記一端の前記円環状の面板とが接続された
ルビジウム原子発振器用ルビジウムガスセルにおいて、 前記第1の円筒状部の外周に設けられ、前記第1の外径
に等しい内径を有し且つ前記第2の外径に等しい外径を
有する円環状の誘電体板を備えたことを特徴とするルビ
ジウム原子発振器用ルビジウムガスセル。
1. A first cylindrical portion having a disk-shaped face plate at one end and an opening at the other end and having a first inner diameter and a first outer diameter; and a first cylindrical portion equal to the first inner diameter. A ring-shaped face plate having a hole of a diameter at one end, and a disc-shaped face plate at the other end, and a second inner diameter larger than the first inner diameter and a first outer diameter larger than the first outer diameter. A second cylindrical portion having an outer diameter of 2, and the other end of the first cylindrical portion so that the first and second cylindrical portions are arranged on the same axis. In the rubidium gas cell for a rubidium atomic oscillator, which is connected to the annular face plate at the one end of the second cylindrical portion, the rubidium gas cell for the rubidium atomic oscillator is provided on the outer periphery of the first cylindrical portion, and is equal to the first outer diameter. Rubidium atomic oscillation characterized by including an annular dielectric plate having an inner diameter and an outer diameter equal to the second outer diameter Rubidium gas cell for dexterity.
【請求項2】 前記第2の円筒状部の外壁には、突出先
端に面板を有し、内部空間が前記第2の円筒状部の内部
空間と連通する中空突出部が形成されていることを特徴
とする請求項1に記載のルビジウム原子発振器用ルビジ
ウムガスセル。
2. A hollow projecting portion is formed on an outer wall of the second cylindrical portion, the hollow projecting portion having a face plate at a projecting tip and having an inner space communicating with the inner space of the second cylindrical portion. A rubidium gas cell for a rubidium atomic oscillator according to claim 1.
【請求項3】 前記中空突出部は、前記第2の円筒状部
の前記円環状の面板から前記円環状の誘電体板を貫通し
て外方に突出していることを特徴とする請求項1及び2
のいずれかに記載のルビジウム原子発振器用ルビジウム
ガスセル。
3. The hollow projecting portion projects outward from the annular face plate of the second cylindrical portion through the annular dielectric plate. And 2
A rubidium gas cell for a rubidium atomic oscillator according to any one of 1.
【請求項4】 前記円環状の誘電体板が、前記第2の円
筒状部の前記円環状の面板に接した状態に、前記第1の
円筒状部の外周に設けられていることを特徴とする請求
項1、2、及び3のいずれかに記載のルビジウム原子発
振器用ルビジウムガスセル。
4. The annular dielectric plate is provided on the outer periphery of the first cylindrical portion while being in contact with the annular face plate of the second cylindrical portion. The rubidium gas cell for a rubidium atomic oscillator according to any one of claims 1, 2 and 3.
JP4303466A 1992-11-13 1992-11-13 Rubidium gas cell for rubidium atomic oscillator Expired - Fee Related JPH0817329B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4303466A JPH0817329B2 (en) 1992-11-13 1992-11-13 Rubidium gas cell for rubidium atomic oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4303466A JPH0817329B2 (en) 1992-11-13 1992-11-13 Rubidium gas cell for rubidium atomic oscillator

Publications (2)

Publication Number Publication Date
JPH06152407A true JPH06152407A (en) 1994-05-31
JPH0817329B2 JPH0817329B2 (en) 1996-02-21

Family

ID=17921307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4303466A Expired - Fee Related JPH0817329B2 (en) 1992-11-13 1992-11-13 Rubidium gas cell for rubidium atomic oscillator

Country Status (1)

Country Link
JP (1) JPH0817329B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007287835A (en) * 2006-04-14 2007-11-01 Epson Toyocom Corp Rubidium atomic oscillator
JP2008192722A (en) * 2007-02-02 2008-08-21 Epson Toyocom Corp Method for manufacturing centrifugal reservoir and rubidium lamp or rubidium gas cell
JP2013150334A (en) * 2013-03-04 2013-08-01 Seiko Epson Corp Atomic oscillator and control method thereof
US9507322B2 (en) 2014-10-29 2016-11-29 Seiko Epson Corporation Atomic cell manufacturing method, atomic cell, quantum interference device, atomic oscillator, electronic device, and moving object
US9654125B2 (en) 2014-06-03 2017-05-16 Seiko Epson Corporation Atom cell, quantum interference device, atomic oscillator, electronic apparatus, and moving object

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108381A (en) * 1982-12-14 1984-06-22 Nec Corp Rubidium atom oscillator
JPS62178557U (en) * 1986-04-30 1987-11-12
JPH04302219A (en) * 1991-03-29 1992-10-26 Nec Corp Rubidium atom oscillator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108381A (en) * 1982-12-14 1984-06-22 Nec Corp Rubidium atom oscillator
JPS62178557U (en) * 1986-04-30 1987-11-12
JPH04302219A (en) * 1991-03-29 1992-10-26 Nec Corp Rubidium atom oscillator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007287835A (en) * 2006-04-14 2007-11-01 Epson Toyocom Corp Rubidium atomic oscillator
JP2008192722A (en) * 2007-02-02 2008-08-21 Epson Toyocom Corp Method for manufacturing centrifugal reservoir and rubidium lamp or rubidium gas cell
JP2013150334A (en) * 2013-03-04 2013-08-01 Seiko Epson Corp Atomic oscillator and control method thereof
US9654125B2 (en) 2014-06-03 2017-05-16 Seiko Epson Corporation Atom cell, quantum interference device, atomic oscillator, electronic apparatus, and moving object
US9507322B2 (en) 2014-10-29 2016-11-29 Seiko Epson Corporation Atomic cell manufacturing method, atomic cell, quantum interference device, atomic oscillator, electronic device, and moving object

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