JPH06151327A - Member for thin-film manufacturing apparatus - Google Patents

Abstract

PURPOSE:To obtain a thin-film manufacturing apparatus wherein its weight is light and its heat capacity is low by a method wherein a member, for the thin-film manufacturing apparatus, such as a tray and a soaking plate, is constituted of glassy carbon. CONSTITUTION:Glassy carbon is used for members, for a thin-film manufacturing apparatus, such as a tray 1 and a soaking plate 2. The glassy carbon is obtained in such a way that a thermoset resin such as a furan resin and a phenolic resin or a mixed resin of them is molded and hardened to a uniform-thickness flat plate, that the flat plate is then baked and carbonized at a temperature of about 1000 deg.C in an inert gas atmosphere and that the flat plate is treated to become graphite at a temperature of up to 3000 deg.C as required. Thereby, the weight of the thin-film manufacturing apparatus can be made light and the heat capacity of the apparatus can be made low without changing its mechanical constitution.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a member of a thin film manufacturing and processing apparatus such as a tray and a heat equalizing plate mainly used for manufacturing electronic parts.

[0002]

2. Description of the Related Art Conventionally, in a thin film manufacturing / processing apparatus for electronic parts and the like, stainless steel or a high nickel alloy has been used for its tray and soaking plate. This is because the tray and soaking plate have high corrosion resistance in a corrosive atmosphere, good characteristics in vacuum (especially low degassing and impurities), good electrical conductivity, and low thermal expansion. In addition, it must meet the requirements of high thermal conductivity above a certain value and low dust generation.
This is because the metal material was selected. However, when manufacturing and processing a thin film, it is necessary to heat and cool the tray, the substrate (hereinafter abbreviated as substrate) mounted on the tray, and the soaking plate to an appropriate temperature. Currently, it takes about 20 minutes to heat from room temperature to 300 ° C. and about 15 minutes to cool from 300 ° C. to 100 ° C. In the past, in order to shorten the time required for heating and cooling, it was inevitable to increase the number of chambers used for heating and cooling.

[0003]

Since the conventional metal trays and heat equalizing plates have a high density of materials, the weight of the trays increases as the size of the apparatus increases, and the product of the specific heat and the density (heat capacity) of the materials ) Is large, it is difficult to heat up and it is difficult to cool down. Then, this leads to an increase in size, weight and cost of the entire device. In addition, because of this, a long time is required for heating and cooling in the current tray type thin film manufacturing / processing apparatus. Therefore, in order to improve the throughput of the conventional device, it is necessary to take measures such as adding a heating and cooling chamber, which causes problems such as high price and increase in device installation area. It is an object of the present invention to provide a member for a thin film manufacturing apparatus, such as a tray or a heat equalizing plate, which satisfies the above-mentioned six kinds of requirements and has a reduced weight and a low heat capacity.

[0004]

The inventors of the present invention have proposed a tray,
As a result of a multifaceted study on the optimum material of the thin film manufacturing apparatus member such as a heat equalizing plate, the density of the material is smaller than that of a metal material, and the glassy carbon, which is a material having a small heat capacity, is used. After confirming the fact that the problem can be solved, the present invention has been completed. TECHNICAL FIELD The present invention relates to a member for a thin film manufacturing apparatus made of glassy carbon.

The glassy carbon in the present invention is obtained by molding and curing a thermosetting resin such as a furan resin or a phenol resin, or a mixed resin thereof into a flat plate having a uniform thickness, and then in an inert gas atmosphere at a temperature of about 1000.degree. It is obtained by carbonizing by firing at, and graphitizing at a temperature of up to 3000 ° C. if necessary. Also, mounting holes and the like are processed as necessary. The member for a thin film manufacturing apparatus made of glassy carbon thus manufactured has suitable physical properties such as excellent thermal stability, chemical stability, non-dust generation and light weight.

[0006]

EXAMPLES Examples of the present invention will be described below. From furan resin, bulk density is 1.49g / cm ³ , Shore hardness is 11
0, bending strength 1200kg / cm ² , electrical resistivity 4200μ
Glassy carbon with physical properties of Ω-cm, size 6 ×
Tray 1 and 3 × shown in FIG. 1 of 920 × 1000 (mm)
A soaking plate 2 of 300 × 400 (mm) was manufactured. As a comparative example, SUS430 was processed to manufacture a tray and a heat equalizing plate having the same size.

The soaking plate 2 and the glass substrate 3 for liquid crystal are fitted in the tray 1 as shown in FIG.
The substrate 3 is irradiated with heating energy 6 from a heating mechanism having an infrared lamp heater 5 and a reflector 4 under the conditions of rf power supply frequency 13.56 MHz, reaction gases SiH ₄ and H ₂ , and pressure 100 Pa. And heat to 300 ° C
A thin film of -Si was formed. As a result, an α-Si film equivalent to that of SUS430 of Comparative Example was formed on the glassy carbon tray and the heat equalizing plate. Also, using the same device, hydrogen was introduced and shaft-sealed to 100 Pa, and 0.54 W / cm per unit area for the tray 1, soaking plate 2 and substrate 3.
^The time required to raise the temperature of the tray and the soaking plate from 20 ° C. to 300 ° C. when the heating energy 6 of ² and 1.1 W / cm ² was applied was measured. Here, the temperature of the soaking plate was measured by a thermocouple 7 inserted from the outside of the vacuum chamber.
On the other hand, the weights of the trays and the heat equalizing plates were compared by material. The results are shown in Table 1. The heat equalizing plates in the table indicate the weight of four sheets (four trays were used for one tray).

[0008]

[Table 1]

From Table 1, it is clear that the heating time of glassy carbon is shortened to about 1/4 of that of conventional metal. Also, by using glassy carbon, the tray is 16.4 kg, the soaking plate is 9 kg,
This means that we have achieved a total weight reduction of 25.4 kg.
It is 80% lighter than the conventional metal (SUS430).

[0010]

According to the present invention, since members for thin film manufacturing equipment such as trays and heat equalizing plates are made of glassy carbon, weight reduction and heat capacity reduction can be achieved without changing the mechanical structure of the equipment. .

[Brief description of drawings]

FIG. 1 is a diagram showing a usage state of a tray and a heat equalizing plate.

[Explanation of symbols]

1 ... Tray, 2 ... Soaking plate, 3 ... Glass substrate for liquid crystal, 4 ...
Reflector, 5 ... Heater, 6 ... Heating energy, 7 ... Thermocouple

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yoshihiro Kikuchi 3-3-1 Ayukawa-cho, Hitachi-shi, Ibaraki Hitachi Chemical Co., Ltd. Sakuragawa factory (72) Inventor Kenichi Nakayama 3-chome, Ayukawa-cho, Hitachi-shi, Ibaraki 3-1 Hitachi Chemical Co., Ltd. Sakuragawa Plant (72) Inventor Manabu Ikemoto 5-8-1, Yotsuya, Fuchu-shi, Tokyo 8-1 Nichiden Anelva Co., Ltd. (72) Hitoshi Ueda 5-chome, Yotsuya, Fuchu-shi, Tokyo 8-1 Nichiden Anerva Co., Ltd. (72) Inventor Ka Watanabe 5-8-1, Yotsuya, Fuchu-shi, Tokyo Nichiden Anerva Co., Ltd.

Claims (1)

[Claims] 1. A member for a thin film manufacturing apparatus made of glassy carbon.