JPH06148897A - Production of screen printing plate - Google Patents

Production of screen printing plate

Info

Publication number
JPH06148897A
JPH06148897A JP29328192A JP29328192A JPH06148897A JP H06148897 A JPH06148897 A JP H06148897A JP 29328192 A JP29328192 A JP 29328192A JP 29328192 A JP29328192 A JP 29328192A JP H06148897 A JPH06148897 A JP H06148897A
Authority
JP
Japan
Prior art keywords
shielding film
screen printing
thickness
printing plate
curable resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29328192A
Other languages
Japanese (ja)
Inventor
Kazuo Inoue
和夫 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP29328192A priority Critical patent/JPH06148897A/en
Publication of JPH06148897A publication Critical patent/JPH06148897A/en
Pending legal-status Critical Current

Links

Landscapes

  • Printing Plates And Materials Therefor (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PURPOSE:To make possible the formation of fine patterns having sharp aperture shapes even if the thickness of a shielding film is increased in such a manner that a desired pattern thickness is obtd. and to make possible the rapid production of the screen printing plate with the relatively easy control of the thickness of the shielding film and without using an exposure mask. CONSTITUTION:A base 2 is immersed into a UV curing resin 10. The prescribed patterns by UV rays are drawn by a laser beam 13, etc., on the UV curing resin 10 existing above this base 2 and the UV curing resin 10 curing at this time is laminated on the base 2, by which the shielding film 3 having prescribed apertures 4 is formed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、特に電子部品における
微細ピッチパターンの印刷に使用して最適なスクリーン
印刷版の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a screen printing plate which is optimal for printing fine pitch patterns on electronic parts.

【0002】[0002]

【従来の技術】例えば電子部品のパターン印刷に供され
るスクリーン印刷版は、図2に示すように、支持枠1で
周縁部を支持されたメッシュ2等の支持体の上面に所定
パターンの開口部4を有する遮蔽膜3を設けることによ
って構成されたものであるが、従来、この種のスクリー
ン印刷版は、一般に図3に示すような方法によって製造
されていた。
2. Description of the Related Art A screen printing plate used for pattern printing of electronic parts, for example, has openings of a predetermined pattern on the upper surface of a support body such as a mesh 2 whose peripheral portion is supported by a support frame 1 as shown in FIG. Although it is constructed by providing the shielding film 3 having the portion 4, the screen printing plate of this type has been conventionally produced by the method shown in FIG.

【0003】即ち、先ず金属製や木製等の支持枠1にス
テンレス製或いはポリエステル製等のメッシュ(支持
体)2を張り(同図(a))、このメッシュ2の上面に
遮蔽膜3を構成する感光性樹脂膜5を積層する(同図
(b))。この感光性樹脂膜5の積層は、例えば感光性
樹脂フィルムを用いて、これをメッシュ2の上面に貼り
付けたり、エマルジョン等の感光性樹脂をメッシュ2の
上面に塗布することによって行う。
That is, first, a mesh (support) 2 made of stainless steel or polyester is attached to a support frame 1 made of metal, wood or the like (FIG. 1A), and a shielding film 3 is formed on the upper surface of the mesh 2. Then, the photosensitive resin film 5 is laminated ((b) in the figure). The lamination of the photosensitive resin film 5 is performed, for example, by using a photosensitive resin film and adhering it to the upper surface of the mesh 2 or applying a photosensitive resin such as emulsion to the upper surface of the mesh 2.

【0004】この状態で、例えば写真製版で作成した露
光マスク6を感光性樹脂膜5の上面に配置し、この露光
マスク6を通して感光性樹脂膜5に紫外線7を照射する
露光を施して、露光マスク6に描かれたパターンに対応
した光化学反応による潜像を感光性樹脂膜5に形成する
(同図(c))。
In this state, an exposure mask 6 formed by, for example, photoengraving is placed on the upper surface of the photosensitive resin film 5, and the photosensitive resin film 5 is exposed to ultraviolet rays 7 through the exposure mask 6 to perform exposure. A latent image by a photochemical reaction corresponding to the pattern drawn on the mask 6 is formed on the photosensitive resin film 5 ((c) in the figure).

【0005】しかる後、現像を行うことによってポリマ
ーの画像を形成し、これによって所定パターンの開口部
4を有する遮蔽膜3を備えたスクリーン印刷版を得てい
た(同図(d))。
Thereafter, development was carried out to form a polymer image, and thereby a screen printing plate provided with a shielding film 3 having openings 4 of a predetermined pattern was obtained ((d) in the same figure).

【0006】ここに、近年の電子機器の軽薄短少化に伴
い、電子部品の端子も狭ピッチ化が加速的に進み、生産
性の高いスクリーン印刷技術に対しても、狭ピッチパタ
ーン印刷が行えるようにすることが望まれている。
Here, with the recent trend toward lighter, thinner, shorter, and smaller electronic devices, the pitch of terminals of electronic parts has been narrowed at an accelerating pace, and narrow-pitch pattern printing can be performed even for screen printing technology with high productivity. Is desired.

【0007】この要望に答えるためは、インキ、スクリ
ーン印刷機、印刷条件の他に、スクリーン印刷版の対応
が重要となる。即ち、スクリーン印刷版においては、メ
ッシュの線径、メッシュの目開き(互いに隣合う線間の
ギャップ)、メッシュの張り強さ、遮蔽膜の膜厚、遮蔽
膜に設けた開口部の形状等が重要な要因となってくる。
In order to meet this demand, in addition to the ink, the screen printing machine and the printing conditions, it is important to deal with the screen printing plate. That is, in the screen printing plate, the wire diameter of the mesh, the mesh opening (gap between adjacent lines), the tensile strength of the mesh, the film thickness of the shielding film, the shape of the opening provided in the shielding film, etc. It will be an important factor.

【0008】そこで、狭ピッチの微細パターン化に対し
ては、遮蔽膜の膜厚を薄くすることで対応させることが
通常行われていた。
Therefore, it has been usual to cope with the fine patterning with a narrow pitch by reducing the film thickness of the shielding film.

【0009】[0009]

【発明が解決しようとする課題】しかしながら、上記従
来例にあっては、遮蔽膜の膜厚を薄くすることで微細パ
ターン化に対応させると、印刷時のインキ供給量が少な
くなって、要求されるパターン厚が得られないといった
問題があった。
However, in the above-mentioned conventional example, when the film thickness of the shielding film is made thin to cope with the fine patterning, the ink supply amount at the time of printing becomes small, which is required. However, there is a problem that the pattern thickness is not obtained.

【0010】一方、要求されるパターン厚が得られるよ
うに遮蔽膜の膜厚を厚くすると、微細パターンの形成が
難しいばかりでなく、メッシュに付着して切除しきれず
に残った感光性樹脂の残膜が生じる等により遮蔽膜の開
口部の形状にシャープさを欠き、パターン形状が不安定
になって、インキ供給量のばらつきも大きくなってしま
う。
On the other hand, if the film thickness of the shielding film is increased so that the required pattern thickness can be obtained, not only is it difficult to form a fine pattern, but also the residual photosensitive resin that remains on the mesh and cannot be cut off. Due to the formation of a film, the shape of the opening of the shielding film lacks sharpness, the pattern shape becomes unstable, and the variation in the ink supply amount also increases.

【0011】本発明は上記に鑑み、要求されるパターン
厚が得られるように遮蔽膜の膜厚を厚くしたとしても、
シャープな開口部形状を有する微細パターンを形成する
ことができ、しかも遮蔽膜の膜厚のコントロールが比較
的容易で、かつ露光マスクを使用することなく、短時間
で製作できるようにしたスクリーン印刷版を提供するこ
とを目的とする。
In view of the above, the present invention makes it possible to increase the thickness of the shielding film so as to obtain the required pattern thickness.
A screen printing plate capable of forming a fine pattern having a sharp opening shape, relatively easy control of the film thickness of the shielding film, and capable of being produced in a short time without using an exposure mask. The purpose is to provide.

【0012】[0012]

【課題を解決するための手段】上記目的を達成するた
め、本発明に係るスクリーン印刷版の製造方法は、紫外
線硬化樹脂中に支持体を浸し、この支持体の上方に位置
する紫外線硬化樹脂に紫外線による描画を施し、この時
に硬化する紫外線硬化樹脂を支持体上に積層して遮蔽膜
を形成するようにしたものである。
In order to achieve the above object, a method for producing a screen printing plate according to the present invention is such that a support is dipped in an ultraviolet curable resin and the ultraviolet curable resin located above the support is immersed in the ultraviolet curable resin. Drawing is performed with ultraviolet rays, and an ultraviolet curable resin that cures at this time is laminated on a support to form a shielding film.

【0013】[0013]

【作用】上記のように構成した本発明によれば、支持体
の上方に位置する紫外線硬化樹脂に紫外線による描画を
施し、紫外線の当たった面のみを硬化させて、紫外線が
当たらなかった面を開口部とした遮蔽膜を支持体上に形
成するとともに、支持体を下降させつつ紫外線による同
一パターンの描画を繰り返すことにより、遮蔽膜を所望
の厚さに成長させることができる。
According to the present invention having the above-described structure, the ultraviolet curable resin located above the support is subjected to drawing with ultraviolet light to cure only the surface exposed to the ultraviolet light, and the surface not exposed to the ultraviolet light is cured. The shielding film can be grown to a desired thickness by forming the shielding film as the opening on the support and by repeating the drawing of the same pattern with ultraviolet rays while lowering the support.

【0014】[0014]

【実施例】以下、本発明の実施例を図1を参照して説明
する。この実施例は、図2に示すスクリーン印刷版、即
ち支持枠1で周縁部を支持したメッシュ(支持体)2の
上面に所定パターンの開口部4を有する遮蔽膜3を設け
たスクリーン印刷版を製造する例を示すものである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIG. In this embodiment, the screen printing plate shown in FIG. 2, that is, the screen printing plate in which a shielding film 3 having openings 4 of a predetermined pattern is provided on the upper surface of a mesh (support) 2 whose peripheral portion is supported by a supporting frame 1 is used. It shows an example of manufacturing.

【0015】先ず、内部に紫外線硬化樹脂10を満たし
たタンク11の側方にエレベータ機構(図示せず)を配
置するとともに、このエレベータ機構により上下動する
アーム12が前記タンク11の内部に達するようにして
おく。
First, an elevator mechanism (not shown) is arranged beside the tank 11 filled with the ultraviolet curable resin 10, and the arm 12 vertically moved by this elevator mechanism reaches the inside of the tank 11. Leave.

【0016】ここに、前記紫外線硬化樹脂10は、紫外
線の光エネルギによって重合反応を起こして、液体が固
体に変化するという特性をもった樹脂で、光重合性ポリ
マー、光開始剤、特性改善のための添加剤等を含んでい
る。また、前記エレベータ機構の上下動の駆動源とし
て、ステッピングモータを使用することにより、ステー
ジ12の高さ方向の位置制御を容易に行うことができ
る。
Here, the UV curable resin 10 is a resin having a characteristic that a liquid undergoes a polymerization reaction by the light energy of ultraviolet rays to change into a solid, which is a photopolymerizable polymer, a photoinitiator, and a characteristic improving agent. It contains additives for Further, by using a stepping motor as a drive source for the vertical movement of the elevator mechanism, it is possible to easily control the position of the stage 12 in the height direction.

【0017】そして、金属製や木製等の支持枠1にステ
ンレス製或いはポリエステル製等のメッシュ(支持体)
2を張ったものを前記ステージ12上に載置し、エレベ
ータ機構とスキージングによって、メッシュ2の上に位
置する紫外線硬化樹脂10の深さΔhが所定の深さにな
るようにする(同図(a))。
Then, a mesh (support) made of stainless steel or polyester is attached to the support frame 1 made of metal or wood.
2 is placed on the stage 12, and the depth Δh of the ultraviolet curable resin 10 located on the mesh 2 is set to a predetermined depth by the elevator mechanism and the squeegee (the same figure). (A)).

【0018】この状態で、レーザ光源とレーザビーム1
3を線走査または面走査できる機構とを有する描画装置
(図示せず)を介して、タンク11の上方から紫外線硬
化樹脂10に向けて紫外線による描画(露光)を施し、
この時に硬化する紫外線硬化樹脂10をメッシュ2上に
積層させて開口部4を有する第1層の遮蔽膜3aを形成
する(同図(b))。
In this state, the laser light source and the laser beam 1
Through a drawing device (not shown) having a mechanism capable of performing line scanning or surface scanning of 3, ultraviolet drawing (exposure) is performed from above the tank 11 toward the ultraviolet curable resin 10.
The ultraviolet curable resin 10 that cures at this time is laminated on the mesh 2 to form the first-layer shielding film 3a having the openings 4 (FIG. 7B).

【0019】即ち、前記レーザビーム13として、例え
ばHeーCdビームやArビームを使用し、このレーザ
ビーム13を、例えばCADにて形成したパターンに従
って面走査する。すると、レーザビーム13の当たった
面に位置する紫外線硬化樹脂10が硬化して第1層の遮
蔽膜3aとなり、レーザビーム13が当たらなかった面
に位置する紫外線硬化樹脂10は液体のままで開口部4
となる。
That is, for example, a He--Cd beam or an Ar beam is used as the laser beam 13, and the laser beam 13 is surface-scanned according to a pattern formed by CAD, for example. Then, the ultraviolet curable resin 10 located on the surface hit by the laser beam 13 is cured to become the first-layer shielding film 3a, and the ultraviolet curable resin 10 located on the surface not hit by the laser beam 13 is opened as a liquid. Part 4
Becomes

【0020】これによって、例えば10μm程度のレー
ザビーム径レベルの微細パターンを形成することができ
る。次に、エレベータ機構とスキージングによって、前
記第1層の遮蔽膜3aの上方に位置する紫外線硬化樹脂
10の深さが所定の深さΔhになるようにした後、上記
と同様なパターンを使用して、タンク11の上方から紫
外線硬化樹脂10に向けて紫外線による描画を施し、こ
の時に硬化する紫外線硬化樹脂10を第2層の遮蔽膜3
bとして前記第1層の遮蔽膜3a上に積層させて開口部
4を有する遮蔽膜3を成長させる(同図(c))。
As a result, a fine pattern having a laser beam diameter level of, for example, about 10 μm can be formed. Next, the elevator mechanism and squeegee are used to set the depth of the ultraviolet curable resin 10 located above the first-layer shielding film 3a to a predetermined depth Δh, and then the same pattern as above is used. Then, drawing is performed with ultraviolet rays from above the tank 11 toward the ultraviolet curable resin 10, and the ultraviolet curable resin 10 that cures at this time is applied to the second layer of the shielding film 3.
As b, it is laminated on the first layer of the shielding film 3a to grow the shielding film 3 having the opening 4 (FIG. 7C).

【0021】このようなプロセスを繰り返すことによ
り、前記第2層の遮蔽膜3bの上に第3層の遮蔽膜、そ
の上に第4層の遮蔽膜と順次積層して、遮蔽膜3の膜厚
が所定の厚さになるまでこれを成長させる。
By repeating such a process, the shielding film of the third layer is sequentially laminated on the shielding film 3b of the second layer, and the shielding film of the fourth layer is sequentially laminated on the shielding film 3b. This is grown until the thickness is the desired thickness.

【0022】そして、遮蔽膜3が所定の厚さtに達した
時、これをタンク11から取り出し、洗浄した後、未硬
化の紫外線硬化樹脂10を取り除き、しかる後、ポスト
ベークを施してスクリーン印刷版を完成させる(同図
(d))。
Then, when the shielding film 3 reaches a predetermined thickness t, it is taken out from the tank 11 and washed, and then the uncured ultraviolet curable resin 10 is removed, and after that, post-baking is performed to perform screen printing. Complete the plate (Fig. (D)).

【0023】このようにして、1ステップの厚みと繰返
し回数によって、ハイアスペクトなパターンを得ること
ができ、開口部4の端面がシャープで、メッシュ2に取
り残しの樹脂膜が付着してしまうことがないスクリーン
印刷版を製作することができる。
In this way, a high aspect pattern can be obtained by the thickness of one step and the number of repetitions, the end face of the opening 4 is sharp, and the residual resin film may adhere to the mesh 2. No screen printing plate can be produced.

【0024】しかも、露光マスクが不要となるため、短
時間でスクリーン印刷版を製造することができるばかり
でなく、例えばCADにて形成したパターンに従ってレ
ーザビームを走査する方式のため、パターンの変更をC
AD上で容易に行うことができる。
Moreover, since the exposure mask is not required, not only the screen printing plate can be manufactured in a short time, but also the pattern is changed because of the method of scanning the laser beam according to the pattern formed by CAD, for example. C
It can be easily done on AD.

【0025】なお、1ステップの形成厚さは、紫外線硬
化樹脂の組織と紫外線の光強度によって定まるため、条
件の設定によっては、1ステップでも微細、ハイアスペ
クトなパターンを得ることができる。
Since the formation thickness of one step is determined by the structure of the ultraviolet curable resin and the light intensity of ultraviolet rays, a fine, high aspect pattern can be obtained even by one step depending on the setting of conditions.

【0026】[0026]

【発明の効果】本発明は上記のような構成であるので、
支持体の上方に位置する紫外線硬化樹脂に紫外線による
描画を施して支持体上に遮蔽膜を形成することにより、
要求されるパターン厚が得られるように遮蔽膜の膜厚を
厚くしても、シャープな開口部形状を有する微細パター
ンを形成することができ、しかも遮蔽膜の膜厚のコント
ロールが比較的容易で、かつ露光マスクを使用すること
なく、短時間で製作することができるといった効果があ
る。
Since the present invention has the above-mentioned structure,
By forming a shielding film on the support by drawing with ultraviolet rays on the ultraviolet curable resin located above the support,
Even if the film thickness of the shielding film is increased to obtain the required pattern thickness, it is possible to form a fine pattern having a sharp opening shape, and it is relatively easy to control the film thickness of the shielding film. Moreover, there is an effect that it can be manufactured in a short time without using an exposure mask.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を工程順に示す断面図であ
る。
FIG. 1 is a sectional view showing an embodiment of the present invention in the order of steps.

【図2】スクリーン印刷版の平面図である。FIG. 2 is a plan view of a screen printing plate.

【図3】従来例を工程順に示す断面図である。FIG. 3 is a cross-sectional view showing a conventional example in the order of steps.

【符号の説明】[Explanation of symbols]

1 支持枠 2 メッシュ(支持体) 3,3a,3b 遮蔽膜 4 開口部 10 紫外線硬化樹脂 11 タンク 13 レーザビーム 1 Support Frame 2 Mesh (Support) 3, 3a, 3b Shielding Film 4 Opening 10 Ultraviolet Curing Resin 11 Tank 13 Laser Beam

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 紫外線硬化樹脂中に支持体を浸し、この
支持体の上方に位置する紫外線硬化樹脂に紫外線による
描画を施し、この時に硬化する紫外線硬化樹脂を支持体
上に積層して遮蔽膜を形成することを特徴とするスクリ
ーン印刷版の製造方法。
1. A shield film is obtained by immersing a support in an ultraviolet curable resin, drawing an ultraviolet ray on the ultraviolet curable resin located above the support, and laminating the ultraviolet curable resin which is cured at this time on the support. A method for producing a screen printing plate, which comprises:
JP29328192A 1992-10-30 1992-10-30 Production of screen printing plate Pending JPH06148897A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29328192A JPH06148897A (en) 1992-10-30 1992-10-30 Production of screen printing plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29328192A JPH06148897A (en) 1992-10-30 1992-10-30 Production of screen printing plate

Publications (1)

Publication Number Publication Date
JPH06148897A true JPH06148897A (en) 1994-05-27

Family

ID=17792804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29328192A Pending JPH06148897A (en) 1992-10-30 1992-10-30 Production of screen printing plate

Country Status (1)

Country Link
JP (1) JPH06148897A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102180045A (en) * 2011-03-11 2011-09-14 安徽中烟工业公司 Surface treatment process capable of achieving three-dimensional texture and laser effect

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102180045A (en) * 2011-03-11 2011-09-14 安徽中烟工业公司 Surface treatment process capable of achieving three-dimensional texture and laser effect

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