JPH06145958A - Wear resistant protective film - Google Patents
Wear resistant protective filmInfo
- Publication number
- JPH06145958A JPH06145958A JP32620092A JP32620092A JPH06145958A JP H06145958 A JPH06145958 A JP H06145958A JP 32620092 A JP32620092 A JP 32620092A JP 32620092 A JP32620092 A JP 32620092A JP H06145958 A JPH06145958 A JP H06145958A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- wear
- resistant protective
- wear resistant
- wear resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Other Surface Treatments For Metallic Materials (AREA)
- Magnetic Record Carriers (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【技術分野】本発明は耐摩耗性保護膜に関し、またかか
る耐摩耗性保護膜を施した磁気記録媒体、切削工具、金
型、摺動部材、その他同様な耐摩耗性を必要とする物品
に関する。TECHNICAL FIELD The present invention relates to a wear-resistant protective film, and to a magnetic recording medium, a cutting tool, a mold, a sliding member, and other articles requiring similar wear resistance provided with such a wear-resistant protective film. .
【０００２】[0002]
【従来の技術】従来、磁気記録媒体、工具、金型、摺動
部材、その他同様な耐摩耗性を必要とする物品の耐摩耗
性を上げるために各種の耐摩耗性保護膜が使用されてい
る。代表的なものはＴｉＣ、ＴｉＮ、Ａｌ4 Ｃ、Ａｌ
Ｎ、Ｓｉ3 Ｎ4 、ＳｉＣ等がある。これらの保護膜の硬
度は非常に高いが、工具や金具等の保護膜としては耐摩
耗性が不十分である。その理由は、従来の耐摩耗性保護
膜では内部応力が大きく、基体金属への親和性が不十分
なためと思われる。2. Description of the Related Art Conventionally, various wear-resistant protective films have been used to improve wear resistance of magnetic recording media, tools, molds, sliding members, and other similar articles requiring wear resistance. There is. Typical ones are TiC, TiN, Al 4 C, Al
There are N, Si 3 N 4 , SiC, and the like. Although the hardness of these protective films is very high, they have insufficient wear resistance as protective films for tools, metal fittings, and the like. The reason is considered to be that the conventional wear-resistant protective film has a large internal stress and the affinity for the base metal is insufficient.
【０００３】[0003]
【発明が解決しようとする課題】上記のように従来の耐
摩耗性保護膜では内部応力が大きく、基体金属への親和
性が不十分なため、硬度が高いにもかかわらず十分な耐
摩耗性を確保できない。本発明は、十分な耐久耐摩耗性
を有する保護膜を提供すること、またかかる保護膜を被
覆した磁気記録媒体、切削工具、または金型等の物品を
提供することを目的とする。As described above, the conventional wear-resistant protective film has a large internal stress and an insufficient affinity for the base metal. Cannot be secured. An object of the present invention is to provide a protective film having sufficient durability and abrasion resistance, and to provide an article such as a magnetic recording medium, a cutting tool, or a mold, which is coated with the protective film.
【０００４】[0004]
【課題を解決するための手段】本発明は、Ｔｉ、Ａｌ、
Ｏ及びＮを主たる構成元素とする耐摩耗性保護膜であ
り、またこの保護膜により被覆された金型等の物品であ
る。より詳しく述べると、上記耐摩耗性保護膜はＴｉＡ
ｌx Ｏy Ｎz （ここにｘ、ｙ、ｚはＴｉを１とした原子
比でｘ＝０．２〜６、ｙ＝０．１〜５、ｚ＝０．０５〜
３である）で表される組成を有する。ｘが少な過ぎると
膜の粘り（耐久性）が不十分であり、多過ぎると硬度が
高くならないためである。ｙ＝０．１〜５、及びｚ＝
０．０５〜３とするのは、硬度及び耐摩耗性を考慮して
決められ、内部応力の減少も考慮されている。Ｏ、Ｎは
いずれも硬度及び耐摩耗性を上げ、これらが少な過ぎる
と膜が柔かくなり耐摩耗性が減じ、一方多過ぎると脆く
なる。また両者の総量が一定な場合、Ｏが多くＮが少な
い方が内部応力が減り密着性が大きくなり、Ｎが多くＯ
が少ない方が耐摩耗性が高くなるので、両者の総量とバ
ランスを考慮して上記のｙ、ｚで示される範囲が決定さ
れた。The present invention is directed to Ti, Al,
A wear-resistant protective film containing O and N as main constituent elements, and an article such as a mold covered with the protective film. More specifically, the wear-resistant protective film is made of TiA.
l x O y N z (where x, y, and z are atomic ratios with Ti as 1; x = 0.2 to 6, y = 0.1 to 5, z = 0.05 to
3). This is because if the x is too small, the film has insufficient stickiness (durability), and if it is too large, the hardness does not increase. y = 0.1-5, and z =
The value of 0.05 to 3 is determined in consideration of hardness and wear resistance, and reduction of internal stress is also considered. Both O and N increase hardness and wear resistance, and if they are too small, the film becomes soft and wear resistance decreases, while if they are too large, they become brittle. Further, when the total amount of both is constant, the internal stress decreases and the adhesiveness increases as the amount of O and the amount of N decrease, and the amount of N and O increases.
Since the smaller the value, the higher the abrasion resistance, the range indicated by the above y and z was determined in consideration of the total amount and balance of both.
【０００５】[0005]
【作用】本発明によると、従来のものよりもビッカース
硬度が低いが、耐摩耗性が増す。これは保護膜の内部応
力が減じると共に、基体に対する密着性が増したためと
思われる。なお、本発明の耐摩耗性保護膜は導電性が比
較的高いので電流や電圧が絡むような場合には使用でき
ない。絶縁性が必要な場合にはこの保護膜の上または下
に絶縁膜が必要である。According to the present invention, the Vickers hardness is lower than the conventional one, but the wear resistance is increased. It is considered that this is because the internal stress of the protective film was reduced and the adhesion to the substrate was increased. The wear-resistant protective film of the present invention has a relatively high conductivity, and therefore cannot be used when a current or voltage is involved. When insulation is required, an insulating film is required above or below this protective film.
【０００６】本発明の耐摩耗性保護膜は各種の方法で製
造し得る。例えばスパッタ法、その他良く知られた方法
が採用できる。The wear resistant protective film of the present invention can be manufactured by various methods. For example, a sputtering method and other well-known methods can be adopted.
【０００７】本発明の保護膜は例えばスパッタ法を用い
て成膜することができる。この場合には、成膜原料とし
てＴｉＮ、ＡｌＮ、Ａｌ2 Ｏ3 、Ｔｉ、Ａｌ等を用い、
これらを所定の混合比で混合し、プレスしてターゲット
とし、また雰囲気ガスとしてＡｒガス、及び必要ならさ
らにＯ2 、Ｎ2 ガスを用い、ＲＦ電力を加えてターゲッ
トをＡｒスパッタし、下地例えば樹脂用射出成形金型の
キャビティー面のうち、可動金型が固定金型に対して摺
動する部分にＴｉ−Ａｌ−Ｏ−Ｎ系の保護膜を成膜す
る。The protective film of the present invention can be formed by using, for example, a sputtering method. In this case, TiN, AlN, Al 2 O 3 , Ti, Al or the like is used as a film forming raw material,
These are mixed at a predetermined mixing ratio and pressed to form a target. Further, Ar gas is used as an atmospheric gas, and O 2 and N 2 gas are further used if necessary, and RF power is applied to sputter the target to form a substrate such as a resin. A Ti—Al—O—N-based protective film is formed on a portion of the cavity surface of the injection molding die for use in which the movable die slides with respect to the fixed die.
【０００８】[0008]
実施例１ ＴｉＮ、Ａｌ2 Ｏ3 、ＡｌＮの粉末をモル比５：２：３
の割合で混合し、プレスしてターゲットとし、投入電力
１．５kw、Ａｒ圧３Pa、焼入れ鋼ＳＫＤ−１１製の金型
摺動面に基板温度３５０℃でＲＦスパッタして４．５μ
m の厚さに成膜して耐摩耗性層とした。Ａｒガスに適宜
Ｏ2 、Ｎ2 を混入して反応性スパッタをし、組成の調整
をした。得られた組成はＴｉＡｌ1.4 Ｏ1.2 Ｎ0.6 であ
った。得られた保護膜のビッカース硬度、摩擦摩耗試
験、及び金型耐久性を試験した。なお、摩擦摩耗試験は
ボールオンディスク方式（高千穂精機製の摩擦摩耗試験
機）で膜が破壊する力を測定した。また金型耐久性試験
は実際に樹脂の射出成形を行ったバリの出ない耐用回数
である。Example 1 TiN, Al 2 O 3 and AlN powders were mixed at a molar ratio of 5: 2: 3.
The mixture is mixed at a ratio of, and pressed to be a target. RF power is applied to the target sliding surface of the hardened steel SKD-11 at an input power of 1.5 kw, an Ar pressure of 3 Pa, and a substrate temperature of 350 ° C. to 4.5 μ.
A film having a thickness of m was formed as a wear resistant layer. O 2 and N 2 were appropriately mixed in Ar gas and reactive sputtering was performed to adjust the composition. The composition obtained was TiAl 1.4 O 1.2 N 0.6 . The resulting protective film was tested for Vickers hardness, friction and wear test, and mold durability. In the friction and wear test, the force of breaking the film was measured by a ball-on-disk method (a friction and wear tester manufactured by Takachiho Seiki). The mold durability test is the number of times that the resin is actually injection-molded without burring.
【０００９】実施例２ ＴｉＮ、Ａｌ2 Ｏ3 、ＡｌＮの粉末をモル比１：１：１
の割合で混合し、実施例１と同じ方法でＴｉ−Ａｌ−Ｏ
−Ｎ膜を成膜して耐摩耗性層とした。得られた組成はＴ
ｉＡｌ3 Ｏ3 Ｎ1 であった。得られた膜に対して種々の
試験及び測定を行った。Example 2 TiN, Al 2 O 3 and AlN powders were mixed in a molar ratio of 1: 1: 1.
And mixed in the same manner as in Example 1 using Ti-Al-O.
A -N film was formed as a wear resistant layer. The composition obtained is T
It was iAl 3 O 3 N 1 . Various tests and measurements were performed on the obtained film.
【００１０】比較例 原料としてＴｉＮ及びＡｌＮをターゲットとして実施例
１の条件でスパッタしてＴｉＮ及びＡｌＮの耐摩耗性保
護膜を成膜した。得られた保護膜に対して種々の試験及
び測定を行った。Comparative Example Using TiN and AlN as raw materials as targets, sputtering was performed under the conditions of Example 1 to form a wear-resistant protective film of TiN and AlN. Various tests and measurements were performed on the obtained protective film.
【００１１】実施例１〜２及び比較例の耐摩耗性層の測
定結果を表１に示す。Table 1 shows the measurement results of the wear resistant layers of Examples 1 and 2 and Comparative Example.
【００１２】[0012]
【表１】 [Table 1]
【００１３】[0013]
【発明の効果】上の実施例から明らかなように、本発明
の耐摩耗性保護膜は、従来のＡｌＮやＴｉＮ保護膜に比
して耐摩耗性が大きい。内部応力が小さく密着性が高い
ためと思われる。As is apparent from the above embodiments, the wear-resistant protective film of the present invention has greater wear resistance than the conventional AlN or TiN protective film. This is probably because the internal stress is small and the adhesion is high.
Claims (4)
とする耐摩耗性保護膜。1. A wear-resistant protective film containing Ti, Al, O and N as main constituent elements.
はＴｉを１とした原子比でｘ＝０．２〜６、ｙ＝０．１
〜５、ｚ＝０．０５〜３である）で表される請求項１に
記載の耐摩耗性保護膜。2. TiAl x O y N z (where x, y, z
Is an atomic ratio in which Ti is 1, x = 0.2 to 6, and y = 0.1.
.About.5, and z = 0.05 to 3). The wear-resistant protective film according to claim 1, wherein
摩耗性の必要な部分に被覆した物品。3. An article in which the wear-resistant protective film according to claim 1 or 2 is coated on a portion requiring wear resistance.
金型である請求項３に記載の物品。4. The article according to claim 3, which is a magnetic recording medium, a cutting tool, or a mold.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32620092A JPH06145958A (en) | 1992-11-12 | 1992-11-12 | Wear resistant protective film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32620092A JPH06145958A (en) | 1992-11-12 | 1992-11-12 | Wear resistant protective film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06145958A true JPH06145958A (en) | 1994-05-27 |
Family
ID=18185133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32620092A Pending JPH06145958A (en) | 1992-11-12 | 1992-11-12 | Wear resistant protective film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06145958A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1258911A2 (en) * | 2001-03-27 | 2002-11-20 | Sharp Kabushiki Kaisha | Method of using titanium doped aluminium oxide for passivation of ferroelectric materials and devices including the same |
| WO2004038842A2 (en) * | 2002-10-22 | 2004-05-06 | Arizona Board Of Regents, Acting For And On Behalf Of Arizona State University | FUEL CELL HAVING TiAlNO DEPOSITED AS A PROTECTIVE LAYER ON METALLIC SURFACES |
| JP2010534801A (en) * | 2007-07-28 | 2010-11-11 | フェデラル−モーグル ブルシェイド ゲーエムベーハー | piston ring |
-
1992
- 1992-11-12 JP JP32620092A patent/JPH06145958A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1258911A2 (en) * | 2001-03-27 | 2002-11-20 | Sharp Kabushiki Kaisha | Method of using titanium doped aluminium oxide for passivation of ferroelectric materials and devices including the same |
| EP1258911A3 (en) * | 2001-03-27 | 2007-02-21 | Sharp Kabushiki Kaisha | Method of using titanium doped aluminium oxide for passivation of ferroelectric materials and devices including the same |
| WO2004038842A2 (en) * | 2002-10-22 | 2004-05-06 | Arizona Board Of Regents, Acting For And On Behalf Of Arizona State University | FUEL CELL HAVING TiAlNO DEPOSITED AS A PROTECTIVE LAYER ON METALLIC SURFACES |
| WO2004038842A3 (en) * | 2002-10-22 | 2004-06-10 | Univ Arizona | FUEL CELL HAVING TiAlNO DEPOSITED AS A PROTECTIVE LAYER ON METALLIC SURFACES |
| JP2010534801A (en) * | 2007-07-28 | 2010-11-11 | フェデラル−モーグル ブルシェイド ゲーエムベーハー | piston ring |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20021210 |