JPH06139939A - Defect inspection device and inspection and correction device for defect - Google Patents

Abstract

PURPOSE:To provide a defect inspection and correction device having the capability of easily and properly identifying a defect position, improving the efficiency of a later correction work, and ensuring an easy correction. CONSTITUTION:The measuring area of a panel 11 is photographed with an inspection camera 31, and the coordinate position of a defect in a black film on the camera 31 is detected with the first detecting device 35 on the basis of an image signal sent from the camera 31. A pair of positioning marks preliminarily formed at reference positions on the panel 11 are photographed, and the coordinate positions of the marks on positioning cameras 33a and 33b are detected with the second detecting devices 37a and 37b. From a positional relationship between the coordinate positions of the marks on the cameras 33a and 33b, and the preliminarily set reference positions, the position of a defect is obtained as a coordinate position on the panel 11 with an arithmetic unit 38, thereby identifying the position of the defect. A correction device 24 is controlled on the basis of the obtained coordinate position of the defect and, therefore, a correction work can be undertaken fast and properly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a defect inspection apparatus for inspecting a defect generated on an inspection object and a defect inspection / correction apparatus for performing even correction.

[0002]

2. Description of the Related Art As a conventional inspection and correction of this type of defect, the inspection and correction of a black film defect of a panel for a color cathode ray tube will be described.

As shown in FIGS. 3 and 4, a black film 12 is formed on the inside of the face surface 11a of the panel 11 for the color CRT. The black film 12 is applied to the panel 11 through a resist coating process, an exposure process using a shadow mask (not shown) combined with the panel 11, a developing process after removing the shadow mask, and a doug coating process. On the inner surface of the curved glass which is formed, a large number of holes are formed in a regular pattern.

The pattern of the black film 12 is originally
As shown in FIG. 5, the holes 13 having the same diameter are regularly arranged in a predetermined arrangement pattern. However, in the pattern forming process described above, the defects as shown in FIGS. 13a may occur. That is, defect 13a
As shown in FIG. 6, a small hole 13a1 having a diameter smaller than the original hole diameter should be generated, a deformed hole 13a2 should be generated as shown in FIG. 7, and a hole 13 should be generated as shown by a broken line in FIG. There may be non-holes 13a3 that do not have holes in place.

Here, in the exposure step for forming the black film 12, the exposure is performed using the shadow mask combined with the panel 11 as described above, but a small diameter is formed in a part of the holes of the shadow mask itself. If there is a hole, the small hole 13a1 shown in FIG.
When the shadow mask has a portion where no hole is formed, the non-hole 13a3 shown in FIG. 8 occurs. Further, if a foreign substance or the like adheres during exposure, the small hole 13a1 shown in FIG. 7 is generated.

In the actual manufacturing process, the panel 11 is placed on the panel conveyor at the exit of the fluorescent screen coating machine, or
After unloading from the panel conveyor, the state of the black film 12 is manually inspected on a light table which is illuminated from the bottom surface to find the defect 13a.

However, such inspection work is extremely difficult, requires a long time, and is liable to cause detection errors. For example, between normal displays,
The diameter of the holes 13 of the black film 12 formed on the panel 11 is usually 90
μm to 150 μm, hole pitch 120 μm to 220
Since it is extremely small (μm), it is extremely difficult to visually detect various defects 13a and it takes a long time.

Further, when the operator finds the defect 13a by visual inspection, he or she has to manually perform a repairing operation using a correction needle or the like while looking through the magnifying lens in order to correct it. This work is also extremely difficult, takes a long time, and requires more skill than inspection work. That is,
Since the defect 13a is manually repaired, the problem that the panel 11 is scratched or the repair pattern becomes uneven is likely to occur.

Further, the work takes a long time, in addition to the reason that the work itself is difficult as described above, and the fact that the panel 11 has to be turned every time the inspection and correction work is performed. That is, the inspection work of the panel 11 is performed with the face surface 11a of the panel 11 shown in FIG. 3 and FIG. 4 facing upward and illuminating from below, but the correction work makes the face surface 11a face downward and the black film 12 is removed. It is necessary to perform it in the state of facing upward, and after correction, it is necessary to turn the face 11a upward and return it to the panel conveyor. For this reason, the panel 11 has to be manually inverted twice to change its direction, which requires a lot of working time and places a heavy burden on the operator.

Normally, when the operator finds the defect 13a by inspection, he or she makes a circle on the face surface 11a so as to surround the defect 13a with a marker pen or the like so that the defect 13a can be easily identified. In this case, a circle drawn by a marker pen or the like is usually a circle of 10 mm to 20 mm, and 6000 to 24000 holes 13 are present in this circle. Therefore, after the inspection, if the panel 11 is turned over for correction, it is necessary to search for the defective portion again, and it is difficult to find the corrected portion even if there is a circle, and it takes a long time. . Moreover, the locations where the defects 13a are generated are rarely concentrated on a specific location on the panel 11, and are usually scattered irregularly on the entire surface of the panel 11, and it is extremely difficult to find a location to be repaired.

Therefore, if there are many defects 13a, the black film 12 is recreated from the beginning without performing the above-mentioned correction, which results in a large amount of waste.

[0012]

As described above, the above-described series of inspection / correction work cannot be easily performed by anyone, requires a high degree of skill for the operator, and is capable of finding a defective portion and It takes a lot of time to find the corrections after that. Further, there is a problem in work efficiency such as inversion operation of the panel 11 which is a considerable weight several times, and a heavy burden is imposed on the operator.

An object of the present invention is to provide a defect inspection apparatus and a defect inspection / correction apparatus capable of easily and reliably specifying the position of a defect, improving the efficiency of the subsequent repair work, and facilitating the repair. Especially.

[0014]

According to a first aspect of the present invention, there is provided a defect inspection apparatus which detects an image of an object to be inspected and outputs an image signal, and a defect of the object to be inspected from an image signal of the object to be inspected. First detecting means for detecting a coordinate position of a portion of the inspection object imaging means, and positioning mark imaging means for imaging a pair of positioning marks formed in advance at a reference position of the inspection object and outputting an imaging signal. Second detection means for detecting the coordinate position of the pair of positioning marks on the mark image pickup means from the image pickup signal of the positioning mark image pickup means;
The coordinate position of the defect on the inspection object imaging means is determined based on the positional relationship between the coordinate position on the positioning mark imaging means of the pair of positioning marks detected by the second detection means and a preset reference position. And a calculation means for converting the coordinate position on the inspection object.

According to a second aspect of the present invention, there is provided a defect inspection / correction apparatus in which a conveying means for conveying an inspection object, an inspection table located at an intermediate portion in the conveying direction of the conveying means, and the inspection object loaded on the inspection table. And a transfer means for unloading the inspection object onto the conveying means following from the inspection table, an inspection object imaging means for imaging the inspection object on the inspection table and outputting an imaging signal, and the inspection object First detection means for detecting the coordinate position of the defect on the inspection object image pickup means from the image pickup signal of the image pickup means, and a pair of positioning marks formed in advance on the inspection object reference position on the inspection table. Positioning mark imaging means for imaging
Second detecting means for detecting the coordinate position of the pair of positioning marks on the positioning mark imaging means from the image pickup signal of the positioning mark imaging means, and the positioning mark of the pair of positioning marks detected by the second detecting means. A calculation for converting the coordinate position of the defect on the inspection object imaging means into the coordinate position on the inspection object based on the positional relationship between the coordinate position on the imaging means and the preset reference position on the positioning mark imaging means. Means, reject means for diverting the inspection object unloaded onto the subsequent conveying means, and the coordinate position of the defect on the inspection object is obtained by the arithmetic unit, and the inspection object rejected by the reject means. Correction means for stopping at a predetermined position and performing correction processing on a defect whose coordinate position on the inspection object is obtained by the arithmetic device; It includes those were.

[0016]

In the defect inspection apparatus according to the present invention, the inspection object is imaged by the inspection object imaging means, and the coordinate position of the defect on the inspection object imaging means is detected from the imaging signal of the inspection object imaging means. A pair of positioning marks formed in advance at the reference position of the inspection object is imaged by the positioning mark imaging means, and the coordinate position of the pair of positioning marks on the positioning mark imaging means is detected from the imaging signal of the positioning mark imaging means. The position of the defect is determined as the coordinate position on the inspection object from the positional relationship between the coordinate position of the pair of positioning marks on the positioning mark imaging unit and the preset reference position on the positioning mark imaging unit, and the position of the defect is specified. To do.

According to another aspect of the present invention, there is provided a defect inspection / correction apparatus, in which an inspection object on a conveying means is loaded on an inspection table, the inspection object is imaged by the inspection object imaging means, and an image pickup signal of the inspection object imaging means is used. The coordinate position of the defect on the inspection object imaging means is detected, and a pair of positioning marks formed in advance at the reference position of the inspection object are imaged by the positioning mark imaging means, and a pair of positioning is performed based on the imaging signal of the positioning mark imaging means. The coordinate position of the mark on the positioning mark imaging means is detected, and the position of the defect is determined from the positional relationship between the coordinate position of the pair of positioning marks on the positioning mark imaging means and the preset reference position on the positioning mark imaging means. Is obtained as a coordinate position on the inspection object, the position of the defect is specified,
After the inspection, the inspection object, which is unloaded on the following conveying means, the defect is found by the inspection and the position is specified as the coordinate position, is rejected by the rejecting device, and the defective portion is accurately detected according to the coordinate position in the correction device. Capture and make corrections.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

In FIG. 1, reference numeral 15 is a panel conveyor as a conveying means, and the panel conveyor 15 is composed of a front half portion 15a and a rear half portion 15b.
An inspection device 16 is provided between 15b. Further, the panel conveyor 15 conveys the panel 11 as an inspection object in a predetermined direction with the face surface 11a facing upward. And, the panel 11 is the first half 15 of the panel conveyor 15.
When it is carried to the load position A by a, it is positioned by a positioning device (not shown), and then transferred to the inspection table 18 in the inspection device 16 provided at the inspection position B by the transfer device 17 as transfer means. Face 11a
Is loaded in the upward direction.

After the inspection, the transfer device 17 unloads onto the unloading position C of the latter half portion 15b of the following panel conveyor 15 with the face surface 11a facing upward, and a non-defective panel. 11 is conveyed to the next step, for example, the step of applying the green phosphor as the first color of the phosphor. In this case, the panel 11 is never inverted during loading from the panel conveyor 15 to the inspection device 16 and unloading onto the panel conveyor 15.

For the panel conveyor 15,
As shown in FIG. 2, the mask conveyors 21 are provided in parallel, and the shadow mask 22 combined with the panel 11 conveyed by the panel conveyor 15 is conveyed in synchronization with the corresponding panel 11 on the panel conveyor 15. To do. Further, a panel reject conveyor 23, which is driven by a defect detected by the inspection device 16 and serves as reject means for branching out the panel 11, is branched and connected to the second half 15b of the panel conveyor 15. Then, at the destination of the panel reject conveyer 23, a repairing device 24 as a repairing device for repairing a defective portion of the panel 11 with a laser beam or the like is provided.
Is provided. Further, the mask reject conveyor 25 for branching out the defective mask is also provided on the mask conveyor 21.
Are branched and connected.

Here, when the inspection device 16 finds a defect 13a of the panel 11 as shown in FIGS. 6 to 8,
In most cases, the cause of the defect is that the shape of the corresponding shadow mask 22 itself is abnormal. Therefore, some correction processing is required for this shadow mask 22,
With the elimination of the panel 11 having the defect 13a, the shadow mask 22 corresponding to the panel having the defect 13a which is conveyed in synchronization with the panel 11 in which the defect 13a is found is also branched by operating the mask reject conveyor 25. Exclude.

The inspection table 18 of the inspection device 16 has an illumination device 27 below the inspection table 18, and illuminates the panel 11 loaded on the inspection table 18 from below. Furthermore, the upper periphery of the inspection table 18 is covered with an enclosure 28, and shutters 29 are provided at the entrances and exits of the enclosure 28 to block outside light.

In the enclosure 28, an inspection object camera 31 as an inspection object imaging means for imaging the effective surface of the panel 11 surrounded by the alternate long and short dash line in FIG. A pair of positioning mark cameras 33a and 33b are provided as positioning mark imaging means for imaging the pair of positioning marks 32a and 32b, respectively.
Further, as shown in FIG. 3, the reference position at which the pair of positioning marks 32a and 32b is provided is the X-axis based on the origin Oa of the XY coordinates which is the center of the effective surface of the panel 11.
Both ends are separated by a distance M, and positioning marks 32a and 32b which can be imaged by a pair of positioning mark cameras 33a and 33b are provided at the both ends, respectively.

Further, the inspection object camera 31 for imaging the effective surface of the panel 11 has a first detecting device as a first detecting means.
35 is connected, the defect 13a of the black film 12 as shown in FIGS. 6 to 8 is detected from the image pickup signal of the inspection object camera 31 by a known image processing technique, and the inspection object camera 31 of the defect 13a is detected. Detect the upper coordinate position. The inspection object camera 31 has an image pickup device 36 as shown in FIGS. 9 and 10. As the image pickup device 36, a CCD having a pixel number of about 500 × 500 or more is suitable. Here, by setting the center of the image sensor 36 as the origin Ob of the XY coordinates, the position of the defect 13a captured on the image sensor 36 can be detected as the coordinate position on the inspection object camera 31. it can. If the number of pixels increases, the position detection accuracy on coordinates improves.

Further, the positioning mark cameras 33a, 33
b corresponds to the second detection means, which corresponds to the second detection means.
Detection devices 37a and 37b are connected, and a pair of positioning marks are detected from the image signals of the positioning mark cameras 33a and 33b.
The coordinate positions of the positioning mark cameras 33a and 33b of 32a and 32b are detected.

9 and 10, the origin Ob of the image sensor 36 and the imaged area 11A of the effective surface of the panel 11 are shown.
The origin Oa of the above is coincident, and the inclinations of the X axis and the Y axis are also coincident with each other. 9 and 10, the panel 11 imaged by the inspection object camera 31 is shown.
The coordinate position of the defect 13a part of the
It is assumed to be at the coordinate position of Ks (Xm, Yn) on the Y coordinate. The coordinate position Ks (Xm, Yn) on the inspection object camera 31 is the absolute defect position Kp of the panel 11.
It can be converted to (Xm, Yn). That is, it is possible to easily determine how many squares of one pixel of the image sensor 36 corresponds to the panel 11 by the optical system. Therefore, by using the conversion multiplier α, the absolute defect position on the panel 11 is calculated by the following equation. Is converted by.

Kp (Xm, Yn) = Ks (αXm, αYn) However, it is practical to make the origin Ob of the image pickup device 36 and the origin Oa of the panel 11 coincident with each other and the respective XY coordinate axes coincide with each other. It is difficult, and generally, as shown in FIG. 10, the origin Ob and the origin Oa do not coincide, and the coordinate axes do not coincide. Therefore, the coordinate position on the positioning mark cameras 33a and 33b of the pair of positioning marks 32a and 32b obtained by the second detecting devices 37a and 37b is used by the calculating device 38 as the calculating means shown in FIG. Thus, from the XY coordinate position of the defect 13a on the image pickup device 36 obtained by the first detection device 35, the actual panel
The XY coordinate position of the defect 13a on 11 is obtained. That is,
The arithmetic unit 38 is configured to coordinate the pair of positioning marks 32a and 32b on the positioning mark cameras 33a and 33b detected by the second detecting devices 37a and 37b and to preset positioning mark cameras 33a and 33b. The actual coordinate position on the panel 11 is obtained from the positional relationship with the above reference position.

This principle will be described below.

In FIG. 11, the image pickup elements of the pair of positioning mark cameras 33a and 33b are designated as 40a and 40b. Here, when the XY coordinate axes of the image pickup device 36 and the panel 11 coincide with each other as shown in FIG. 9, the image pickup device 40a,
The position of the center of gravity of the horizontal positioning marks 32a and 32b on the coordinate 40b, that is, the reference position, is corrected on the coordinate of the image sensor 36, and T1 (x1, y1), T2 (x2, y
2)

The center position Ob of the image pickup device 36 at this time is obtained from the following equation.

Ob = ((x1 + x2) / 2, (y1 + y2) / 2) As shown in FIG. 10, even when the position of the panel 11 is shifted, the coordinates of the image pickup devices 40a and 40b are similarly set. The positions of the centers of gravity of the horizontal positioning marks 32a and 32b on the above are corrected on the coordinates of the image sensor 36, and T3 (x3, y3),
T4 (x4, y4). The center position Oa of the panel 11 at this time is obtained from the following equation.

Oa = ((x3 + x4) / 2, (y3 + y4) / 2) Therefore, the parallel displacement amount Δ of the center is obtained by Oa−Ob. In addition, the inclination θ of the horizontal positioning marks 32a and 32b
Is calculated from the following formula.

Θ = Sin ^-1 ((y4-y3) / L) In the above equation, L is a pair of horizontal positioning marks 32a,
The distance on the image sensor 36 between 32b.

From the above relationships, the old XY coordinates, that is, the center Ob of the coordinates in the camera 31 for the inspection object is (0, 0), and the new XY coordinates, that is, the center Oa of the coordinates in the panel 11 is ( x0, y0), the position of the defect 13a is expressed by the following equation from FIG.

X = Xcos θ−Y sin θ + x 0 y = X sin θ−Y cos θ + y 0 From the relationship of the above equation, the position of the defect 13 a on the image pickup device 36 of the camera 31 for inspection object is moved in parallel and rotated in the panel.
11 is converted to the position on the coordinates. And to this value,
By multiplying by the conversion multiplier determined by the above-mentioned optical system, the absolute position of the portion of the defect 13a on the XY coordinates of the actual panel 11 can be obtained.

The coordinate position on the panel 11 of the defect 13a thus obtained is stored in the storage device 39, and is displayed on the display device.
It is displayed by 40. In addition, the coordinate position of the defect 13a stored in this way is determined by the correction device for the panel 11.
It is read by the control device 41 of 24 and indicates the correction position of the panel 11 to be corrected. That is, the correction device 24
When receiving the panel 11 to be repaired, reads out from the storage device 39 to the coordinate position of the defect 13a of this panel 11, positions the repairing device by laser light or the like according to this coordinate position, and repairs the black film 12. Therefore, when the correction is performed, it is not necessary to perform the conventional difficult work of searching for the correction point with the circle mark by the marker pen as a target.

In the above structure, the panel 11 combined with the shadow mask 22 in the previous step and having the black film 12 is
As shown in FIG. 1 and FIG. 2, the panel conveyor 15 conveys the face 11a in the direction of the arrow in the figure with the face 11a facing upward. Further, the shadow mask 22 combined with the panel 11 also has a panel conveyor as shown in FIG.
A mask conveyer 21 installed in parallel with 15 is conveyed in the direction of the arrow in the figure in synchronization with the corresponding panel 11.

When the panel 11 reaches the load position A shown in FIG. 1, the panel 11 remains in the state in which the face surface 11a is directed upward, that is, the panel 11 is not turned over and is inspected by the transfer device 17. It is transferred onto the inspection table 18 of the inspection device 16 installed in B.

For the panel 11 on the inspection table 18,
Illumination is performed from below by the illumination device 27, and the inspection object camera 31 and the positioning mark cameras 33a and 33b are provided.
An image of the face surface 11a is picked up by and the inspection of the panel 11 is executed. That is, the effective surface of the panel 11 is imaged by the inspection object camera 31, the defect 13a is detected by the first detection device 35 from the image signal of the inspection object camera 31, and the coordinates of the defect 13a on the inspection object camera 31 are detected. The position is detected. Further, a pair of positioning marks 32a formed on the panel 11 by the positioning mark cameras 33a and 33b,
32b is imaged, and a pair of positioning marks 32a, 32b of the positioning mark cameras 33a, 33b are detected by the second detection devices 37a, 37b from the imaging signals of the positioning mark cameras 33a, 33b.
The coordinate position on 33a, 33b is detected. The positioning mark camera 33a of the pair of positioning marks 32a, 32b detected by the second detection devices 37a, 37b.
, 33b, the defect 13a detected by the first detection device 35 from the positional relationship between the coordinate position on the reference position and the preset reference position.
The coordinate position on the inspection object camera 31 is converted into the coordinate position on the panel 11 by the arithmetic unit 38. The result of this conversion, that is, the coordinate position of the defect 13a portion on the panel 11 is stored in the storage device 39 and displayed by the display device 40 as necessary.

After the above inspection, the panel 11 has the face surface 11
While a is turned up, it is transferred by the transfer device 17 onto the unloading position C of the latter half portion 15b of the panel conveyor 15 without being reversed, and is conveyed again in the direction of the arrow.

Here, the non-defective panel 11 and the shadow mask 22 corresponding thereto are provided on the succeeding panel conveyor 15b.
And is conveyed to the next process by the mask conveyor 21,
Regarding the panel 11 in which the defect 13a is detected by the inspection device 16, when the panel 11 reaches a branch point with the panel reject conveyor 23, the operation of the reject control device (not shown) activates the panel reject conveyor 23,
The panel 11 in which the defect 13a is generated is removed by branching. Similarly, regarding the shadow mask 22 combined with the panel 11 in which the defect 13a has occurred, when it reaches a branch point with the mask reject conveyor 25, the mask reject conveyor 25 is activated by a reject control device (not shown), and the shadow mask Branch out 22.

In the repair device 24, the removed panel 11 is repaired by a control device 41 such as a laser whose position is controlled by the control device 41 based on the coordinate position data regarding the defective portion on the panel 11 stored in the storage device 39. It is modified from below. Further, the shadow mask 22 that has been branched and eliminated at the same time is also modified by another means, but a description thereof will be omitted.

In the series of inspection and correction processes described above,
The panel 11 is never turned over
Since 11a is in the upward state, the work can be performed more quickly and the burden on the worker is reduced, compared to the conventional inspection and correction which requires the flipping of the panel every time.

Further, based on the image pickup signals of the inspection object camera 31 and the positioning mark cameras 33a and 33b, the defect 13a is detected.
Since the location is detected as a coordinate position on the panel 11, inspection work by an expert is not required, and the work can be automated. Further, since the detected coordinate position is also used for the positioning with respect to the correction means, it is not necessary for a skilled worker to perform the correction work, and it is possible to improve efficiency by automation and improve product quality by appropriate correction.

In the above embodiment, one inspection object camera is used as the inspection object imaging means for imaging the effective surface of the panel 11.
Although 31 is used, the imaging range of the panel 11 is divided into, for example, 4
It is also possible to obtain a four-divided image by a single camera. If the panel 11 is imaged by a plurality of cameras in this way, the detection accuracy is further improved. In this case,
If either the positioning mark 32a or the positioning mark 32b is set in the imaging range of the four cameras, the absolute coordinates of the defect 13a portion can be similarly obtained.

Further, in order to image the horizontal positioning marks 32a, 32b, a pair of positioning mark cameras 33a,
Although 33b is provided, the inspection object camera 31 for imaging the effective surface of the panel 11 may also be used.

Further, the position of the defect 13a to be obtained is the defect 13
It does not have to be a detailed position of a itself, and for example, a range having a diameter of about 2 mm in which the defect 13a is located may be designated. In this case, if a camera is provided on the side of the correction device 24 and its field of view is matched with a range of about 2 mm in diameter,
The defect 13a can be detected from the image captured by this camera, the XY table on the side of the correction device 24 can be operated, and the detected defect 13a can be positioned for irradiation with a laser or the like.

Needless to say, the above-described method of determining the defect position can be applied to the shadow mask 22.

[0050]

According to the defect inspection apparatus of the first aspect, the inspection object is imaged by the inspection object imaging means, and the coordinate position of the defect on the inspection object imaging means is determined from the image signal of the inspection object imaging means. In addition to the detection, the pair of positioning marks formed in advance at the reference position of the inspection object is imaged by the positioning mark imaging means, and the coordinate position of the pair of positioning marks on the positioning mark imaging means is detected from the imaging signal of the positioning mark imaging means. The position of the defect is detected as a coordinate position on the inspection object from the positional relationship between the coordinate position of the pair of positioning marks on the positioning mark imaging means and the preset reference position on the positioning mark imaging means. Since the position of the defect can be specified, the defect location can be obtained on the panel coordinates without the need for a visual inspection by a skilled worker. Becomes accurately, good or bad decision can also be quantitatively, it is possible to speed up the work, can also reduce the burden on the worker.

According to the defect inspection / correction apparatus of the second aspect, the inspection object on the conveying means is loaded on the inspection table,
The inspection object is imaged by the inspection object imaging means, the coordinate position of the defect on the inspection object imaging means is detected from the imaging signal of the inspection object imaging means, and a pair of positioning marks formed in advance at the reference position of the inspection object. Is imaged by the positioning mark imaging means, the coordinate position of the pair of positioning marks on the positioning mark imaging means is detected from the imaging signal of the positioning mark imaging means, and the coordinate position of the pair of positioning marks on the positioning mark imaging means is detected. The position of the defect is obtained as a coordinate position on the inspection object from the positional relationship with the preset reference position on the positioning mark imaging means, the position of the defect is specified, and after the inspection, it is unloaded on the following conveying means. The inspection object whose defect is found by the inspection and whose position is specified as the coordinate position is rejected by the rejecting means, and the inspection device Accurately capture the defective portion according to the position, to perform the correction, the image signal of the camera,
Defects can be found on the panel coordinates without the need for visual inspection by a skilled worker, so inspection work is fast and accurate, and quality can be determined quantitatively. Since the device is controlled, it is possible to speed up the repair work itself as well as to improve the quality of the repair as compared to manual repair, and it is possible to speed up the work.
The burden on the worker can also be reduced.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of a black film inspection device and an inspection correction device for a color cathode ray tube panel according to the present invention.

FIG. 2 is a plan view schematically showing the overall structure of the device shown in FIG.

FIG. 3 is a plan view showing a panel to be inspected in the same as above.

FIG. 4 is a front view showing a panel to be inspected in the same as above.

5 is an enlarged view of a part showing a normal pattern of a black film of the panel shown in FIGS. 3 and 4 above.

FIG. 6 is an enlarged view of a part showing small holes as defects in the normal pattern shown in FIG.

FIG. 7 is an enlarged view of a part showing a deformed hole as a defect with respect to the normal pattern shown in FIG.

FIG. 8 is an enlarged view of a part of the normal pattern shown in FIG. 5 showing a non-hole as a defect.

FIG. 9 is an explanatory diagram showing an ideal state in which the coordinate axes coincide with each other in the relationship between the image pickup element of the camera used in the apparatus shown in FIG. 1 and the coordinate position of the imaged defect portion.

10 is an explanatory diagram showing an actual relationship in which the coordinate axes are deviated in the relationship between the image pickup element of the camera used in the apparatus shown in FIG. 1 above and the coordinate position of the imaged defect portion.

FIG. 11 is an explanatory diagram showing the image pickup state of the pair of positioning marks shown in FIGS. 3 and 4 above in comparison with an ideal state and an actual state.

FIG. 12 is an explanatory diagram showing a conversion method for obtaining the position of the defect as the position on the panel coordinates.

[Explanation of symbols]

11 Panel as inspection object 13a Defect 15 Panel conveyor as transfer means 17 Transfer device as transfer means 18 Inspection table 23 Panel reject conveyor as reject means 24 Correction device as correction means 31 Inspection as inspection object imaging means Object cameras 33a, 33b Positioning mark camera 35 as positioning mark imaging means 35 First detection device 37a, 37b as first detection means Second detection device 38 as second detection means 38 Calculation as calculation means apparatus

Claims (2)

[Claims] 1. An inspection object image pickup means for picking up an image of an inspection object and outputting an image pickup signal, and detecting a coordinate position of a defective portion of the inspection object on the inspection object image pickup means from an image pickup signal of the inspection object image pickup means. No. 1 detection means, positioning mark imaging means for imaging a pair of positioning marks formed in advance at the reference position of the inspection object and outputting an imaging signal, and a pair of positioning marks from the imaging signal of the positioning mark imaging means. A second detection unit that detects a coordinate position on the mark imaging unit; a coordinate position on the positioning mark imaging unit of the pair of positioning marks detected by the second detection unit; and a preset reference position. An inspection device for a defect, comprising: an arithmetic means for converting a coordinate position of the defect on the inspection object imaging means into a coordinate position on the inspection object based on a positional relationship. 2. Conveying means for conveying an inspection object, an inspection table located at an intermediate portion in the conveying direction of the conveying means, the inspection table being loaded with the inspection object, and the succeeding conveyance from the inspection table. Transfer means for unloading the inspection object on the means, inspection object imaging means for imaging the inspection object on the inspection table and outputting an imaging signal, and the defect of the defect from the imaging signal of the inspection object imaging means. First detection means for detecting a coordinate position on the inspection object imaging means; positioning mark imaging means for imaging a pair of positioning marks formed in advance on the inspection object reference position on the inspection table; The second detection means detects the coordinate position of the pair of positioning marks on the positioning mark imaging means from the imaging signal of the positioning mark imaging means, and the second detection means. From the positional relationship between the detected coordinate position of the pair of positioning marks on the positioning mark imaging means and the preset reference position on the positioning mark imaging means, the coordinate position of the defect on the inspection object imaging means is determined. Computing means for converting to coordinate positions on the inspection object; reject means for unloading onto the subsequent transport means and branching the inspection object for which the coordinate position of the defect on the inspection object is obtained And a correction unit that stops the inspection object rejected by the rejection unit at a predetermined position and corrects a defect whose coordinate position on the inspection object is obtained by the arithmetic unit. Defect inspection and repair device.