JPH06133523A - Actuator - Google Patents

Actuator

Info

Publication number
JPH06133523A
JPH06133523A JP4305100A JP30510092A JPH06133523A JP H06133523 A JPH06133523 A JP H06133523A JP 4305100 A JP4305100 A JP 4305100A JP 30510092 A JP30510092 A JP 30510092A JP H06133523 A JPH06133523 A JP H06133523A
Authority
JP
Japan
Prior art keywords
output shaft
coil
yoke
pair
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4305100A
Other languages
Japanese (ja)
Other versions
JP3268033B2 (en
Inventor
Hitoshi Mikami
均 三上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Metals Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP30510092A priority Critical patent/JP3268033B2/en
Publication of JPH06133523A publication Critical patent/JPH06133523A/en
Application granted granted Critical
Publication of JP3268033B2 publication Critical patent/JP3268033B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To provide a high output downsized voice coil type linear actuator in which the output shaft can be controlled highly accurately. CONSTITUTION:A pair of permanent ring magnets 2, 2 are incorporated, while opposing the same poles to each other, in a yoke comprising a pair of board type side yoke parts 4, 4 and a cylindrical yoke part 5 for connecting them integrally. A movable coil 6 is disposed between the cylindrical yoke part 5 and the outer peripheral end faces of pole pieces 3, 3 and fitted to the outer periphery of the pole piece thus increasing the cross-sectional area of the magnet while reducing leakage flux to the outside of the magnetic circuit and enhancing the flux density in the air gap efficiently.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、ボイスコイルモータ
型のリニアアクチュエータに係り、磁気回路部及びコイ
ル部を一体化し、精密位置決め装置、油圧及び空圧バル
ブのNC制御装置、ロボット腕、組立て装置等の種々の
用途に利用できる小型高性能アクチュエータに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a voice coil motor type linear actuator, in which a magnetic circuit unit and a coil unit are integrated, and a precision positioning device, an NC control device for hydraulic and pneumatic valves, a robot arm, and an assembling device. The present invention relates to a small high-performance actuator that can be used in various applications such as.

【0002】[0002]

【従来の技術】ボイスコイルモータ(Voice Co
il Motor)は、磁石が作る磁界の中で可動コイ
ル部のみが動くモータであり、可動線輪型とも呼ばれる
タイプで、一般的な回転型モータで直線運動させる場合
に必要な回転運動を直線運動に変換する機構が不要なリ
ニアモータである。
2. Description of the Related Art A voice coil motor (Voice Co
il Motor) is a motor in which only the movable coil part moves in the magnetic field created by the magnet. It is also called a movable coil type, and the rotary motion required for linear motion with a general rotary motor is linear motion. It is a linear motor that does not require a mechanism to convert to.

【0003】ボイスコイルモータは、可動部がコイル及
びそれを支持するボビンで構成されており軽量であるこ
と、強力な磁界の中を可動コイル部だけが直線運動する
ことから、軸出力速度が極めて速いことが特徴であり、
また、ボイスコイルモータの制御にはクローズドループ
方式が必要で、ステッピングモータ等のオープンループ
方式に比べ、制御系が若干複雑になるが、出力は入力電
流に完全に比例し精密な制御が可能であること、コイル
インダクタンスが小さく電気的応答にすぐれているこ
と、コギング、トルクリップルがなく円滑な制御が可能
なことなど多くの利点がある。かかるボイスコイルモー
タは、従来、主としてハードディスクドライブ(HD
D)装置のヘッド位置決め用に用いられてきた。
In the voice coil motor, the movable part is composed of a coil and a bobbin supporting the coil and is lightweight, and since only the movable coil part makes a linear motion in a strong magnetic field, the shaft output speed is extremely high. Characterized by being fast,
In addition, a closed loop system is required to control the voice coil motor, and the control system is slightly more complicated than open loop systems such as stepping motors, but the output is completely proportional to the input current and precise control is possible. There are many advantages such as a small coil inductance, excellent electrical response, smooth control without cogging and torque ripple. Conventionally, such voice coil motors have been mainly used in hard disk drives (HD
D) It has been used for head positioning of devices.

【0004】[0004]

【発明が解決しようとする課題】本発明者は先に、上記
のようなボイスコイルモータの特長、利点を種々の産業
分野で容易に適用できるボイスコイル型リニアアクチュ
エータの開発を行った結果、図3に示すような、外径の
異なる一対の円筒材21,22を同軸配置して一端部を
導通可能に接続し、一対のエンドプレート20,20間
に配置し、ヨーク部材の外側円筒材21内周面に円筒状
の永久磁石23を着設した所要空隙内に静磁界を発生さ
せる磁気回路と、該空隙内に配置される可動コイル25
とをかかるフレーム内に配設し、エンドプレート20,
20に直動可能に軸支された出力軸26と可動コイル2
5をボビン24により接続一体化した構成のアクチュエ
ータを完成した。(特開平4−101657号)
The present inventor has previously developed a voice coil type linear actuator in which the features and advantages of the voice coil motor as described above can be easily applied in various industrial fields. 3, a pair of cylindrical members 21 and 22 having different outer diameters are coaxially arranged, one end portions thereof are connected so as to be able to conduct, and arranged between a pair of end plates 20 and 20 to form an outer cylindrical member 21 of the yoke member. A magnetic circuit for generating a static magnetic field in a required space having a cylindrical permanent magnet 23 attached to the inner peripheral surface thereof, and a movable coil 25 arranged in the space.
And the end plate 20,
An output shaft 26 and a movable coil 2 which are rotatably supported by 20
An actuator having a structure in which 5 are connected and integrated by a bobbin 24 is completed. (JP-A-4-101657)

【0005】また、上記発明は、磁気回路部と可動コイ
ル部とを軸受を介して所要フレーム内に一体化し、さら
に可動コイル25と一体化された出力軸26の一方端
に、可動コイルの移動位置を確認するための、例えば差
動トランス、エンコーダ等の位置センサー、あるいは可
動コイルの移動速度を確認するための速度センサーを該
フレームに一体化し、上記出力軸の他方端には制御対象
物、例えば油圧バルブ等を接続したことを特徴とするア
クチュエータである。
Further, in the above invention, the magnetic circuit portion and the movable coil portion are integrated into a required frame through a bearing, and the movable coil is moved to one end of the output shaft 26 integrated with the movable coil 25. A position sensor for confirming the position, for example, a differential transformer, a position sensor such as an encoder, or a speed sensor for confirming the moving speed of the moving coil is integrated with the frame, and the controlled object is provided at the other end of the output shaft, For example, it is an actuator characterized by connecting a hydraulic valve or the like.

【0006】この構成のアクチュエータは、高速かつ高
精度に位置決めすることができ、精密位置決め装置、油
圧及び空圧バルブのNC制御装置、ロポット腕、組立て
装置等の様々な用途に利用できる。しかし、近年さらに
小型、高出力であり、さらに高精度の出力軸の制御が可
能なリニアアクチュエータが求められている。
The actuator having this structure can perform high-speed and high-precision positioning, and can be used in various applications such as a precision positioning device, a hydraulic and pneumatic valve NC control device, a robot arm, and an assembly device. However, in recent years, there has been a demand for a linear actuator that is smaller, has higher output, and can control the output shaft with higher accuracy.

【0007】この発明は、ボイスコイル型リニアアクチ
ュエータにおいて、高精度の出力軸の制御が可能で、小
型、高出力を達成したリニアアクチュエータの提供を目
的としている。
It is an object of the present invention to provide a voice coil type linear actuator which is capable of controlling an output shaft with high precision and has a small size and high output.

【0008】[0008]

【課題を解決するための手段】この発明は、所定の空隙
を形成して同磁極を対向配置しかつ空隙側端面に磁極片
を固着した一対のリング状永久磁石を、各永久磁石の他
方端面に配置する一対の盤状サイドヨーク部とこれらサ
イドヨークを接続一体化する筒状ヨーク部とからなるヨ
ーク内に内蔵し、リング状永久磁石の軸方向にサイドヨ
ーク部を貫通して直動可能に出力軸を配置し、該筒状ヨ
ーク部の内周面と前記一対の磁極片外周面との間に配置
する可動コイルと出力軸とを接続するコイル支持体を空
隙内に配置したことを特徴とするアクチュエータであ
る。
SUMMARY OF THE INVENTION According to the present invention, a pair of ring-shaped permanent magnets having a predetermined air gap, the magnetic poles arranged opposite to each other, and magnetic pole pieces fixed to the air gap side end surface are provided on the other end surface of each permanent magnet. It is built in a yoke consisting of a pair of disc-shaped side yokes arranged in a pair and a cylindrical yoke that connects and integrates these side yokes, and can be moved directly through the side yokes in the axial direction of the ring-shaped permanent magnet. The output shaft is disposed in the coil, and the coil support that connects the output shaft and the movable coil disposed between the inner peripheral surface of the cylindrical yoke portion and the outer peripheral surfaces of the pair of magnetic pole pieces is disposed in the space. It is a characteristic actuator.

【0009】この発明は、種々の産業機器に適用できる
小型で高出力のボイスコイル型アクチュエータとして、
一対の永久磁石をいわゆる内磁型スピーカーの構成のよ
うに、同磁極を対向配置させた構成とすることにより、
かつ可動コイルを筒状ヨーク部と磁極片外周端面との間
に配置し磁極片外周に外装する構成とすることにより、
磁石断面積を増すとともに、磁気回路外への磁束の漏れ
を少なくし、空隙の磁束密度を効率よく向上させること
が可能である。
The present invention provides a compact and high-power voice coil type actuator applicable to various industrial equipment.
By configuring the pair of permanent magnets so that the same magnetic poles are arranged to face each other, as in the case of a so-called inner magnet type speaker,
Further, by arranging the movable coil between the cylindrical yoke portion and the outer peripheral end face of the magnetic pole piece and covering the outer periphery of the magnetic pole piece,
It is possible to increase the cross-sectional area of the magnet, reduce leakage of the magnetic flux to the outside of the magnetic circuit, and efficiently improve the magnetic flux density of the air gap.

【0010】また、この発明において、例えば可動コイ
ルとヨーク中央部において軸方向に直動可能に配置する
出力軸とを接続一体化するコイル支持体が、一対の永久
磁石の空隙対向磁極面に固着された磁極片間に配置され
るような構成とすることにより、図3の従来装置ではボ
ビン24内にヨークの一部である内側円筒材22を通
し、シャフト26を受けるための支持部を有する等、複
雑な構成となっていたが、この発明ではコイル支持体及
びヨークの構成が簡素化され、装置全体の構成が単純化
でき、製造を容易にすることができる。
Further, in the present invention, for example, a coil support for connecting and integrating a movable coil and an output shaft arranged so as to be linearly movable in the axial direction at the center of the yoke is fixed to the air gap facing magnetic pole faces of the pair of permanent magnets. The conventional apparatus shown in FIG. 3 has a supporting portion for passing the inner cylindrical member 22 which is a part of the yoke in the bobbin 24 and receiving the shaft 26 by adopting the structure in which the magnetic pole pieces are arranged between the pole pieces. However, in the present invention, the configurations of the coil support and the yoke are simplified, the configuration of the entire apparatus can be simplified, and the manufacturing can be facilitated.

【0011】さらに、この発明の構成は、従来装置に比
べヨークの長さを短縮でき、磁気回路からの磁束を効率
よく利用でき、さらに、出力軸の移動範囲を一対の磁極
片間に形成された所要の空隙内としたため、装置が大幅
に小型化した。
Further, according to the structure of the present invention, the length of the yoke can be shortened as compared with the conventional device, the magnetic flux from the magnetic circuit can be efficiently utilized, and the moving range of the output shaft is formed between the pair of magnetic pole pieces. Also, because the required space was provided, the device was significantly downsized.

【0012】この発明のアクチュエータは、可動コイル
と接続一体化された出力軸の一方端に、可動コイルの移
動位置を確認するための、例えば差動トランス、エンコ
ーダ等の位置センサー、あるいは可動コイルの移動速度
を確認するための速度センサーを配設することにより、
装置の高精度化を図ることができる。また、上記出力軸
の他方端には制御対象物、たとえば油圧バルブ等を接続
してもよい。また、制御対象物の作動状況を確認するセ
ンサーを付設してこの信号に基づいて出力軸を制御する
こともできる。
The actuator of the present invention is provided with a position sensor such as a differential transformer or an encoder for confirming the moving position of the movable coil at one end of the output shaft connected and integrated with the movable coil, or of the movable coil. By arranging a speed sensor to check the moving speed,
The accuracy of the device can be improved. Further, a controlled object such as a hydraulic valve may be connected to the other end of the output shaft. It is also possible to attach a sensor for confirming the operating status of the controlled object and control the output shaft based on this signal.

【0013】制御対象物には、HDD装置は勿論のこ
と、工作物、測定物などの精密位置決め装置、油圧及び
空圧バルブ等のNC制御装置、組立てラインの組立て装
置、ロボット腕、ボンディング装置等の種々の用途に応
じて、アクチュエータの可動部質量、ストローク、コイ
ル、永久磁石等を種々選定することにより、いずれのも
のにも適用利用できる。
The objects to be controlled include HDD devices, precision positioning devices for workpieces, measured objects, NC control devices for hydraulic and pneumatic valves, assembly devices for assembly lines, robot arms, bonding devices, etc. According to various uses, various kinds of actuator masses, strokes, coils, permanent magnets and the like can be selected to be applied to any of them.

【0014】[0014]

【作用】この発明によるアクチュエータの作用を図面に
基づいて詳述する。図1のAはこの発明によるアクチュ
エータの一実施例を示す一部縦断説明図であり、同Bは
同AにおけるX−Y縦断面説明図である。
The operation of the actuator according to the present invention will be described in detail with reference to the drawings. 1A is a partially longitudinal explanatory view showing an embodiment of an actuator according to the present invention, and FIG. 1B is an XY vertical sectional view in the same A. FIG.

【0015】所定の空隙1を形成して一対のリング状永
久磁石2が対向配置され、該リング状永久磁石2の空隙
側端面にはリング状の磁極片3が固着される。該リング
状永久磁石2の他方端面には一対の円盤状サイドヨーク
部4,4が固着され、該サイドヨーク部4,4は円筒状
の筒状ヨーク部5にて接続一体化される。
A pair of ring-shaped permanent magnets 2 are arranged so as to face each other to form a predetermined gap 1, and a ring-shaped magnetic pole piece 3 is fixed to the gap-side end surface of the ring-shaped permanent magnet 2. A pair of disc-shaped side yoke portions 4, 4 are fixed to the other end surface of the ring-shaped permanent magnet 2, and the side yoke portions 4, 4 are connected and integrated by a cylindrical tubular yoke portion 5.

【0016】つまり、リング状永久磁石2及びリング状
の磁極片3を円盤状サイドヨーク部4,4と筒状ヨーク
部5にて包囲された構成することにより、リング状永久
磁石2からの漏洩磁束を低減することができる。盤状サ
イドヨーク部4,4と筒状ヨーク部5からなるヨークの
構成は、磁界発生源を包囲し、磁極片3外周端面と筒状
ヨーク部5内周面間に静磁界を発生するよう、組立て作
業性を考慮し適宜選定できる。
That is, since the ring-shaped permanent magnet 2 and the ring-shaped magnetic pole piece 3 are surrounded by the disk-shaped side yoke portions 4 and 4 and the cylindrical yoke portion 5, leakage from the ring-shaped permanent magnet 2 is caused. The magnetic flux can be reduced. The configuration of the yoke composed of the disk-shaped side yoke portions 4 and 4 and the tubular yoke portion 5 surrounds the magnetic field generation source so that a static magnetic field is generated between the outer peripheral end surface of the magnetic pole piece 3 and the inner peripheral surface of the tubular yoke portion 5. , It can be selected as appropriate in consideration of assembling workability.

【0017】可動コイル6は該筒状ヨーク部5と前記磁
極片3,3の外周端面との間の静磁界内に位置し、磁極
片3,3の外周面に外装して配置してあり、また、一対
のリング状永久磁石2,2の中心軸方向に盤状サイドヨ
ーク部4,4を貫通して軸受9を介して直動可能に出力
軸8を配置してあり、さらに円盤状のコイル支持体7を
空隙1内に配置して上記出力軸8と可動コイル6とを接
続一体化してある。従って、出力軸8は空隙1内のコイ
ル支持体7の移動範囲内で直動可能となる。コイル支持
体7は非磁性体からなり、空隙1内に配置できればいず
れの形状でも良く、また出力軸8も非磁性体からなり、
アクチュエータの用途に応じて種々の形状を採用するこ
とができる。従って、出力軸8も上記の如く、リング状
永久磁石2,2の中心軸方向にサイドヨーク部4,4を
貫通して配置するほか、任意の軸方向に配置することが
できる。サイドヨーク部の出力軸対向面に配置され、出
力軸の往復動を円滑にする軸受9は、どのような構成で
も良いが、従来からあるリニアボールベアリング、含油
メタル軸受等種々の構成が選択できる。
The movable coil 6 is located in the static magnetic field between the cylindrical yoke portion 5 and the outer peripheral end surfaces of the magnetic pole pieces 3 and 3, and is arranged on the outer peripheral surfaces of the magnetic pole pieces 3 and 3 so as to be externally mounted. Further, the output shaft 8 is arranged so as to be linearly movable through the bearings 9 through the disc-shaped side yoke portions 4 and 4 in the central axis direction of the pair of ring-shaped permanent magnets 2 and 2, and further in the shape of a disc. The coil support 7 is disposed in the space 1 so that the output shaft 8 and the movable coil 6 are connected and integrated. Therefore, the output shaft 8 can be moved linearly within the moving range of the coil support 7 in the gap 1. The coil support 7 is made of a non-magnetic material and may have any shape as long as it can be placed in the gap 1. The output shaft 8 is also made of a non-magnetic material.
Various shapes can be adopted depending on the application of the actuator. Therefore, as described above, the output shaft 8 can also be arranged in any axial direction in addition to the side yoke portions 4 and 4 penetrating in the central axis direction of the ring-shaped permanent magnets 2 and 2. The bearing 9 arranged on the surface of the side yoke portion facing the output shaft to smoothly reciprocate the output shaft may have any structure, but various structures such as a conventional linear ball bearing and an oil-impregnated metal bearing can be selected. .

【0018】可動コイル6は、筒状ヨーク部5の内周面
と前記磁極片外周端面との間の静磁界の発生する位置
で、磁極片3,3に外装しており、ヨーク支持部7を介
して出力軸8に接続される構成となっている。リード線
10を介して可動コイル6に給電されると、可動コイル
6に軸方向に推力が発生し、コイル支持体7を介して出
力軸8に伝えられる。可動コイル6に通電するリード線
10は、可動コイル6からコイル支持体7に沿ってヨー
ク中心部に導かれ、出力軸8の切欠部を通してヨーク中
心部では出力軸8の中空部を通り、装置外部へ通じてい
る。可動コイル6に給電するリード線10は、コイル支
持体7に導かれ中空の出力軸8内を通って装置外部へ出
されているため、可動コイル及びコイル支持体7が回転
しても、従来のアクチュエータのように、リード線が切
れたり曲がったりすることがなく、またそれを防止する
ための手段も不要であるため、給電部の構造が簡素化さ
れ、アクチュエータの信頼性が高くなる。
The movable coil 6 is mounted on the magnetic pole pieces 3 and 3 at a position where a static magnetic field is generated between the inner peripheral surface of the cylindrical yoke portion 5 and the outer peripheral end surface of the magnetic pole piece, and the yoke support portion 7 is provided. It is configured to be connected to the output shaft 8 via. When power is supplied to the movable coil 6 via the lead wire 10, an axial thrust is generated in the movable coil 6 and transmitted to the output shaft 8 via the coil support 7. The lead wire 10 for energizing the movable coil 6 is guided from the movable coil 6 to the center of the yoke along the coil support 7, passes through the notch of the output shaft 8 and passes through the hollow portion of the output shaft 8 at the center of the yoke, Communicating to the outside. Since the lead wire 10 feeding the movable coil 6 is guided to the coil support 7 and passed through the hollow output shaft 8 to the outside of the device, even if the movable coil and the coil support 7 rotate, the conventional lead wire 10 is not provided. Unlike the actuator of (1), the lead wire is not broken or bent, and a means for preventing it is not necessary. Therefore, the structure of the power feeding unit is simplified and the reliability of the actuator is increased.

【0019】このアクチュエータの磁界発生源となる一
対のリング状永久磁石2には、フェライト磁石、アルニ
コ系磁石、希土類コバルト系磁石が使用できるが、特
に、RとしてNdやPrを中心とする資源的に豊富な軽
希土類を用い、B、Feを主成分として30MGOe以
上の極めて高いエネルギー積を示す、R−Fe−B系永
久磁石を使用することにより、著しく小型化、高出力化
することができる。リング状永久磁石2は必ずしも一体
物である必要はなく、複数の永久磁石ブロックを軸方向
に積層したもの、複数の弓形永久磁石を組み合わせたも
のなど、適宜選定される。永久磁石2の配置を、内磁型
スピーカタイプのような構成とすることにより、サイド
ヨーク内面全体を有効に使うことが可能である。
Ferrite magnets, alnico magnets, and rare earth cobalt magnets can be used for the pair of ring-shaped permanent magnets 2 serving as the magnetic field generation source of this actuator, and especially R is a resource centered on Nd or Pr. By using abundant light rare earths and using an R-Fe-B system permanent magnet that contains B and Fe as main components and has an extremely high energy product of 30 MGOe or more, it is possible to significantly reduce the size and output. . The ring-shaped permanent magnet 2 does not necessarily have to be a unitary body, and may be appropriately selected such as one in which a plurality of permanent magnet blocks are laminated in the axial direction, one in which a plurality of bow-shaped permanent magnets are combined, and the like. By arranging the permanent magnets 2 in a configuration such as an inner magnet type speaker type, it is possible to effectively use the entire inner surface of the side yoke.

【0020】一対のリング状永久磁石2に固着される磁
極片3の寸法は、リング状永久磁石2と同程度の寸法で
良く、永久磁石2の寸法、材質に合わせて適宜選定する
が、図2に示すように、可動コイル7の軸方向厚み及び
可動コイル7の移動範囲、すなわち出力軸8の移動範囲
を考慮して、可動コイル対向面を永久磁石2の方向へ延
長した構成とすることもできる。
The size of the magnetic pole piece 3 fixed to the pair of ring-shaped permanent magnets 2 may be about the same as that of the ring-shaped permanent magnet 2, and is appropriately selected according to the size and material of the permanent magnet 2. As shown in FIG. 2, in consideration of the axial thickness of the moving coil 7 and the moving range of the moving coil 7, that is, the moving range of the output shaft 8, the moving coil facing surface is extended in the direction of the permanent magnet 2. You can also

【0021】装置は盤状サイドヨーク部4,4及び筒状
ヨーク部5により密封された構成となっているが、図1
のAに示すように、円盤状のコイル支持体7側面に1個
または2個以上の孔11を開けることにより、コイル支
持体7が軸方向に往復動する際に空気の抵抗を避けるこ
とができ、運動がスムーズに行われる。また、孔11を
開けることにより、装置を軽量化できる利点もある。
The apparatus is constructed so as to be sealed by the disc-shaped side yoke portions 4 and 4 and the tubular yoke portion 5.
As shown in A of FIG. 1, by forming one or more holes 11 on the side surface of the disk-shaped coil support body 7, it is possible to avoid air resistance when the coil support body 7 reciprocates in the axial direction. Yes, you can exercise smoothly. In addition, there is an advantage that the weight of the device can be reduced by forming the hole 11.

【0022】この発明によるアクチュエータは、磁界発
生源が直接可動コイルに対向する構成ではなく、筒状ヨ
ーク部5の内周面と前記磁極片3外周端面間の静磁界に
可動コイル6を配置することにより、盤状サイドヨーク
部4,4内面全面を有効に活用することができ、筒状ヨ
ーク部5と磁極片3及び磁極片3,3間の空隙を狭くし
て磁気回路外への漏洩磁束を低減することができる。こ
の条件の範囲内であれば、制御対象物に応じて、同磁極
を対向させ磁極片を固着した一対の永久磁石を、他方端
面にサイドヨークを固着し筒状ヨーク部にて接続一体化
し、該筒状ヨーク部と磁極片外周端面との間に配置した
可動コイルと、前記磁極片間に配置し軸方向に直動可能
な出力軸とをコイル支持体にて接続一体化した構成であ
れば、いずれの構成も採用できる。
In the actuator according to the present invention, the magnetic field source does not directly face the movable coil, but the movable coil 6 is arranged in the static magnetic field between the inner peripheral surface of the cylindrical yoke portion 5 and the outer peripheral end surface of the magnetic pole piece 3. As a result, it is possible to effectively utilize the entire inner surface of the board-shaped side yoke portions 4 and 4, and to narrow the gap between the cylindrical yoke portion 5 and the magnetic pole pieces 3 and the magnetic pole pieces 3 and 3 to leak outside the magnetic circuit. The magnetic flux can be reduced. Within the range of this condition, a pair of permanent magnets having the same magnetic poles opposed to each other and having magnetic pole pieces fixed thereto, and a side yoke fixed to the other end surface and connected and integrated at a cylindrical yoke portion, according to an object to be controlled, A movable coil arranged between the cylindrical yoke portion and the outer peripheral end surface of the magnetic pole piece and an output shaft arranged between the magnetic pole pieces and movable linearly in the axial direction are connected and integrated by a coil support. Any configuration can be adopted.

【0023】[0023]

【実施例】図1のAに示すこの発明のアクチュエータを
用いて、図3に示す従来装置と比較した。同一条件のも
とで単位体積あたりの推力および単位重量あたりの推力
を比較すると、単位体積あたりの推力で3倍、単位重量
あたりの推力で1.8倍もの良好な結果が得られた。
EXAMPLE The actuator of the present invention shown in FIG. 1A was used for comparison with the conventional device shown in FIG. When the thrust per unit volume and the thrust per unit weight were compared under the same conditions, the thrust per unit volume was 3 times as good, and the thrust per unit weight was 1.8 times as good.

【0024】[0024]

【発明の効果】この発明は、リング状永久磁石を、各永
久磁石の他方端面に配置する一対の盤状サイドヨーク部
とこれらサイドヨークを接続一体化する筒状ヨーク部と
からなるヨーク内に内蔵した構成により、コイルボビン
、ヨークの構造が簡素化され、装置を小型化し製造を
容易とすることが可能である。また、磁石断面積を増や
すとともに、磁気回路外への漏洩磁束を低減でき、可動
コイルの配置される筒状ヨーク部の内周面と磁極片外周
端面のギャップ磁束密度を、効率よく高めることができ
るため、高出力化されたアクチュエータを得ることがで
きる。
According to the present invention, a ring-shaped permanent magnet is provided in a yoke composed of a pair of disc-shaped side yoke parts arranged on the other end surface of each permanent magnet and a cylindrical yoke part for connecting and integrating these side yokes. The built-in structure simplifies the structures of the coil bobbin and the yoke, and makes it possible to downsize the device and facilitate manufacturing. Further, while increasing the magnet cross-sectional area, it is possible to reduce the leakage magnetic flux to the outside of the magnetic circuit, and efficiently increase the gap magnetic flux density between the inner peripheral surface of the cylindrical yoke portion where the movable coil is arranged and the outer peripheral end surface of the pole piece. Therefore, an actuator with high output can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明によるアクチュエータの一実施例を示
す一部縦断説明図であり、同Bは同AにおけるX−Y縦
断面説明図である。
FIG. 1 is a partially vertical explanatory view showing an embodiment of an actuator according to the present invention, and FIG. 1B is an XY vertical sectional view in the same A;

【図2】この発明によるアクチュエータの他の実施例を
示す要部縦断説明図であ
FIG. 2 is a longitudinal sectional explanatory view of a main part showing another embodiment of the actuator according to the present invention.

【図3】従来のアクチュエータの構成例を示す一部縦断
説明図である。
FIG. 3 is a partially longitudinal explanatory view showing a configuration example of a conventional actuator.

【符号の説明】[Explanation of symbols]

1 空隙 2 リング状永久磁石 3 磁極片 4 盤状サイドヨーク部 5 筒状ヨーク部 6 可動コイル 7 コイル支持体 8 出力軸 9 軸受 10 リード線 11 孔 20 エンドプレート 21,22 円筒材 23 永久磁石 24 ボビン 25 可動コイル 26 出力軸 DESCRIPTION OF SYMBOLS 1 Air gap 2 Ring-shaped permanent magnet 3 Magnetic pole piece 4 Board-shaped side yoke part 5 Cylindrical yoke part 6 Moving coil 7 Coil support 8 Output shaft 9 Bearing 10 Lead wire 11 Hole 20 End plate 21, 22 Cylindrical material 23 Permanent magnet 24 Bobbin 25 Moving coil 26 Output shaft

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 所定の空隙を形成して同磁極を対向配置
しかつ空隙側端面に磁極片を固着した一対のリング状永
久磁石を、各永久磁石の他方端面に配置する一対の盤状
サイドヨーク部とこれらサイドヨークを接続一体化する
筒状ヨーク部とからなるヨーク内に内蔵し、リング状永
久磁石の軸方向にサイドヨーク部を貫通して直動可能に
出力軸を配置し、該筒状ヨーク部の内周面と前記一対の
磁極片外周面との間に配置する可動コイルと出力軸とを
接続するコイル支持体を空隙内に配置したことを特徴と
するアクチュエータ。
1. A pair of disc-shaped sides in which a pair of ring-shaped permanent magnets are formed on a second end face of each permanent magnet, with a predetermined gap being formed so that the same magnetic poles are arranged to face each other, and pole pieces are fixed to the gap-side end faces. The output shaft is built in a yoke composed of a yoke part and a cylindrical yoke part for connecting and integrating these side yokes, and the output shaft is arranged so as to be linearly movable through the side yoke part in the axial direction of the ring-shaped permanent magnet. An actuator characterized in that a coil support that connects a movable coil arranged between the inner peripheral surface of the cylindrical yoke portion and the outer peripheral surfaces of the pair of magnetic pole pieces to the output shaft is arranged in the gap.
JP30510092A 1992-10-16 1992-10-16 Actuator Expired - Fee Related JP3268033B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30510092A JP3268033B2 (en) 1992-10-16 1992-10-16 Actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30510092A JP3268033B2 (en) 1992-10-16 1992-10-16 Actuator

Publications (2)

Publication Number Publication Date
JPH06133523A true JPH06133523A (en) 1994-05-13
JP3268033B2 JP3268033B2 (en) 2002-03-25

Family

ID=17941106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30510092A Expired - Fee Related JP3268033B2 (en) 1992-10-16 1992-10-16 Actuator

Country Status (1)

Country Link
JP (1) JP3268033B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7205686B2 (en) 2004-03-24 2007-04-17 Shinano Kenshi Kabushiki Kaisha Linear actuator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437916U (en) * 1990-07-25 1992-03-31
JPH04101657A (en) * 1990-08-20 1992-04-03 Sumitomo Special Metals Co Ltd Actuator
JPH0498876U (en) * 1991-01-23 1992-08-26

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437916U (en) * 1990-07-25 1992-03-31
JPH04101657A (en) * 1990-08-20 1992-04-03 Sumitomo Special Metals Co Ltd Actuator
JPH0498876U (en) * 1991-01-23 1992-08-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7205686B2 (en) 2004-03-24 2007-04-17 Shinano Kenshi Kabushiki Kaisha Linear actuator

Also Published As

Publication number Publication date
JP3268033B2 (en) 2002-03-25

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