JPH0613262Y2 - 竪型液相エピタキシヤル成長装置 - Google Patents

竪型液相エピタキシヤル成長装置

Info

Publication number
JPH0613262Y2
JPH0613262Y2 JP1987154719U JP15471987U JPH0613262Y2 JP H0613262 Y2 JPH0613262 Y2 JP H0613262Y2 JP 1987154719 U JP1987154719 U JP 1987154719U JP 15471987 U JP15471987 U JP 15471987U JP H0613262 Y2 JPH0613262 Y2 JP H0613262Y2
Authority
JP
Japan
Prior art keywords
underframe
frame
slide guide
vertical
guide mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987154719U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0162364U (cs
Inventor
英雄 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP1987154719U priority Critical patent/JPH0613262Y2/ja
Publication of JPH0162364U publication Critical patent/JPH0162364U/ja
Application granted granted Critical
Publication of JPH0613262Y2 publication Critical patent/JPH0613262Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1987154719U 1987-10-12 1987-10-12 竪型液相エピタキシヤル成長装置 Expired - Lifetime JPH0613262Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987154719U JPH0613262Y2 (ja) 1987-10-12 1987-10-12 竪型液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987154719U JPH0613262Y2 (ja) 1987-10-12 1987-10-12 竪型液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPH0162364U JPH0162364U (cs) 1989-04-20
JPH0613262Y2 true JPH0613262Y2 (ja) 1994-04-06

Family

ID=31431699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987154719U Expired - Lifetime JPH0613262Y2 (ja) 1987-10-12 1987-10-12 竪型液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPH0613262Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515636A (en) * 1974-07-04 1976-01-17 Tokyo Gas Co Ltd Ekitainenryono chitsusosankabutsuteihatsuseinenshohoho
JPS5815218A (ja) * 1981-07-20 1983-01-28 Hitachi Ltd 液相エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPH0162364U (cs) 1989-04-20

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