JPH06129723A - Temperature accumulating body - Google Patents

Abstract

PURPOSE:To improve the workability and heat accumulation of a temperature accumulating body employed for the cooling unit of a cryopump and the like for a cryogenic refrigerating device. CONSTITUTION:A sintered body 10 is made by sintering fibrous metallic material 1 while providing a multitude of fine air passages 10A therein. An interposing body 11 is provided with a length shorter than the length L of the sintered body 10 or a thin thickness T and is manufactured employing a material having smaller heat conductivity compared with the metallic material of the sintered body 10 while providing air passages. A temperature accumulating body 12 is formed by piling the sintered body 10 and the interposing body 11 alternately. The principal body of the temperature accumulating body 12 is the sintered bodies 10 whereby the workability of filling work and the like is improved. On the other hand, the heat conductivity of the interposing body 11 is small whereby respective heat capacities accumulated in respective sintered bodies 10 can be maintained and the accumulating capacity of heat capacity is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a regenerator for accumulating cryogenic cooling energy or a temperature accumulator used as a heat accumulating member for accumulating high temperature heating energy.

[0002]

2. Description of the Related Art This type of temperature accumulator is required to have a large amount of accumulated heat energy that can be absorbed and released quickly. For example, as a means for accumulating cooling energy, a temperature drop during expansion of high pressure helium is required. There is a heat exchange device provided with a regenerator for accumulating the cooling energy obtained by the method described in JP-B-53-52673, JP-B-43-8656, JP-B-54-28623, JP-B-47-16591, and JP-B-4.
7-13588 and the like.

[0003] As a refrigerating device for performing a refrigerating operation while accumulating cooling energy for accumulating cooling energy by such a temperature accumulating body, "Cryogenic Engineering Handbook" issued by Uchida Lao Tsuruga Shinsha Co., Ltd.
There is a regenerator type heat exchange refrigerating device including a regenerator type heat exchanger such as a GM cycle refrigerator / Stirling cycle refrigerator, etc. described in, for example, as an example of such a regenerator type heat exchange refrigerating device. There is one using a GM cycle refrigerator such as No. 7 as the cooling unit 50 of the cryopump.

In FIG. 7, a compressor 101 includes a refrigerant gas, for example, a pressurized refrigerant obtained by compressing a helium gas, supplied from a high pressure pipe 102 to an alternating opening / closing valve 1 of a cryopump cooling section 50.
03, the pressure-reduced refrigerant that has expanded and reduced in the cryopump cooling unit 50 is recovered from the low-pressure pipe 103, pressurized again, and circulates as a pressurized refrigerant.

The cryopump cooling unit 50 includes a first displacer 53 and a second displacer 53 that reciprocate in the first cylinder 52.
A second displacer 62 that reciprocates in the cylinder 61.
The reciprocating drive mechanism 55 operates a reciprocating stroke of a combination of the above and the reciprocating stroke mechanism. The ventilation on the side of 102 and the side of the low pressure pipe 103 are alternately opened and closed.

The pressurized refrigerant from the high-pressure pipe line 102 passes from the vent passage 56 to the regenerator member in the first displacer 53, that is, the regenerator 54, to the vent passage 57, and then to the first expansion chamber 5.
After entering 8, the second displacer 62 from the air passage 59.
The inflow stroke operation of passing through the cold storage member inside, that is, the cold storage body 63, passing through the ventilation path 64 and entering the second expansion chamber 65 is performed.

The depressurized refrigerant that has been depressurized by the expansion cooling operation goes through a path that is the reverse of the path during the inflow stroke, and is discharged to the low pressure pipe 103 via the alternate on-off valve 51, and undergoes an expansion and discharge stroke operation to form the regenerator 54. Cooling heat capacity to the regenerator 63,
That is, while the cooling energy is accumulated, the cooling load device (not shown) connected to the first cylinder 52 and the second cylinder 61 is provided with required cooling to perform the inflow stroke operation and the expansion discharge stroke operation. It is configured to repeat alternately.

The regenerators 54 and 63 are temperature accumulators for accumulating heat energy for cooling. With such a temperature accumulator, since heat energy for heating can be accumulated, the heat of the heating type is reduced. It goes without saying that it can also be used as a temperature accumulator in exchange equipment.

As the temperature accumulating body as described above, a wire material made of different kinds of metal materials is braided, and as shown in FIG. The technology) is disclosed in Japanese Utility Model Publication No. 62-11070.

Further, the high heat energy obtained at the outlet side of the refrigerant is made uniform with the low heat energy at the inlet side of the refrigerant due to the heat conduction of the temperature accumulating body itself, and the high heat energy stored with a great deal of effort is introduced at the inlet side. In order to prevent this heat loss, in order to prevent this heat loss, a metal perforated plate having a high thermal conductivity and a resin material perforated plate having a low thermal conductivity are alternately multiplexed in place of the metal net in FIG. A structure in which they are laminated and adhered to each other (hereinafter referred to as the second prior art) is the actual development number 62.
-115059 and the like.

[0011]

Since the thickness of the wire mesh or the perforated plate is generally required to be about 0.1 mm, in the first prior art, it takes time to manufacture and stack the wire mesh. In the second prior art, there is a problem that it takes a lot of time and labor for the bonding work in addition to manufacturing and laminating the perforated plate.

Therefore, there is a problem that it is desired to provide a product which does not have such inconvenience and is easy to manufacture.

[0013]

The present invention is a temperature accumulating body made of a metal material having the above-mentioned fine ventilation passages and used for accumulating low-temperature or high-temperature thermal energy. It is shorter than the length of the sintered body or thinner than the length of the sintered body. And a configuration in which an intervening body formed by providing a ventilation path with a material having a thermal conductivity smaller than that of the fibrous metal material is provided, and a configuration in which the intervening body is formed in a mesh shape or a perforated plate shape. The above problems can be solved by providing and.

[0014]

Since the main part of the temperature accumulator is made of a sintered body of fibrous metal material, it is suitable for the internal shape of the regenerator for accommodating the temperature accumulator, for example, the cool accumulator storage chamber of the displacer. Since it can be formed, it can be easily manufactured at low cost, and the intervening body for suppressing heat conduction is shorter or thinner than the length of the sintered body interposed between the sintered bodies. , Even when the interposition body is formed as a net-like or perforated plate-like layer, the number of intervening bodies is very small, so compared to the conventional one in which net-like or perforated plates are alternately laminated,
It works much easier and cheaper.

[0015]

EXAMPLES Examples will be described below with reference to FIGS.
In FIG. 1, a fibrous metal material 1 constituting a sintered body 10
Is a metal material having good thermal conductivity, for example, a copper material formed into a fibrous shape. For example, in addition to the thin linear metal material 1A and the thin flat strip metal material 1B as shown in FIG. 1A
Alternatively, 1B is made of a corrugated metal material 1C, a curled metal material 1D, or the like.

A predetermined length suitable for forming the fibrous metal material 1 having such a shape as, for example, a cylindrical temperature accumulating sintered body 10 as shown in FIG. 3, for example, a diameter D or less. In a container 20 for forming, which is made into pieces having different shapes so as to have different directions and whose inside shape is the shape of the sintered body 10 as shown in FIG. 4, which is made of a high heat resistant material, for example, a quartz glass material. After loading, a weight lid 21 for charging a gas body for atmosphere for cleaning the metal surface to an active state, for example, dissociated ammonia, and appropriately compressing the volume.
Nichrome wire 2 applied around the molding container 20
An electric current is applied to 2 to heat the fibrous metal material 1 to weld the surfaces of the fibrous materials in contact with each other, and then to cool and take out the air passages, so that a large number of air passages are provided between the fibrous materials. 10A
A semi-solid integrated sintered body having a target shape, for example, a cylindrical sintered body 1 for temperature accumulation as shown in FIG.
This is to obtain 0.

In order to integrate into the above-mentioned semi-solid state, in addition to the method of welding the surface of each fibrous material, a metal "waxing agent" whose melting temperature is lower than that of the fibrous metal material 1, for example,
It is also possible to mix powder of silver braze or solder and braze the welded portion.

The air passage 10A is preferably formed so that the porosity of the sintered body 10 is, for example, about 60 to 70%. The porosity, that is, the density of the ventilation passage 10A is arbitrarily adjusted, for example, by changing the filling amount of the metal fiber of the raw material so that the refrigerating device can exhibit optimum performance with respect to operating conditions. be able to.

In the present invention, forming a large number of air passages as described above and increasing the density of the air passages to form them by welding or brazing is called sintering. Generally, powder metal is compressed. Different from sintering to obtain a solid product with a low density of air passages, for example, by obtaining a solid product by heating at high temperature and welding or brazing, for example, a sintered product used for oilless metal Is.

The structure using the sintered body 10 as a temperature storage material and the structure using the temperature storage material as a temperature storage member in the cryopump cooling unit 50 are disclosed in Japanese Patent Application No. 4-108812 by the applicant of the present application. It is disclosed by.

The present invention is made of a metal material having a large number of fine ventilation passages as described above and is used for accumulating low-temperature heat energy for cooling or high-temperature heat energy for heating. The body is configured like the temperature accumulator 12 of FIG.

The temperature accumulating body 12 includes a plurality of sintered bodies 10 formed by sintering the fibrous metal material 1 as shown in FIG. A material that is interposed between them and is shorter than the length L of the sintered body 10 or has a thin dimension T and has a smaller thermal conductivity than the fibrous metal material 1 described above, for example, stainless steel material. The ventilation passage 11A is provided and, for example, the intervening body 11 formed in a net shape is overlapped and provided.

Also, the interposer 11 used for the temperature accumulator 12
It is also possible to use a configuration in which the shape is formed into a mesh shape as in the first conventional technique or a perforated plate shape as in the second conventional technique. The specific size of each part varies depending on the use target, but the cryopump cooling part 50 described above is used.
In an example of the case, the sintered body 10 has a diameter of a fibrous metal material of about 0.05 mm, and the diameter D of each sintered body 10 is 30 m.
m, the length L of each sintered body 10 is about 20 mm,
In addition, each interposer 11 has a thickness of about 0.1 mm,
OA has a large number of holes each having a diameter of about 0.2 mm.

[Modification Implementation] The present invention can be implemented by being modified as follows. (1) As shown in FIG. 5, the sintered body 10 is formed by forming a thin-walled metal cylinder 31 on the outer periphery thereof. .

(2) In the above (1), the melting temperature of the metal used for the metal cylinder 11 is set higher than the melting temperature of the fibrous metal material 1. Furthermore, the metal tube 3
1 is made to have a slightly thicker thickness, and is directly heated and molded in the atmosphere without using the molding container 20.

(3) In the above (2), the metal cylinder 31 is made into a long tubular shape corresponding to a plurality of required sintered bodies 10 and cut into a predetermined length after sintering and molding.

(4) The corrugated metal material 1 of FIG. 1, or
A large number of curled metal materials 1 arranged in parallel and bundled to have a required diameter or more are rolled into a sushi roll on a metal plate, compressed to a desired diameter, and then sintered to obtain a desired size. A sintered body 10 is obtained. Further, similarly to the above (3), it is formed into a long shape and then cut to obtain a sintered body 10 having a desired size.

(5) A chamber portion for accommodating the temperature accumulating body 12,
For example, the cool storage body 54.6 of each displacer 53.62.
As shown in FIG. 6, the cold accumulating chamber 32 accommodating 3 is formed in a tapered shape, and the outer shape of the sintered body 10 is formed in accordance with the shape of the accommodating chamber. Make it easy to carry out work and take-out work.

(6) The temperature accumulator 12 is used as a member for accumulating heating energy in the heating device, that is, a heat accumulator.

(7) The fibrous metal material 1 is added to the molding container 20.
In the case of loading into a pipe, the fibrous metal material 1 is not cut and shortened, but is left in a long shape, is folded in a zigzag shape, or is wound in an appropriate arrangement such as a spiral shape, and the required ventilation passage 10A.
Are formed on the sintered body 10.

(8) The temperature accumulating body 12 is used as a heat accumulating member of a similar function part in the heat conduction type heat exchanger.

(9) The intermediate body 11 is replaced with a large ventilation passage 11A.
It is formed into a simple ring shape provided with, or is formed by transforming this ring shape into a triangle, a polygon, or the like, or
Consists of a star-shaped one with only linear parts that radiate from the center.

(10) The sintered body 10 and the interposition body 11 are adhered and fixed and integrally formed to facilitate the loading and unloading operations of the temperature accumulating body 12.

(11) The material of the interposer 11 is selected from other metal materials having a small thermal conductivity, such as Inconel (nickel-chromium alloy steel series), Hastello (innickel-chrome alloy steel series), titanium and manganese content. And a resin material having a low thermal conductivity, for example, a fluorine-based resin material or the like.

(12) Length L of sintered body 10 and interposer 1
The thickness T of 1 is selected to be in the range of 20: 1 to 1000: 1.

[0036]

According to the present invention, since the main portion of the temperature accumulating body 12 is formed of the sintered body 10 of the fibrous metal material 1, a regenerator for accommodating the temperature accumulating body, for example, a displacer. It can be formed in conformity with the shape of the regenerator storage chamber 53/62.

In addition, it is shorter than the length L of the sintered body 10,
Alternatively, the inclusion 11 having a thin dimension T and a small thermal conductivity is used.
Are intervened between the plurality of sintered bodies 10 to slow the heat conduction in the temperature accumulating body 12. Therefore, even if they are formed as a mesh or a perforated plate like the conventional case, Since the number of the bodies 11 can be made very small, there is a feature that a temperature accumulator capable of accumulating high thermal energy can be provided simply and inexpensively.

[Brief description of drawings]

1 to 7 show an embodiment of the present invention, and FIG. 8 shows a prior art. The contents of each drawing are as follows.

FIG. 1 is an exploded perspective view of a temperature accumulator.

[Figure 2] Perspective view of the material

FIG. 3 is a perspective view of a sintered body.

FIG. 4 is a vertical cross-sectional view of a sintered body forming structure.

FIG. 5 is a vertical sectional view of a modification of the temperature accumulator and the storage chamber.

FIG. 6 is a perspective view of a modified example of a sintered body.

FIG. 7 is a schematic configuration diagram of a cryopump cooling unit to which a temperature accumulator is applied.

FIG. 8 is an exploded perspective view of a temperature accumulator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Fibrous metal material 10 Sintered body 10A Ventilation path 11 Interposition body 20 Forming container 21 Weight lid 22 Nichrome wire 31 Metal cylinder 32 Cold storage chamber 50 Cryopump cooling section 51 Alternate on-off valve 52 First cylinder 53 First displacer 54 regenerator 55 reciprocating drive mechanism 56 air passage 57 air passage 58 first expansion chamber 59 air passage 61 second cylinder 62 second displacer 63 regenerator 64 air passage 65 second expansion chamber 101 compressor 102 high-pressure pipe 103 low-pressure pipe Road

Claims (2)

[Claims] 1. A temperature accumulator made of a metal material having a large number of fine ventilation passages, which is used for accumulating low-temperature or high-temperature thermal energy, wherein a fibrous metal material is used for the fine ventilation passages. And a plurality of sintered bodies formed by sintering and interposed between the sintered bodies and having a length shorter than or shorter than the length of the sintered body, and having a fibrous shape. A temperature accumulator, comprising: an interposition body formed by providing a ventilation path with a material having a lower thermal conductivity than a metal material. 2. A temperature accumulator made of a metal material having a large number of fine ventilation passages, which is used for accumulating low-temperature or high-temperature thermal energy, wherein a fibrous metal material is used for the fine ventilation passages. And a plurality of sintered bodies formed by sintering and interposed between the sintered bodies, and formed in a mesh shape or a perforated plate shape with a material having a smaller thermal conductivity than the fibrous metal material. A temperature accumulator characterized by comprising: