JPH06126608A - Polishing tool device and polishing method using it - Google Patents

Abstract

PURPOSE:To provide a polishing tool device capable of uniformly applying pressurizing force to the whole surface of a non-spherical part of a very small part to be worked by installing a liquid storing member having a polishing tool fixed to the outer surface thereof in one of openings formed on both end areas of a support member and installing a member for receiving the pressure of a fluid in the other thereof. CONSTITUTION:In a polishing tool device where a fluid is put in a bag made by a flexible material and a polishing tool is interposed between the bag and a work piece, a support member for the whole device comprises an upper support member 1A and a lower support member 1B, a void where a fluid 10 and an elastic member are installed is formed in a hollow part, the opening areas communicate with each other, and the opening area of the lower support member 1B confronts with a surface to be worked of a work piece. A liquid storing member 2 which is made by an elastic material and follows the shape of the surface to be worked of the work piece is installed on one side of the opening of the lower member 1B, a polishing tool 8 is fixed to the outer surface thereof, and a fluid sealing member 6 for receiving the pressure of the fluid 10 is installed in the other side opening.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing tool device used for processing an optical member such as a lens, a mirror, or a molding die for molding a precision component, and a polishing method therefor.

[0002]

2. Description of the Related Art Conventionally, a polishing tool in which gas and liquid are enclosed in a bag-like body made of a flexible material under a rigid body and an abrasive material is fixed to the outer surface of the bag-like body is disclosed in JP-A-62-54676. Known as the official gazette. Furthermore, it has a polishing ball made of soft rubber and plastic material and molded into a hollow sphere,
A polishing tool in which an abrasive powder film is attached to the surface of a polished ball and gas and liquid are enclosed in the inner space is known as Japanese Utility Model Laid-Open No. 61-195970. The conventional polishing tool has been proposed as a tool for processing a curved surface or an uneven surface.

[0003]

An optical member such as a lens or a mirror whose surface has an aspherical surface curved surface has a curvature of the curved surface which sequentially changes on the surface to be processed. It is very difficult for the polishing tool such as the polishing pitch to follow the curvature of each processing point, and it is difficult to process the aspherical shape as designed. The same applies to the machining of the cavity surface of a molding die that molds molded parts with complex shapes.When machining a cavity surface that is a continuous surface of an aspherical surface, the polishing tool follows the cavity surface. It is very difficult to obtain a high-precision finished surface. Further, in an apparatus for polishing a minute amount using a conventional polishing pitch tool, a grinding process, the pressure applied from the pressing means does not act uniformly on the member holding the polishing pitch, Therefore, it is difficult to apply a uniform pressure to the work surface of the workpiece, and there is a limit to the processing accuracy in performing the correction processing of a minute amount in a minute area portion. Furthermore,
In the polishing tool using a liquid described in the above publication, when the reciprocating movement is performed along the surface of the work piece, a corrugation phenomenon of the liquid occurs, which reduces the followability of the polishing tool to the surface of the work piece. It was difficult to improve the finishing accuracy.

It is an object of the present invention to provide a polishing tool device which is an optical member such as a lens and a mirror, and in particular, a curved surface of which is suitable for processing an aspherical portion. In particular, the present invention relates to a workpiece having an aspherical surface, to which the aspherical surface is formed to some extent, when processing a small amount of machining or when performing partial correction processing on a partial location. It is an object of the present invention to provide an apparatus capable of accurately following a polishing tool to the aspherical surface portion of the. Further, the present invention provides a polishing tool device capable of uniformly exerting a pressing force on the entire surface of an aspherical surface of a minute portion to be processed by a polishing tool such as a polishing pitch. Further, according to the present invention, the polishing tool that is in contact with the processed surface of the workpiece is supported by an elastic member so as to follow the aspherical surface of the workpiece while polishing. A processing method for grinding is provided.

[0005]

[Means for Solving the Problems]
In order to achieve the object, according to the present invention, a rigid support member that receives a processing pressure is provided with a void portion for inserting a fluid, and openings are formed at both ends in the axial direction of the processing pressure, and an elastic member is provided on one side of the opening. A liquid storage member that follows the shape of the processed surface of the workpiece made of material is attached, a polishing tool is fixed to the outer surface of the liquid storage member, and a member that receives the pressure of the fluid is attached to the opening on the other side. And Further, according to the present invention, a rigid support member that receives a processing pressure is provided with a void portion for inserting a fluid, openings are formed at both ends in the axial direction of the processing pressure, and a workpiece made of an elastic material is formed on one side of the opening. A shape-following member that follows the shape of the machined surface is attached, a polishing tool is fixed to the outer surface of the member, a member that receives the pressure of the fluid is attached to the opening on the other side, and a pressing force is applied in the axial direction of the support member. The above object is achieved by a polishing tool device characterized by causing the polishing tool and the shape following member to follow the shape of the surface of the workpiece to perform the polishing. Further, according to the present invention, a polishing tool is brought into pressure contact with a work surface of a workpiece through a fluid to perform polishing. We propose a polishing and grinding tool device that incorporates means that can suppress the waviness that occurs during grinding.

Further, the present invention has a mode in which the viscoelastic coefficients of the liquid and the liquid containing member are specified. Further, according to an embodiment of the present invention, a polishing tool is arranged on a surface of the workpiece that is in contact with the aspherical surface, and the polishing tool is configured to be held by an elastic member supported by a rigid member that receives a pressing force. , The storage shear modulus of the elastic member is 1 × 10 ⁷ to 1 × 10 ⁹ d
There is a disclosure of a polishing tool device characterized by having a range of yn / cm ² . Further, the present invention proposes an apparatus capable of preventing the deterioration of the shape followability of the polishing tool on the surface of the workpiece due to the undulating phenomenon of the fluid generated in the above-described polishing tool apparatus using the fluid.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a sectional view showing the structure of a first polishing tool device of the present invention. Reference numeral 1 is a supporting member of the apparatus main body, and the supporting member includes an upper supporting member 1A and a lower supporting member 1B,
The support member has a hollow cylindrical shape, and the member is made of a metal material. The upper member 1A and the lower member 1B are fixed by a screw 1C, and the hollow portion forms a void portion for mounting a fluid described later and an elastic member. The upper member 1A
The hollow portion of the lower member 1B has opening portions communicating vertically.
The opening of the hollow part communicates with the top and bottom, and the opening of the lower member is in contact with the work surface of the work to be described later. Reference numeral 2 is a bag-shaped member provided so as to come into contact with the peripheral wall of the hollow portion of the lower member, and the tube portion 2a in contact with the peripheral wall, the bottom portion 2b, the upper member 1A, and the lower member 1B are superposed and fixed. It comprises a fixed part 2c fixed to the part. The bag-shaped member,
It is a member for containing the fluid described later, and the material is made of polychloroprene. Reference numeral 4 is a seal member for preventing liquid leakage when fixing the fluid storage member 2 to the support member. Reference numeral 6 is a liquid sealing member attached to the upper member of the supporting member, and in this example, a diaphragm is used.
The upper member 1A of the support member consists of a ring 1a ₂ inner and threadedly coupled to the outer ring 1a ₁ and outer ring 1a _1, the periphery of the diaphragm by outer ring and the inner ring sheet -
It is fixed by the rule member 1a ₃ . Reference numeral 8 denotes a bottom surface of the liquid storage member (a surface that contacts a surface to be processed of the workpiece).
It is a polishing tool for polishing or grinding attached to. In this example, the pitch tool is attached and fixed as shown in FIG. A liquid 10 is enclosed by the liquid storage member 2 and the liquid sealing member 6.

(Specific Example-1 of Polishing Tool Device) Next, a specific example of the polishing tool device shown in FIGS. Liquid storage member material: polychloroprene (JIS rubber hardness A scale - le 30 ⁰⁾ modulus (storage shear modulus) 5X10 of ⁶ dyn / cm ² 1mm thick liquid 10 different silicone - N'oiru dynamic viscosity 0.1 × 10 ^-1 (m ² / s) Dimension of effective outer diameter of the liquid storage member to which the polishing tool 8 is attached 20 mm Diameter and number of polishing tool (polishing pitch) to be attached to effective outer diameter portion of the liquid storage member, Diameter 2 mm Number 61 The polishing tool: Asphalt pitch material Elastic modulus (storage shear) 1 × 10 ⁷ (dyn / cm ² ) Pitch diameter 2φ Height 0.5 mm

(Specific Example-2) Type of liquid Silicone oil Kinetic viscosity coefficient 5 × 10 ^-1 (m ² / s) Type of liquid storage member Polychloroprene Elastic properties (shear elastic modulus at storage) 5 × 10 ⁸ dyn / cm ² Thickness 1 mm Polishing tool: Asphalt pitch material Elastic modulus (storage shear) 1 × 10 ⁹ (dyn / cm ² ) Pitch diameter 2φ Height 0.5 mm In addition, the polishing pitch 8 has a pitch part in contact with the work surface. The small pitch convex portions may be individually formed or may be connected at the pitch bottom portion.

(Explanation of the polishing apparatus) FIGS.
A polishing apparatus suitable for polishing using the polishing tool apparatus shown in FIG. The apparatus is a polishing apparatus filed by the present applicant on March 19, 1987 (application number: Japanese Patent Application No. 62-64808, publication number: Japanese Patent Laid-Open No. 63-232956). In the polishing apparatus, a work shaft 27 for supporting a workpiece 25 is provided on a support base 7 which is given a turning motion by a turning motor 19 on a main body base 100, and a motor 2 is provided.
The workpiece 25 is rotated by 7B. Reference numeral 41 denotes a polishing tool device, which is supported by a swing arm 43A. The polishing tool device 41 is rocked in the direction A in the figure by a rocking means 43 such as a motor 57B and a crank mechanism 51.
Further, the polishing tool device 41 comprises an X-axis moving means 7 including a horizontal slide body 71, a feed screw 73, an X-axis motor 75 and the like.
The movement in the X-axis direction is performed by 7. The weight of the polishing tool device 41, the swinging means 43, and the like is applied to the work piece 25 as a load. A balancer-65 is provided to adjust the load applied to the workpiece. The device is controlled by the control means 110 to rotate the workpiece 25, the swing motion of the support body 7 by swinging, the swing motion in the direction A in the drawing, the X axis movement by the X axis moving means, and the pressing force by the balancer. The motions (1) and (2) are given to perform the polishing (grinding) processing function.

(Example of Operation) Next, an example of operation in which the polishing tool shown in FIGS. 1 and 2 is attached to the polishing apparatus shown in FIGS. The threaded ring 1a ₂ of the polishing tool device shown in FIGS. 1 and ₂ is attached to the tool rotating shaft 47 of the polishing device of FIGS. A specific example of the polishing tool device is Example-1. Processing conditions 1) Workpiece convex shape, radius of curvature 40
0 mm quartz glass lens Surface roughness before processing of workpiece 1.5 nm rms 2) Device side setting conditions Swiveling motion Set according to X-axis moving speed.

Oscillation frequency 3.3 Hz Oscillation stroke ± 5 mm Load 13.2 KPa (135 gf / cm
² ) X-axis movement speed 0.5 mm / s Workpiece rotation speed 30 rpm Polishing liquid Cerium oxide 0.75% by weight Average particle size 0.3 μm Workpiece was processed under the conditions 1) and 2) above, Surface roughness of the lens is 0.2nmrms (root mean square)
It became the following. Further, when a quartz glass lens was processed under the conditions 1) and 2) described above to have a concave shape, a radius of 400 mm, and the surface roughness before processing was the same as in the condition 1), a surface roughness of 0.2 nm rms was obtained. .

The shape following evaluation was carried out by using a tool having a diameter of 20 mm in which the pitch attachment surface of the polychloroprene rubber was formed into a concave surface R400 mm and having 13 kinds of curvatures (+ 5 × 10 ^{−3 to} −).
The same load as during processing was applied to the optical glass spherical surface manufactured to 5 × 10 ⁻³ ), and it was observed and judged whether the pitch surface of the polishing tool device adhered to the tool in conformity with the shape.
FIG. 5 is a graph showing the results showing the ability of the polishing tool 8 to follow the curved surface of the polishing tool device according to the embodiment. JIS rubber hardness A scale - Le, 15 ^0, 30
The elastic body thicknesses of the fluid storage members for the two kinds of materials of ⁰ were 2, 3, 4, and mm. The vertical axis of the graph represents the curvature and radius of curvature of the optical glass spherical surface of the tool. From these results, the shape-following range of the polishing tool device according to the present invention is wide, and when the surface to be machined of the workpiece is a convex surface, the shape-following property is high in the direction in which the radius of curvature increases (the direction in which R becomes loose). It is understood that it will be higher. Therefore, when the curved surface to be processed is a convex surface, the radius of curvature of the polishing tool device may be set to the concave surface having the minimum radius of curvature of the surface to be processed (the sharpest radius R). Further, when processing a concave surface, the radius of curvature of the polishing tool device exhibits shape followability in the direction in which the absolute value of the radius of curvature of the surface to be processed increases, so the absolute radius of curvature of the concave aspherical surface to be processed is The radius of curvature of the polishing tool device may be set on the convex surface of the portion having the minimum value. As a result of the examination of the present invention, the rubber hardness of the polychloroprene rubber was 2 in JIS A scale.
It has been found that 0 ⁰ and 25 ⁰ are suitable, and a hardness of 40 ⁰ is also suitable.

(Comparison with Prior Art) Conventionally, for example, FIGS.
As a polishing tool device of the device of No. 2, a polyurethane foam sheet was attached to a tool having a diameter of 20 mm, and processing was performed under the conditions of the device side condition 2), and the workpiece lens surface roughness was 1.5.
An improvement in the accuracy of the surface roughness was obtained as compared with the result of nm rms. Therefore, the processing using the present polishing tool device shows that the ability of the polishing tool 8 to follow the lens surface of the workpiece is very high. The present inventor continued to perform processing using the tool device of Concrete Example-2 of the tool device based on the above conditions 1 and 2), and obtained the same results as above. confirmed.

(Application Example-1) FIGS. 6 and 7 In the polishing tool device shown in the above embodiment, a high-viscosity liquid is enclosed in a fluid container, and the entire polishing tool device is, for example, 3.
Swing motion is performed at a high speed such as 3 Hz. In this case, as the polishing tool device swings, the fluid 122 in the fluid storage member 2 is subjected to an inertial force due to the movement in one direction,
A wavy phenomenon occurs due to the reversal of the movement direction. This waving phenomenon adversely affects the shape following ability of the polishing tool 8 to the work surface of the workpiece and the polishing ability of the polishing tool 116. That is, the corrugation phenomenon associated with the movement of the fluid occurs due to the movement of the fluid within the fluid storage member.
The fluid is biased in the fluid storage member, and the pressure applied to the tip of each polishing pitch of the polishing tool 116 cannot be made uniform via the fluid, resulting in unnecessary fluctuation of the pressure applied to the surface of the workpiece. Cause Furthermore, the uneven distribution of the fluid in the fluid storage member causes a decrease in the ability of the fluid storage member and the polishing tool to follow the shape of the workpiece because the uniform balance of the pressure applied to the surface of the workpiece is disrupted. As a result, the precision of microfabrication becomes difficult. In order to prevent this waving phenomenon, it is conceivable to reduce the weight of the liquid or increase the viscosity of the liquid to prevent fluidization, but it is difficult to reduce the weight of the liquid with currently known materials. Therefore, it is effective to increase the viscosity of the liquid. Further, the present invention proposes another invention for preventing the corrugation phenomenon.

FIG. 6 shows an example for preventing the deterioration of the shape followability of the surface of the workpiece of the tool due to the corrugation phenomenon. In this application example, the above-mentioned problem is solved by incorporating means for suppressing the movement of the fluid in the fluid storage member accompanying the movement of the polishing tool device. In the figure, 112A is an upper member of the supporting member, 112B is a lower member of the supporting member, and
It is screwed by 12a and 112b. Reference numeral 114 denotes a liquid storage member made of the same material as shown in FIG. 1 and fixed to the inner surface of the support member 112B. A polishing pitch tool 116 is attached to the bottom surface of the liquid storage member. Reference numeral 118 denotes an elastic member held between the support members 112A and 112B, and the liquid storage member 114.
Seal the viscous material in. The elastic member 118 is made of a rubber material having high hardness. Reference numeral 120 denotes a pressure adjusting member, which includes a flat portion 120a in contact with the upper surface of the elastic member and a screw shaft portion 120b screwed into the screw hole portion 112a ₁ of the upper member of the supporting member. In the polishing tool device of FIG. 6 having the above-mentioned configuration, the internal pressure applied to the fluid via the elastic sealing member 118 is controlled by the degree of the screwing amount of the pressure adjusting member 120 depending on the size, shape, etc. of the processed surface of the workpiece. By changing it, it was possible to prevent the above-mentioned waving phenomenon.

(Other Example) FIG. 7 shows another example of the present invention.
As described in the above-mentioned JP-A-62-54676,
In an apparatus that uses a liquid, if the surface of the workpiece to be processed has a large area and the liquid storage section is enlarged to increase the contact area, an effective action of the processing pressure on the surface of the workpiece is performed. However, there is a problem in that the desired accuracy cannot be obtained. As a conventional technique, Japanese Patent Laid-Open No. 63-232
As described in Japanese Patent Laid-Open No. 953, there is a polishing tool that supports an abrasive body with an elastic support portion. The polishing tool has a structure in which each elastic body supporting portion is fixed to a rigid holder, and the polishing body is mounted on the elastic body supporting portion. As shown in FIG. 8, the processed surface of the aspherical workpiece has an optical axis 0 ₁
Against each point r ₁ on the aspherical surface _{P, r 2, r 3,} - the radius of curvature R ₁ of, R _2, R ₃ - vary continuously, for example, the radius of curvature R ₄ of the point r ₄ Point r for maximum curvature
It was very difficult to bring the polishing tool into contact with the area near ₄ and it was difficult to ensure the accuracy of the surface roughness of this area. This example proposes a polishing tool device which solves the above-mentioned problems and has a large contact area.

In the figure, reference numeral 130 denotes a support body portion, which is made of metal. Reference numeral 130a denotes an elastic member fixed to a recess formed in the support body portion 130, which is composed of a large diameter portion 130a ₁ and a small diameter portion 130a _2. Surface part 13 of diameter part 130a ₁
0a ₃ forms a curved surface portion. The elastic body member is characteristic of the JIS rubber hardness A scale - 15 Le ^0, or is suitable rubber of 30 ^0, as a specific material, polychloroprene mule - was preferred. Reference numeral 132 denotes a polishing pitch attached to the surface of the elastic member, and as the material, straight asphalt pitch (penetration: 20) was preferable.
The diameter of the exposed portion of the elastic body portion from the supporting portion is 20 mm, the tip diameter of the polishing pitch is 2 mm, and the number of the polishing pitch is 61, which is attached to the tip portion of the tool shaft 47 of the polishing apparatus of FIGS. It was

Processing conditions 1) Workpiece: convex shape,
Quartz glass lens with a curvature radius of 400 mm Surface roughness of the workpiece before processing 1.5 nm rms 2) Equipment-side setting conditions Swiveling motion Set according to the X-axis moving speed.

Oscillation frequency 3.3 Hz Oscillation stroke ± 5 mm Load 13.2 KPa (135 gf / cm)
² ) X-axis movement speed 0.5 mm / s Workpiece rotation speed 30 rpm Polishing liquid Cerium oxide 0.75% by weight Average particle size 0.3 μm Workpiece was processed under the conditions 1) and 2) above, Surface roughness of the lens is 0.2nmrms (root mean square)
It became the following.

(Application of Other Examples) FIG. 9 shows a modification of FIG. In this example, the polishing pitch 132 of FIG.
The part of the bonding surface with the elastic body 130a ₁ is formed to have an uneven shape. The polishing pitch 134 is formed by injecting melted straight asphalt pitch into a mold member having the concave and convex cavities and then molding it. According to this example, since the bonding area between the elastic member and the polishing pitch could be set large, the pitch portion
It was possible to prevent peeling.

[0022]

As described above, according to the present invention, the rigid supporting member which receives the processing pressure is provided with the void portion for receiving the fluid, and the openings are formed at both ends in the axial direction of the processing pressure.
A liquid accommodating member that follows the shape of the processed surface of the workpiece made of an elastic material is attached to one side of the opening, a polishing tool is fixed to the outer surface of the same, and the fluid pressure is applied to the opening on the other side. Polishing of lenses with aspherical surfaces, optical parts such as mirrors, parts that require precise surfaces, and curved surfaces of molding dies by a polishing tool device characterized by mounting members. We were able to secure a high level of processing accuracy guarantee for the grinding process. Further, according to the present invention, in a configuration in which a polishing tool is pressed against a surface of a workpiece through a fluid and the apparatus is reciprocally moved, unevenness of pressure applied to the surface of the workpiece due to a corrugation phenomenon of the fluid is prevented, It was possible to guarantee the conformability of the shape of the polishing tool.

Further, the effect of the present invention is that the polishing and grinding tools can be accurately applied to a curved surface of an aspherical surface having a very small curvature as shown in FIG. We were able to propose a device and a processing method that could reliably perform the above. Further, according to the present invention, when the fluid, particularly the liquid, is used, the kinematic viscosity of the fluid is selected according to the work piece to be processed, so that various non-workpiece materials can be dealt with. Furthermore, in the case of the polishing tool device shown in FIG. 9, by adopting a configuration in which the polishing tool is an asphalt pitch and is made to bite into the uneven portion of the surface of the elastic member, a polishing tool device resistant to peeling can be obtained.

[Brief description of drawings]

FIG. 1 is a sectional view of a main part of a polishing (grinding) tool device according to an embodiment of the present invention.

FIG. 2 is a view showing the arrangement of polishing tools fixed to the surface of a fluid storage member as seen from the lower surface of FIG.

FIG. 3 is a perspective view of a polishing / grinding device suitable for using the polishing tool device of the present invention.

FIG. 4 is a sectional view taken along line MM in FIG.

FIG. 5 is a graph chart in which the shape followability of the polishing tool device of the present invention is evaluated.

FIG. 6 is a sectional view of a main part of another example of the present invention.

FIG. 7 is a cross-sectional view of main parts showing another embodiment.

FIG. 8 is a diagram for explaining the apparatus of FIG.

FIG. 9 is a cross-sectional view of a main part showing another embodiment.

[Explanation of symbols]

1 Polishing and Grinding Tool Device Supporting Member 1A Supporting Member Upper Member 1B Supporting Member Lower Member 1a ₂ Inner Ring 2 Fluid Storage Member 6 Fluid Sealing Member 8 Polishing Tool 10 Fluid 25 Workpiece 27 Work Shaft 41 Polishing Tool device 43 Swinging means 65 Balancer 77 X axis moving means 110 Control means 120 Member for preventing corrugation of fluid 130 Elastic member

Claims (9)

[Claims] 1. A polishing tool device in which a fluid is placed in a bag body made of a flexible material and a polishing tool is interposed between the bag and the workpiece, and the void is placed in a rigid support member which receives a working pressure. A portion is provided and openings are formed at both ends in the axial direction of the processing pressure, and a liquid storage member that follows the shape of the processing surface of the workpiece made of an elastic material is attached to one side of the opening, and its outer surface is attached. A polishing tool device in which a polishing tool is fixed and a member for receiving the pressure of the fluid is attached to the opening on the other side. 2. The fluid has a kinematic viscosity coefficient of 0.1 × 10 ^−1.
The polishing tool device according to claim 2, wherein the polishing oil device is a silicone oil in the range of 5 × 10 ^-1 m ² / s. 3. A polishing tool device in which a fluid is put in a bag body made of a flexible material and a polishing tool is interposed between the bag and the work, and the fluid is put in a rigid support member which receives a working pressure. A portion is provided and openings are formed at both ends in the axial direction of the processing pressure, and a shape-following member that follows the shape of the processing surface of the workpiece made of an elastic material is attached to one side of the opening, and the outer surface thereof is attached. A polishing tool is fixed, a member that receives the pressure of the fluid is attached to the opening on the other side, and a pressing force is applied in the axial direction of the support member to cause the polishing tool and the shape following member to move to the workpiece. A polishing tool device characterized by performing polishing by following the shape of a surface to be processed. 4. The polishing tool device according to claim 4, wherein the fluid receiving member attached to the opening on the other side is a diaphragm. 5. A polishing tool is arranged on a surface of the workpiece which is in contact with an aspherical surface, and the polishing tool is configured to be held by an elastic member supported by a rigid member that receives a pressing force. Storage shear modulus of 1 × 10 ⁷ to 1 × 10
A polishing tool device characterized by having a range of ⁹ dyn / cm ² . 6. A polishing tool device for accommodating a fluid in a fluid accommodating member, fixing a polishing tool on the surface of the fluid accommodating member, and reciprocatingly moving on the surface of a workpiece, and accommodating the fluid in the fluid accommodating member. A polishing tool device comprising means for preventing movement of a fluid. 7. The polishing tool device according to claim 1, wherein a concavo-convex portion is formed on the bottom surface of the fluid storage member, and a polishing tool made of asphalt pitch is allowed to enter the concavo-convex portion. 8. A rigid support member in JIS rubber hardness A scale - paste the resilient member le 15 ^{0-40 0,} forms a resilient member surface with a predetermined curvature shape, the curved surface of the elastic member, the polishing tool A polishing tool device characterized by being attached. 9. A polishing tool of a polishing tool device in which a viscous fluid is put into an elastic storage member and a polishing tool such as a polishing pitch is attached to the surface of the storage member, and the polishing tool is processed into a workpiece. A polishing and grinding method characterized by moving the workpiece in the radial direction while performing the swinging movement of the polishing tool device while bringing the workpiece into contact with a surface.