JPH061200B2 - Linear encoder - Google Patents

Linear encoder

Info

Publication number
JPH061200B2
JPH061200B2 JP11864185A JP11864185A JPH061200B2 JP H061200 B2 JPH061200 B2 JP H061200B2 JP 11864185 A JP11864185 A JP 11864185A JP 11864185 A JP11864185 A JP 11864185A JP H061200 B2 JPH061200 B2 JP H061200B2
Authority
JP
Japan
Prior art keywords
linear encoder
guide shaft
stator
magnetic pole
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11864185A
Other languages
Japanese (ja)
Other versions
JPS61274215A (en
Inventor
博文 大田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP11864185A priority Critical patent/JPH061200B2/en
Publication of JPS61274215A publication Critical patent/JPS61274215A/en
Publication of JPH061200B2 publication Critical patent/JPH061200B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、物体の移動距離、寸法、位置等の検出に適用
するリニアエンコーダに関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial field of application> The present invention relates to a linear encoder applied to detection of a moving distance, size, position, etc. of an object.

〈発明の概要〉 本発明は、内周面に螺旋状磁極歯を有し筒孔中心部にガ
イド軸を備えた円筒状固定子と、前記ガイド軸に対しす
べり軸受を介して摺動可能に支持されたリング状永久磁
石の周面等分位置に複数の磁気抵抗素子を配備した移動
子とでリニアエンコーダを構成して成り、構造および組
立作業を簡易化してコストダウンを実現し且つ分解能を
向上したものである。
<Outline of the Invention> The present invention allows a cylindrical stator having spiral magnetic pole teeth on the inner peripheral surface and a guide shaft at the center of a cylindrical hole to be slidable with respect to the guide shaft via a slide bearing. It consists of a linear encoder with a moving element that has a plurality of magnetoresistive elements arranged at equal positions on the circumferential surface of a supported ring-shaped permanent magnet, and simplifies the structure and assembly work to realize cost reduction and resolution. It is an improved one.

〈従来の技術〉 従来、この種リニアエンコーダとしては、リニアポテン
ショメータの如き接触式のもの、或いは光センサとスリ
ットとの組合せによる光学式のものがある。前記ポテン
ショメータは、抵抗体をブラシで摺動する構成のため、
信頼性に乏しく、分解能を上げることも摺動ノイズの影
響で限界がある。また光学式の場合、スケールを高精度
に加工すれば分解能を上げることは可能であるが、コス
トアップの一因となると共に、スケール面への埃の付着
により、光の透過性が低下する等の不都合を生じる。
<Prior Art> Conventionally, as this type of linear encoder, there is a contact type encoder such as a linear potentiometer, or an optical type encoder by combining an optical sensor and a slit. Since the potentiometer is configured to slide the resistor with a brush,
The reliability is poor, and increasing the resolution is limited by the influence of sliding noise. Further, in the case of the optical type, it is possible to increase the resolution by processing the scale with high accuracy, but this is one of the causes of cost increase, and the adhesion of dust to the scale surface reduces the light transmittance. Causes inconvenience.

〈発明の目的〉 本発明は上記の諸問題を解消し、構成簡易にしてコスト
ダウンおよび高分解能を実現する新規なリニアエンコー
ダを提供することを目的とする。
<Object of the Invention> It is an object of the present invention to provide a novel linear encoder that solves the above problems and simplifies the structure to realize cost reduction and high resolution.

〈発明の構成および効果〉 上記の目的を達成するため、本発明では、内周面に螺旋
状磁極歯を有し、筒孔中心部にガイド軸を配設した円筒
状固定子と、前記ガイド軸にすべり軸受を介して摺動可
能に配備したリング状永久磁石の周面等分位置に複数の
磁気抵抗素子を配備した移動子とによってリニアエンコ
ーダを構成して成る。
<Structure and Effect of the Invention> In order to achieve the above object, in the present invention, a cylindrical stator having a spiral magnetic pole tooth on the inner peripheral surface and a guide shaft arranged at the center of the cylindrical hole, and the guide. A linear encoder is configured by a moving element having a plurality of magnetoresistive elements arranged at equal positions on the circumferential surface of a ring-shaped permanent magnet slidably provided on a shaft through a slide bearing.

上記の構成によると、本発明では、移動子の周面にn個
の磁気抵抗素子を配置することにより、P/n(ただし
Pは磁極歯のピッチ)の分解能をもつリニアエンコーダ
を容易に構成できる。特に本発明は、通常の切削加工、
ネジ加工により固定子を加工し得るため、安価に製造で
きるコストダウンを実現する。しかも、光学式リニアエ
ンコーダに比べてゴミ、埃による不都合が解消される
等、発明目的を達成した実用上の効果を奏する。
According to the above configuration, in the present invention, by arranging n magnetoresistive elements on the peripheral surface of the moving element, a linear encoder having a resolution of P / n (where P is the pitch of the magnetic pole teeth) can be easily configured. it can. In particular, the present invention is a general cutting process,
Since the stator can be processed by screw processing, the manufacturing cost can be reduced at low cost. In addition, compared with the optical linear encoder, inconveniences caused by dust and the like are eliminated, and practical effects that achieve the object of the invention are achieved.

〈実施例の説明〉 第1図は本発明にかかるリニアエンコーダの一実施例の
断面図を示している。該リニアエンコーダは、内周面に
螺旋状磁極歯11を形成した円筒状固定子1中へ、周面
等分位置したニッケル合金等の磁気抵抗素子23a〜2
3dを配設した移動子2を配備して構成される。前記固
定子1は、内周面に螺旋状の磁極歯11を有し、両端開
口面は側板12,13にて閉塞すると共に、両側板1
2,13間に、筒孔中心部に位置してガイド軸14を架
設し、このガイド軸14に移動子2を軸承している。
<Description of Embodiments> FIG. 1 is a sectional view of an embodiment of a linear encoder according to the present invention. The linear encoder includes magnetoresistive elements 23a to 2a made of nickel alloy or the like, which are located at equal intervals on a circumferential surface of a cylindrical stator 1 having spiral magnetic pole teeth 11 formed on the inner surface thereof.
It is configured by disposing a moving element 2 having 3d. The stator 1 has spiral magnetic pole teeth 11 on its inner peripheral surface, and both end opening surfaces are closed by side plates 12 and 13, and both side plates 1
A guide shaft 14 is installed between 2 and 13 at the center of the cylindrical hole, and the mover 2 is supported by the guide shaft 14.

移動子2は、前記ガイド軸14に嵌挿したリニアベアリ
ング等のすべり軸受21に対し、半径方向に着磁された
リング状永久磁石22、該永久磁石22に対し、外周等
分位置に複数、図面では4個所に薄膜状の磁気抵抗素子
23a,23b,23c,23dを配設した筒体24を
嵌着してなり、該移動子2と固定子1との間に所定のギ
ャップ3(50ミクロン程度)を設定している。
The mover 2 has a ring-shaped permanent magnet 22 magnetized in a radial direction with respect to a slide bearing 21 such as a linear bearing fitted in the guide shaft 14, and a plurality of magnets 2 at equal positions on the outer circumference of the permanent magnet 22. In the drawing, a cylindrical body 24 having thin-film magnetoresistive elements 23a, 23b, 23c, and 23d arranged at four places is fitted, and a predetermined gap 3 (50) is provided between the moving element 2 and the stator 1. About micron) is set.

前記筒体24には、ガイド軸14方向に伸長したガイド
板25を設け、このガイド板25を側板12の開口部よ
り固定子1外へ突出させ、出力信号をとり出すようにな
している。
A guide plate 25 extending in the direction of the guide shaft 14 is provided on the cylindrical body 24, and the guide plate 25 is projected from the opening of the side plate 12 to the outside of the stator 1 to take out an output signal.

第3図は固定子1、移動子2間のギャップ3におけるX
方向の磁策密度の変化を示しており、4は磁力線を示
す。
FIG. 3 shows X in the gap 3 between the stator 1 and the mover 2.
4 shows the change in magnetic diametrical density in the direction, and 4 shows the lines of magnetic force.

第4図は検出部の回路構成例を、第5図はその出力信号
の説明図を示している。
FIG. 4 shows an example of the circuit configuration of the detector, and FIG. 5 shows an explanatory diagram of its output signal.

次に本発明リニアエンコーダの動作を説明する。Next, the operation of the linear encoder of the present invention will be described.

第3図(a)に示す如く、固定子1の磁極歯11と移動子
2の永久磁石22との間の磁束密度のX成分は、正弦波
状に位置Xにより変化する。一方、磁気抵抗素子23a
〜23dは、磁界の強さにより抵抗値が変化するもの
で、ニッケル合金よりなる強磁性薄膜抵抗素子のため、
第3図(b)に示す如く、変化する磁界中では抵抗変化と
して出力される。即ち、位置の信号として各磁気抵抗素
子より抵抗値が出力される。一方磁極歯11は一定ピッ
チPの螺旋状のため、同一円周上では、図示例の如く9
0度位置に設定すればネジ位相がP/4ずれており、従
って、第3図において磁束密度Bgも磁気抵抗素子23
aと23bの位置でP/4の位相ずれを発生する。
As shown in FIG. 3 (a), the X component of the magnetic flux density between the magnetic pole teeth 11 of the stator 1 and the permanent magnet 22 of the mover 2 varies sinusoidally with the position X. On the other hand, the magnetoresistive element 23a
23 to 23d are those whose resistance value changes depending on the strength of the magnetic field. Since they are ferromagnetic thin film resistance elements made of nickel alloy,
As shown in FIG. 3 (b), it is output as a resistance change in a changing magnetic field. That is, the resistance value is output from each magnetoresistive element as a position signal. On the other hand, since the magnetic pole teeth 11 are spiral with a constant pitch P, they are 9 on the same circumference as shown in the figure.
When set at the 0 degree position, the screw phase is shifted by P / 4. Therefore, in FIG. 3, the magnetic flux density Bg is also the magnetoresistive element 23.
A phase shift of P / 4 occurs at the positions of a and 23b.

同様に23aと23c、23bと23dは、P/2の位
相ずれを生じる。
Similarly, 23a and 23c and 23b and 23d have a phase shift of P / 2.

第4図に示す如くブリッジ回路構成とすれば、差動アン
プ26a,26bの出力27a,27bは、第5図(a)
(b)に示す如く、P/4だけ位相のずれた信号となり、
従って出力信号27a,27bをコンパレータ等に入力
すれば、第5図(c)(d)の出力信号を得ることができる。
即P/4の分解能をもつリニアエンコーダを構成するも
のである。
If the bridge circuit configuration is used as shown in FIG. 4, the outputs 27a and 27b of the differential amplifiers 26a and 26b are the same as those shown in FIG.
As shown in (b), the signal is out of phase by P / 4,
Therefore, if the output signals 27a and 27b are input to a comparator or the like, the output signals of FIGS. 5 (c) and 5 (d) can be obtained.
A linear encoder having a resolution of P / 4 is constructed immediately.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明にかかるリニアエンコーダの一実施例を
示す縦断面図、第2図は移動子の縦断面図、第3図(a)
(b)は磁束密度の変化を示す説明図、第4図は検出部の
回路構成例を示す図、第5図(a)(b)(c)(d)は信号処理の
説明図である。 1…固定子 11…磁極歯 14…ガイド軸 2…移動子 21…すべり軸受 22…永久磁石 23a〜23d…磁気抵抗素固素子
FIG. 1 is a vertical sectional view showing an embodiment of a linear encoder according to the present invention, FIG. 2 is a vertical sectional view of a moving element, and FIG. 3 (a).
(b) is an explanatory diagram showing a change in magnetic flux density, FIG. 4 is a diagram showing a circuit configuration example of a detection unit, and FIGS. 5 (a), (b), (c), and (d) are explanatory diagrams of signal processing. . DESCRIPTION OF SYMBOLS 1 ... Stator 11 ... Magnetic pole tooth 14 ... Guide shaft 2 ... Mover 21 ... Sliding bearing 22 ... Permanent magnet 23a-23d ... Magnetoresistive solid element

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】内周面に螺旋状磁極歯を有し、筒孔中心部
にガイド軸を配設した円筒状固定子と、前記ガイド軸に
対しすべり軸受を介して摺動可能に支持されたリング状
永久磁石の周面等分位置に複数の磁気抵抗素子を配備し
た移動子とから成るリニアエンコーダ。
1. A cylindrical stator having spiral magnetic pole teeth on the inner peripheral surface thereof and a guide shaft disposed at the center of a cylindrical hole, and slidably supported on the guide shaft via a slide bearing. A linear encoder composed of a moving element having a plurality of magnetoresistive elements arranged at equal positions on the circumferential surface of a ring-shaped permanent magnet.
JP11864185A 1985-05-30 1985-05-30 Linear encoder Expired - Lifetime JPH061200B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11864185A JPH061200B2 (en) 1985-05-30 1985-05-30 Linear encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11864185A JPH061200B2 (en) 1985-05-30 1985-05-30 Linear encoder

Publications (2)

Publication Number Publication Date
JPS61274215A JPS61274215A (en) 1986-12-04
JPH061200B2 true JPH061200B2 (en) 1994-01-05

Family

ID=14741569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11864185A Expired - Lifetime JPH061200B2 (en) 1985-05-30 1985-05-30 Linear encoder

Country Status (1)

Country Link
JP (1) JPH061200B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01131115U (en) * 1988-03-01 1989-09-06
JPH01301113A (en) * 1988-05-30 1989-12-05 Shicoh Eng Co Ltd Signal processing circuit for magneto-resistance element
JPH03123815A (en) * 1989-10-06 1991-05-27 Makome Kenkyusho:Kk Cylindrical magnetic scale
JP5421646B2 (en) * 2009-04-23 2014-02-19 カヤバ工業株式会社 Cylinder stroke sensor

Also Published As

Publication number Publication date
JPS61274215A (en) 1986-12-04

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