JPH06115959A - Method for flame deposition - Google Patents

Abstract

PURPOSE:To provide a method for flame deposition in which a uniform amount of deposition on a substrate can be obtained even if both the moving speed of a burner and the rotational speed of a rotating plate are kept constant. CONSTITUTION:A deposit synthesized in a flame of a flame reactional burner 5 present above a rotating plate 2 is deposited on substrates 1 while rotating the rotating plate 2 having the substrates installed thereon at a constant rotational frequency. In the process, when the peripheral speed of the rotating plate 2 in a part where the deposit is accumulated is (v) and the moving speed of the burner in the rotating radial direction of the rotating plate 2 is (s), the moving locus 6 of, the burner 5 is defined as a convex type curve having the maximum in the rotational direction of the rotating plate 2 so as to provide the (vXs) always constant. A driving force at a constant speed is applied from a constant rate reciprocation driving mechanism 8 to the burner in the rotating radial direction of the rotating plate 2 to carry out the reciprocation driving of the burner 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flame for rotating a rotary plate on which a substrate is installed, and depositing on the substrate a deposit synthesized in a flame of a flame reaction burner existing above the rotary plate. It relates to a deposition method.

[0002]

2. Description of the Related Art FIGS. 5 and 6 show the state of implementation of a conventional flame deposition method. In this case, the rotary plate 2 in which a plurality of substrates 1 are arranged side by side in the circumferential direction is rotated at a constant rotational speed at a low speed by a high-precision motor 4 such as a servomotor via a speed reducer 3. In this state, the flame reaction burner 5 existing above the rotary plate 2 was linearly reciprocated between the points A and B in the radial direction of the rotary plate 2 while being synthesized in the flame of the burner 5. The deposit is deposited on each substrate 1.

[0003]

However, in such a conventional flame deposition method, if the rotation of the rotary plate 2 on which the substrate 1 is placed is constant (N rpm), the radius D on the outer peripheral side is increased.
Since the peripheral velocity at the position of πDN / min and the peripheral velocity at the position of the radius d on the inner peripheral side change to πdN / min, it is very difficult to move the burner 5 to obtain a uniform deposition amount on the substrate 1. There is a problem that the amount must be adjusted.

Further, when the moving speed of the burner 5 is made constant, there is a problem that it is very difficult to adjust the rotating speed of the rotary plate 2.

Furthermore, in order to adjust the movement amount and the rotation speed of the burner 5 as described above, there is a problem that the cost of a control circuit for controlling the burner 5 becomes high.

An object of the present invention is to provide a flame deposition method capable of obtaining a uniform deposition amount on a substrate even if the burner moving speed is constant and the rotating plate rotating speed is constant.

[0007]

Means for Solving the Problems To explain the means of the present invention for achieving the above-mentioned object, the present invention is to rotate a rotating plate on which a substrate is installed at a constant rotation speed and to present a flame existing above the rotating plate. In a flame deposition method for depositing a deposit synthesized in a flame of a reaction burner on the substrate, a peripheral speed of the rotary plate at a portion where the deposit is deposited is set to v, and a radial direction of the rotary plate is rotated. When the moving speed of the burner is s, the moving locus of the burner is set to a convex curve that is convex in the rotation direction of the rotating plate so that v × s = constant, and the rotating plate is provided to the burner. The burner is reciprocally driven by applying a constant speed driving force in the radial direction of rotation.

[0008]

When the deposit is deposited on the substrate under the condition that v × s = constant in this way, a uniform deposition amount on the substrate can be obtained.

In this case, if the locus of movement of the burner is set to a convex curve which is convex in the rotation direction of the rotary plate so that v × s = constant, the rotational speed of the rotary plate is constant and the drive speed given to the burner is constant. It is possible to drive the substrate under a constant condition to obtain a uniform deposition amount, the driving device is simplified, and the cost can be reduced.

[0010]

FIG. 1 shows an embodiment of the flame deposition method according to the present invention.
Also, a detailed description will be given with reference to FIG. The parts corresponding to those in FIGS. 5 and 6 described above are denoted by the same reference numerals.

In this embodiment, the rotary plate 2 having a plurality of substrates 1 arranged in the circumferential direction is rotated at a constant rotational speed by a high-precision motor 4 such as a servomotor via a speed reducer 3.

Under these conditions, when the peripheral speed of the rotary plate 2 on which the deposit is deposited is v and the moving speed of the burner 5 in the radial direction of rotation of the rotary plate 2 is s, it is always vx
The movement path 6 of the burner 5 is set to the rotary plate 2 so that s = constant.
Set to a convex curve that is convex in the rotation direction of.

A driving force of a constant speed is applied to the burner 5 in the rotation radius direction of the rotary plate 2 to reciprocate the burner 5.

When the deposit is deposited on the substrate 1 under the condition that v × s = constant in this way, a uniform deposition amount can be obtained on each substrate 1.

In this case, if the moving locus 6 of the burner 5 is set to a convex curve which is convex in the rotation direction of the rotary plate 2 so that v × s = constant, the rotational speed of the rotary plate 2 is constant and the burner 5 is constant. It is possible to drive the substrate 1 so as to obtain a uniform deposition amount under a constant drive speed given to the substrate 1, the drive device becomes simple, and the cost can be reduced.

FIGS. 3 and 4 show an example of a drive device for driving the burner 5 along the movement locus 6.

That is, in this embodiment, the guide member 7 is provided above the rotary plate 2 so that the guide member 7 does not move in a predetermined direction by the support means (not shown). The movement locus 6 of the burner 5 is provided as a groove on the lower surface of the guide body 7. Burner 5
The upper part is fitted to the movement locus 6 formed of the groove, and is locked so as not to fall so as to move along the movement locus 6.

At a position outside the outer periphery of the rotary plate 2, a constant speed reciprocating drive mechanism 8 such as a hydraulic cylinder or an electric cylinder is mounted on a base 9. The constant speed reciprocating drive mechanism 8 is rotatably supported by a support shaft 10 so that the horizontal direction can be changed.

The burner 5 is supported at the tip of the movable shaft 8a of the constant speed reciprocating drive mechanism 8. The burner 5 has a gas supply port 5
Gas is supplied from a.

With such a structure, the rotary plate 2 is rotated at a constant rotational speed at a low speed, and a constant speed reciprocating driving force is applied to the burner 5 from the constant speed reciprocating driving mechanism 8. Then, the burner 5 is moved along the movement track 6. When viewed in a plan view, the movement locus 6 is in the form of a convex curve that is convex in the rotation direction of the rotary plate 2, so the radius of rotation of the rotary plate 2 on the outer peripheral side of the rotary plate 2 having a high peripheral speed. The moving speed of the burner 5 in the direction becomes slow, and the moving speed of the burner 5 in the radial direction of rotation of the rotary plate 2 on the center side of the rotary plate 2 having a low peripheral speed becomes fast.

Therefore, when the peripheral speed of the rotary plate 2 on which the deposit is deposited is v, and the moving speed of the burner 5 in the radial direction of rotation of the rotary plate 2 is s, v × s = constant Can be controlled so that Therefore, it is possible to obtain a uniform deposition amount on each substrate 1 using a simple driving device.

Rotating plate 2: diameter 1000 mm, substrate 1: diameter 75 m
When an experiment was conducted under the conditions of m, the number of revolutions of the rotary plate 2: max 20 rpm, and the moving speed of the burner 5: 5 mm / sec, a substantially uniform deposit could be formed on the surface of the substrate 1.

[0023]

As described above, in the flame deposition method according to the present invention, the peripheral speed of the rotary plate on which the deposit is deposited is v, and the moving speed of the burner in the radial direction of rotation of the rotary plate. Where s is s, the deposit is always deposited on the substrate under the condition that v × s = constant, so that a uniform deposition amount can be obtained on the substrate.

In particular, in the present invention, the trajectory of the burner is defined as a convex curve which is convex in the rotation direction of the rotating plate so that v × s = constant.
It is possible to drive the substrate to obtain a uniform deposition amount under a constant drive speed given to the burner. Therefore, the drive device for the rotary plate and the burner are both simple,
The cost of the device can be reduced.

[Brief description of drawings]

FIG. 1 is a plan view showing an example of an apparatus for carrying out a flame deposition method according to the present invention.

FIG. 2 is a side view showing an example of an apparatus for carrying out the flame deposition method according to the present invention.

FIG. 3 is a plan view showing a burner driving device of this embodiment.

FIG. 4 is a partially longitudinal side view showing the burner driving device of the present embodiment.

FIG. 5 is a plan view of a conventional flame deposition device.

FIG. 6 is a side view of a conventional flame deposition device.

[Explanation of symbols]

 1 Substrate 2 Rotating Plate 3 Reducer 4 Motor 5 Flame Reaction Burner 6 Trajectory 7 Guide Body 8 Constant Speed Reciprocating Drive Mechanism 9 Base 10 Support Shaft

Claims (1)

[Claims] 1. A flame deposition method in which a rotary plate on which a substrate is installed is rotated at a constant rotational speed, and a deposit synthesized in a flame of a flame reaction burner existing above the rotary plate is deposited on the substrate. In the above, when v is the peripheral speed of the rotary plate of the portion on which the deposit is deposited and s is the moving speed of the burner in the radial direction of rotation of the rotary plate, v x s is always constant. The movement trajectory of the burner is defined as a convex curve that is convex in the rotation direction of the rotary plate, and a reciprocating drive of the burner is performed by applying a constant speed driving force to the burner in the rotation radius direction of the rotary plate. Flame deposition method characterized by.