JPH06114698A - Transport control system - Google Patents
Transport control systemInfo
- Publication number
- JPH06114698A JPH06114698A JP27006692A JP27006692A JPH06114698A JP H06114698 A JPH06114698 A JP H06114698A JP 27006692 A JP27006692 A JP 27006692A JP 27006692 A JP27006692 A JP 27006692A JP H06114698 A JPH06114698 A JP H06114698A
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- product
- destination
- station
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- 238000012546 transfer Methods 0.000 claims description 114
- 238000004891 communication Methods 0.000 description 28
- 238000007726 management method Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 12
- 238000012423 maintenance Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 2
- 238000004886 process control Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Landscapes
- General Factory Administration (AREA)
- Control Of Conveyors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
- Multi-Process Working Machines And Systems (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は例えば半導体装置の製造
における搬送コントロールシステムに係わり，特に製品
在庫をもてる搬送ステーションを有し，自動的に行き先
を決定する搬送システムに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer control system in the manufacture of semiconductor devices, for example, and more particularly to a transfer system having a transfer station having a product inventory and automatically determining a destination.
【０００２】[0002]
【従来の技術】従来の搬送コントロールシステムは図３
に示すように，製品の搬送先は搬送ステーション１と工
程進捗管理コンピュータ２のどちらか一方または両方で
行い，次の方法で搬送先を決定していた。2. Description of the Related Art A conventional transfer control system is shown in FIG.
As shown in FIG. 3, the product is delivered to either one or both of the delivery station 1 and the process progress management computer 2, and the delivery destination is determined by the following method.
【０００３】（１）ある搬送ステーション１の次の搬送
先は，搬送ステーション１か工程進捗管理コピュータ２
に登録されているデータ通り固定。ただし，次の搬送先
ステーションが故障の場合，代替搬送ステーチョンへ搬
送する機能を追加可能。(1) The next transfer destination of a certain transfer station 1 is the transfer station 1 or the process progress management computer 2
Fixed as the data registered in. However, if the next transfer destination station fails, a function to transfer to the alternative transfer station can be added.
【０００４】（２）次の搬送先ステーション候補が複数
存在する場合，それら搬送ステーションが在庫として持
っいる製品数を比較して多くない方とか，在庫数が予め
規定した比例配分になるようにといった製品在庫情報の
みで搬送先を決定する。(2) When there are a plurality of next transfer destination station candidates, the number of products in stock at those transfer stations is compared to the one that is not large, or the stock number becomes a predetermined proportional distribution. The delivery destination is determined only by the product inventory information.
【０００５】（３）次の搬送先ステーションは搬送ステ
ーションに到着した時点で決定する。(3) The next transfer destination station is determined when it arrives at the transfer station.
【０００６】図３は従来の搬送コントロールシステムの
一例のブロック図である。なお図３中の１０４，１０
６，１０７で示す表は省略表記されており，詳細は図
７，図９，図１０にそれぞれ示す。工程進捗管理コンピ
ュータ２が次の搬送ステーション候補を指定し，最終的
は搬送先ステーション決定を搬送ステーション１で行っ
ている。製品Ｘが搬送ステーション１に到着（矢印Ａ）
した時点で工程進捗管理コンピュータ２にこの製品の次
の行き先搬送ステーション候補を行先搬送ステーション
問合（通信Ｍ）で問い合わせる。工程進捗管理コンピュ
ータ２は製品の仕掛工程を各工程での製品作業報告（通
信Ｃ）を受信する事により認識しており，事前に登録し
てある仕掛工程と搬送ステーションの対照表１０７を利
用して次の行き先搬送ステーション候補を行先搬送ステ
ーション応答（通信Ｎ）で返す。搬送ステーション１
は，搬送先ステーションの稼働状態を搬送ステーション
状態報告（通信Ｆ）で収集しておき，先き先搬送ステー
ションを決定し，出庫する。先き先搬送ステーションが
自分自信の場合，その搬送ステーション１の在庫とな
り，設備への出庫待ちとなる。FIG. 3 is a block diagram of an example of a conventional transport control system. In addition, 104 and 10 in FIG.
The tables denoted by 6 and 107 are abbreviated and the details are shown in FIGS. 7, 9, and 10, respectively. The process progress management computer 2 specifies the next transfer station candidate, and finally the transfer station 1 determines the transfer destination station. Product X arrives at transfer station 1 (arrow A)
At that time, the process progress management computer 2 is inquired about the next destination transfer station candidate of this product by a destination transfer station inquiry (communication M). The process progress management computer 2 recognizes the in-process process of the product by receiving the product work report (communication C) in each process, and uses the comparison table 107 of the in-process process and the transfer station registered in advance. Then, the next destination transport station candidate is returned as a destination transport station response (communication N). Transfer station 1
Collects the operating status of the transfer destination station in the transfer station status report (communication F), determines the previous transfer station, and leaves. If the first transfer station is self-confident, the transfer station 1 will be in stock and waiting for delivery to the facility.
【０００７】[0007]
【発明が解決しようとする課題】従来の搬送コントロー
ルシステムでは，設備から情報を収集する機能が無いた
め，ある製品の仕掛工程の作業可能設備が複数の搬送ス
テーションにまたがって存在する場合，どの搬送ステー
ションに搬送するかを設備の稼働状態，例えば故障やメ
ンテナンスなどへの変化や段取り替えが必要かどうかに
よる搬送先選択が困難であった。そして仕掛工程の全て
の作業可能設備が単一の搬送ステーションに接続または
近接している場合でも，同様に最終的な作業設備決定が
困難であった。逆に作業設備が決定されていないため，
設備操作者が作業する製品の選択を行わなければならな
いという問題点と，設備操作者が必ずしも製品の優先度
に従って作業しないという問題点があった。また，搬送
ステーション１に製品が到着した時点で次の搬送先情報
を入手するため，在荷となってから製品を次の搬送ステ
ーションまたは製品の仕掛工程の作業設備へ送り出す間
に発生する，作業可能設備の稼働状態変化に対応するこ
とが困難であった。さらに，搬送ステーション１あるい
は工程進捗管理コンピュータ２に予め登録されている工
程毎の行き先を手動で変更せずに，製品の搬送先を自動
的に変更することは，目的搬送ステーションが故障また
は在庫満量である場合を除いて困難であった。加えて，
搬送ステーション１や工程進捗管理コンピュータ２自身
のみで行き先指示を行うと搬送先の決定論理変更の自由
度が低いという問題点があった。Since the conventional transfer control system does not have the function of collecting information from the equipment, when the workable equipment for the work-in-progress process of a certain product exists over a plurality of transfer stations, which transfer operation is required. It was difficult to select the transfer destination depending on the operating status of the equipment, such as failure or maintenance, and whether or not setup change is required. Even when all workable equipment in the work-in-process is connected to or close to a single transfer station, it is similarly difficult to determine the final work equipment. On the contrary, since the work equipment has not been decided,
There was a problem that the equipment operator had to select a product to work with, and there was a problem that the equipment operator did not always work according to the priority of the product. Further, since the next delivery destination information is obtained when the product arrives at the delivery station 1, the work that occurs during the time when the product is delivered to the next delivery station or the work facility for the work-in-process of the product after the product is loaded It was difficult to respond to changes in the operational status of possible equipment. Further, it is possible to automatically change the product transfer destination without manually changing the destination for each process registered in advance in the transfer station 1 or the process progress management computer 2. Difficult except in the case of quantity. in addition,
If the destination is instructed only by the transfer station 1 or the process progress management computer 2 itself, there is a problem that the degree of freedom in changing the transfer destination decision logic is low.
【０００８】[0008]
【課題を解決するための手段】本発明の搬送コントロー
ルシステムは，製品の自動搬送を行う製品製造工程にお
ける，製品を保管することのできる搬送ステーション
と，搬送ステーション間での製品を搬送する装置と，製
品の工程進捗管理コピュータとを有する搬送コントロー
ルシステムにおいて，工程進捗管理コンピュータからの
製品の情報と搬送ステーション，作業設備から各々の稼
働状態に関する情報を入手する搬送先指示コントローラ
を有する。A transfer control system of the present invention comprises a transfer station capable of storing a product in a product manufacturing process for automatically transferring a product, and an apparatus for transferring the product between the transfer stations. In a transfer control system having a product process progress management computer, it has a transfer destination instruction controller that obtains product information from a process progress management computer, a transfer station, and work facility information about each operating state.
【０００９】[0009]
【実施例】次に本発明について図面を参照して説明す
る。The present invention will be described below with reference to the drawings.
【００１０】図１は本発明の第１の実施例のブロック図
である。なお図１中の１０１，１０２，１０３，１０４
は簡略化表記してあり，詳細は図４，図５，図６，図７
にそれぞれ示す。FIG. 1 is a block diagram of a first embodiment of the present invention. Note that 101, 102, 103, 104 in FIG.
Are shown in simplified form, and details are shown in FIGS. 4, 5, 6, and 7.
Are shown respectively.
【００１１】搬送ステーション１は製品到着（矢印Ａ）
した時点で工程進捗管理コンピュータ２にこの製品の次
の行き先設備候補を問い合わせるべく行先設備候補問合
（通信Ｂ）を行う。工程進捗管理コンピュータ２は製品
の仕掛工程を各工程での製品作業報告（通信Ｃ）を受信
することにより認識しており，事前に登録してある仕掛
工程と作業可能設備の対照表１０１（図４）を利用して
次の行き先設備候補と作業段取りを行先設備候補応答
（通信Ｄ）で返す。搬送ステーション１は，この情報を
基に在庫製品−作業可能設備・段取り対照表１０２（図
５）を更新する。また，搬送先指示コントローラ３は全
設備の，設備状態，現在の作業条件，予定された定期メ
ンテナンススケジュール等の情報を設備状態報告（通信
Ｅ）によって収集して設備付帯情報表１０３（図６）
を，常に，最新状態にしておく。さらに全搬送ステーシ
ョンの状態変化情報を搬送ステーション状態報告（通信
Ｆ）によって収集して搬送ステーション付帯情報表１０
４（図７）を，常に最新状態にしておく。搬送ステーシ
ョン１はタイマ，搬送装置４のアイドル状態信号等を利
用した搬送要求のトリガ（Ｇ）を認識して，搬送先指示
コントローラ３に対して作業優先度の最も高い在庫製品
の搬送指示要求（通信Ｈ）を搬送先指示コントローラ３
に送信する。このとき在庫製品−作業可能設備・段取り
対照表１０２（図５）の，その製品に関する情報も搬送
先指示コントローラ３に渡される。搬送先指示コントロ
ーラ３に受け取った情報と設備付帯情報表１０３（図
６）とを用いて搬送先設備の決定を行う。本実施例で
は，行き先設備候補の稼働状態，次回メンテナンス予
定，現在の段取りと同一段取りの製品を優先するかどう
かに利用している。続いて，決定された設備に接続また
は近接する搬送ステーションへ搬送可能かどうか，搬送
ステーション付帯情報表１０４（図７）を用いて判断
し，可能であればその搬送ステーションへの搬送指示
（通信Ｉ）を送信する。このとき目的搬送ステーション
が故障や満量であっても代替ステーションを指定してお
けばその搬送ステーションへ搬送指示（通信Ｉ）するこ
とが可能である。目的搬送ステーション及びその代替ス
テーションへの搬送が不可能な場合は，その旨を搬送指
示（通信Ｉ）として送信する。この場合搬送ステーショ
ン１は，在庫製品の内作業優先度の高い製品順に同様な
処理を繰り返し行う。搬送ステーション１は搬送指示
（通信Ｉ）で搬送先を指定された場合，搬送指示（通信
Ｉ）に従って製品を搬送装置４に出庫（Ｊ）する。なお
目的設備が搬送ステーション１自身に最近接であるが接
続していない場合は，製品は搬送ステーション１の在庫
となる。The transfer station 1 arrives at the product (arrow A).
At that time, a destination equipment candidate inquiry (communication B) is performed to inquire the next destination equipment candidate of this product to the process progress management computer 2. The process progress management computer 2 recognizes the in-process processes of the product by receiving the product work report (communication C) at each process, and the pre-registered in-process process and workable equipment comparison table 101 (Fig. 4) is used to return the next destination equipment candidate and work setup as a destination equipment candidate response (communication D). The transfer station 1 updates the stock product-workable equipment / setup comparison table 102 (FIG. 5) based on this information. Further, the destination instruction controller 3 collects information such as the equipment status, the current work conditions, and the scheduled regular maintenance schedule of all the equipments by the equipment status report (communication E), and the equipment incidental information table 103 (FIG. 6).
Is always up to date. Furthermore, the status change information of all the transfer stations is collected by the transfer station status report (communication F), and the transfer station incidental information table 10
4 (Fig. 7) is always updated. The transfer station 1 recognizes a transfer request trigger (G) using a timer, an idle signal of the transfer device 4, etc., and requests the transfer destination instruction controller 3 to transfer an instruction for a stock product having the highest work priority ( Communication H) to the destination instruction controller 3
Send to. At this time, information about the product in the stock product-workable equipment / setup comparison table 102 (FIG. 5) is also passed to the transfer destination instruction controller 3. The destination equipment is determined using the information received by the destination instruction controller 3 and the equipment incidental information table 103 (FIG. 6). In this embodiment, the operation status of the destination equipment candidate, the next maintenance schedule, and whether to prioritize the products with the same setup as the current setup are used. Then, it is judged whether or not it is possible to transfer to a transfer station connected to or close to the determined equipment, using the transfer station incidental information table 104 (FIG. 7), and if possible, a transfer instruction to that transfer station (communication I ) Is sent. At this time, even if the target transfer station is out of order or full, if a substitute station is designated, it is possible to issue a transfer instruction (communication I) to that transfer station. If the transfer to the target transfer station and its alternative station is impossible, a message to that effect is sent as a transfer instruction (communication I). In this case, the transfer station 1 repeats the same processing in the order of products having high work priority among the stock products. When the transport destination is designated by the transport instruction (communication I), the transport station 1 delivers (J) the product to the transport device 4 according to the transport instruction (communication I). If the target equipment is the closest to the transfer station 1 itself but is not connected, the product is in stock at the transfer station 1.
【００１２】図２は本発明の第２の実施例のブロック図
である。なお図中の１０１，１０３，１０４，１０５は
図１と同様省略表記されており，図４，図６，図７，図
８にそれぞれ詳細を示す。FIG. 2 is a block diagram of the second embodiment of the present invention. It should be noted that 101, 103, 104, and 105 in the figure are abbreviated as in FIG. 1, and details are shown in FIGS. 4, 6, 7, and 8, respectively.
【００１３】搬送ステーション１は製品到着（矢印Ａ）
した時点で搬送先指示コントローラ３に製品到着報告
（通信Ｋ）を行う。搬送先指示コントローラ３は搬送ス
テーション１に製品到着報告応答（通信Ｌ）を返した
後，工程進捗管理コンピュータ２にこの製品の次の行き
先設備候補を行先設備候補問合（通信Ｂ）で問い合わせ
る。工程進捗管理コンピュータ２は製品の仕掛工程を各
工程での製品作業報告（通信Ｃ）を受信することにより
認識しており，事前に登録してある仕掛工程と作業可能
設備の対照表１０１（図４）を利用して次の行き先設備
候補と作業段取りを行先設備候補応答（通信Ｄ）で返
す。搬送先指示コントローラ３は，この情報を基に搬送
ステーション毎の在庫製品−作業可能設備・段取り対照
表１０５（図８）を更新する。また，搬送先指示コント
ローラ３は全設備の，設備状態，現在の作業条件，予定
された定期メンテナンススケジュール等の情報を設備状
態報告（通信Ｅ）によって収集して設備付帯情報表１０
３（図６）を，全搬送ステーションの状態変化情報を搬
送ステーション状態報告（通信Ｆ）によって収集し搬送
ステーション付帯情報表１０４（図７）を常に最新状態
にしておく。搬送ステーション１はタイマ，搬送装置４
のアイドル状態信号等を利用した搬送要求のトリガ
（Ｇ）を認識して，搬送先指示コントローラ３に対て在
庫製品の搬送指示要求（通信Ｈ）を搬送先指示コントロ
ーラ３に送信する。搬送先指示コントローラ３は搬送ス
テーション毎の在庫製品−作業可能設備・段取り対照表
１０５（図８）より，搬送指示要求（通信Ｈ）を行った
搬送ステーション１の在庫製品の内，作業優先度の最も
高い製品を認識し，その製品についての作業設備決定を
設備付帯情報表１０３（図６）を用いて行う。本実施例
では，行き先設備候補の稼働状態，次回メンテナンス予
定，現在の段取りと同一段取り製品を優先するかどうか
利用している。The transfer station 1 arrives at the product (arrow A).
At that time, a product arrival report (communication K) is sent to the transport destination instruction controller 3. The delivery destination instruction controller 3 returns a product arrival report response (communication L) to the delivery station 1, and then inquires the process progress management computer 2 for the next destination equipment candidate of this product by a destination equipment candidate inquiry (communication B). The process progress management computer 2 recognizes the in-process processes of the product by receiving the product work report (communication C) at each process, and the pre-registered in-process process and workable equipment comparison table 101 (Fig. 4) is used to return the next destination equipment candidate and work setup as a destination equipment candidate response (communication D). The transfer destination instruction controller 3 updates the stock product-workable equipment / setup comparison table 105 (FIG. 8) for each transfer station based on this information. In addition, the destination instruction controller 3 collects information such as the equipment status, the current work conditions, and the scheduled regular maintenance schedule of all the equipment by the equipment status report (communication E), and the equipment incidental information table 10
3 (FIG. 6), the status change information of all the transfer stations is collected by the transfer station status report (communication F), and the transfer station incidental information table 104 (FIG. 7) is always updated. The transfer station 1 is a timer, the transfer device 4
It recognizes the trigger (G) of the transportation request using the idle state signal or the like, and transmits the transportation instruction request (communication H) of the stock product to the transportation destination instruction controller 3 to the transportation destination instruction controller 3. The transfer destination instruction controller 3 determines the work priority among the stock products of the transfer station 1 that has issued the transfer instruction request (communication H) from the stock product-workable equipment / setup comparison table 105 (FIG. 8) for each transfer station. The highest product is recognized, and the work equipment for the product is determined using the equipment incidental information table 103 (FIG. 6). In this embodiment, whether or not the operation status of the destination equipment candidate, the next maintenance schedule, and the current setup product and the setup product are prioritized is used.
【００１４】続いて，決定された作業設備に接続または
近接する搬送ステーションへ搬送可能かどうか，搬送ス
テーション付帯情報表１０４（図７）を用いて判断し，
可能であればその搬送ステーションへの搬送指示（通信
Ｉ）を送信する。このとき目的搬送ステーションが故障
や満量であっても代替ステーションを指定しておけばそ
の搬送ステーションへ搬送指示（通信Ｉ）することが可
能である。目的搬送ステーション及びその代替ステーシ
ョンへの搬送が不可能な場合，搬送先指示コントローラ
３は同一搬送ステーションの在庫製品の内，作業優先度
の高い製品順に同様な処理を行い，搬送可能製品がない
場合はその旨を搬送指示（通信Ｉ）として送信する。こ
の場合，搬送ステーションは次の搬送要求とトリガ発生
を持つ。搬送指示（通信Ｉ）で製品と搬送先を指示され
た場合，搬送ステーション１は搬送指示に従ってその製
品を搬送装置４に出庫（矢印Ｊ）する。なお目的設備が
搬送ステーション１自身に最近接であるが接続していな
い場合は，製品は搬送ステーション１の在庫となる。Next, it is judged whether or not it can be transferred to a transfer station connected to or close to the determined work equipment by using the transfer station incidental information table 104 (FIG. 7),
If possible, a transportation instruction (communication I) to the transportation station is transmitted. At this time, even if the target transfer station is out of order or full, if a substitute station is designated, it is possible to issue a transfer instruction (communication I) to that transfer station. When it is impossible to transfer to the target transfer station and its alternative station, the transfer destination instruction controller 3 performs the same processing in the order of products with the highest work priority among the stocked products in the same transfer station, and there is no transferable product. Transmits that fact as a transport instruction (communication I). In this case, the transfer station has the next transfer request and trigger generation. When the product and the destination are instructed by the transfer instruction (communication I), the transfer station 1 delivers the product to the transfer device 4 according to the transfer instruction (arrow J). If the target equipment is the closest to the transfer station 1 itself but is not connected, the product is in stock at the transfer station 1.
【００１５】[0015]
【発明の効果】以上説明したように，本発明は設備の稼
働状態情報及び搬送ステーション状態情報を収集管理す
る搬送先指示コントローラを設けたので，製品の作業可
能設備の稼働状態に応じて製品の搬送をするという効果
を有する。また，製品の搬送先を設備で指定することに
より，設備毎の仕掛り量の制御や作業段取り変更削減と
稼働率向上という効果を有する。さらに，製品の搬送先
の決定を搬送開始直前に行うことにより，同一搬送ステ
ーションに多数の在荷がある場合にも，作業設備及び搬
送ステーションの最新状態情報を利用して製品の搬送で
きるという効果を持つ。加えて，工程管理コンピュータ
や搬送システムとは独立に搬送先を指示するため，搬送
先決定論理変更の自由度が高いという効果を有する。As described above, the present invention is provided with the transfer destination instruction controller that collects and manages the operating status information of the equipment and the transfer station status information, so that the product can be processed according to the operating status of the equipment. It has the effect of being transported. Also, by designating the destination of the product by the facility, it has the effects of controlling the amount of work in progress for each facility, reducing the work setup changes, and improving the operating rate. Further, by determining the destination of the product immediately before the start of the transportation, the product can be transported by using the latest status information of the work equipment and the transportation station even when there are many loads in the same transportation station. have. In addition, since the transfer destination is instructed independently of the process control computer and the transfer system, there is an effect that there is a high degree of freedom in changing the transfer destination determination logic.
【図１】本発明の第１の実施例を示すブロック図であ
る。FIG. 1 is a block diagram showing a first embodiment of the present invention.
【図２】本発明の第２の実施例を示すブロック図であ
る。FIG. 2 is a block diagram showing a second embodiment of the present invention.
【図３】従来の搬送コントロールシステムを示すブロッ
ク図である。FIG. 3 is a block diagram showing a conventional transport control system.
【図４】製品Ｘの工程−作業可能設備対照表の例を示す
図である。FIG. 4 is a diagram showing an example of a process-workable facility comparison table for product X.
【図５】在庫製品−作業可能設備・段取り対照表の例を
示す図である。FIG. 5 is a diagram showing an example of an inventory product-workable equipment / setup comparison table.
【図６】設備付帯情報表の例を示す図である。FIG. 6 is a diagram showing an example of an equipment incidental information table.
【図７】搬送ステーション付帯情報表の例を示す図であ
る。FIG. 7 is a diagram showing an example of a transfer station incidental information table.
【図８】搬送ステーション毎在庫製品−作業可能設備・
段取り対照表の例を示す図である。[Figure 8] Products in stock at each transfer station-Workable equipment
It is a figure which shows the example of a setup comparison table.
【図９】在庫製品−搬送先ステーション対照表の例を示
す図である。FIG. 9 is a diagram showing an example of an inventory product-conveyance destination station comparison table.
【図１０】在庫製品−搬送先ステーション対照表の例を
示す図である。FIG. 10 is a diagram showing an example of an inventory product-conveyance destination station comparison table.
１ 搬送ステーション ２ 工程進捗管理コンピュータ ３ 搬送先指示コントローラ ４ 搬送装置 Ａ 製品Ｘ到着 Ｂ 行先設備候補問合 Ｃ 製品作業報告 Ｄ 行先設備候補応答 Ｅ 設備状態報告 Ｆ 搬送ステーション状態報告 Ｇ 搬送要求とトリガ Ｈ 搬送指示要求 Ｉ 搬送指示 Ｊ 製品出庫 Ｋ 製品到着報告 Ｌ 製品到着報告応答 Ｍ 行先搬送ステーション候補問合 Ｎ 行先搬送ステーション候補応答 1 Transfer station 2 Process progress management computer 3 Transfer destination instruction controller 4 Transfer device A Product X arrival B Destination equipment candidate inquiry C Product work report D Destination equipment candidate response E Equipment status report F Transfer station status report G Transfer request and trigger H Transfer instruction request I Transfer instruction J Product delivery K Product arrival report L Product arrival report response M Destination carrier station candidate inquiry N Destination carrier station candidate response
Claims (1)
製品を保管することのできる搬送ステーションと，搬送
ステーション間で製品を搬送する装置と，製品の工程進
捗管理コンヒュータを有する搬送コントロールシステム
において，工程進捗管理コンピュータからの製品の情報
と搬送ステーション，作業設備から各々の稼働状態に関
する情報を入手する機能を有する搬送先指示コントロー
ラを備えることを特徴とする搬送コントロールシステ
ム。1. A product manufacturing process for automatically carrying a product,
In a transfer control system having a transfer station capable of storing products, a device for transferring the products between transfer stations, and a process progress management computer for the product, product information from the process progress management computer, transfer station, and work equipment A transport control system, comprising: a transport destination instruction controller having a function of obtaining information on each operating state from the transport destination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27006692A JPH06114698A (en) | 1992-10-08 | 1992-10-08 | Transport control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27006692A JPH06114698A (en) | 1992-10-08 | 1992-10-08 | Transport control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06114698A true JPH06114698A (en) | 1994-04-26 |
Family
ID=17481049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27006692A Pending JPH06114698A (en) | 1992-10-08 | 1992-10-08 | Transport control system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06114698A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010076863A1 (en) * | 2008-12-29 | 2010-07-08 | キヤノンアネルバ株式会社 | Substrate treating system and substrate treating device |
-
1992
- 1992-10-08 JP JP27006692A patent/JPH06114698A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010076863A1 (en) * | 2008-12-29 | 2010-07-08 | キヤノンアネルバ株式会社 | Substrate treating system and substrate treating device |
| JP4615071B2 (en) * | 2008-12-29 | 2011-01-19 | キヤノンアネルバ株式会社 | Substrate processing system and substrate processing apparatus |
| JPWO2010076863A1 (en) * | 2008-12-29 | 2012-06-21 | キヤノンアネルバ株式会社 | Substrate processing system and substrate processing apparatus |
| US8321047B2 (en) | 2008-12-29 | 2012-11-27 | Canon Anelva Corporation | Substrate processing system and substrate processing device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5838566A (en) | System and method for managing empty carriers in an automated material handling system | |
| US6400999B1 (en) | Production system and manufacturing equipment selecting method on production system | |
| EP1128246B1 (en) | Push-type scheduling for semiconductor fabrication | |
| JPH06114698A (en) | Transport control system | |
| JP3170025B2 (en) | Semiconductor manufacturing management method | |
| JP2988472B1 (en) | Production system | |
| CN115344010A (en) | Management control system | |
| JPH0616982B2 (en) | Logistics control device | |
| JPH06208414A (en) | Carrier control system | |
| JPH0744614A (en) | Device for controlling production and method therefor | |
| JP3231677B2 (en) | Wafer transfer method | |
| JP2004323141A (en) | Conveyance control system and conveyance control method for automatic warehouse | |
| JP3527172B2 (en) | Lot transfer device and method | |
| US7139628B2 (en) | System and method for fabrication backup control | |
| JP3480182B2 (en) | Transport vehicle movement scheduling device | |
| JP2000158296A (en) | Three-dimensional cutting network system | |
| JPH11353023A (en) | Carrier robot system | |
| JPH061413A (en) | Article carrying-in control device in automated warehouse system | |
| JPH096409A (en) | Production line control system | |
| JPH0738370B2 (en) | Method for manufacturing semiconductor device | |
| JPH0541382B2 (en) | ||
| JP3356109B2 (en) | Automatic lot transfer system and lot transfer control method | |
| JP3189890B2 (en) | Lot supply method and system | |
| WO2001004741A9 (en) | Automated work in process management system and method | |
| JPH11226848A (en) | Conveying control system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20000516 |