JPH0611166Y2 - Vacuum laminating machine seal structure - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a sealing structure of a vacuum laminating apparatus in which films are continuously attached to the front and back surfaces of a wiring board.

(Prior Art) As is well known from Japanese Utility Model Publication No. 57-56545, 1 is a vacuum chamber, and the inside of the chamber is decompressed at a predetermined pressure by a vacuum device (not shown). A drive roller 5 that conveys the wiring substrate 3 is disposed in the vacuum chamber 1, and a raw fabric roller 6 for bonding the wiring substrate 3 to the surface of the wiring substrate 3 and a feed roller 10 that feeds the film 8 from the raw fabric roller are arranged. The film 8 is attached to the wiring board 3 in the vacuum chamber 1.

The seal plate 1 is provided on both side surfaces 11 and 12 of the vacuum chamber 1.
4 and 15 are provided, and the seal rollers 17 and 18 are arranged so as to be in constant contact with the seal plates 14 and 15.

(Problems to be Solved by the Invention) In the conventional vacuum laminating apparatus, the seal plates 14 and 1 are used.
No. 5 used Teflon coated with a hard alumite coating formed on the surface of aluminum. On the other hand, as the seal rollers 17 and 18, a rubber roller having a rubber roller lined on the surface of a metal roller is used. This seal roller 17,1
Since 8 always rotates under pressure on the seal plates 14 and 15, dust is easily generated, and when the dust adheres to the wiring board 3 and enters the vacuum chamber 1, the film 8 is laminated. Since 8 functions as a resist film, a mistaken pattern occurs when forming a pattern on a wiring board, which causes a short circuit accident.

At the entrance 19 to the vacuum chamber 1, dust adheres to the wiring board 3 and the film 8 holds the dust, and at the exit 20 the dust is adhered to the laminated film 8 in the subsequent developing process. It was a factor in the occurrence of miss patterns.

(Means for Solving the Problem) The sealing structure of the vacuum laminating apparatus of the present invention is a vacuum laminating apparatus having a vacuum chamber for laminating a film on a wiring board, and A seal block having an arc shape that is not in contact with the outer circumference of the metal roller is provided at the entrance / exit, and a metal roller is provided in a non-contact state with this seal block, and the wiring board is conveyed in contact with this metal roller. For this purpose, a pair of seal rollers having a rubber lining are provided.

(Function) The device of the present invention is provided with a seal block on the side surface of the vacuum chamber, which prevents air from entering with a gap of 0.05 mm or less with respect to the metal roller, conveys and drives the wiring board, and shuts off air from entering. Since only the seal roller that contacts the wiring substrate has a structure that does not generate dust as in the prior art and dust does not adhere to the wiring substrate, a wiring substrate of good quality can be obtained.

(Example) The Example of this invention is described based on drawing.

Reference numeral 1 denotes a vacuum chamber, and the structure inside the vacuum chamber 1 is the same as a known one. Metal rollers 22, 23 and seal rollers 25, 26 are provided on both side surfaces 11, 12 of the vacuum chamber 1,
The metal rollers 22 and 23 and the seal rollers 25 and 26 are synchronously rotated so that no slip occurs between the rollers.

The metal rollers 22 and 23 are arranged apart from each other in a non-contact state. As the seal rollers 25 and 26, rubber rollers in which rubber is lined on the surface of metal are used. As described above, the seal rollers 25 and 26 are in contact with the adjacent metal rollers 22 and 23, and the seal rollers 25 and 26 are lined with rubber. Are in pressure contact with each other, and the seal rollers 25, 26
Prevents the outside air from entering the vacuum chamber 1 and also functions as a drive roller that conveys the wiring board 3 in the direction of the arrow.

In order to prevent outside air from entering through the metal rollers 22 and 23,
A seal block 32 having an arc shape 30 with a clearance of 0.05 mm or less is attached to the side surface of the vacuum chamber 1 with respect to the roller outer peripheral portions 28 of the metal rollers 22 and 23.

(Effects of the Invention) In the seal structure of the vacuum laminating apparatus of the present invention, since the seal roller and the metal roller rotate synchronously, there is no risk of dust generation between them, and the metal roller has a seal block and an arc shape that are extremely small Since the invasion of the atmosphere is prevented by the gap, it has almost no effect on the decompression in the vacuum chamber, and eliminates the conventional pattern mistakes in resist processing caused by dust in the seal structure, which improves reliability. High lamination process is now possible.

[Brief description of drawings]

FIG. 1 is a sectional view of the present invention, and FIG. 2 is a conventional sectional view. In the drawings, 1: vacuum chamber, 3: wiring board, 22, 23: metal roller, 25, 26: seal roller, 32: seal block.

Claims (1)

[Scope of utility model registration request] 1. A vacuum laminating apparatus having a vacuum chamber for laminating a film on a surface of a wiring board, comprising:
A seal block having a circular arc shape that does not contact the outer peripheral portion of the metal roller is provided at the entrance / exit portion where the wiring board on the side of the vacuum chamber enters and exits. A seal structure for a vacuum laminating apparatus, comprising: a metal roller;