JPH0610687Y2 - ウエハ移し替え機の安全装置 - Google Patents

ウエハ移し替え機の安全装置

Info

Publication number
JPH0610687Y2
JPH0610687Y2 JP1987054840U JP5484087U JPH0610687Y2 JP H0610687 Y2 JPH0610687 Y2 JP H0610687Y2 JP 1987054840 U JP1987054840 U JP 1987054840U JP 5484087 U JP5484087 U JP 5484087U JP H0610687 Y2 JPH0610687 Y2 JP H0610687Y2
Authority
JP
Japan
Prior art keywords
wafer
claws
transfer machine
safety device
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987054840U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63162536U (enExample
Inventor
貴庸 浅野
亘 大加瀬
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP1987054840U priority Critical patent/JPH0610687Y2/ja
Publication of JPS63162536U publication Critical patent/JPS63162536U/ja
Application granted granted Critical
Publication of JPH0610687Y2 publication Critical patent/JPH0610687Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1987054840U 1987-04-11 1987-04-11 ウエハ移し替え機の安全装置 Expired - Lifetime JPH0610687Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987054840U JPH0610687Y2 (ja) 1987-04-11 1987-04-11 ウエハ移し替え機の安全装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987054840U JPH0610687Y2 (ja) 1987-04-11 1987-04-11 ウエハ移し替え機の安全装置

Publications (2)

Publication Number Publication Date
JPS63162536U JPS63162536U (enExample) 1988-10-24
JPH0610687Y2 true JPH0610687Y2 (ja) 1994-03-16

Family

ID=30882203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987054840U Expired - Lifetime JPH0610687Y2 (ja) 1987-04-11 1987-04-11 ウエハ移し替え機の安全装置

Country Status (1)

Country Link
JP (1) JPH0610687Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611099A (ja) * 1984-06-13 1986-01-07 シャープ株式会社 ウエハ移載ロボツト

Also Published As

Publication number Publication date
JPS63162536U (enExample) 1988-10-24

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