JPH0610653B2 - Infrared microscope - Google Patents
Infrared microscopeInfo
- Publication number
- JPH0610653B2 JPH0610653B2 JP4454089A JP4454089A JPH0610653B2 JP H0610653 B2 JPH0610653 B2 JP H0610653B2 JP 4454089 A JP4454089 A JP 4454089A JP 4454089 A JP4454089 A JP 4454089A JP H0610653 B2 JPH0610653 B2 JP H0610653B2
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- sample
- mirror
- measurement
- atr prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は試料台上部に反射対物鏡を備え、試料測定部位
の可視光観察と赤外分光分析の機能を備えた赤外顕微鏡
に関するものである。TECHNICAL FIELD The present invention relates to an infrared microscope equipped with a reflective objective mirror on the upper part of a sample table and having functions of observing a visible light of a sample measurement site and infrared spectroscopic analysis. is there.
（従来の技術） 赤外顕微鏡には、赤外線を試料に透過させて赤外分光分
析を行なう赤外透過測定モード、赤外線を試料表面で反
射させて赤外分光分析を行なう赤外反射測定モード、可
視光を試料に透過させて顕微鏡観察を行なう可視透過観
察モード、及び可視光を試料表面で反射させて顕微鏡観
察を行なう可視透過観察モードの４つのモードを切り替
えて使用できるようにしたものがある。(Prior Art) An infrared microscope has an infrared transmission measurement mode in which infrared rays are transmitted through a sample for infrared spectroscopic analysis, an infrared reflection measurement mode in which infrared rays are reflected on the sample surface for infrared spectroscopic analysis, There are four modes that can be used by switching between four modes: a visible transmission observation mode in which visible light is transmitted through a sample for microscope observation, and a visible transmission observation mode in which visible light is reflected on the sample surface for microscope observation. .
赤外分光分析は、物質の同定分析のために広く利用され
ている。例えば化学物質、医薬品を初め、電子材料な
ど、有機物が中心ではあるが、無機物に対しても広く利
用されつつある分析法である。Infrared spectroscopic analysis is widely used for identification analysis of substances. For example, it is an analytical method that is mainly used for organic substances such as chemical substances, pharmaceuticals, and electronic materials, but is also being widely used for inorganic substances.
（発明が解決しようとする課題） 試料表面に付着した物質の赤外分光分析を行なおうとし
た場合、もし試料が赤外線を透過する物質であれば赤外
透過測定モードで測定することができ、また、もし試料
が赤外線をよく反射する物質、例えば金属や半導体など
であれば赤外反射測定モードで測定することができる。(Problems to be Solved by the Invention) When an infrared spectroscopic analysis of a substance attached to a sample surface is attempted, if the sample is a substance that transmits infrared rays, it can be measured in an infrared transmission measurement mode, If the sample is a substance that reflects infrared rays well, such as a metal or a semiconductor, it can be measured in the infrared reflection measurement mode.
しかし、試料が赤外線をよく透過せず、かつ、よく反射
もしない物質、例えばポリマーや無機材料などの場合に
は、赤外透過測定モードと赤外反射測定モードの何れの
測定モードによっても試料表面上の付着物の赤外分光分
析を行なうことはできない。However, when the sample does not transmit infrared rays well and does not reflect well, such as polymers and inorganic materials, the sample surface can be measured by either the infrared transmission measurement mode or the infrared reflection measurement mode. Infrared spectroscopic analysis of the above deposit is not possible.
本発明は、赤外線に対する試料の透過特性に関係なく、
試料表面上の付着物の赤外分光分析を行なうことのでき
る赤外顕微鏡を提供することを目的とするものである。The present invention, regardless of the transmission characteristics of the sample for infrared rays,
It is an object of the present invention to provide an infrared microscope capable of performing infrared spectroscopic analysis of deposits on a sample surface.
（課題を解決するための手段） 本発明は、従来の赤外顕微鏡の反射対物鏡と試料台の間
に、支持棒の下端に取りつけられたＡＴＲ（全反射）プ
リズムと、このＡＴＲプリズムを前記支持棒を介して視
野中心軸上で上下方向に移動させる移動機構とを設けた
ものである。(Means for Solving the Problem) According to the present invention, an ATR (total reflection) prism attached to a lower end of a support rod is provided between a reflection objective mirror and a sample stage of a conventional infrared microscope, and the ATR prism is provided as described above. And a moving mechanism for moving vertically on the central axis of the visual field via the support rod.
（作用） 赤外線をよく透過せず、かつ、よく反射もしない物質か
らなる試料の表面上の付着物を測定する場合に、ＡＴＲ
プリズムを視野中心軸上で下降させて測定対象物上に密
着させ、赤外反射測定モードで測定を行なう。入射赤外
線はＡＴＲプリズムによって測定対象物の表面で全反射
され、測定対象物の赤外分光分析が行なわれる。(Function) When measuring an adhered substance on the surface of a sample made of a substance that does not transmit infrared rays well and does not reflect well, ATR
The prism is moved down on the central axis of the field of view and brought into close contact with the object to be measured, and measurement is performed in the infrared reflection measurement mode. The incident infrared light is totally reflected by the surface of the measurement target by the ATR prism, and the infrared spectroscopic analysis of the measurement target is performed.
赤外線透過物質や赤外線反射物質の試料の表面上の付着
物を測定する場合は、ＡＴＲプリズムを視野中心軸上で
上方に引き上げておく。それによりＡＴＲプリズムが試
料上の焦点位置からずれて、測定の妨げにならなくな
る。When measuring the deposit of the infrared transmitting substance or the infrared reflecting substance on the surface of the sample, the ATR prism is pulled upward on the central axis of the visual field. As a result, the ATR prism does not deviate from the focus position on the sample and does not interfere with the measurement.
（実施例） 第１図は一実施例を表わす。図の状態は、ＡＴＲプリズ
ムを使用する赤外反射測定モードを示している。(Embodiment) FIG. 1 shows an embodiment. The state of the figure shows an infrared reflection measurement mode using an ATR prism.
２は赤外測定を行なう際の測定モードを切り替える透過
／反射切替え鏡、４は平面鏡、６は球面鏡、８は平面
鏡、１０は反射対物鏡である。反射対物鏡１０の下部に
は試料台１２が設けられている。１４は試料上の焦点位
置である。反射対物鏡１０で試料上に照射された赤外線
による反射赤外線は再び反射対物鏡１０で集光される。
１６は反射対物鏡１０で集光された赤外線を通す可変ア
パーチャ、１８は赤外測定と可視観察を切り替える切替
え鏡、２０，２２は平面鏡、２４は軸外し楕円面鏡、２
６は赤外検出器であるＭＣＴ検出器である。Reference numeral 2 is a transmission / reflection switching mirror for switching the measurement mode when performing infrared measurement, 4 is a plane mirror, 6 is a spherical mirror, 8 is a plane mirror, and 10 is a reflection objective mirror. A sample table 12 is provided below the reflective objective mirror 10. 14 is a focal position on the sample. Infrared light reflected by the infrared light irradiated onto the sample by the reflective objective mirror 10 is condensed again by the reflective objective mirror 10.
Reference numeral 16 is a variable aperture through which the infrared light collected by the reflective objective mirror 10 passes, 18 is a switching mirror for switching between infrared measurement and visible observation, 20 and 22 are plane mirrors, 24 is an off-axis elliptical mirror, 2
Reference numeral 6 is an MCT detector which is an infrared detector.
赤外透過測定モードで赤外線を試料の下面から透過させ
るために、下部に平面鏡２８、球面鏡３０、ピンホール
３１，平面鏡３２及びコンデンサ鏡３４が設けられてい
る。A plane mirror 28, a spherical mirror 30, a pinhole 31, a plane mirror 32, and a condenser mirror 34 are provided in the lower part in order to transmit infrared rays from the lower surface of the sample in the infrared transmission measurement mode.
可視反射観察モードで試料に可視光を照射するために、
上部にハロゲンランプ３６、レンズ系３８、反射照明光
導入用平面鏡４０が設けられている。In order to irradiate the sample with visible light in the visible reflection observation mode,
A halogen lamp 36, a lens system 38, and a plane mirror 40 for introducing reflected illumination light are provided on the upper portion.
また、可視透過観察モードで試料に可視光を透過するた
め、下部にハロゲンランプ４２、透過照明光導入用平面
鏡４３が設けられている。Further, in order to transmit visible light to the sample in the visible transmission observation mode, a halogen lamp 42 and a plane mirror 43 for introducing transmitted illumination light are provided below.
可視光による観察を行なうために、反射対物鏡１０で集
光された光は平面鏡８、アパーチャ１６、切替え鏡１
８、平面鏡４０及びプリズム４４などを経て接眼レンズ
４６，４８に導かれる。In order to perform observation with visible light, the light condensed by the reflective objective mirror 10 is a plane mirror 8, an aperture 16, and a switching mirror 1.
8, the plane mirror 40, the prism 44, and the like, and is guided to the eyepieces 46 and 48.
試料台１２と反射対物鏡１０の間には、第２図に拡大し
て示されるように、支持棒５０の先端に取りつけられた
ＡＴＲプリズム５２が設けられている。支持棒５０は移
動機構５４によって上下方向に移動できるように支持さ
れている。５８は試料台１２上に載置された試料、６０
は試料５８上に付着した測定対象物である。An ATR prism 52 attached to the tip of a supporting rod 50 is provided between the sample stage 12 and the reflecting objective 10, as shown in an enlarged view in FIG. The support rod 50 is supported by a moving mechanism 54 so as to be vertically movable. 58 is a sample placed on the sample table 12, 60
Is a measurement object attached on the sample 58.
移動機構５４は、具体的にはＸＹＺステージであり、上
下方向だけでなく水平面内方向にも移動できる。移動機
構５４により支持棒５０及びＡＴＲプリズム５２を顕微
鏡の視野中心軸上に位置決めしておき、測定モードによ
って上下方向に移動させる。The moving mechanism 54 is specifically an XYZ stage, and can move not only in the vertical direction but also in the horizontal plane. The support rod 50 and the ATR prism 52 are positioned by the moving mechanism 54 on the central axis of the visual field of the microscope, and are moved in the vertical direction depending on the measurement mode.
ＡＴＲプリズム５２は円錐台状をしており、底面の直径
が１mm程度のものである。ＡＴＲプリズム５２の材質と
しては、ＫＲＳ−５，ＫＲＳ−６，ＺｎＳｅ，Ｇｅなど
を使用することができる。支持棒５０は例えばステンレ
ス棒である。しかし、支持棒５０やＡＴＲプリズム５２
の大きさ、形状材質などは例示のものに限定されない。The ATR prism 52 has a truncated cone shape and has a bottom surface diameter of about 1 mm. As the material of the ATR prism 52, KRS-5, KRS-6, ZnSe, Ge or the like can be used. The support rod 50 is, for example, a stainless rod. However, the support rod 50 and the ATR prism 52
The size, shape material, etc. are not limited to those illustrated.
次に、本実施例の動作について説明する。Next, the operation of this embodiment will be described.
まず、ＡＴＲプリズム５２を用いた赤外反射測定モード
を説明する。First, the infrared reflection measurement mode using the ATR prism 52 will be described.
ＡＴＲプリズム５２を測定対象物から離して上に上げた
状態で、測定対象物の測定したい部位を顕微鏡の視野中
心に移動させる。このときの可視光による観察モードは
可視反射観察モードである。With the ATR prism 52 lifted away from the object to be measured, the part of the object to be measured to be measured is moved to the center of the visual field of the microscope. The observation mode with visible light at this time is the visible reflection observation mode.
次に、ＡＴＲプリズム５２を視野中心軸上で下降させて
測定対象物上に密着させ、第１図に示される赤外反射測
定モードで測定を行なう。赤外線は切替え鏡２から平面
鏡４、球面鏡６、平面鏡８を経て反射対物鏡１０によっ
て測定対象物上に照射される。赤外入射光はＡＴＲプリ
ズム５２によって第２図で記号５５で示されるように測
定対象物６０に入射し、記号５６で示されるように反射
する。反射光５６は再び反射対物鏡１０で集光され、平
面鏡８、アパーチャ１６、切替え鏡１８、平面鏡２０，
２２、軸外し楕円面鏡２４を経てＭＣＴ検出器２６で検
出される。Next, the ATR prism 52 is lowered on the central axis of the visual field and brought into close contact with the object to be measured, and measurement is performed in the infrared reflection measurement mode shown in FIG. Infrared rays are emitted from the switching mirror 2 through the plane mirror 4, the spherical mirror 6 and the plane mirror 8 onto the object to be measured by the reflection objective mirror 10. The infrared incident light is incident on the measuring object 60 by the ATR prism 52 as indicated by the symbol 55 in FIG. 2 and is reflected by the ATR prism 52 as indicated by the symbol 56. The reflected light 56 is collected again by the reflective objective mirror 10, and the plane mirror 8, the aperture 16, the switching mirror 18, the plane mirror 20,
22 and an off-axis ellipsoidal mirror 24 to detect the MCT detector 26.
赤外測定では、可変アパーチャ１６によって測定したい
部位だけの赤外スペクトルを測定できるように、マスキ
ングすることも可能である。In the infrared measurement, masking may be performed so that the variable aperture 16 can measure the infrared spectrum of only the portion to be measured.
ＡＴＲ測定以外の測定モードのときは、ＡＴＲプリズム
５２を測定対象物上から離して上下方向に移動させてお
く。ＡＴＲプリズム５２が測定対象物上の焦点位置１４
からずれることにより、ＡＴＲプリズム５２を備えてい
ない赤外顕微鏡と同じ測定モードでの測定を行なうこと
ができる。In the measurement modes other than the ATR measurement, the ATR prism 52 is moved vertically from the object to be measured. The ATR prism 52 moves the focus position 14 on the measurement object.
By deviating from this, it is possible to perform measurement in the same measurement mode as an infrared microscope not equipped with the ATR prism 52.
（発明の効果） 本発明では、反射対物鏡と試料台の間に、ＡＴＲプリズ
ムを上下動可能に取りつけたので、赤外線をよく透過せ
ず、かつ、よく反射もしない物質であっても、その表面
上の付着物などの赤外スペクトル測定が可能になる。(Effects of the Invention) In the present invention, since the ATR prism is vertically movable between the reflecting objective mirror and the sample stage, even if the substance does not transmit infrared rays well and does not reflect well, Infrared spectrum measurement of deposits on the surface becomes possible.
また、１mm以下というような微小な測定対象物のＡＴＲ
法による赤外スペクトル測定が可能になる。In addition, the ATR of minute measurement objects such as 1 mm or less
The infrared spectrum can be measured by the method.
【図面の簡単な説明】 第１図は一実施例をＡＴＲ法による赤外反射測定モード
で示す断面図、第２図はＡＴＲプリズム部分を拡大して
示す断面図である。 １０……反射対物鏡、１２……試料台、１４……試料上
焦点位置、５０……支持棒、５２……ＡＴＲプリズム、
５４……移動機構。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view showing an embodiment in an infrared reflection measurement mode by an ATR method, and FIG. 2 is an enlarged sectional view showing an ATR prism portion. 10 ... Reflective objective mirror, 12 ... Sample stage, 14 ... Focus position on sample, 50 ... Support rod, 52 ... ATR prism,
54 ... Moving mechanism.
Claims (1)
部位の可視光観察と赤外分光分析の機能を備えた赤外顕
微鏡において、反射対物鏡と試料台の間に、支持棒の下
端に取りつけられたＡＴＲプリズムと、このＡＴＲプリ
ズムを前記支持棒を介して視野中心軸上で上下方向に移
動させる移動機構とを備えたことを特徴とする赤外顕微
鏡。1. In an infrared microscope equipped with a reflective objective mirror on the upper part of a sample table and having a function of observing visible light of a sample measurement site and infrared spectroscopic analysis, a supporting rod of a support rod is provided between the reflective objective mirror and the sample table. An infrared microscope comprising: an ATR prism attached to the lower end; and a moving mechanism for moving the ATR prism in the vertical direction on the central axis of the visual field via the support rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4454089A JPH0610653B2 (en) | 1989-02-23 | 1989-02-23 | Infrared microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4454089A JPH0610653B2 (en) | 1989-02-23 | 1989-02-23 | Infrared microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02223847A JPH02223847A (en) | 1990-09-06 |
| JPH0610653B2 true JPH0610653B2 (en) | 1994-02-09 |
Family
ID=12694344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4454089A Expired - Lifetime JPH0610653B2 (en) | 1989-02-23 | 1989-02-23 | Infrared microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610653B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03233166A (en) * | 1990-02-06 | 1991-10-17 | Suzuki Motor Corp | Oxygen enriching device for internal combustion engine |
| JPH03117749U (en) * | 1990-03-15 | 1991-12-05 | ||
| JPH0572120A (en) * | 1991-03-08 | 1993-03-23 | Shimadzu Corp | Infrared microscopic measuring device |
| US6141100A (en) * | 1997-08-15 | 2000-10-31 | Bio-Rad Laboratories, Inc. | Imaging ATR spectrometer |
-
1989
- 1989-02-23 JP JP4454089A patent/JPH0610653B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02223847A (en) | 1990-09-06 |
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