JPH06104223B1 - - Google Patents
Info
- Publication number
- JPH06104223B1 JPH06104223B1 JP2515823A JP51582390A JPH06104223B1 JP H06104223 B1 JPH06104223 B1 JP H06104223B1 JP 2515823 A JP2515823 A JP 2515823A JP 51582390 A JP51582390 A JP 51582390A JP H06104223 B1 JPH06104223 B1 JP H06104223B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Knives (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2515823A JPH06104223B1 (cs) | 1989-11-21 | 1990-11-21 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30256089 | 1989-11-21 | ||
| JP32432989 | 1989-12-14 | ||
| JP2515823A JPH06104223B1 (cs) | 1989-11-21 | 1990-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06104223B1 true JPH06104223B1 (cs) | 1994-12-21 |
Family
ID=27338547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2515823A Pending JPH06104223B1 (cs) | 1989-11-21 | 1990-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06104223B1 (cs) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62106630A (ja) * | 1985-11-05 | 1987-05-18 | Hitachi Ltd | 処理装置 |
| JPS62149137A (ja) * | 1985-09-24 | 1987-07-03 | Tomuko:Kk | 乾燥装置 |
| JPS62173720A (ja) * | 1986-01-28 | 1987-07-30 | Fujitsu Ltd | ウエハ洗浄装置 |
| JPS63119889A (ja) * | 1986-11-10 | 1988-05-24 | ジャパン・フイールド株式会社 | 洗浄装置 |
| JPS63240982A (ja) * | 1987-03-27 | 1988-10-06 | ジャパン・フィールド株式会社 | 洗浄装置 |
-
1990
- 1990-11-21 JP JP2515823A patent/JPH06104223B1/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62149137A (ja) * | 1985-09-24 | 1987-07-03 | Tomuko:Kk | 乾燥装置 |
| JPS62106630A (ja) * | 1985-11-05 | 1987-05-18 | Hitachi Ltd | 処理装置 |
| JPS62173720A (ja) * | 1986-01-28 | 1987-07-30 | Fujitsu Ltd | ウエハ洗浄装置 |
| JPS63119889A (ja) * | 1986-11-10 | 1988-05-24 | ジャパン・フイールド株式会社 | 洗浄装置 |
| JPS63240982A (ja) * | 1987-03-27 | 1988-10-06 | ジャパン・フィールド株式会社 | 洗浄装置 |