JPH06104115A - Magnetic recording medium and its production - Google Patents

Abstract

PURPOSE:To provide a magnetic recording medium which allows high density recording with excellent durability at low cost by constituting an Fe-P-O magnetic film of a specific composition. CONSTITUTION:On a substrate 1, an undercoat layer 2 for improving the adhesion of a magnetic layer 3 is provided and a metal thin film magnetic layer 3 is accumulated on the layer 2 by ion assist diagonal deposition device, for example, by evaporating Fe which has a purity of 99.95% or more in 10<-4>-10<-6>Torr vacuum atmosphere. Since a phosphorus ion and an oxygen ion are applied on the deposited Fe film, the magnetic layer is permitted to be composed of Fe-P-O and is controlled to have 70-90 atom % Fe, 5-35 atom %, P and 5-10 atom % O. Therefore, reasonable cost is allowed without environmental contamination which occurs when Co and Cr are used and a magnetic recording medium which allows excellent anticorrosion and high density recording is provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium and its manufacturing method.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. It is well known that a metal thin film type that is not used has been proposed.

That is, there has been proposed a magnetic recording medium having a magnetic layer formed by a wet plating means such as electroless plating, or a dry plating means such as vacuum deposition, sputtering or ion plating. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording. By the way, as a magnetic material forming a magnetic layer in a metal thin film type magnetic recording medium of this type, a magnetic metal such as a Co—Cr alloy or a Co—Ni alloy is used. However, since Co is a rare substance, there are problems of cost and environmental pollution.

On the other hand, in view of the fact that Fe does not have the above-mentioned problems, Fe has begun to attract attention as a magnetic material for a metal thin film type magnetic recording medium. That is, although Fe and Ni can be considered as the non-Co-based metallic magnetic material, it is said that Fe is preferable in view of the magnitude of saturation magnetization. By the way, since Fe is more likely to rust than Co, it is necessary to be chemically stable. From such a point of view, it is proposed that the magnetic film is made of Fe _x N (Japanese Patent Laid-Open Nos. 60-236113 and 63-2372).
No. 19) or a Fe—C—N film is proposed (Japanese Laid-Open Patent Publication No. 2-89213), but none of them is sufficient and further improvement is required. I'm waiting.

[0005]

DISCLOSURE OF THE INVENTION It is an object of the present invention that the cost is low, the problem of environmental pollution such as when using Co or Cr is not taken into consideration, and high-density recording which is rich in durability is possible. A magnetic recording medium is provided. The object of the present invention is 70 atomic% ≦ Fe ≦ 90 atomic%, 5 atomic% ≦ P
The present invention is achieved by a magnetic recording medium characterized by comprising a Fe—P—O based magnetic film having a composition ratio of ≦ 25 at%, 5 at% ≦ O ≦ 10 at%.

A method for producing a magnetic recording medium by forming a magnetic film on a non-magnetic support by the ion assisted oblique vapor deposition method, wherein the evaporation source material has a purity of 99.95%.
The above vapor deposition process using Fe, the collision process in which phosphorus ions collide with the vapor deposition Fe film, and the oxygen ion vapor deposition F
and a collision step of colliding with the e film, the magnetic recording medium manufacturing method.

A method for producing a magnetic recording medium by forming a magnetic film on a non-magnetic support by the ion-assisted oblique vapor deposition method, wherein the evaporation source material has a purity of 99.95%.
The above vapor deposition process using Fe, the collision process in which phosphorus ions collide with the vapor deposition Fe film, and the oxygen gas vapor deposition Fe
And a collision step of causing the film to collide with the magnetic recording medium.

The present invention will be described in more detail below. FIG. 1 shows a schematic sectional view of a magnetic recording medium according to the present invention. In the figure, 1 is a non-magnetic substrate, and this substrate 1 is made of polyester such as polyethylene terephthalate, polyamide, polyimide, polysulfone, polycarbonate,
An olefin resin such as polypropylene, a cellulose resin, a polymer material such as a vinyl chloride resin, an inorganic material such as glass and ceramics, and a metal material such as an aluminum alloy are used.

An undercoat layer 2 for improving the adhesion of the magnetic layer is provided on the surface of the substrate 1. That is, in order to improve the adhesion of the magnetic layer formed by dry plating by appropriately roughening the surface roughness and further improve the runnability by making the surface roughness of the magnetic recording medium surface moderate, for example, The undercoat layer 2 is formed by providing a coating film containing particles such as SiO ₂ and having a thickness of 0.01 to 0.5 μm.

A metal thin film type magnetic layer 3 is provided on the undercoat layer 2 by an ion assisted oblique vapor deposition apparatus. For example, Fe having a purity of 99.95% or more is evaporated by resistance heating, high frequency heating, electron beam heating or the like in a vacuum atmosphere of about 10 ⁻⁴ to 10 ⁻⁶ Torr, and the substrate 1
The magnetic layer 3 is formed to a thickness of 0.04 to 1 μm by depositing (evaporating) on the surface of the undercoat layer 2.

In the present invention, since the vapor deposition Fe film is irradiated with phosphorus ions and oxygen ions (or oxygen gas) when the magnetic layer 3 is formed, the magnetic layer 3 is made of the Fe-PO system. And, especially, the Fe component is 70 atomic%
It is controlled so that the composition ratio is 90 atom%, the P component is 5 atom% to 25 atom%, and the O component is 5 atom% to 10 atom%.

By the way, the ion assisted oblique vapor deposition apparatus has a structure as shown in FIG. In FIG. 2, 11 is a guide member, 12 is a PET film 10 supply side roll, 13 is a PET film 10 winding side roll, 14 is a shielding plate, 1
5 is a crucible, 16 is Fe with a purity of 99.95% or more, 1
7 is an electron gun with an output of 30 kW, 18 is a vacuum vessel,
Reference numeral 19 denotes an ion gun. When a P-containing gas such as PH ₃ is supplied to the ion gun 19 and oxygen gas is supplied to a second ion gun (not shown), phosphorus ion and oxygen are supplied from each. Ions and are released, these ions are PET
Fe collides with the Fe film deposited on the film 10, and Fe becomes Fe.
-Convert to P-O type.

It should be noted that, instead of irradiating the deposited Fe film with oxygen ions, oxygen gas is supplied to the deposited Fe film so that F
An e-P-O-based magnetic film can also be formed. In such a case, instead of the second ion gun, an apparatus in which the nozzle port of the oxygen gas supply pipe is arranged in the vicinity of the evaporated Fe film is used. You can use it. Here, the magnetic film has an Fe—P—O-based composition, in particular, the Fe component is 70 atom% to 90 atom%, the P component is 5 atom% to 25 atom%, and the O component is 5 atom% to 10 atom%. When the Fe-PO-based metal film composed of the composition ratio is used, the coercive force Hc is 1100 Oe or more, the saturation magnetic flux density Bs is 4000 G or more, and the corrosion resistance is excellent. Has a high hardness and does not require a special protective film for the magnetic layer.
It becomes a magnetic recording medium capable of high density recording in place of a magnetic metal such as an alloy or a Co-Ni alloy.

An Fe-P-O-based metal film having a composition ratio of 70 atomic% to 90 atomic% Fe component, 5 atomic% to 25 atomic% P component and 5 atomic% to 10 atomic% O component is formed. In order to do so, basically, Fe with a purity of 99.95% or more is used.
Can be achieved by using as an evaporation source substance, and by causing phosphorus ions or oxygen ions (or oxygen gas) to collide with the evaporated Fe film, at the same time when evaporated Fe is deposited on the film, ionized phosphorus ions or oxygen ions (active oxygen ) Is preferably made to collide with the attached Fe. It is also preferable to heat the guide member 11 in FIG. 2 as high as possible, for example, to 50 to 200 ° C., at a temperature at which the film 10 does not undergo thermal deformation.

Reference numeral 4 is a lubricant layer provided on the magnetic layer 3. That is, by applying a coating material containing a lubricant by a predetermined means, about 5 to 50Å, preferably about 1
A lubricant layer 4 having a thickness of 0 to 30Å is provided. 5
Is a back coat layer provided on the other surface of the substrate 1 and containing carbon black or the like.

A specific embodiment will be described below.

[0017]

【Example】

[Examples 1 to 5] A PET film 10 having a thickness of 10 µm was mounted on an ion-assisted oblique vapor deposition apparatus as shown in Fig. 2, and the PET film 10 was run at a running speed of 2 m / min.

The crucible 15 made of magnesium oxide
Fe16 with a purity of 99.95% or more is added to
Operate the 0 kW electron gun 17 to evaporate Fe, PE
Fe particles are vapor-deposited on the T film 10, and PH ₃ gas is used as a phosphorus ion source to output 400 W with an ion gun 19
(The supply rate is 2 cm ³ / min), and oxygen gas as an oxygen ion source is supplied to another ion gun with an output of 400 W (the supply rate is 3 cm ³ / min) and irradiated toward the PET film 10. .

Then, a magnetic film having a thickness of 1000 Å was formed by ion-assisted oblique vapor deposition to prepare a magnetic tape.
Further, the same operation was carried out by changing the supply rates of PH ₃ gas and oxygen gas to prepare a magnetic tape having a magnetic film thickness of 1000Å. [Comparative Examples 1 to 4] In the above Examples, the purity was 99.
The same procedure was performed using 9% Fe.

[Characteristics] The magnetic characteristics and corrosion resistance of the magnetic recording media obtained in each of the above examples were investigated, and the results are shown in Table 1 below. Table 1 Composition (atomic%) Coercive force Saturation magnetic flux density ΔBs Fe P O (Oe) (G) (%) Example 1 80 10 10 1200 1200 5200 3 Example 2 75 15 10 1100 4500 2 Example 3 90 5 5 1150 6500 7 Example 4 70 25 5 1100 4800 3 Example 5 70 20 10 1100 4600 2 Comparative Example 1 90 10 10 0 790 5600 14 Comparative Example 2 90 0 10 1000 1000 5400 14 Comparative Example 3 65 25 10 10 900 3600 12 Comparative Example 4 95 0 5 920 7200 19 ΔBs: Immersed in a 5% NaCl aqueous solution for 1 week, the change rate of the saturation magnetic flux density is determined, and the corrosion resistance is determined by this.

[0021]

[Effect] Since inexpensive Fe is used, it is preferable in terms of cost, and there is no need to consider the problem of environmental pollution such as when using Co or Cr, and high density recording with rich corrosion resistance is possible. It is possible to obtain an excellent magnetic recording medium.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view of a magnetic recording medium.

FIG. 2 is a schematic diagram of a magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Non-magnetic Substrate 2 Undercoat Layer 3 Magnetic Layer 10 PET Film 14 Shielding Plate 15 Crucible 16 Fe 17 Electron Gun with Purity 99.95% or More 19 Ion Gun

Claims (3)

[Claims] 1. A Fe—P—O magnetic film having a composition ratio of 70 atomic% ≦ Fe ≦ 90 atomic%, 5 atomic% ≦ P ≦ 25 atomic%, 5 atomic% ≦ O ≦ 10 atomic%. A magnetic recording medium characterized by the following: 2. A method for producing a magnetic recording medium by forming a magnetic film on a non-magnetic support by an ion assisted oblique vapor deposition method, wherein Fe having a purity of 99.95% or more is used as an evaporation source substance. The vapor deposition step, a collision step of causing phosphorus ions to collide with the vapor deposited Fe film, and an oxygen ion vapor deposited Fe film.
And a collision step of colliding with a film. 3. A method for producing a magnetic recording medium by forming a magnetic film on a non-magnetic support by an ion-assisted oblique vapor deposition method, wherein Fe having a purity of 99.95% or more is used as an evaporation source substance. A method of manufacturing a magnetic recording medium, comprising: the vapor deposition step, the collision step of causing phosphorus ions to collide with the vapor deposition Fe film, and the collision step of causing oxygen gas to collide with the vapor deposition Fe film.