JPH06103902A - Plasma display panel and its manufacture - Google Patents

Plasma display panel and its manufacture

Info

Publication number
JPH06103902A
JPH06103902A JP25249192A JP25249192A JPH06103902A JP H06103902 A JPH06103902 A JP H06103902A JP 25249192 A JP25249192 A JP 25249192A JP 25249192 A JP25249192 A JP 25249192A JP H06103902 A JPH06103902 A JP H06103902A
Authority
JP
Japan
Prior art keywords
electrode
conductive
display panel
plasma display
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25249192A
Other languages
Japanese (ja)
Other versions
JP3324153B2 (en
Inventor
Shinya Fujiwara
伸也 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP25249192A priority Critical patent/JP3324153B2/en
Publication of JPH06103902A publication Critical patent/JPH06103902A/en
Application granted granted Critical
Publication of JP3324153B2 publication Critical patent/JP3324153B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To obtain an AC type plasma display panel(PDP) which can be connected with an external drive circuit easily while maintaining a low resistance and a high precision of a maintenance electrode and a scanning electrode. CONSTITUTION:A maintenance electrode and a scanning electrode formed on a back plate 1 are made in a laminate structure of the low resistance metal membranous electrode or electrodes 4 and the conductive intermediate electrode or electrodes 3, and as the connecting terminal or terminals of the frit seals and the external circuits, a printed and baked type thick film electrodes 2 are used. Since the metal film electrode 4 is not contacted directly to the frit member in such a structure, a poor sealing to generate a leakage and the like in not generated, and furthermore, a flexible printed circuit(FPC) application process or a COG process having a high reliability in the connection with an external driving circuit can be applied.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、放電,発光を利用した
プラズマディスプレイパネル(以下PDPという)に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel (hereinafter referred to as PDP) using discharge and light emission.

【0002】[0002]

【従来の技術】図3は従来のPDPの一構成例を示して
いる。図3において、1は背面板、4は金属薄膜電極
(維持電極および走査電極)、5はフリット封着部であ
る。金属薄膜電極4(維持電極および走査電極)は表示
部の高精細化と電気抵抗を下げるために通常AlやCr
CuCr3層構造に代表される低抵抗薄膜金属材料を使
用しており、外部駆動回路との接続部もこの電極をその
まま延長し外部電極取り出し部としている。
2. Description of the Related Art FIG. 3 shows an example of the configuration of a conventional PDP. In FIG. 3, 1 is a back plate, 4 is a metal thin film electrode (sustain electrode and scan electrode), and 5 is a frit sealing part. The metal thin film electrode 4 (sustain electrode and scan electrode) is usually made of Al or Cr in order to improve the definition of the display portion and reduce the electric resistance.
A low-resistance thin film metal material typified by a CuCr three-layer structure is used, and a connection portion with an external drive circuit is also an extension of this electrode to serve as an external electrode extraction portion.

【0003】[0003]

【発明が解決しようとする課題】しかしながら上記の従
来の構成では、フリットガラス等で封着された部分に直
接金属薄膜電極が接触する構造となり、封着工程より以
前に金属電極が酸化されたりまた封着工程時に金属電極
が変質した場合、完全にシーリングされないという問題
があった。
However, in the above-mentioned conventional structure, the metal thin film electrode is in direct contact with the portion sealed with the frit glass or the like, and the metal electrode is oxidized before the sealing step. There is a problem that the metal electrode is not completely sealed when the metal electrode is changed in quality during the sealing process.

【0004】また、この金属電極は抵抗加熱蒸着法、エ
レクトロンビーム蒸着法またはスパッタリング法で形成
され、膜厚が数μm程度という薄膜になっている。この
ため外部駆動回路との接続は一般に用いられているフレ
キシブル・プリント回路(以下FPCという)の熱圧着
工法は剥離等の問題があり強度不足で使用が困難であ
り、クリップ等を用いた接続方法を取っていた。このク
リップによる接続は信頼性も悪く、製造コストが高くな
り、また歩留まりを低下させる原因になっていた。
The metal electrode is formed by a resistance heating vapor deposition method, an electron beam vapor deposition method or a sputtering method, and is a thin film having a thickness of about several μm. For this reason, the connection with the external drive circuit is difficult to use due to lack of strength in the thermocompression bonding method of the commonly used flexible printed circuit (hereinafter referred to as FPC), which is difficult to use. Was taking. The connection by the clip is unreliable, the manufacturing cost is high, and the yield is reduced.

【0005】また、最近用いられている駆動回路部品を
PDPガラス面に直接接続するチップオンガラス工法
(以下COG工法という)もバンプやワイヤーボンディ
ングにより回路部品を接続するため上記従来の金属電極
では使用できないという問題があった。
The chip-on-glass method (hereinafter referred to as the COG method) for directly connecting recently used drive circuit parts to the PDP glass surface is also used in the above conventional metal electrodes because the circuit parts are connected by bumps or wire bonding. There was a problem that I could not.

【0006】外部駆動回路との熱圧着・COG工法によ
る接続は印刷焼成タイプの厚膜電極を用いればよく、こ
の部分のみ印刷焼成電極を用いれば解決するが、上記金
属薄膜は上記印刷焼成タイプの厚膜電極と直接接続した
場合は、その焼成工程で酸化等により接続界面の金属表
面が変質し接触不良が発生する問題点があった。
The connection with the external drive circuit by the thermocompression bonding / COG method may be achieved by using a printing and firing type thick film electrode. This problem can be solved by using only the printing and firing electrode, but the metal thin film is of the printing and firing type. When the thick film electrode is directly connected, there is a problem that the metal surface at the connection interface is deteriorated due to oxidation or the like in the firing process and contact failure occurs.

【0007】本発明は上記課題を解決するもので、維持
電極および走査電極の低抵抗化,高精細化を維持したま
ま、高信頼の外部駆動回路との接続を可能にしたプラズ
マディスプレイパネルおよびその製造方法を提供するこ
とを目的とする。
The present invention has been made to solve the above-mentioned problems, and a plasma display panel and a plasma display panel which can be connected to a highly reliable external drive circuit while maintaining a low resistance and a high definition of a sustain electrode and a scan electrode. It is intended to provide a manufacturing method.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に本発明は、背面板上の所定部にパターン形成された酸
化物導電体からなる導電性仲介電極と、その導電性仲介
電極の一端を含む領域にパターン形成された金属薄膜電
極からなる維持電極および走査電極と、上記導電性仲介
電極の他端を含む領域にパターン形成された印刷焼成厚
膜電極とを有する構成よりなる。
In order to achieve the above object, the present invention provides a conductive intermediary electrode made of an oxide conductor patterned in a predetermined portion on a back plate, and one end of the conductive intermediary electrode. And a sustain electrode and a scan electrode, which are metal thin-film electrodes patterned in a region including, and a print-baked thick film electrode patterned in a region including the other end of the conductive mediating electrode.

【0009】[0009]

【作用】この構成によってフリット部には直接金属薄膜
が接触することがなくリーク等のシーリング不良がなく
なり、金属薄膜電極と印刷焼成電極が直接接触しないた
め接触不良もなくなる。外部駆動回路との接続部も印刷
焼成電極になるためFPCやCOG工法で接続すること
が可能になり、信頼性・歩留まりが高く製造コストを下
げることが可能となる。
With this configuration, the metal thin film does not come into direct contact with the frit, and sealing defects such as leaks are eliminated. Since the metal thin film electrode and the print firing electrode do not directly contact with each other, the contact defect is eliminated. Since the connection portion with the external drive circuit also serves as the printed firing electrode, it can be connected by the FPC or COG method, and the reliability and yield are high and the manufacturing cost can be reduced.

【0010】[0010]

【実施例】以下図1を用いてこの発明の一実施例を説明
する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIG.

【0011】図1(a)は本発明の一実施例であるディ
スプレイパネル(PDP)の上面図で図1(b)はその
断面図である。
FIG. 1A is a top view of a display panel (PDP) which is an embodiment of the present invention, and FIG. 1B is a sectional view thereof.

【0012】図1において、1は背面板、2は印刷焼成
厚膜電極、3は導電性仲介電極、4は金属薄膜電極(維
持電極および走査電極)ですべて背面板1上に形成され
ており、フリット塗布部5で前面板と密着,封着され
る。
In FIG. 1, 1 is a back plate, 2 is a printed and baked thick film electrode, 3 is a conductive mediating electrode, and 4 is a metal thin film electrode (sustaining electrode and scanning electrode), all of which are formed on the back plate 1. The frit application section 5 is in close contact with and sealed to the front plate.

【0013】背面板1の上に例えばスパッタリング法に
よりITO,SnO2等の酸化物導電体からなる導電膜
を全面に形成する。これをフォトエッチングプロセス等
を用いて所定の仲介形状にし導電性仲介電極3を形成す
る。次に抵抗加熱蒸着,電子ビーム蒸着またはスパッタ
リング法により低抵抗金属を背面板1の全面に形成す
る。これを同じくフォトエッチングプロセス等を用いて
金属薄膜電極(維持および走査電極)4を形成する。金
属薄膜電極4の端部の下には先に形成された導電性仲介
電極3があり、金属薄膜電極4(維持および走査電極)
と接続される。
A conductive film made of an oxide conductive material such as ITO or SnO 2 is formed on the entire surface of the back plate 1 by, for example, a sputtering method. This is formed into a predetermined intermediate shape by using a photo etching process or the like, and the conductive intermediate electrode 3 is formed. Next, a low resistance metal is formed on the entire surface of the back plate 1 by resistance heating evaporation, electron beam evaporation or sputtering. The metal thin film electrode (sustain and scan electrode) 4 is formed by using the same photoetching process. Below the end of the metal thin film electrode 4 is the conductive mediating electrode 3 previously formed, and the metal thin film electrode 4 (maintaining and scanning electrode)
Connected with.

【0014】次に金属印刷ペースト(例えば銀)を印刷
し、炉中で焼成し印刷焼成厚膜電極2を形成する。
Next, a metal printing paste (for example, silver) is printed and fired in a furnace to form a print fired thick film electrode 2.

【0015】なお以上の実施例において導電性仲介電極
3は図1(b)に示すように印刷焼成厚膜電極と金属薄
膜電極4の間のみを仲介する構造としたが、図2に示す
ように金属薄膜電極4の下全域に配置してもよい。
In the above embodiment, the conductive mediating electrode 3 has a structure that mediates only between the printed and baked thick film electrode and the metal thin film electrode 4 as shown in FIG. 1B, but as shown in FIG. In addition, the metal thin film electrode 4 may be arranged over the entire area below.

【0016】[0016]

【発明の効果】以上の実施例から明らかなように本発明
は、背面板上の所定部にパターン形成された酸化物導電
体からなる導電性仲介電極と、その導電性仲介電極の一
端を含む領域にパターン形成された金属薄膜電極からな
る維持電極および走査電極と、上記導電性仲介電極の他
端を含む領域にパターン形成された印刷焼成厚膜電極と
を少なくとも有する構成によるので、内部維持および走
査電極の低抵抗化,高精細化を維持したまま外部駆動回
路との接続に高信頼のFPC熱圧着やCOG工法を用い
ることができるプラズマディスプレイパネルおよびその
製造方法を提供できる。
As is apparent from the above embodiments, the present invention includes a conductive mediation electrode made of an oxide conductor patterned in a predetermined portion on the back plate and one end of the conductive mediation electrode. Due to the configuration having at least the sustain electrode and the scan electrode composed of the metal thin film electrode patterned in the region, and the printed and baked thick film electrode patterned in the region including the other end of the conductive mediating electrode, the internal sustaining and It is possible to provide a plasma display panel and a manufacturing method thereof in which highly reliable FPC thermocompression bonding or COG method can be used for connection with an external driving circuit while maintaining low resistance and high definition of scan electrodes.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)本発明の一実施例によるプラズマディス
プレイパネルの平面図 (b)(a)のプラズマディスプレイパネルの断面図
1A is a plan view of a plasma display panel according to an embodiment of the present invention; FIG. 1B is a sectional view of the plasma display panel of FIG. 1A.

【図2】本発明の他の実施例のプラズマディスプレイパ
ネルの断面図
FIG. 2 is a sectional view of a plasma display panel according to another embodiment of the present invention.

【図3】従来のプラズマディスプレイパネルの平面図FIG. 3 is a plan view of a conventional plasma display panel.

【符号の説明】[Explanation of symbols]

1 背面板 2 印刷焼成厚膜電極 3 導電性仲介電極 4 金属薄膜電極 5 フリット塗布部 1 Back Plate 2 Printed and Thick Film Electrode 3 Conductive Mediating Electrode 4 Metal Thin Film Electrode 5 Frit Coating Section

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 背面板と、その背面板上の所定部にパタ
ーン形成された酸化物導電体からなる導電性仲介電極
と、その導電性仲介電極の一端を含む領域にパターン形
成された金属薄膜電極からなる維持電極および走査電極
と、前記導電性仲介電極の他端を含む領域にパターン形
成された印刷焼成厚膜電極とを少なくとも有することを
特徴とするプラズマディスプレイパネル。
1. A back plate, a conductive mediating electrode made of an oxide conductor patterned in a predetermined portion on the back plate, and a metal thin film patterned in a region including one end of the conductive mediating electrode. A plasma display panel comprising at least a sustain electrode and a scan electrode, which are electrodes, and a printed and baked thick film electrode patterned in a region including the other end of the conductive mediation electrode.
【請求項2】 導電性仲介電極の一端が、金属薄膜電極
の下全域にのびて形成されていることを特徴とする請求
項1記載のプラズマディスプレイパネル。
2. The plasma display panel according to claim 1, wherein one end of the conductive mediation electrode is formed so as to extend over the entire area below the metal thin film electrode.
【請求項3】 酸化物導電体がITOまたはSnO2
あることを特徴とする請求項1または2記載のプラズマ
ディスプレイパネル。
3. The plasma display panel according to claim 1, wherein the oxide conductor is ITO or SnO 2 .
【請求項4】 背面板上の所定部に酸化物導電体からな
る導電性仲介電極をパターン形成する工程と、その導電
性仲介電極上の少なくとも一端を含む領域に金属薄膜電
極からなる維持電極および走査電極をパターン形成する
工程と、前記導電性仲介電極上の他端を含む領域に厚膜
電極を印刷・焼成してパターン形成する工程とを少なく
とも有することを特徴とするプラズマディスプレイパネ
ルの製造方法。
4. A step of patterning a conductive intermediate electrode made of an oxide conductive material on a predetermined portion of the back plate, and a sustain electrode made of a metal thin film electrode in a region including at least one end on the conductive intermediate electrode. A method for manufacturing a plasma display panel, which comprises at least a step of patterning a scanning electrode and a step of printing and baking a thick film electrode in a region including the other end on the conductive intermediary electrode to form a pattern. .
JP25249192A 1992-09-22 1992-09-22 Plasma display panel and method of manufacturing the same Expired - Lifetime JP3324153B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25249192A JP3324153B2 (en) 1992-09-22 1992-09-22 Plasma display panel and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25249192A JP3324153B2 (en) 1992-09-22 1992-09-22 Plasma display panel and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH06103902A true JPH06103902A (en) 1994-04-15
JP3324153B2 JP3324153B2 (en) 2002-09-17

Family

ID=17238114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25249192A Expired - Lifetime JP3324153B2 (en) 1992-09-22 1992-09-22 Plasma display panel and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JP3324153B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050022071A (en) * 2003-08-26 2005-03-07 삼성에스디아이 주식회사 Plasma display panel
KR100751372B1 (en) * 2006-03-13 2007-08-22 삼성에스디아이 주식회사 Display panel
KR100828875B1 (en) * 2002-12-10 2008-05-09 오리온피디피주식회사 Flexible Printed Circuit for AC-PDP
US7573196B2 (en) 2004-05-25 2009-08-11 Samsung Sdi Co., Ltd. Plasma display panel having electrodes with expansion portions

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100828875B1 (en) * 2002-12-10 2008-05-09 오리온피디피주식회사 Flexible Printed Circuit for AC-PDP
KR20050022071A (en) * 2003-08-26 2005-03-07 삼성에스디아이 주식회사 Plasma display panel
US7573196B2 (en) 2004-05-25 2009-08-11 Samsung Sdi Co., Ltd. Plasma display panel having electrodes with expansion portions
KR100918416B1 (en) * 2004-05-25 2009-09-24 삼성에스디아이 주식회사 Plasma display panel
KR100751372B1 (en) * 2006-03-13 2007-08-22 삼성에스디아이 주식회사 Display panel

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JP3324153B2 (en) 2002-09-17

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