JPH06103543A - Thin-film magnetic head - Google Patents
Thin-film magnetic headInfo
- Publication number
- JPH06103543A JPH06103543A JP24749892A JP24749892A JPH06103543A JP H06103543 A JPH06103543 A JP H06103543A JP 24749892 A JP24749892 A JP 24749892A JP 24749892 A JP24749892 A JP 24749892A JP H06103543 A JPH06103543 A JP H06103543A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- thin film
- head element
- insulating layer
- flexible support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、コンピュータの外部記
憶装置として使用される磁気ディスク装置や磁気フレキ
シブル・ディスク（フロッピィ）装置などの磁気記録再
生装置において、電磁変換を行う薄膜磁気ヘッドに係
り、とくにその接地構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head for electromagnetic conversion in a magnetic recording / reproducing device such as a magnetic disk device or a magnetic flexible disk (floppy) device used as an external storage device of a computer. Especially, the grounding structure.
【０００２】この薄膜磁気ヘッドは、垂直記録再生方式
の記録媒体接触型で主磁極、コイル、絶縁層などで薄膜
形成した磁気ヘッド素子と、この磁気ヘッド素子を先端
に媒体記録面に対し垂直となるように取り付け微小な圧
力で接触させる可撓性支持体とから構成されており、ノ
イズ防止及び静電破壊の観点から磁気ヘッド素子に静電
気が帯電しないように接地することが要求されている。This thin film magnetic head is a recording medium contact type of a perpendicular recording / reproducing system, a magnetic head element formed by a thin film of a main pole, a coil, an insulating layer and the like, and a tip of the magnetic head element perpendicular to the medium recording surface. Therefore, the magnetic head element is required to be grounded so as not to be charged with static electricity from the viewpoint of noise prevention and electrostatic breakdown.
【０００３】[0003]
【従来の技術】図３は従来の斜視図である。図示するよ
うに、従来の薄膜磁気ヘッドは磁気ヘッド素子11と、可
撓性支持体12とで構成されている。2. Description of the Related Art FIG. 3 is a conventional perspective view. As shown in the figure, the conventional thin film magnetic head comprises a magnetic head element 11 and a flexible support 12.
【０００４】一方の磁気ヘッド素子11は、 AI2O3・TiC
などの薄膜形成基板上に薄膜形成技術によりNi-Fe など
の主磁極11a と主磁極11a に巻回した薄膜コイル11b と
AI2O 3 による絶縁層11c と Ni-Feなどの図示しないリタ
ーンヨーク及びバックヨークと表面（薄膜形成面）に露
出させた一対の信号接続端子11d とで構成し、野球のホ
ームベース形の形状をしている。One of the magnetic head elements 11 is an AI2O3・ TiC
Ni-Fe etc. by thin film forming technology on the substrate
Main magnetic pole 11a and thin film coil 11b wound around the main magnetic pole 11a
AI2O 3 Insulation layer 11c and Ni-Fe
Dew on the surface of the yoke and back yoke (the surface on which the thin film is formed)
It is composed of a pair of signal connection terminals 11d that have been taken out.
It has a boom-base shape.
【０００５】他方の可撓性支持体12は、 AI2O3でなる細
長い薄板状の絶縁層12a の上層（あるいは中間層）に配
線した２本の信号用リード線12b と、この信号用リード
線12b に接続し絶縁層12a の表面に露出させた一対の接
続パッド12b-1(半田めっきや金などの蒸着などによる）
とで構成されている。The other flexible support 12 is composed of two signal leads 12b wired on the upper layer (or intermediate layer) of an elongated thin plate insulating layer 12a made of AI 2 O 3 and the signal leads. A pair of connection pads 12b-1 connected to the wire 12b and exposed on the surface of the insulating layer 12a (by solder plating, vapor deposition of gold, etc.)
It consists of and.
【０００６】そして、磁気ヘッド素子11は、その媒体対
向面の反対面（固着面）を可撓性支持体12の先端取付面
に紫外線硬化型接着剤13で固着され、可撓性支持体12の
接続パッド12b-1 と磁気ヘッド素子11の信号接続端子11
d とはボンディングワイヤ14で信号接続されている。The magnetic head element 11 has its opposite surface (fixing surface) opposite to the medium facing surface fixed to the tip mounting surface of the flexible support 12 with an ultraviolet curable adhesive 13 so that the flexible support 12 Connection pad 12b-1 and the signal connection terminal 11 of the magnetic head element 11
A signal is connected to d by a bonding wire 14.
【０００７】このように組み立てた薄膜磁気ヘッド（可
撓性支持体）の基端取付部は、図示しない磁気ディスク
装置に内設されたポジショナのヘッド取付アーム15に取
り付けられ、接続パッド12b-1 はリード線16で配線接続
されている。The base end mounting portion of the thin film magnetic head (flexible support) assembled in this manner is mounted on the head mounting arm 15 of the positioner provided inside the magnetic disk device (not shown), and the connection pad 12b-1. Are connected by a lead wire 16.
【０００８】[0008]
【発明が解決しようとする課題】しかしながら、このよ
うな上記取付構造によれば、磁気ヘッド素子が接地され
ず接地グランドから浮いているため、磁気ヘッド素子に
電荷が蓄積し易く、記録媒体に接触した場合、磁気ヘッ
ド素子に蓄積していた電荷が瞬間的に放電してノイズと
して検出されたり、磁極部分が静電破壊されるといった
問題があった。However, according to the above-mentioned mounting structure, since the magnetic head element is not grounded and floats from the ground ground, electric charges are easily accumulated in the magnetic head element and contact with the recording medium is made. In that case, there is a problem that the electric charge accumulated in the magnetic head element is instantaneously discharged and detected as noise, or the magnetic pole portion is electrostatically destroyed.
【０００９】上記問題点に鑑み、本発明は磁気ヘッド素
子を接地接続し静電気によるノイズや磁極部分の静電破
壊を防止できる薄膜磁気ヘッドを提供することを目的と
する。In view of the above problems, it is an object of the present invention to provide a thin film magnetic head capable of preventing noise due to static electricity and electrostatic destruction of the magnetic pole portion by connecting the magnetic head element to the ground.
【００１０】[0010]
【課題を解決するための手段】上記目的を達成するため
に、本発明の薄膜磁気ヘッドにおいては、薄膜磁気ヘッ
ドは、導電性材料からなる薄膜形成基板上に主磁極、薄
膜コイル、絶縁層、バックヨーク、信号接続端子を薄膜
形成し前記薄膜形成基板をリターンヨークとする磁気ヘ
ッド素子と、該磁気ヘッド素子の信号接続端子に接続す
る接続パッドと信号用リード線とを基端取付部から先端
取付面まで延びるベース体を兼ねる導電体に絶縁層を介
し備える可撓性支持体とからなり、該磁気ヘッド素子の
リターンヨークを前記可撓性支持体の導電体に接地接続
するとともに、前記信号接続端子と接続パッドとを信号
接続するように構成する。In order to achieve the above object, in the thin film magnetic head of the present invention, the thin film magnetic head comprises a main pole, a thin film coil, an insulating layer, and a thin film forming substrate made of a conductive material. A magnetic head element having a back yoke and a signal connection terminal formed in a thin film and the thin film forming substrate serving as a return yoke, a connection pad connected to a signal connection terminal of the magnetic head element, and a signal lead wire from the base end mounting portion to the tip. A flexible support provided with an insulating layer on a conductor that also serves as a base extending to the mounting surface, the return yoke of the magnetic head element is grounded to the conductor of the flexible support, and the signal The connection terminal and the connection pad are configured to make a signal connection.
【００１１】[0011]
【作用】このように構成することにより、磁気ヘッド素
子は可撓性支持体を通して接地できるため電荷の蓄積が
なく、したがって静電気によるノイズや磁極部分の静電
破壊を防止することができる。With this structure, since the magnetic head element can be grounded through the flexible support, there is no charge accumulation, and therefore noise due to static electricity and electrostatic destruction of the magnetic pole portion can be prevented.
【００１２】[0012]
【実施例】以下、図面に示した実施例に基づいて本発明
の要旨を詳細に説明する。図１に本発明による一実施例
の側断面図を示す。DESCRIPTION OF THE PREFERRED EMBODIMENTS The gist of the present invention will be described in detail below with reference to the embodiments shown in the drawings. FIG. 1 shows a side sectional view of an embodiment according to the present invention.
【００１３】薄膜磁気ヘッドは、従来同様に磁気ヘッド
素子１と可撓性支持体２とで構成する。磁気ヘッド素子
１は、導電性材料（軟磁性材料であるMnZnフェライト）
からなる薄膜形成基板1f上に主磁極1a、薄膜コイル1b、
絶縁層1c、バックヨーク1d、信号接続端子1eを薄膜形成
し、野球のホームベース形状に切り出し個片とする。薄
膜形成基板1fはそのままリターンヨークとなり、このリ
ターンヨーク1fの上端面は可撓性支持体２の先端取付面
との固着面に露出し、固着面の一部を形成する。The thin-film magnetic head comprises a magnetic head element 1 and a flexible support 2 as in the conventional case. The magnetic head element 1 is made of a conductive material (MnZn ferrite which is a soft magnetic material).
The main magnetic pole 1a, the thin film coil 1b, on the thin film forming substrate 1f consisting of
The insulating layer 1c, the back yoke 1d, and the signal connection terminal 1e are formed into a thin film and cut into individual pieces for a baseball home base. The thin film forming substrate 1f serves as a return yoke as it is, and the upper end surface of the return yoke 1f is exposed at the fixing surface of the flexible support 2 to which the tip mounting surface is attached, and forms a part of the fixing surface.
【００１４】可撓性支持体２は、ベース体を導電性の金
属材料であるステンレス薄板（厚さは約30μｍ）の導電
体2aとし、この導電体（ベース体）2aは基端取付部から
先端取付面まで長手方向に延び、上面に絶縁層2b（アル
ミナAl2O3 のスパッタ成膜、あるいはポリイミド、ポリ
エチレンのように絶縁できる膜材）を介し磁気ヘッド素
子１の信号接続端子1eに接続する接続パッド2c-1と信号
用リード線2cを備える。In the flexible support 2, the base body is a conductor 2a of a stainless steel thin plate (thickness is about 30 μm) which is a conductive metal material, and this conductor (base body) 2a is from the base end mounting portion. Connects to the signal connection terminal 1e of the magnetic head element 1 through the insulating layer 2b (alumina Al 2 O 3 film formed by sputtering or a film material that can be insulated like polyimide or polyethylene) extending in the longitudinal direction to the tip mounting surface. Connection pad 2c-1 and signal lead wire 2c.
【００１５】磁気ヘッド素子１は、従来同様に媒体対向
面の反対面、即ち固着面を可撓性支持体２の先端取付面
に固着するが、導電性接着剤３を用いてその固着面に露
出したリターンヨーク1fと可撓性支持体２の先端取付面
の導電体（ベース体）2aとを導通接続する。In the magnetic head element 1, the surface opposite to the medium facing surface, that is, the fixing surface is fixed to the tip mounting surface of the flexible support 2 as in the conventional case, but the conductive adhesive 3 is used to fix the fixing surface. The exposed return yoke 1f is electrically connected to the conductor (base body) 2a on the tip mounting surface of the flexible support 2.
【００１６】また、磁気ヘッド素子１の信号接続端子1e
と可撓性支持体２の接続パッド2c-1とはボンディングワ
イヤ４により信号接続する。可撓性支持体２の基端取付
部は従来同様に図示しない磁気ディスク装置に内設され
たポジショナのヘッド取付アーム５に接続する。ヘッド
取付アーム５は、接地レベルに構成されている。これに
より、磁気ヘッド素子１はリターンヨーク1f→導電体
（ベース体）2a→ヘッド取付アーム５と接地接続され
る。なお、可撓性支持体２の基端取付部の接続パッド2c
-1はリード線６で配線接続する。The signal connection terminal 1e of the magnetic head element 1
And the connection pad 2c-1 of the flexible support 2 are signal-connected by the bonding wire 4. The base end mounting portion of the flexible support 2 is connected to a head mounting arm 5 of a positioner provided in a magnetic disk device (not shown) as in the conventional case. The head mounting arm 5 is configured at the ground level. As a result, the magnetic head element 1 is grounded to the return yoke 1f → the conductor (base body) 2a → the head mounting arm 5. In addition, the connection pad 2c of the base end mounting portion of the flexible support 2
-1 is connected by a lead wire 6.
【００１７】このように構成することにより、リターン
ヨークが接地接続される構造となるため、磁気ヘッド素
子に電荷が蓄積されることを抑制し、静電気によるノイ
ズや磁極部分の静電破壊を防止することができる。With this structure, the return yoke is connected to the ground, so that the accumulation of electric charges in the magnetic head element is suppressed, and noise due to static electricity and electrostatic breakdown of the magnetic pole portion are prevented. be able to.
【００１８】なお、上記説明のリターンヨーク（薄膜形
成基板）は、MnZnフェライトとしたが、例えばパーマロ
イNiFeなどの導電性の軟磁性材料に替えても差し支えな
い。また、磁気ヘッド素子と可撓性支持体との接着は、
導電性接着剤の他に導電率、接合強度を補強する上で磁
気ヘッド素子背面も含めて低融点半田で接合し導通させ
てもよい。Although the return yoke (thin film forming substrate) described above is MnZn ferrite, it may be replaced with a conductive soft magnetic material such as permalloy NiFe. Further, the adhesion between the magnetic head element and the flexible support is
In addition to the conductive adhesive, in order to reinforce the conductivity and the bonding strength, the magnetic head element back surface and the back surface of the magnetic head element may be bonded with a low melting point solder so as to be conductive.
【００１９】図２に本発明による他の実施例の側断面図
を示す。図示するように、この実施例の磁気ヘッド素子
１は先の実施例と同様の構造であるが、他方の可撓性支
持体２はベース体にアルミナAl2O3 などの絶縁層2bを用
い、その下部（図示するように内部または下面）に接地
用導電体2dを設け、その両端、即ち可撓性支持体２の先
端取付部及び基端取付部に接地用導電体端子2d-1（下面
に露出させる）を設ける点が異なる。FIG. 2 shows a side sectional view of another embodiment according to the present invention. As shown in the figure, the magnetic head element 1 of this embodiment has the same structure as that of the previous embodiment, but the other flexible support body 2 uses an insulating layer 2b such as alumina Al 2 O 3 for the base body. , A grounding conductor 2d is provided at the lower portion (inside or underside as shown in the drawing), and grounding conductor terminals 2d-1 (at the front end mounting portion and the base end mounting portion of the flexible support 2). Exposed on the bottom surface) is different.
【００２０】即ち、真空薄膜プロセス（蒸着またはスパ
ッタ）により、絶縁層2bの上に非磁性金属材料の銅(Cu)
でなる接地用導電体2dを形成・埋設し、上部には信号用
リード線2c及び接続パッド2c-1（上面に露出させる）を
設ける。That is, a non-magnetic metal material such as copper (Cu) is formed on the insulating layer 2b by a vacuum thin film process (evaporation or sputtering).
The grounding conductor 2d is formed and buried, and the signal lead wire 2c and the connection pad 2c-1 (exposed on the upper surface) are provided on the upper part.
【００２１】そして、可撓性支持体２の先端取付部及び
基端取付部の接地用導電体端子2d-1に、予め、半田バン
プ（図示略）を露出形成しておく。磁気ヘッド素子１と
可撓性支持体２との固着（接合）は、位置決めした後、
半田バンプにレーザ光を照射して溶融接続する。これに
より、先の実施例と同様に磁気ヘッド素子１はリターン
ヨーク1f→接地用導電体2d→ヘッド取付アーム５と接地
接続される。なお、この実施例の場合も可撓性支持体２
の接続パッド2c-1はリード線６で配線接続する。Then, solder bumps (not shown) are formed in advance on the grounding conductor terminals 2d-1 at the tip mounting portion and the base mounting portion of the flexible support 2. After the magnetic head element 1 and the flexible support 2 are fixed (joined) to each other after positioning,
The solder bumps are irradiated with laser light to be melted and connected. As a result, the magnetic head element 1 is grounded to the return yoke 1f → grounding conductor 2d → head mounting arm 5 as in the previous embodiment. Incidentally, also in the case of this embodiment, the flexible support 2
The connection pad 2c-1 is connected by the lead wire 6.
【００２２】[0022]
【発明の効果】以上、詳述したように本発明によれば、
磁気ヘッド素子のリターンヨークが接地する構造になっ
ているため、電荷の蓄積を抑制し静電気によるノイズ及
び磁極部分の静電破壊を防止し、信頼性の向上を図るこ
とができるといった産業上極めて有用な効果を発揮す
る。As described above in detail, according to the present invention,
Since the return yoke of the magnetic head element is grounded, charge accumulation is suppressed, noise due to static electricity and electrostatic breakdown of the magnetic pole portion are prevented, and reliability is improved, which is extremely useful in industry. Exerts a great effect.
【図１】 本発明による一実施例の側断面図FIG. 1 is a side sectional view of an embodiment according to the present invention.
【図２】 本発明による他の実施例の側断面図FIG. 2 is a side sectional view of another embodiment according to the present invention.
【図３】 従来技術による斜視図FIG. 3 is a perspective view according to the related art.
１は磁気ヘッド素子 2aは導電体
（ベース体） 1aは主磁極 2bは絶縁層 1bは薄膜コイル 2cは信号用
リード線 1cは絶縁層 2c-1は接続
パッド 1dはバックヨーク 2dは接地用
導電体 1eは信号接続端子 2d-1は接地
用導電体端子 1fは薄膜形成基板（リターンヨーク） ３は導電性
接着剤 ２は可撓性支持体1 is a magnetic head element 2a is a conductor (base body) 1a is a main pole 2b is an insulating layer 1b is a thin film coil 2c is a signal lead wire 1c is an insulating layer 2c-1 is a connection pad 1d is a back yoke 2d is a grounding conductive Body 1e is a signal connection terminal 2d-1 is a grounding conductor terminal 1f is a thin film forming substrate (return yoke) 3 is a conductive adhesive 2 is a flexible support
Claims (3)
板(1f)上に主磁極(1a)、薄膜コイル(1b)、絶縁層(1c)、
バックヨーク(1d)、信号接続端子(1e)を薄膜形成し、前
記薄膜形成基板(1f)をリターンヨークとする磁気ヘッド
素子(1) と、該磁気ヘッド素子(1) の信号接続端子(1e)
に信号接続する接続パッド(2c-1)と信号用リード線(2c)
とを配設した可撓性支持体(2) の一体構成からなる薄膜
磁気ヘッドにおいて、 前記可撓性支持体(2) は導電体(2a)の上に絶縁層(2b)を
重ねた構成からなり、前記磁気ヘッド素子(1) のリター
ンヨーク(1f)を可撓性支持体(2) のベース体である接地
接続された導電体(2a)に導電性接着材(3) で固着し、か
つ可撓性支持体(2) の絶縁層(2b)の上部に前記接続パッ
ド(2c-1)と信号用リード線(2c)とを設け前記信号接続し
たことを特徴とする薄膜磁気ヘッド。1. A main magnetic pole (1a), a thin film coil (1b), an insulating layer (1c), on a thin film forming substrate (1f) made of a conductive soft magnetic material.
A magnetic head element (1) having a back yoke (1d) and a signal connection terminal (1e) formed in a thin film, and the thin film forming substrate (1f) as a return yoke, and a signal connection terminal (1e) of the magnetic head element (1). )
Connection pad (2c-1) and signal lead (2c) for signal connection to
A thin film magnetic head comprising a flexible support body (2) integrally formed with an insulating layer (2b) on a conductor (2a). The return yoke (1f) of the magnetic head element (1) is fixed to the grounded conductor (2a), which is the base of the flexible support (2), with a conductive adhesive (3). And a thin film magnetic head characterized in that the connection pad (2c-1) and the signal lead wire (2c) are provided on the insulating layer (2b) of the flexible support (2) for signal connection. .
層(2b)からなり、該絶縁層(2b)の下部に信号用リード線
(2c)と接地用導電体(2d)とを並行させて設けるととも
に、前記絶縁層(2b)の上面に該信号用リード線(2c)を導
出する接続パッド(2c-1)を設け前記信号接続するととも
に、絶縁層(2b)の下面に露出させた前記接地用導電体端
子(2d-1)をリターンヨーク(1f)に接地接続したことを特
徴とする薄膜磁気ヘッド。2. The base body of the flexible support (1) is made of an insulating layer (2b), and a signal lead wire is provided under the insulating layer (2b).
(2c) and the grounding conductor (2d) are provided in parallel, and a connection pad (2c-1) for leading out the signal lead wire (2c) is provided on the upper surface of the insulating layer (2b). A thin film magnetic head characterized in that the grounding conductor terminal (2d-1) exposed on the lower surface of the insulating layer (2b) is grounded to a return yoke (1f).
性金属材料でなることを特徴とする薄膜磁気ヘッド。3. A thin film magnetic head characterized in that the conductor (2a) according to any one of items 1 and 2 is made of a non-magnetic metal material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24749892A JPH06103543A (en) | 1992-09-17 | 1992-09-17 | Thin-film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24749892A JPH06103543A (en) | 1992-09-17 | 1992-09-17 | Thin-film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06103543A true JPH06103543A (en) | 1994-04-15 |
Family
ID=17164364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24749892A Withdrawn JPH06103543A (en) | 1992-09-17 | 1992-09-17 | Thin-film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06103543A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5727009A (en) * | 1994-07-29 | 1998-03-10 | Sanyo Electric Co., Ltd. | Semiconductor laser apparatus and optical pickup apparatus using the same |
-
1992
- 1992-09-17 JP JP24749892A patent/JPH06103543A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5727009A (en) * | 1994-07-29 | 1998-03-10 | Sanyo Electric Co., Ltd. | Semiconductor laser apparatus and optical pickup apparatus using the same |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19991130 |