JP3731731B2 - Manufacturing method of magnetic head device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a magnetic head device and a magnetic recording / reproducing apparatus.
[0002]
[Prior art]
In a floating magnetic disk drive, the magnetic head support structure is a head with a magnetic head attached to a gimbal. Gimbal assembly (hereinafter referred to as HGA), head with HGA attached to the arm. An arm assembly (Head Arm Assembly, hereinafter referred to as HAA), and a head in which a plurality of HAAs are stacked. There are three types of stack assemblies (Head Stack Assembly, hereinafter referred to as HSA).
[0003]
In order to obtain the above-mentioned HGA, HAA and HSA, conventionally, after attaching a magnetic head to the HGA portion, between the lead-out electrode of the magnetic head and the metal connecting piece of the flexible lead wire composed of tab tape or the like Were connected by a gold ball bondage or the like. Thereafter, in the state of HGA, HAA, and HSA, characteristics of the magnetic head, such as write characteristics and reproduction characteristics, are measured.
[0004]
However, in the case of conventional gold ball bonding, since the pressing force from the oblique direction is applied to the magnetic head with reference to the mounting surface of the head support and the magnetic head, the magnetic head is inclined with respect to the mounting surface. In addition, the static posture angles such as the pitch angle and the roll angle, and the load may change to an area where correction cannot be made.
[0005]
Since the oblique pressing force is also applied to the head support, there is a problem in that the head support is mechanically deformed or deformed, resulting in a change in static posture angle, a change in load, and the like. When mechanical distortion occurs in the head support, the magnetic head is affected by the influence, and the air bearing surface (ABS surface) may change into a crown shape. Such deformation of the ABS surface causes a head crash, damage to the magnetic disk, and magnetic recording destruction resulting therefrom.
[0006]
Of course, if the magnetic head device has the above-mentioned problems, it cannot be shipped as it is. In such a case, treating it as a defective product means eliminating the disposal and assembly costs of expensive HGAs, HAAs and HSAs with magnetic heads attached, resulting in a large loss.
[0007]
As another conventional technique, a technique has recently been proposed in which a take-out electrode of a magnetic head and a lead wire formed of a tab tape or the like are connected by solder. For example, Japanese Patent Laid-Open No. 7-320434 discloses a slider that falls into this category. suspension. An assembly manufacturing method is disclosed. In this prior art, each termination pad and each contact. A solder bump is formed on the pad, and the solder bump is flattened. Next, the termination pad is a contact. Attach the slider to the suspension so that it is properly aligned with the pad. Next, the solder bump is heated, and the termination pad and the bump of the contact pad are reflowed to be electrically connected.
[0008]
In this prior art, solder bumps must be formed on the termination pad and the contact pad. Therefore, in both the slider and the flexible lead wire, solder vapor deposition, solder plating or solder printing for forming the solder bump is performed. It is necessary to add a process, resulting in an increase in the number of processes and an increase in cost.
[0009]
Further, since the joining is performed only by solder, the joining strength of the slider to the suspension may become insufficient depending on the solder joining conditions.
[0010]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION An object of the present invention is to provide a magnetic head device and a magnetic recording / reproducing apparatus capable of avoiding fluctuations in the static attitude angle and load in the assembly process of the magnetic head device.
[0011]
Another object of the present invention is to provide a magnetic head device and a magnetic recording / reproducing apparatus capable of avoiding a change in slider shape in the assembly process of the magnetic head device.
[0012]
[Means for Solving the Problems]
In order to solve the above-described problems, the present invention discloses a magnetic head according to two aspects. The magnetic head device according to the first aspect includes a head support and a magnetic head.
[0013]
The head support has a head mounting portion and insulated wiring, and an end electrode of the wiring is exposed in the vicinity of the head mounting portion.
[0014]
The magnetic head includes a slider, an extraction electrode, and a metal connection piece. The extraction electrode is provided on a side end surface of the slider. The metal connection piece has a linear protrusion and is attached to the extraction electrode, and the linear protrusion protrudes from the end surface of the slider.
[0015]
In the magnetic head, the slider is fixed to the head mounting portion of the head support, and the linear protrusion of the metal connection piece is connected to an end electrode of the wiring of the head support by a conductive bonding material. Is done.
[0016]
Here, in the magnetic head device according to the present invention, the magnetic head includes a metal connection piece, and the metal connection piece has a linear protrusion and is attached to the extraction electrode provided on the side end surface of the slider. ing.
[0017]
According to this bonding structure, when the linear protrusion of the metal connection piece and the end electrode are connected by the conductive bonding material, the conductive bonding material is supplied to the end electrode from above the linear protrusion. Therefore, it is possible to avoid applying a pressing force to the magnetic head from an oblique direction with reference to the mounting surface of the head support and the magnetic head. Therefore, it is possible to avoid the slider from floating from the head support and to minimize the change in pitch angle and roll angle.
[0018]
For the same reason, it is possible to suppress the occurrence of mechanical distortion in the head support, and therefore it is possible to minimize the change in the static posture angle and the change in the load due to the mechanical distortion of the head support. Since the mechanical distortion of the head support can be minimized, the ABS surface of the magnetic head can be prevented from changing into a crown shape. Therefore, head crash, magnetic disk damage, and magnetic recording destruction due to the deformation of the ABS surface can be avoided.
[0019]
The magnetic head device according to the second aspect includes a head support, a magnetic head, and a flexible wiring board. The head support has a head mounting portion. The magnetic head includes a slider and an extraction electrode. The extraction electrode is provided on a side end surface of the slider, and the slider is fixed to the head mounting portion of the head support.
[0020]
The flexible wiring board includes an insulating film, wiring, and metal connection pieces. The insulating film has flexibility. The said wiring is embed | buried under the inside of the said insulating film, and the edge part is exposed outside from the one surface of the said insulating film.
[0021]
The metal connection piece has a linear protrusion, and is attached to the end, and the linear protrusion protrudes from the one surface of the insulating film.
[0022]
The flexible wiring board is attached to the head support, and the linear protrusion of the metal connection piece is connected to the extraction electrode of the magnetic head by a conductive bonding material.
[0023]
As described above, in the magnetic head device according to the second aspect, the flexible wiring board includes a metal connection piece, the metal connection piece has a linear protrusion, and the metal connection piece includes the metal connection piece. A linear protrusion is connected to the extraction electrode of the magnetic head by a conductive bonding material.
[0024]
Also with this bonding structure, it is possible to avoid applying a pressing force from the oblique direction to the magnetic head. For this reason, it is possible to avoid the slider from floating from the head support, and to minimize the change in pitch angle and roll angle.
[0025]
For the same reason, it is possible to suppress the occurrence of mechanical distortion in the head support, and therefore it is possible to minimize the change in the static posture angle and the change in the load due to the mechanical distortion of the head support. Since the mechanical distortion of the head support can be minimized, the ABS surface of the magnetic head can be prevented from changing into a crown shape. Therefore, head crash, magnetic disk damage, and magnetic recording destruction due to the deformation of the ABS surface can be avoided.
[0026]
Other objects, configurations and advantages of the present invention will be described more specifically with reference to the accompanying drawings. The figure is merely illustrative.
[0027]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a perspective view of the magnetic head device according to the first embodiment, and FIG. 2 is an enlarged partial sectional view of a head mounting portion of the magnetic head device shown in FIG. The illustrated magnetic head device is an HGA, in which an FPC 3 is bonded onto the head support 1, and the magnetic head 4 is bonded onto the head support 1 on the side where the FPC 3 is bonded.
[0028]
The head support 1 includes a load beam 11 and a flexible body 12. The load beam 11 has a protrusion 111 (see FIG. 2) in the vicinity of the free end of the longitudinal axis passing through the center. The illustrated load beam 11 has bent portions 118 on both sides in the width direction, and the bent portions 118 increase rigidity. Further, the load beam 11 has a positioning hole 112 at the end opposite to the protrusion 111 (see FIG. 2). The load beam 11 can take various structures and shapes, and is not limited to the illustrated embodiment. For example, the load beam 11 may be provided with a hole for improving the followability of the magnetic head 4 with respect to a recording medium (not shown) or a hole for increasing the overall elasticity.
[0029]
The flexible body 12 is composed of a thin spring plate material, and one surface is attached to the surface of the load beam 11 on the side having the protrusion 111, and receives a pressing load from the protrusion 111. The flexible body 12 is bonded to the side of the load beam 11 having the projection 111 by means of caulking or the like. Instead of caulking, means such as spot welding may be used.
[0030]
Furthermore, the flexible body 12 has a tongue-like portion 120 serving as a head attachment portion. One end of the tongue-like portion 120 is coupled to the horizontal frame portion 121 of the flexible body 12. Both ends of the horizontal frame portion 121 of the flexible body 12 are connected to the outer frame portions 123 and 124. A groove 122 is formed between the outer frame portions 123 and 124 and the tongue-shaped portion 120. The FPC 3 and the magnetic head 4 are attached to one surface of the tongue portion 120 by bonding. The other surface of the tongue-shaped portion 120 is in contact with the tip of the protruding portion 111, so that the tongue-shaped portion 120 serving as a head mounting portion has two degrees of freedom around two orthogonal axes, that is, pitch and roll. It has two degrees of freedom.
[0031]
The FPC 3 is obtained by embedding necessary wiring 32 in an extremely thin insulating film 31. The FPC 3 is bonded to the magnetic head mounting surface side of the head support 1. The wiring 32 is exposed to the outside at both ends in the longitudinal direction of the insulating film 31, and constitutes an end electrode 33 for external connection on one end side, and is connected to the extraction electrode 21 of the magnetic head 4 on the other end side. The end electrode 30 is configured. The illustrated FPC 3 includes a frame portion 35 that overlaps the tongue-shaped portion 120 and a notch 34 that exposes a part of the tongue-shaped portion 120.
[0032]
As the head support 1, a wiring integrated head support in which a wiring pattern is directly formed on the surface of the head support 1 by using, for example, photolithography is used in addition to the illustrated structure of attaching the FPC 3. You can also.
[0033]
FIG. 3 is a perspective view of the magnetic head shown in FIGS. The illustrated magnetic head includes a slider 2, an extraction electrode 21, and a metal connection piece 6. Inside the slider 2, an inductive electromagnetic conversion element 92 and an element 9 (hereinafter referred to as an MR element) using a magnetoresistance effect are provided.
[0034]
The slider 2 has two rails 273 and 274 separated by a groove 277 on the medium facing surface side, and the surface of the rail is used as the ABS surfaces 271 and 272. The rails 273 and 274 are not limited to two. It may have 1 to 3 rails and may be a flat surface without rails. In addition, various geometric shapes may be attached to the medium facing surface in order to improve the flying characteristics. The present invention can be applied to any type of slider 2. Furthermore, the slider 2 may be provided with a protective film such as DLC having a film thickness of, for example, about 8 to 10 nm on the surface of the rail. In such a case, the surface of the protective film becomes the ABS surfaces 271 and 272.
[0035]
With respect to the air outflow direction (magnetic disk rotation direction) F1, the extraction electrode 21 connected to the inductive electromagnetic transducer 92 and the MR element 93 is provided on the side end face 23 on the air outflow end side. In the embodiment, two extraction electrodes 21 for the inductive electromagnetic transducer 92 and two extraction electrodes 21 for the MR element 93 are provided.
[0036]
The metal connection piece 6 is attached to the extraction electrode 21. The metal connection piece 6 has a linear protrusion 62, and the linear protrusion 62 protrudes from the side end face 23 of the slider 2. The metal connection piece 6 is generally a wire bond wire, specifically, Au etc. Made of wire bonding wire.
[0037]
The metal connection piece 6 is obtained by applying a wire bonding method and performing wire bonding on the extraction electrode 21 and then cutting the wire slightly above the welded portion. The base 61 of the metal connection piece 6 is a welded portion when wire bonding is performed, and the wire diameter of the linear protrusion 62 is given by the wire diameter of the wire bonding wire. The length L1 can be set arbitrarily. Generally, it has a length L1 of about 200 μm.
[0038]
The magnetic head 4 is disposed on the frame portion 35 and the cutout portion 34 on one surface of the tongue-shaped portion 120, and is bonded to the tongue-shaped portion 120 of the flexible body 12 with an adhesive 53. The magnetic head 4 has ABS surfaces 271 and 272 on the surface opposite to the mounting side.
[0039]
The linear protrusion 62 of the metal connection piece 6 is attached to the extraction electrode 21 of the magnetic head 4 by means such as welding, and is further connected to the end electrode 30 provided in the FPC 3 by the conductive bonding material 60. Yes. The conductive bonding material 60 is composed of solder or a conductive adhesive. A conductive adhesive is basically a mixture of an organic resin adhesive component and a conductive component, and various types of adhesive are already known. it can. In the illustration of FIG. 2, the conductive bonding material 60 is deposited on the end electrode 30 provided in the FPC 3, and the linear protrusion 62 of the metal connection piece 6 is positioned and bonded in the upper region. is there.
[0040]
As described above, in the magnetic head device according to the present invention, the magnetic head 4 includes the metal connection piece 6. The metal connection piece 6 includes the linear protrusion 62 and is provided on the side end surface of the slider 2. Is attached to the extracted electrode 30.
[0041]
According to this joining structure, when the linear protrusion 62 of the metal connection piece 6 and the end electrode 30 are connected by the conductive bonding material 60, the conductive property is electrically connected to the end electrode 30 from above the linear protrusion 62. Since it is only necessary to supply the bonding material 60, it is possible to avoid applying a pressing force to the magnetic head 4 from an oblique direction. Therefore, it is possible to avoid the slider 2 from floating from the head support 1, and to minimize the change in the pitch angle and the roll angle.
[0042]
For the same reason, it is possible to suppress the occurrence of mechanical distortion in the head support 1, so that it is possible to minimize the change in the static posture angle and the change in the load due to the mechanical distortion of the head support 1. Since the mechanical distortion of the head support 1 can be minimized, the ABS surfaces 271 and 272 of the magnetic head 4 can be prevented from changing into a crown shape. Therefore, head crashes, magnetic disk damage, and magnetic recording destruction due to deformation of the ABS surfaces 271 and 272 can be avoided.
[0043]
FIG. 4 is an enlarged sectional view of the magnetic head shown in FIG. In the figure, the dimensions are exaggerated. In the figure, the inductive electromagnetic transducer 92 is a writing element, and the MR element 93 is a reading element. The inductive electromagnetic transducer 92 and the MR element 93 are provided on the air outflow end TR side of one or both of the rails 273 and 274. The inductive electromagnetic conversion element 92 and the MR element 93 are provided in the slider 2, and the end portions for electromagnetic conversion are located close to the ABS surfaces 271 and 272. Slider 2 is Al ₂ O _Three -Al on the surface of the substrate 915 made of TiC or the like ₂ O _Three , SiO ₂ A ceramic structure provided with an inorganic insulating film 916 or the like.
[0044]
The inductive electromagnetic transducer 92 includes a first magnetic film 921, a second magnetic film 922, a coil film 923, a gap film 924 made of alumina, an insulating film 925, a protective film 926, and the like.
[0045]
The tip portions of the first magnetic film 921 and the second magnetic film 922 are pole ends facing each other with a gap film 924 having a small thickness, and writing is performed at the pole ends. The first and second magnetic films 921 and 922 may be a single film or a multi-film structure. The first and second magnetic films 921 and 922 may be formed into a multilayer film for the purpose of improving characteristics, for example. As for the pole end structure, various improvements and proposals have been made from the viewpoints of narrowing the track width and improving the recording ability. In the present invention, any pole structure proposed so far can be adopted. The gap film 924 is made of a nonmagnetic metal film or an inorganic insulating film such as alumina.
[0046]
The second magnetic film 922 further extends behind the ABS surfaces 271 and 272 while maintaining an inner gap with the first magnetic film 921, and is coupled to the second magnetic film 922 at the rear coupling portion 942. ing. As a result, a thin film magnetic circuit surrounding the first magnetic film 921, the second magnetic film 922, and the gap film 924 is completed.
[0047]
The coil film 923 is sandwiched between the first and second magnetic films 921 and 922 and rotates around the rear coupling portion 942 in a spiral shape. Both ends of the coil film 923 are electrically connected to the extraction electrode 21 (see FIG. 3). The number of turns of the coil film 923 and the number of films are arbitrary.
[0048]
The insulating film 925 is formed of an organic insulating resin film or a ceramic film. A typical example of ceramic film is Al ₂ O _Three Membrane or SiO ₂ It is a membrane. A coil film 923 is embedded in the insulating film 925. The insulating film 925 is filled in the inner gap between the first and second magnetic films 921 and 922. A second magnetic film 922 is provided on the surface of the insulating film 925.
[0049]
The protective film 926 covers the entire inductive electromagnetic conversion element 92. The protective film 926 is made of Al. ₂ O _Three Or SiO ₂ It is comprised with inorganic insulating materials, such as.
[0050]
MR elements 93 having various film structures have been proposed and put to practical use. For example, there are those using an anisotropic magnetoresistive effect element such as permalloy, those using a giant magnetoresistive (GMR) effect film such as a spin valve film structure or a perovskite type magnetic material, and a ferromagnetic tunnel junction effect element. In the present invention, any type may be used. The MR element 93 is disposed inside the insulating film 71 between the first shield film 931 and the second shield film 921 that is also used as the first magnetic film 921. The insulating film 71 is made of alumina or the like. The MR element 93 is connected to the extraction electrode 21 (see FIG. 3). The second shield film may be different from the first magnetic film 921.
[0051]
FIG. 5 is a partial sectional view showing another embodiment of the magnetic head device according to the first aspect. In the figure, the same components as those shown in FIG. 2 are denoted by the same reference numerals. In this embodiment, the conductive bonding material 60 is formed by directly connecting the end electrode 30 provided in the FPC 3 and the extraction electrode 21 of the magnetic head 4 with the linear protrusion 62 of the metal connection piece 6 as a nucleus. It is joined.
[0052]
6 to 11 show a wire bonding apparatus used for welding the metal connecting piece 6 in the magnetic head shown in FIGS. 3 and 4, and an operation method thereof.
[0053]
First, referring to FIG. 6, the wire bonding apparatus includes a spark torch body 80 and a capillary tool 83. The spark torch body 80 includes a base body 801 and an insulating coating 803. The base 801 is made of a metal body having a low electrical resistance, such as copper, and has a spark electrode portion 805 in part. The insulating coating 803 is an electromagnetic wave absorbing insulating coating and covers the surface of the base 801 excluding the spark electrode portion 805.
[0054]
The capillary tool 83 holds the metal wire 82, and the tip of the held metal wire 82 is disposed at a position facing the spark electrode portion 805 of the spark torch body 80. The metal wire 82 is supplied from the wire supply unit 811. As the metal wire 82, a conventionally known one such as an Au wire or an Al wire can be used.
[0055]
Further, the wire bonding apparatus includes a high voltage power supply device 85, metal wire fixing means 871 and 872, and cable wires 891 to 893. The high voltage power supply device 85 generates a DC high voltage sufficient to generate a spark between the tip of the metal wire 82 and the spark electrode portion 805 of the spark torch body 80. A power-on switch 84 is inserted on the high potential side (+) of the high voltage power supply device 85.
[0056]
The metal wire fixing means 871 and 872 fix or release the intermediate portion of the metal wire 82, and are electrically connected to the metal wire 82 when the metal wire 82 is fixed. The metal wire fixing means 871 and 872 are in front of the capillary tool 83 and supply the metal wire 82 to the capillary tool 83.
[0057]
The cable lines 891 to 893 constitute an electric circuit that electrically connects the metal wire fixing means 871 and 872, the metal wire 82, and the spark torch body 80 in series. The metal wire fixing means 871 and 872 are connected to the high potential side (+) of the high voltage power supply device 85 via the cable line 892 and further grounded via the cable line 893. The spark torch body 80 is connected to the low potential side (−) of the high voltage power supply device 85 via the cable line 891.
[0058]
The illustrated wire bonding apparatus further includes ultrasonic excitation means 86. The ultrasonic excitation means 86 excites the capillary tool 83.
[0059]
A support body (workpiece) 88 on which the magnetic head 4 is mounted is disposed in advance below the spark torch body 80 and at a position facing the capillary tool 83. When the spark torch body 80 is retracted, the magnetic head 4 mounted on the work 88 comes to face the capillary tool 83.
[0060]
In the operation of the wire bonding apparatus in FIG. 6, the tip of the metal wire 82 guided through the capillary tool 83 is opposed to the spark electrode portion 805 of the spark torch body 80 with a minute interval.
[0061]
Then, as shown in FIG. 7, the intermediate portion of the metal wire 82 is sandwiched by the metal wire fixing means 871 and 872 to fix and electrically connect the metal wire 82. In this state, as shown in FIG. 8, the power-on switch 84 is turned on, and a high voltage (DC voltage) is applied between the tip of the metal wire 82 and the spark electrode portion 805 of the spark torch body 80. As a result, a spark is generated between the tip of the metal wire 82 and the spark electrode portion 805 of the spark torch body 80, and the tip of the metal wire 82 is melted by the heat of the spark to form a metal ball 821.
[0062]
Next, as shown in FIG. 9, the power-on switch 84 is turned off, and the spark torch body 80 is retracted from the position facing the capillary tool 83 in the direction indicated by the arrow a1.
[0063]
Next, as shown in FIG. 10, the capillary tool 83 is lowered in the direction indicated by the arrow b <b> 1, and the metal ball 821 formed at the tip of the metal wire 82 is formed on the extraction electrode 21 of the magnetic head 4 mounted on the work 88. Press.
[0064]
Then, the capillary tool 83 is excited by ultrasonic waves by the ultrasonic excitation means 86, and the metal ball 821 formed at the tip of the metal wire 82 is welded to the extraction electrode 21.
[0065]
Next, as shown in FIG. 11, the metal wire 82 is cut leaving an appropriate length to form the metal connection piece 6 having the linear protrusion 62. Thereby, the magnetic head shown in FIG. 3 is obtained. Thereafter, the capillary tool 83 is moved in the direction of the arrow b2 to return to the original position in FIG.
[0066]
In the examples of FIGS. 6 to 11, the process of bonding the metal wire 82 to the single magnetic head 4 is shown, but the same metal is applied to a head assembly or a magnetic head wafer in which a large number of magnetic heads are aligned. A bonding process using the wire 82 can be performed.
[0067]
FIG. 12 is a partial cross-sectional view of the magnetic head device according to the second embodiment. In the figure, the same components as those shown in FIG. 2 are denoted by the same reference numerals. The illustrated magnetic head device is an HGA, in which an FPC 3 is bonded onto the head support 1, and the magnetic head 4 is bonded onto the head support 1 on the side where the FPC 3 is bonded. The head support body 1 has a tongue-like piece 120 serving as a head attachment portion. The magnetic head 4 and the extraction electrode 21 are included. The extraction electrode 21 is provided on the side end face 23 of the magnetic head 4 on the air outflow end side. The magnetic head 4 is fixed to a tongue-like piece 120 that is a head mounting portion of the head support 1.
[0068]
FIG. 13 is an enlarged perspective view of the FPC 3 included in the magnetic head device of FIG. The FPC 3 includes an insulating film 31 and a wiring 32. The insulating film 31 has flexibility. The wiring 32 is embedded in the insulating film 31, and both ends are exposed to the outside from one surface of the insulating film 31, thereby constituting the end electrodes 30 and 33.
[0069]
The feature of this embodiment is that the FPC 3 has a metal connection piece 6. The metal connection piece 6 has a linear protrusion 62, and the base 61 is attached to the end electrode 30 by means such as welding. The linear protrusion 62 extends from the base 61 and protrudes from one surface of the insulating film 31. The metal connection piece 6 is made of a wire bonding wire such as Au or Al.
[0070]
The metal connection piece 6 is obtained by performing wire bonding on the end electrode 30 by applying the wire bonding method illustrated in FIGS. 6 to 11 and cutting the wire slightly above the welded portion. The base 61 of the metal connection piece 6 is a welded portion when wire bonding is performed, and the wire diameter of the linear protrusion 62 is given by the wire diameter of the wire bonding wire. The length L1 is, for example, about 200 μm.
[0071]
The linear protrusion 62 of the metal connection piece 6 attached to the end electrode 30 by means such as welding is connected to the extraction electrode 21 provided in the magnetic head 4 by the conductive bonding material 60. In the illustration of FIG. 12, the conductive bonding material 60 directly connects the extraction electrode 21 of the magnetic head 4 and the end electrode 30 provided in the FPC 3 with the linear protrusion 62 of the metal connection piece 6 as a nucleus. It is joined to.
[0072]
In the magnetic head device according to the second aspect described above, the FPC 3 includes the metal connection piece 6, and the metal connection piece 6 has the linear protrusion 62 and is provided on the side end surface of the slider 2. It is attached to the electrode 30.
[0073]
According to this bonding structure, when the extraction electrode 21 of the magnetic head 4 and the end electrode 30 of the FPC 3 are connected by the conductive bonding material 60, the conductive bonding is performed from above the linear protrusion 62 to the end electrode 30. Since the material 60 has only to be supplied, it is possible to avoid applying a pressing force to the magnetic head 4 from an oblique direction. Therefore, it is possible to avoid the slider 2 from floating from the head support 1, and to minimize the change in the pitch angle and the roll angle.
[0074]
For the same reason, it is possible to suppress the occurrence of mechanical distortion in the head support 1, so that it is possible to minimize the change in the static posture angle and the change in the load due to the mechanical distortion of the head support 1. Since the mechanical distortion of the head support 1 can be minimized, the ABS surfaces 271 and 272 of the magnetic head 4 can be prevented from changing into a crown shape. Therefore, head crashes, magnetic disk damage, and magnetic recording destruction due to deformation of the ABS surfaces 271 and 272 can be avoided.
[0075]
FIG. 14 is a partial sectional view showing still another embodiment of the magnetic head device according to the second aspect. In the figure, the same components as those shown in FIG. 13 are given the same reference numerals. In the embodiment of FIG. 14, the conductive bonding material 60 is stacked on the extraction electrode 21 of the magnetic head 4, and the linear protrusion 62 of the metal connection piece 6 is positioned and bonded in the end region. is there.
[0076]
The present invention can be applied to HAA and HSA in addition to the above-described application to HGA. 15 is a front view of the HAA, and FIG. 16 is a side view of the HAA shown in FIG. The illustrated HAA includes a head support 1, a magnetic head 4, and an arm piece 51. The arm piece 51 is integrally formed using a suitable nonmagnetic metal material, such as an aluminum alloy. The arm piece 51 is provided with an attachment hole 52. The attachment hole 52 is used for attachment to a positioning device included in the magnetic disk device. One end of the head support 1 is fixed to the arm piece 51 by, for example, a ball connection structure or the like. The head support 1 includes a load beam 11 and a flexible body 12. The magnetic head 4 and the FPC 3 are combined with the head support 1 by the combination structure described above.
[0077]
17 is a front view of the HSA according to the present invention, and FIG. 18 is a side view of the HSA shown in FIG. The illustrated HSA includes a head support 1, a magnetic head 4, and a block 5. The block 5 has a plurality of arm pieces 51. The plurality of arm pieces 51 are sequentially arranged with a gap D1. The arm piece 51 is provided so as to protrude from the outer peripheral surface of the base body 50. The base body 50 and the arm piece 51 are integrally formed using a suitable nonmagnetic metal material such as an aluminum alloy. In the illustrated embodiment, there are two arm pieces 51, but the number can be increased.
[0078]
The base body 50 is provided with mounting holes 52 parallel to the arrangement direction of the arm pieces 51. The attachment hole 52 is used for attachment to a positioning device included in the magnetic disk device. Further, the base body 50 is provided with a coil support portion 53 and a voice coil 54.
[0079]
The head support 1 is provided for each arm piece 51, and one end is fixed to the arm piece 51 by, for example, a ball connection structure. The head support 1 includes a load beam 11 and a flexible body 12. In the illustrated embodiment, the head support 1 is provided only on one side of the arm piece 51, but when three or more arm pieces 51 are provided, the head support body 1 is often provided on both sides of the arm piece 51.
[0080]
The magnetic head 4 and the FPC 3 are attached to the other end side of each head support 1. The magnetic head 4 and the FPC 3 are combined with each of the head supports 1 by the combination structure described above.
[0081]
FIG. 19 is a plan view of a magnetic recording / reproducing apparatus according to the present invention. The illustrated magnetic recording / reproducing apparatus includes a magnetic head device 71 and a magnetic disk 72. The magnetic head device 71 is the one shown in FIGS. 3 and 4, or the one shown in FIGS. In the magnetic head device 71, one end of the head support 1 is supported by the positioning device 73 and driven. The magnetic head 4 of the magnetic head device 71 is supported by the head support 1 and is disposed so as to face the magnetic recording surface of the magnetic disk 72. As the magnetic head device 71, all of the above-described embodiments can be used.
[0082]
When the magnetic disk 72 is rotationally driven in the direction of the arrow F1 by a drive device (not shown), the magnetic head 4 floats from the surface of the magnetic disk 72 with a minute flying height. The drive system is rotary. Although an actuator system is common, a linear actuator system may be adopted. FIG. 19 shows a rotary. The magnetic head 4 which shows an actuator system and is attached to the tip of the head support 1 is driven in the radial directions C1 and C2 of the magnetic disk 72. Then, the magnetic head 4 is positioned at a predetermined track position on the magnetic disk 72 by a positioning device 73 that rotationally drives the head support 1.
[0083]
Although the contents of the present invention have been specifically described above with reference to the preferred embodiments, it is obvious that those skilled in the art can take various modifications based on the basic technical idea and teachings of the present invention. It is.
[0084]
【The invention's effect】
As described above, according to the present invention, the following effects can be obtained.
(A) It is possible to provide a magnetic head device and a magnetic recording / reproducing device capable of avoiding fluctuations in the static posture angle and load in the assembly process of the magnetic head device.
(B) It is possible to provide a magnetic head device and a magnetic recording / reproducing device that can avoid a change in slider shape in the assembly process of the magnetic head device.
[Brief description of the drawings]
FIG. 1 is a perspective view of a magnetic head device according to a first embodiment.
FIG. 2 is an enlarged partial cross-sectional view of a head mounting portion of the magnetic head device shown in FIG.
FIG. 3 is a perspective view of the magnetic head shown in FIGS.
4 is an enlarged cross-sectional view of the magnetic head shown in FIG.
FIG. 5 is a partial cross-sectional view showing another embodiment of the magnetic head device according to the present invention.
6 shows a wire bonding apparatus provided for obtaining the magnetic head shown in FIGS. 3 and 4. FIG.
7 is a diagram for explaining the operation of the wire bonding apparatus shown in FIG. 6;
FIG. 8 is a diagram for explaining the next operation after the operation shown in FIG. 7;
FIG. 9 is a diagram for explaining the next operation after the operation shown in FIG. 8;
FIG. 10 is a diagram for explaining the next operation after the operation shown in FIG. 9;
FIG. 11 is a diagram for explaining the next operation after the operation shown in FIG. 10;
FIG. 12 is a partial cross-sectional view of a magnetic head device according to a second embodiment.
13 is an enlarged perspective view of an FPC 3 included in the magnetic head device of FIG.
FIG. 14 is a partial cross-sectional view showing still another embodiment of the magnetic head device according to the second mode.
FIG. 15 is a front view of the HAA.
16 is a side view of the HAA shown in FIG.
FIG. 17 is a front view of an HSA according to the present invention.
18 is a side view of the HSA illustrated in FIG.
FIG. 19 is a plan view of a magnetic recording / reproducing apparatus according to the present invention.
[Explanation of symbols]
1 Head support
2 Slider
3 FPC
4 Magnetic head
6 Metal connection piece
61 Base
62 Linear protrusion

Claims (2)

A method of manufacturing a magnetic head device comprising a head support and a magnetic head, wherein an extraction electrode of the magnetic head is conductively connected to an end electrode of the head support,
Wire bonding the metal connection piece to the extraction electrode, cutting the wire bonding wire portion to form a linear protrusion on the metal connection piece,
The head support and the magnetic head are arranged so that the linear protrusions face each other in a floating state from the end electrodes,
A conductive bonding material is supplied onto the end electrode from above the linear protrusion, and adhered to both the linear protrusion and the end electrode.
Manufacturing method of magnetic head device. A method of manufacturing a magnetic head device comprising a head support and a magnetic head, wherein an extraction electrode of the magnetic head is conductively connected to an end electrode of the head support,
Wire bonding the metal connection piece to the end electrode, cutting the wire bonding wire portion to form a linear protrusion on the metal connection piece,
The head support and the magnetic head are arranged so that the linear protrusions face each other in a floating state from the extraction electrode,
A conductive bonding material is supplied onto the extraction electrode from above the linear protrusion, and is adhered to both the linear protrusion and the extraction electrode.
Manufacturing method of magnetic head device.

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