JPH0346107A - Thin-film magnetic head - Google Patents
Thin-film magnetic headInfo
- Publication number
- JPH0346107A JPH0346107A JP17904289A JP17904289A JPH0346107A JP H0346107 A JPH0346107 A JP H0346107A JP 17904289 A JP17904289 A JP 17904289A JP 17904289 A JP17904289 A JP 17904289A JP H0346107 A JPH0346107 A JP H0346107A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic layer
- coil
- terminal
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims description 18
- 239000004020 conductor Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 abstract description 10
- 239000010410 layer Substances 0.000 description 76
- 239000010408 film Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
[従来技術]
近年、磁気記録の高密度化の進展に伴い、記録波長及び
記録トラック幅の低減が進み、更に記録再生信号の高周
波化も進んできており、このため従来のバルクの磁性材
料を用いた磁気ヘッドよりも小型で優れた高周波特性を
有する薄膜磁気ヘッドが多用される傾向にある。[Detailed Description of the Invention] [Prior Art] In recent years, with the progress of increasing the density of magnetic recording, the recording wavelength and recording track width have been reduced, and the frequency of recording and reproduction signals has also been increasing. Thin-film magnetic heads, which are smaller and have better high-frequency characteristics than conventional magnetic heads using bulk magnetic materials, are increasingly being used.
薄膜磁気ヘッドでは、基板上に下部磁性層。In a thin film magnetic head, the bottom magnetic layer is on the substrate.
コイル導体層、絶縁層、ギャップ層及び上部磁性層とな
る薄膜が形成されている。これらの膜厚は例えばμmオ
ーダーであり2前述の記録密度向上等のためますます薄
膜化が要請されている。Thin films serving as a coil conductor layer, an insulating layer, a gap layer, and an upper magnetic layer are formed. The thickness of these films is, for example, on the order of .mu.m, and thinner films are required to be made thinner and thinner in order to improve the recording density mentioned above.
[発明が解決しようとする課題]
このような薄膜ヘッドがシシテムに組み込まれて使用さ
れる場合1時としてコイルに通ずる接続端子の一部が接
地される事がある。この場合には、媒体に蓄えられた静
電気が上部あるいは下部磁極を通して、コイルに流れよ
うとするためコイルと磁極間にある絶縁層の一部か破壊
されてしまうという問題が発生した。[Problems to be Solved by the Invention] When such a thin film head is incorporated into a system and used, a part of the connection terminal leading to the coil may sometimes be grounded. In this case, a problem occurred in that static electricity stored in the medium tends to flow into the coil through the upper or lower magnetic pole, resulting in part of the insulating layer between the coil and the magnetic pole being destroyed.
本発明は、各層がますます薄膜化される薄膜磁気ヘッド
一般において信頼性の高い薄膜磁気ヘッドを提供するこ
とを目的とする。An object of the present invention is to provide a highly reliable thin-film magnetic head in general, in which each layer is increasingly thinned.
[課題解決の手段]
本発明の前記目的は、基板上に少くとも下部磁性層2
コイル導体層、絶縁層、ギャップ層及び上部磁性層を形
成して成る薄膜磁気ヘッドにおいて、下部磁性層に接地
端子を配したことを特徴とする薄膜磁気ヘッドによって
達成される。この場合下部磁性層の一部を接地端子とす
ることが好ましい。[Means for Solving the Problems] The object of the present invention is to provide at least a lower magnetic layer 2 on a substrate.
This is achieved by a thin film magnetic head comprising a coil conductor layer, an insulating layer, a gap layer and an upper magnetic layer, characterized in that a ground terminal is disposed on the lower magnetic layer. In this case, it is preferable to use a part of the lower magnetic layer as a ground terminal.
本発明の知見は実験中において、薄膜磁気ヘッドの絶縁
層の一層の薄膜化に起因し、これにより上部磁性膜とコ
イルとの間で絶縁層の絶縁破壊を起したと考えられる事
象を発見したことに基づく。The knowledge of the present invention was discovered during an experiment, which is thought to be due to the thinning of one layer of the insulating layer of a thin-film magnetic head, which caused dielectric breakdown of the insulating layer between the upper magnetic film and the coil. Based on that.
従来においても、磁気ヘッドにおいて接地を施こすこと
は理論上考えられてはいたが、かかる薄膜ヘッドにおい
てはその寸法の狭小の故もあり。In the past, it has been theoretically considered to provide grounding to magnetic heads, but this is partly due to the narrow dimensions of such thin film heads.
更にたとえ磁気ヘッドの一部がある瞬間に帯電したとし
ても次の瞬間にはいずれかの経路を通って放電するもの
と考えられていたので、薄膜磁気ヘッドに接地端子を配
することは全く行なわれていなかった。Furthermore, even if a part of the magnetic head were charged at one moment, it was thought that the next moment the discharge would take place through some path, so no grounding terminal was placed on the thin-film magnetic head at all. It wasn't.
しかし、前記の如き薄膜化の要請に応えるためにはいき
おい絶縁層も薄くならざるを得ず2例えば記録媒体との
摺接により、帯電した磁性層上の電荷が最も近いコイル
導体層等に放電し、絶縁層の絶縁破壊を起こすことがそ
の場合予想される事態となっている。However, in order to meet the above-mentioned demand for thinner films, the active insulating layer must also be made thinner.2 For example, due to sliding contact with the recording medium, charges on the charged magnetic layer are discharged to the nearest coil conductor layer, etc. However, in this case, it is expected that dielectric breakdown of the insulating layer will occur.
本発明においては、下部磁性層上に接地端子を設けたの
で、これを所定の接地極にリード線等を介して接続する
ことにより上部磁性層の帯電を防止することが出来る。In the present invention, since the ground terminal is provided on the lower magnetic layer, charging of the upper magnetic layer can be prevented by connecting this to a predetermined ground electrode via a lead wire or the like.
更に、下部磁性層はこの接地端子用のスペースをとるた
めに上部磁性層よりも大きく作る必要がある。接地端子
は、下部磁性層上に形成された絶縁層の一部をエッチ〉
グにより除去して下部磁性層を露出させ、この露出した
下部磁性層の一部で形成することが好ましい。Furthermore, the lower magnetic layer must be made larger than the upper magnetic layer in order to provide space for this ground terminal. The ground terminal is formed by etching a part of the insulating layer formed on the bottom magnetic layer.
It is preferable to expose the lower magnetic layer by removing it by cleaning, and to form the layer using a part of the exposed lower magnetic layer.
〔作用] 下部磁性層に接地端子を設けたことにより。[Effect] By providing a ground terminal on the lower magnetic layer.
これを所定の接地極とリード線等の接続手段を介して導
通させ磁性層上に帯電した1js荷を放電させることが
でき、磁性層の電位の上昇が抑えられる。This can be electrically connected to a predetermined ground electrode through a connecting means such as a lead wire, and the 1js charge charged on the magnetic layer can be discharged, thereby suppressing the increase in the potential of the magnetic layer.
[実施例]
図面を参照して本発明について説明する。第1図は本発
明の一実施例である薄膜磁気ヘッドの要部構造を示す平
面図であり、基板1を除いて示している。第2図(a)
、 (b)は夫々、第1図のA−A’及びB−8’断
面における薄膜磁気ヘッドの構造断面図である。[Example] The present invention will be described with reference to the drawings. FIG. 1 is a plan view showing the main structure of a thin film magnetic head according to an embodiment of the present invention, with the substrate 1 removed. Figure 2(a)
, (b) are structural sectional views of the thin film magnetic head taken along the lines AA' and B-8' in FIG. 1, respectively.
本実施例の薄膜磁気ヘッドは、磁性或いは非磁性でなる
基板lと、この基板l上にアモルファス、センダスト或
いはパーマロイ等からなる磁性材料により形成された下
部磁性層2と、下部磁性層2上に8102等の絶縁材料
により形成された第1の絶縁層3と、この絶縁層3上に
Cu或いはCu合金等の導電材料により形成された導体
層4と、この導体層4を覆ってやはり810.等の絶縁
材料により形成された第2の絶縁層5と、この上に形成
された渦巻コイル中心部からの引出しり一層9と、下部
磁性層と同様な磁性材料から成り下部磁性層と協働して
磁路を構成する上部磁性層6と、上部及び下部磁性層の
間に形成され絶縁材料等から形成されるギャップ層7と
、導体層と外部リード線との接続用の2つの外部端子4
a、 4b及びこれ等の中間に配された接地端子8と、
から基本的に構成され、必要に応じて最終的に所要個所
に保護層が設けられるものである。The thin film magnetic head of this embodiment includes a substrate l made of magnetic or non-magnetic material, a lower magnetic layer 2 formed on the substrate l from a magnetic material such as amorphous, sendust, or permalloy, and a lower magnetic layer 2 formed on the lower magnetic layer 2. A first insulating layer 3 made of an insulating material such as 8102, a conductor layer 4 made of a conductive material such as Cu or Cu alloy on this insulating layer 3, and a first insulating layer 3 made of an insulating material such as 810. A second insulating layer 5 made of an insulating material such as, a layer 9 extending from the center of the spiral coil formed thereon, and a second insulating layer 5 made of the same magnetic material as the lower magnetic layer and cooperating with the lower magnetic layer. an upper magnetic layer 6 forming a magnetic path; a gap layer 7 formed between the upper and lower magnetic layers and made of an insulating material; and two external terminals for connecting the conductor layer and external lead wires. 4
a, 4b, and a grounding terminal 8 arranged between these,
It basically consists of the following, and a protective layer is finally provided at required locations as necessary.
接地端子8は下部磁性層〈2〉上に形成された絶縁層(
3) (4)の一部をイオンミリング等により所望の形
状に除去し形成されている。したがって該接地用端子の
表面には下部磁性層(2)が露出した形となっている。The ground terminal 8 is connected to an insulating layer (
3) It is formed by removing a part of (4) into a desired shape by ion milling or the like. Therefore, the lower magnetic layer (2) is exposed on the surface of the grounding terminal.
外部端子4a、 4b及び接地端子8は夫々外部リード
線にボンディングされ、このリード線の他端は夫々所定
の外部回路及び接地極に接続される。下部磁性層2の長
さは上部磁性層6の長さよりも概略上記3偲所の端子部
の配される部分の長さだけ長く形成されている。また上
部磁性膜と下部磁性膜とはコイル中心部において磁気的
及び電気的に導通するブリッジ部を有する。The external terminals 4a, 4b and the ground terminal 8 are each bonded to an external lead wire, and the other ends of the lead wires are connected to a predetermined external circuit and a ground electrode, respectively. The length of the lower magnetic layer 2 is longer than the length of the upper magnetic layer 6 by approximately the length of the portion where the three terminal portions are arranged. Further, the upper magnetic film and the lower magnetic film have a bridge portion that is magnetically and electrically conductive at the center of the coil.
第1図及び第2図に見る如く本実施例に係る磁気ヘッド
は基板1上に配された平面略長方形状の下部磁性層2を
有しており、この下部磁性層2と上部磁性層6の層間に
は記録媒体との間で信号の授受を行うギャップが前部に
配され、その後部にはコイル部分4がやはり両磁性層の
間に絶縁層3.5を隔てて配され、このコイル部分4と
外部配線との接続部となる端子部4a、 4bはこのコ
イル4の後部に配されている。中間のコイル巻線の部分
はできるだけコイルのターン数を多く確保するため他の
部分より幅が大きくなり易い。従って図からも容易にわ
かるように端子部4a、 4bの配される後部付近は比
較的配置上に余裕がある。本実施例の場合、接地端子8
はこの端子4a、 4bの中間に配するとしたのでこの
接地端子の配置のために下部磁性層を大きくする必要は
ない。As shown in FIGS. 1 and 2, the magnetic head according to this embodiment has a lower magnetic layer 2 having a substantially rectangular planar shape disposed on a substrate 1, and this lower magnetic layer 2 and an upper magnetic layer 6. A gap for transmitting and receiving signals to and from the recording medium is disposed at the front between the layers, and a coil section 4 is disposed at the rear between the two magnetic layers with an insulating layer 3.5 in between. Terminal portions 4a and 4b, which serve as connection portions between the coil portion 4 and external wiring, are arranged at the rear of the coil 4. The middle coil winding portion tends to be wider than other portions in order to ensure as many turns as possible in the coil. Therefore, as can be easily seen from the figure, there is relatively more room in the rear area where the terminal portions 4a, 4b are arranged. In this embodiment, the ground terminal 8
Since the ground terminal is placed between the terminals 4a and 4b, there is no need to make the lower magnetic layer large for the arrangement of the ground terminal.
本実施例においては上部磁性層6と下部磁性層2との間
及び下部磁性層2と基板lとの間に絶縁層の介在がない
ものを示したがこれらのいずれかに絶縁物が介在してい
る場合にはこれらに導通部を設けるか或いは別途導通手
段を介して導通させることが好ましい。In this example, an insulating layer is not interposed between the upper magnetic layer 6 and the lower magnetic layer 2 and between the lower magnetic layer 2 and the substrate l, but an insulating material is interposed between either of these layers. In such a case, it is preferable to provide a conductive portion for these or to establish conduction through a separate conductive means.
[発明の効果]
本発明の構成において、下部磁性層に接地用端子を設け
たことにより、これをリード線等を介して適当な接地極
と接続することが可能となり。[Effects of the Invention] In the configuration of the present invention, by providing the grounding terminal on the lower magnetic layer, it becomes possible to connect this to a suitable grounding electrode via a lead wire or the like.
磁性層の帯電を防止することができる。好ましくは上部
磁性層と下部磁性層とを電気的に導通させることにより
、この効果が一層よく達成でき、信頼性の高い薄膜磁気
ヘッドとすることができる。It is possible to prevent the magnetic layer from being charged. Preferably, by making the upper magnetic layer and the lower magnetic layer electrically conductive, this effect can be better achieved and a highly reliable thin-film magnetic head can be obtained.
本発明は一層コイルの場合を示したが、2層以上の多層
コイルにおいても同様の効果を奏することは勿論である
。また、多数のヘッドが並んでいるマルチチャンネル薄
膜ヘッドにおいても同様な効果を奏する事は言うまでも
ない。Although the present invention has been described in the case of a single-layer coil, it goes without saying that the same effect can be achieved in a multi-layer coil having two or more layers. Furthermore, it goes without saying that similar effects can be achieved in a multi-channel thin film head in which a large number of heads are lined up.
第1図は1本発明の一実施例の薄膜磁気ヘッドの構造を
基板を除いて表わす平面略図。
第2図(a) 、(b)は、第1図の薄膜磁気ヘッドの
A−A ’及びB−B ’断面における夫々の構造断面
図である。
符号の説明
1・・・基板 2・・・下部磁性層3.5
・・・絶縁層 4・・導体層4a、 4b・・・
外部端子
7・・・ギャップ層
6・・・上部磁性層
8・・・接地端子FIG. 1 is a schematic plan view showing the structure of a thin film magnetic head according to an embodiment of the present invention, excluding the substrate. 2(a) and 2(b) are structural sectional views taken along the lines AA' and BB' of the thin film magnetic head shown in FIG. 1, respectively. Explanation of symbols 1...Substrate 2...Lower magnetic layer 3.5
...Insulating layer 4...Conductor layer 4a, 4b...
External terminal 7...Gap layer 6...Top magnetic layer 8...Ground terminal
Claims (1)
ギャップ層及び上部磁性層を形成して成る薄膜磁気ヘッ
ドにおいて、下部磁性層に接地端子を配したことを特徴
とする薄膜磁気ヘッド。At least a lower magnetic layer, a coil conductor layer, an insulating layer,
1. A thin film magnetic head comprising a gap layer and an upper magnetic layer, characterized in that a ground terminal is disposed on the lower magnetic layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17904289A JPH0346107A (en) | 1989-07-13 | 1989-07-13 | Thin-film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17904289A JPH0346107A (en) | 1989-07-13 | 1989-07-13 | Thin-film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0346107A true JPH0346107A (en) | 1991-02-27 |
Family
ID=16059105
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17904289A Pending JPH0346107A (en) | 1989-07-13 | 1989-07-13 | Thin-film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0346107A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7905008B2 (en) * | 2003-07-28 | 2011-03-15 | Tdk Corporation | Method of manufacturing a coil component |
-
1989
- 1989-07-13 JP JP17904289A patent/JPH0346107A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7905008B2 (en) * | 2003-07-28 | 2011-03-15 | Tdk Corporation | Method of manufacturing a coil component |
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