JPH0592619U - Sample holder for vacuum chamber - Google Patents

Abstract

(57) [Abstract] [Purpose] To observe a clean sample surface with a magnetic field applied efficiently. [Structure] A sample 7 is placed on a sample table 6 made of a permanent magnet, and the sample table is set between the pressing body 2 and the lid 4. For example, the holder is set at a predetermined position in the sample observation chamber of the tunnel microscope, and the sample chamber is evacuated to a high vacuum by an exhaust device. Since the sample table 6 generates magnetic lines of force 8 from its upper part to its lower part, the magnetic lines of force of a given portion pass perpendicularly to the upper and lower surfaces of the sample 7.

Description

[Detailed description of the device]

[0001]

[Field of Industrial Application] The present invention relates to a vacuum chamber sample holder suitable for observing a sample such as a tunnel microscope or an atomic force microscope when the sample is placed in a vacuum chamber. The present invention relates to a vacuum chamber sample holder configured to apply a magnetic field to a sample.

[0002]

2. Description of the Related Art Recently, a tunnel microscope that scans a probe along a sample surface and obtains an uneven image of the sample surface based on the tunnel current detected by the scanning observes a minute shape of the sample surface. It is attracting attention as a means of doing so.

When observing the sample surface with such a tunnel microscope, the observation environment includes the atmosphere, vacuum, inert gas, liquid, etc., which is selected according to the purpose of observation, but it is usually observed. That is, when observing a clean sample surface, the sample oxidizes in the atmosphere, so the observation is performed in a high vacuum.

Now, in observing a clean sample surface, there are many cases in which it is desired to observe the sample with a magnetic field applied.

[0005]

[Problems to be Solved by the Invention] For example, taking the tunnel microscope as an example, it was not possible to observe a clean sample surface in a state in which a magnetic field was applied in the conventional tunnel microscope. If a coil is placed on both sides of the sample to be observed set in the vacuum chamber and an electric current is passed through the coil to generate a magnetic field, heat or gas is generated from the coil to generate the vacuum chamber. This is because the pressure rises and it becomes impossible to observe the clean sample surface. Further, when the magnetic field is generated in this way, it is not possible to efficiently apply the magnetic field to the sample.

The present invention has been made for the purpose of solving such a problem, and a sample holder for a vacuum chamber capable of efficiently observing a clean sample surface in a state where a magnetic field is applied. It is to provide da.

[0007]

Means for Solving the Problems In order to achieve the above object, a first invention has a pressing body for pressing a lower part of a sample table on which a sample is placed and a pressing body for pressing an upper part of the sample. In the sample holder for the vacuum chamber, the sample table was made of a magnet. In order to achieve the same object, the second invention is a sample holder for a vacuum chamber having a pressing body for pressing the lower part of the sample table on which the sample is placed and a pressing body for pressing the upper part of the sample. The sample stage was made of a magnet, and a buffer member that moderates the strength of the magnetic field applied to the sample was inserted between the sample stage and the sample. Similarly, in order to achieve the above-mentioned object, a third present invention provides a sample holder for a vacuum chamber having a pressing body for pressing a lower part of a sample table on which a sample is placed and a pressing body for pressing an upper part of the sample, The sample table was made of a magnet, and a side part of the sample table and / or a bottom part pressed by the pressing body was surrounded by a yoke.

[0008]

[Operation] The sample table made of a magnet is set between the pressing body for pressing the lower part of the sample table and the pressing body for pressing the upper part of the sample. The sample holder in such a state is set at a predetermined position in a vacuum chamber such as a tunnel microscope. Then, the sample table forms a magnetic field around it, so it is possible to observe a clean sample surface with the magnetic field applied efficiently. Further, the strength of the magnetic field applied to the sample can be appropriately moderated by the buffer member inserted between the sample table and the sample. Further, the yoke surrounding the side part of the sample table and / or the bottom part pressed by the pressing body efficiently directs the magnetic field from the sample table, which is going out of the sample, toward the sample.

[0009]

Embodiment FIG. 1 is a vertical sectional view of a sample holder for a vacuum chamber showing an embodiment of the present invention.

In FIG. 1, reference numeral 1 denotes a holder bottom body having a U-shaped cross section, and a pressing body 2 such as a spring is attached to the bottom of the holder bottom body. A lid 4 having a hole 3 formed in the center of the upper portion of the holder bottom body 1 is fixed by screws 5A and 5B. In the figure, reference numeral 6 denotes a sample table placed on the pressing body 2, and either the side on which the sample 7 is placed or the side pressed by the pressing body 2 is made of a permanent magnet having N and S poles. In this embodiment, the north and south poles are used.

When a sample holder such as this is set at a predetermined position in a sample observation chamber of a tunnel microscope for sample observation, first, the sample 7 is placed on the sample table 6 and then the sample table 6 is placed. Is set between the pressing body 2 and the lid 4. Then, the periphery of the sample upper portion is pressed from above by the portion near the hole 3 of the lid upper portion, and the bottom portion of the sample table 6 is pressed from below by the pressing body 2, so that the sample 7 is mounted. The sample table 6 placed is firmly fixed by the upper lid and the pressing body. Set the holder in this state at a predetermined position in the sample observation chamber (not shown) of the tunnel microscope, that is, at a position where the probe (not shown) of the tunnel microscope is located above the approximate center of the sample 7. The inside of the sample chamber is evacuated to a high vacuum by an exhaust device (not shown). At this time, in the sample chamber in a high vacuum state, the sample table 6 generates magnetic field lines 8 from its upper part to its lower part as shown in the figure. Pass vertically. As a result, it is possible to observe a clean sample surface with a magnetic field applied efficiently and uniformly by a tunnel microscope.

FIG. 2 is a vertical sectional view of a sample holder for a vacuum chamber showing another embodiment of the present invention. In FIG. 2, the same components as those in FIG. 1 have the same reference numerals.

The first difference between the embodiment shown in FIG. 2 and the embodiment shown in FIG. 1 is that a cushioning member 9 for relaxing the magnetic field strength applied to the sample is inserted between the sample stage 6 and the sample 7. It was done. As this buffer member, a member that emits a very small amount of gas and has a magnetic permeability close to that of air, for example, Teflon or Diflon is used. The strength of the magnetic field applied to the sample can be made arbitrary by considering the thickness of this buffer member in the direction connecting the sample stage and the sample. It is possible to observe a clean sample surface with a magnetic field applied.

The second difference between the embodiment shown in FIG. 2 and the embodiment shown in FIG. 1 is that the side of the sample table 6 and the bottom pressed by the pressing body 2 are surrounded by the yoke 10. Is. Of the magnetic lines of force (8 in FIG. 1) generated from the sample stage 6 by such a yoke, all that try to pass outside the side of the sample stage pass through the sample stage and inside the yoke, and It passes perpendicularly to the upper and lower surfaces (see 8'in FIG. 2). As a result, most of the magnetic lines of force generated on the sample stage 6 pass through the sample, and it is possible to observe a clean sample surface with a magnetic field applied very efficiently by a tunnel microscope. Even if the yoke is provided only on the bottom portion or the side portion of the sample table 6, its effect is greater than that when it is not provided at all.

The sample holder of the present invention is not limited to being used as a sample holder for a tunnel microscope, but can also be used as a sample holder for other vacuum chambers such as an atomic force microscope.

Further, in the above-mentioned embodiment, as the sample table, magnets having N-pole, S-pole or S-pole, N-pole on the sample mounting side and the opposite side, respectively, were used. Alternatively, a vertically oriented magnet may be used.

[0017]

Effect of the Invention In the first aspect of the present invention, since the magnet is used as the sample stand, it is possible to efficiently observe the clean sample surface in the state where the magnetic field is applied. Further, in the second invention, since the buffer member is inserted between the sample table and the sample, it is possible to observe the clean sample surface in the state where the magnetic field of arbitrary strength is applied. Further, in the third invention, since the side of the sample stand and / or the bottom pressed by the pressing body are surrounded by the yoke, the clean sample surface can be observed with the magnetic field applied very efficiently. I can do things.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view of a sample holder for a vacuum chamber showing an embodiment of the present invention.

FIG. 2 is a vertical cross-sectional view of a sample holder for a vacuum chamber showing another embodiment of the present invention.

[Explanation of symbols]

 1 Holder bottom body 2 Pressing body 3 Hole 4 Lid body 5A, 5B Screw 6 Sample stand 7 Sample 8 Magnetic field line 9 Buffer member 10 Yoke

Claims (3)

[Scope of utility model registration request] 1. A vacuum chamber sample holder having a pressing body for pressing a lower portion of a sample table on which a sample is placed and a pressing body for pressing an upper portion of the sample, wherein the sample table is made of a magnet. . 2. In a vacuum chamber sample holder having a pressing body for pressing a lower portion of a sample table on which a sample is placed and a pressing body for pressing an upper portion of the sample, the sample table is made of a magnet,
A sample holder for a vacuum chamber having a buffer member inserted between the sample table and the sample to soften the magnetic field strength applied to the sample. 3. A vacuum chamber sample holder having a pressing body for pressing a lower portion of a sample table on which a sample is placed and a pressing body for pressing an upper portion of the sample, wherein the sample table is made of a magnet,
A sample holder for a vacuum chamber in which a side portion of the sample table and / or a bottom portion pressed by the pressing body is surrounded by a yoke.