JPH1167131A - Sample processing folder and sample processing folder system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample processing folder which easily adjust the insertion length of a sample for a transmission electron microscope to be constant. SOLUTION: A sample processing folder HL is composed of a lower holding member 10, an upper holding member 12, and a tightening tool 14, and a space between the lower holding member 10, and the upper holding member 12 can be adjusted by the tightening tool 14. As a result, a sample 30 for a transmission electron microscope can be nipped and held by a lower nipping part 10a of the lower holding member 10 and an upper nipping part 12a of the upper holding member 12. In the lower holding member 10, a contact part 10b is formed to be one step higher than the lower nipping part 10a. Since the contact part 10b plays a role of a positioning stopper when the sample 30 for the transmission electron microscope is inserted, the insertion length of the sample 30 can be made constant.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample processing holder and a sample processing holder system, and more particularly to a sample processing holder and a sample processing holder which can be easily mounted on a transmission electron microscope sample without damaging it. About the system.

[0002]

2. Description of the Related Art FIG. 7 shows a conventional focused ion beam (FI).
B) shows a sample processing holder for processing. As can be seen from FIG. 7, the conventional sample processing holder was configured to include a lower holding member 40, an upper holding member 42, and a fastener 44. Both the lower holding member 40 and the upper holding member 42 were members made of a flat metal plate. The space X1 between the lower holding member 40 and the upper holding member 42 can be adjusted by the fastener 44. The transmission electron microscope sample 30 held by this sample processing holder was formed by attaching the sample material 32 to the auxiliary plate 34.

In the sample processing holder shown in FIG. 7, since the sample 30 for a transmission electron microscope is very small, it is necessary to mount the sample 30 for a transmission electron microscope using tweezers P. there were. That is, the sample 30 for the transmission electron microscope is picked up with the tweezers P and inserted between the lower holding member 40 and the upper holding member 42 of the sample processing holder. Then, while the position of the transmission electron microscope sample 30 is maintained, the fasteners 44 are tightened, and the distance X1 between the lower holding member 40 and the upper holding member 42 is reduced, so that the lower holding member 40 and the upper holding member The transmission electron microscope sample 30 was sandwiched between the member 42 and the sample processing holder.

[0004]

When the sample processing holder shown in FIG. 7 is used, the sample 30 for the transmission electron microscope is picked up with the tweezers P.
In some cases, the transmission electron microscope sample 30 popped and was lost. An operation of inserting the transmission electron microscope sample 30 between the lower holding member 40 and the upper holding member 42 in the sample processing holder using tweezers P;
Since the operation of tightening the fastener 44 must be performed simultaneously, it is not always easy to mount the transmission electron microscope sample 30. In addition, if this operation is troublesome, the time for picking the transmission electron microscope sample 30 with the tweezers P becomes long, and the possibility of breakage or loss has increased.

In addition, since the lower holding member 40 and the upper holding member 42 are formed by joining flat plates, it is difficult to reproduce the mounting position of the transmission electron microscope sample 30. That is, as shown in FIG. 8A, the transmission electron microscope sample 30 enters the inside of the sample processing holder, or as shown in FIG. 8B, the transmission electron microscope sample 30 is Or was only inserted until. For this reason, it has been difficult to make the insertion length approximately the same every time of mounting. If the insertion length of the transmission electron microscope sample 30 is different at each mounting,
There is a problem in that the work in the subsequent work, FIB processing, becomes complicated.

The present invention has been made in view of the above-mentioned problems, and has been made in view of the above-mentioned circumstances, and provides a sample processing holder and a sample processing holder system for focused ion beam processing in which the mounting position of the transmission electron microscope sample 30 can be easily reproduced. The purpose is to provide. That is, an object of the present invention is to provide a sample processing holder and a sample processing holder system in which the insertion length when the transmission electron microscope sample 30 is inserted between the lower holding member 40 and the upper holding member 42 becomes constant. . It is another object of the present invention to provide a sample processing holder system for focused ion beam processing that can mount the transmission electron microscope sample 30 without damaging the transmission electron microscope sample 30. Further, a sample that allows the transmission electron microscope sample 30 to be easily mounted without simultaneously performing the operation of bringing the transmission electron microscope sample 30 using the tweezers P and the operation of tightening the fastener 44. The purpose is to provide a processing holder system.

[0007]

In order to solve the above problems, a sample processing holder according to the present invention comprises a transmission electron microscope in which a sample material is mounted on an auxiliary plate between a lower holding member and an upper holding member. A sample processing holder for holding the transmission electron microscope sample by inserting the sample for use, clamping the lower holding member and the upper holding member with a fastener and sandwiching the auxiliary plate. When the sample for transmission electron microscope is inserted between the lower holding member and the upper holding member, the auxiliary plate abuts on the lower holding member or the upper holding member, and the auxiliary plate abuts on the positioning stopper. And a contact portion having a role as the contact portion.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) A sample processing holder according to a first embodiment of the present invention has a constant insertion length when a transmission electron microscope sample is inserted between a lower holding member and an upper holding member of a sample processing holder. By providing a contact portion as a positioning stopper for the lower holding member,
The insertion length of the transmission electron microscope sample is made constant, and the mounting operation of the transmission electron microscope sample is facilitated by using a jig.

FIGS. 3A and 3B are views showing a sample processing holder HL according to the first embodiment of the present invention, wherein FIG. 3A is a plan view and FIG. 3B is a side view.

In particular, as can be seen from FIG. 3B, the sample processing holder HL includes a lower holding member 10, an upper holding member 12, and a fastener 14. The distance X1 between the lower holding member 10 and the upper holding member 12
Can be adjusted by the fastening tool 14.

The lower holding member 10 is formed of a metal plate in the present embodiment. This lower holding member 10
Is provided with a lower holding portion 10a and a contact portion 10b. The lower holding portion 10a is a portion that holds the transmission electron microscope sample 30 on the upper surface A thereof. The contact portion 10b is formed one step higher than the lower holding portion 10a, and the upper side thereof forms a surface B. These surfaces A
A vertically rising surface C is formed between the surface C and the surface C. That is, the surface C is formed by a step formed between the lower holding portion 10a and the contact portion 10b.

In the present embodiment, the upper holding member 12 is formed of a metal plate, like the lower holding member 10 described above. The upper holding member 12 includes an upper holding portion 12a and a contact facing portion 12b. Upper clamping unit 1
2a is a lower surface D of the sample 30 for a transmission electron microscope.
This is the part that holds it across. The contact facing portion 12b is formed one step lower than the upper holding portion 12a, and a lower side thereof forms a surface E. A vertically falling surface F is formed between the surface D and the surface E. That is, the surface F is formed by a step formed between the upper holding portion 12a and the contact facing portion 12b.

The contact portion 10 of the lower holding member 10 described above
The height of b and the height of the upper holding portion 12a of the upper holding member 12 are formed to be substantially the same height. In other words, the height of the surface C and the height of the surface F are substantially equal. Therefore, the lower holding member 10 and the upper holding member 1
2 is to be superimposed closely. That is, the surface A of the lower holding portion 10a and the surface D of the upper holding portion 12a can be in close contact, and the surface B of the contact portion 10b and the surface E of the contact opposing portion 12b can be in close contact. It has become. Further, the surfaces C and F can be in close contact with each other.

As can be seen particularly from FIG. 3A, in the present embodiment, the fastener 14 is formed by one screw.
It is configured. This fastening tool 14 is used for the contact opposing portion 1.
It is provided at a position near the center of 2b. That is, it is provided at a position near the center of the lower contact portion 10b. As can be seen from FIG. 3B, the contact opposing portion 12
The fastening tool 14 is provided so as to penetrate the inside b, and the tip end thereof reaches the contact part 10b. As described above, the lower holding member 10 and the upper holding member 1 are
2 can be adjusted. That is, by tightening the fastener 14, the lower holding member 1
The distance X1 between the zero and the upper holding member 12 is narrowed. Conversely, by loosening the fastener 14,
The space X1 between the lower holding member 10 and the upper holding member 12 is widened. A spring SP is provided around the fastener 14 between the lower holding member 10 and the upper holding member 12. That is, the fastener 1
4, a spring SP is wound around. The spring SP allows the lower holding member 10 and the upper holding member 12 to naturally separate when the fastener 14 is loosened.

FIG. 1 is a view showing a state in which the above-mentioned sample processing holder HL is mounted on a jig JG, that is, a view showing the entire sample processing holder system, (a) is a plan view thereof, and (b) is a plan view thereof. It is the side view.

In particular, as can be seen from FIG.
G includes a sample insertion section 20a and a holder mounting section 20b. The holder mounting part 20b is a part for mounting the sample processing holder HL. That is, the sample processing holder HL is mounted on the upper surface G of the holder mounting portion 20b. The sample insertion part 20a is a part for mounting the transmission electron microscope sample 30 and inserting it into the sample processing holder HL. That is, the sample insertion section 20
a sample 30 for a transmission electron microscope is temporarily placed on the upper surface H of the sample processing holder a so as to slide it.
Inserted into L. The sample insertion portion 20b is formed one step higher than the holder mounting portion 20b. The raised step forms the surface I. That is, the surface I is formed between the surface G and the surface H.

When the sample processing holder HL is mounted on the jig JG, the sample insertion portion 20a of the jig JG and the lower holding portion 10a of the sample processing holder HL are set to be substantially the same height. Has become. That is, the surface I of the jig JG and the surface J of the sample processing holder HL on the side of the sample insertion portion 20a are configured as vertically standing surfaces having substantially the same height. For this reason, the surface H of the jig JG and the surface A of the sample processing holder HL are substantially at the same height, and the sample 30 for a transmission electron microscope is smoothly inserted into the sample processing holder HL. You can do it.

The transmission electron microscope sample 30 is made of a sample material 32
And an auxiliary plate 34. The sample material 32 and the auxiliary plate 34 are attached with an adhesive or the like. The auxiliary plate 34 is generally called a ring, a mesh, a grid, or the like. In the present embodiment, the auxiliary plate 34 is assumed to have a size of about 3 mm.

Next, how to use the sample processing holder HL and the sample processing holder system according to the present embodiment will be described.

As can be seen from FIG. 1, the sample processing holder HL is mounted on the holder mounting portion 20b of the jig JG.
At this time, the jig JG is placed so that the lower holding portion 10a and the upper holding portion 12a of the sample processing holder HL are located on the sample insertion portion 20a side of the jig JG. Further, the fastening portion 14 is loosened so that the distance X1 between the lower holding portion 10a and the upper holding portion 12a is equal to or greater than the thickness of the auxiliary plate 34. Next, the transmission electron microscope sample 30 is placed on the sample insertion portion 20a of the jig 30 using tweezers P or the like. Then, by pressing the sample 30 for transmission electron microscope using tweezers P or the like, the sample 30 for transmission electron microscope is slid to the right side in the drawing while being placed on the sample insertion portion 20a. Then, the auxiliary plate 34 of the transmission electron microscope sample 30 is inserted between the lower holding portion 10a and the upper holding portion 12a.
Then, the tip 34a of the auxiliary plate 34 on the sample processing holder HL side contacts the surface C of the contact portion 10b and stops.
That is, when the insertion length of the auxiliary plate 34 becomes the same as the depth X2 of the surface A, the distal end 34a comes into contact with the surface C and stops naturally. This depth X2 is, for example, about 1.5 mm in the present embodiment. Next, the tightening device 14 is tightened, and the lower holding portion 10a and the upper holding portion 12
The distance X1 with respect to “a” is reduced. Then, as can be seen from FIG. 2, the auxiliary plate 34 is sandwiched and held between the lower holding portion 10a and the upper holding portion 12a. That is, the sample 30 for a transmission electron microscope is held by sandwiching the surface A of the lower holding portion 10a and the surface D of the upper holding portion 12a.

As described above, according to the sample processing holder HL according to the present embodiment, the contact portion 10b serving as a positioning stopper is provided on the sample processing holder HL, so that the transmission electron microscope sample 30 can be easily manufactured. With the same insertion length. That is, when the transmission electron microscope sample 30 is inserted between the lower holding portion 10 and the upper holding portion 12, the tip 34a of the auxiliary plate 34 comes into contact with the contact portion 10b. Can be kept constant. Therefore, the transmission electron microscope sample 30
This prevents the sample processing holder HL from penetrating deeply or stopping in front. Therefore, the reproducibility of the mounting position of the transmission electron microscope sample 30 can be obtained in each operation.

Further, according to the sample processing holder system according to the present embodiment, the sample insertion portion 20a for mounting the sample 30 for the transmission electron microscope on the jig JG and sliding the sample processing holder HL is provided. Holder mounting part 20
b, and when the sample processing holder HL is mounted on the holder mounting portion 20b, the sample insertion portion 20
The upper surface H of the sample a and the upper surface A of the lower holding member 10 of the sample processing holder HL are set to have substantially the same height.
0 can be easily inserted into the sample processing holder HL by sliding. Therefore, there is no need to pick up the transmission electron microscope sample 30 with the tweezers P, and the possibility that the transmission electron microscope sample 30 is damaged or lost can be extremely reduced. Moreover, the operation of inserting the transmission electron microscope sample 30 between the lower holding member 10 and the upper holding member 12 in the sample processing holder HL using the tweezers P, and the fastening tool 44
It is not necessary to perform the operation of tightening the sample 30 at the same time, so that the mounting of the transmission electron microscope sample 30 becomes extremely easy.

Moreover, since the spring SP is provided around the fastener 14 between the lower holding member 10 and the upper holding member 12, the loosening of the fastener 14 allows the lower holding member 10 and the upper holding member 12 to be connected to each other. The interval X1 can be naturally expanded. Therefore, the work of mounting the transmission electron microscope sample 30 on the sample processing holder HL can be further facilitated.

(Second Embodiment) In a second embodiment of the present invention, by providing two clamps on the sample processing holder, the interval is reduced while the lower holding member and the upper holding member are maintained in a substantially parallel state. Thus, even if the insertion position of the transmission electron microscope sample is slightly shifted, the sample can be more reliably held.

FIGS. 4A and 4B show a sample processing holder HL and a sample processing holder system according to a second embodiment of the present invention, wherein FIG. 4A is a plan view and FIG. 4B is a side view. FIG. 4 is a diagram corresponding to FIG. 1 of the first embodiment described above.

As can be seen particularly from FIG. 4A, the sample processing holder HL is provided with two fasteners 14A and 14B at positions separated from each other. That is, the fastener 14A is provided on the upper side in the figure of the sample processing holder HL, and the fastener 14B is provided on the lower side in the figure. As can be seen from FIG.
And the fastener 14B are provided so as to penetrate the upper holding member 12 and reach the lower holding member 10. A spring SP is provided around each of the fasteners 14A and 14B. This fastener 14
Except that two A and 14B are provided, it is the same as the above-described first embodiment, and the other description is omitted here.

As described above, in the second embodiment of the present invention, since the two fasteners 14A and 14B are provided, even if the insertion position of the transmission electron microscope sample 30 is slightly shifted, this shift can be easily performed. Sample 30 for transmission electron microscope
Can be held. In other words, even when the transmission electron microscope sample 30 is inserted to be shifted above or below the sample processing holder HL in the drawing, the transmission electron microscope sample 30 is sandwiched between the lower holding member 10 and the upper holding member 12. It can be held more reliably. This is because, by alternately tightening the fasteners 14A and the fasteners 14B, the interval X1 can be reduced while the lower holding member 10 and the upper holding member 12 are kept substantially parallel. It is. That is, even when the transmission electron microscope sample 30 is located at a slightly shifted position, the upper holding member 12 is less likely to tilt upward in the drawing or downward in the drawing.

(Third Embodiment) In a sample processing holder system according to a third embodiment of the present invention, a pair of guide walls for guiding a sample for a transmission electron microscope are provided on a sample insertion portion of a jig by using a pair of guide walls. By providing the sample for the microscope along the insertion direction, the positioning of the sample for the transmission electron microscope is further facilitated.

FIGS. 5A and 5B show a sample processing holder HL and a sample processing holder system according to a third embodiment of the present invention, wherein FIG. 5A is a plan view and FIG. 5B is a side view. FIG. 5 is a diagram corresponding to FIG. 1 of the first embodiment described above.

In particular, as can be seen from FIG.
A pair of guide walls 22, 22 are formed above and below the sample insertion portion 20a in FIG. This guide wall 2
Reference numerals 2 and 22 are for facilitating positioning when inserting the transmission electron microscope sample 30 into the sample processing holder HL. The space X3 inside these guide walls 22, 22
Is formed to be slightly larger than the width of the auxiliary plate 34. At the insertion side of the guide walls 22, 22, that is, at the end opposite to the sample processing holder HL, the transmission electron microscope sample 30 is easily inserted into the space X <b> 3.
An inclined wall 22 is formed. The inclined wall 22 is formed as an oblique wall that gradually widens toward the insertion side. As can be seen from FIG. 5B, in the present embodiment, the guide walls 22 are formed to a height that is approximately half the height of the sample 30 for a transmission electron microscope.

As described above, according to the sample processing holder system according to the third embodiment of the present invention, since the pair of guide walls 20, 20 are formed in the sample insertion portion 20a of the jig JG, it is possible to use a transmission electron microscope. The positioning of the sample 30 is further facilitated. That is, not only the insertion length of the transmission electron microscope sample 30 but also the insertion position can be made constant. That is, the upper and lower insertion positions of the transmission electron microscope sample 30 in the drawing can be made constant. In addition, the direction of the transmission electron microscope sample 30 is fixed, and the sample processing holder H
L. In other words, insertion of the transmission electron microscope sample 30 can be further facilitated.

The present invention is not limited to the above embodiment, but can be variously modified. For example, the fastener 14
It is sufficient that the distance between the lower holding member 10 and the upper holding member 12 is adjustable, such as screws, bolts, clips, etc., instead of screws. That is, any material can be used as long as it can hold the transmission electron microscope sample 30 between the lower holding member 10 and the upper holding member 12. Further, the spring SP provided around the fastening member 14 is not always essential, and can be omitted. If the spring SP is omitted, when inserting the transmission electron microscope sample 30, the upper holding member
2 may need to be lifted.

Further, as shown in FIG. 6, the upper holding member 12 may be provided with a contact portion 12c. That is,
The abutting portion 1 hangs downward from the upper holding member 12.
2c can also be provided. In this case, the portion of the lower holding member 10 facing the contact portion 12c is provided with the contact facing portion 10c.
c is formed. In addition, it is necessary that the surface E of the contact portion 12c does not rise above the surface A of the lower holding portion 10a. Then, the surface F that hangs vertically below the upper holding member 12 functions as a positioning stopper.

[0034]

According to the present invention, when a transmission electron microscope sample having a sample material mounted on an auxiliary plate is inserted into a sample processing holder, the tip of the auxiliary plate abuts and serves as a stopper. Is provided on the sample processing holder, so that the sample for the transmission electron microscope can be sandwiched and held at substantially the same insertion length every time.

[Brief description of the drawings]

FIG. 1 is a view showing a sample processing holder system according to a first embodiment of the present invention.

FIG. 2 is a view showing a sample processing holder system in a state where a sample for a transmission electron microscope is mounted.

FIG. 3 is a view showing a sample processing holder according to the first embodiment of the present invention.

FIG. 4 is a view showing a sample processing holder system according to a second embodiment of the present invention.

FIG. 5 is a view showing a sample processing holder system according to a third embodiment of the present invention.

FIG. 6 is a diagram showing a modification of the sample processing holder system of the present invention.

FIG. 7 is a view showing a conventional sample processing holder.

FIG. 8 is a view showing a state in which a sample for a transmission electron microscope is mounted on a conventional sample processing holder.

[Explanation of symbols]

 HL Sample processing holder JG jig SP Spring 10 Lower holding member 10a Lower holding portion 10b Contact portion 12 Upper holding member 12a Upper holding portion 12b Contact facing portion 14 Fastening tool 20a Sample insertion portion 20b Holder mounting portion 30 Transmission electron microscope Sample

Claims (9)

[Claims] 1. A sample for a transmission electron microscope having a sample material mounted on an auxiliary plate is inserted between a lower holding member and an upper holding member, and the lower holding member and the upper holding member are fastened to each other with a fastener. By clamping the auxiliary plate,
A sample processing holder for holding the transmission electron microscope sample, wherein the sample processing holder is formed on one of the lower holding member and the upper holding member, and holds the transmission electron microscope sample on the lower holding member and the upper holding member. A sample processing holder, comprising: an abutting portion that, when inserted between members, contacts the auxiliary plate and functions as a positioning stopper. 2. The contact portion is formed on the lower holding member, and the contact portion rises upward from a lower holding portion of the lower holding member that sandwiches the auxiliary plate. Are formed one step higher, and the tip of the auxiliary plate abuts when inserting the transmission electron microscope sample on the surface formed between the lower holding portion and the abutting portion and rising. 2. The sample processing holder according to claim 1, wherein said surface serves as a positioning stopper. 3. The contact portion is formed on the upper holding member, and the contact portion hangs downward from an upper holding portion of the upper holding member that sandwiches the auxiliary plate. The lower end of the auxiliary plate is abutted when the transmission electron microscope sample is inserted into the hanging surface formed between the upper holding portion and the contact portion. 2. The sample processing holder according to claim 1, wherein said surface serves as a positioning stopper. 4. The fastening tool is constituted by one screw provided at a position near the center of the contact portion in plan view, penetrating the upper holding member and reaching the lower holding member. Claims 1 to 3 characterized by the following:
The sample processing holder according to any one of the above. 5. The apparatus according to claim 5, wherein the fastening tool is constituted by two screws provided at positions separated from the contact portion in plan view and penetrating the upper holding member and reaching the lower holding member. 4. The sample processing holder according to claim 1, wherein: 6. The sample processing holder according to claim 4, wherein a spring is provided around the screw. 7. A sample processing holder according to claim 1, and a jig for mounting said sample processing holder when mounting said transmission electron microscope sample on said sample processing holder. A sample processing holder system, wherein the jig includes a holder mounting portion for mounting the sample processing holder, and the lower holding member and the upper holding portion by mounting and sliding the sample for transmission electron microscope. A sample insertion portion for inserting the transmission electron microscope sample between the member and the member, and when the sample processing holder is placed on the holder mounting portion, the lower holding member of the sample processing holder A height of the sample insertion portion and a height of the jig and the sample insertion portion are configured to be substantially equal to each other; Temu. 8. The sample processing holder system according to claim 7, wherein a pair of guide walls are formed in the sample insertion section along a direction in which the sample for a transmission electron microscope slides. . 9. An end on the insertion side of the pair of guide walls opposite to the sample processing holder, for increasing an inner space between the pair of guide walls toward the insertion side. 9. The sample processing holder according to claim 8, wherein each of the walls is formed.