JPH059079Y2 - - Google Patents
Info
- Publication number
- JPH059079Y2 JPH059079Y2 JP12430188U JP12430188U JPH059079Y2 JP H059079 Y2 JPH059079 Y2 JP H059079Y2 JP 12430188 U JP12430188 U JP 12430188U JP 12430188 U JP12430188 U JP 12430188U JP H059079 Y2 JPH059079 Y2 JP H059079Y2
- Authority
- JP
- Japan
- Prior art keywords
- opening
- air
- workbench
- width
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 235000019645 odor Nutrition 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12430188U JPH059079Y2 (enrdf_load_stackoverflow) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12430188U JPH059079Y2 (enrdf_load_stackoverflow) | 1988-09-22 | 1988-09-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0245142U JPH0245142U (enrdf_load_stackoverflow) | 1990-03-28 |
| JPH059079Y2 true JPH059079Y2 (enrdf_load_stackoverflow) | 1993-03-05 |
Family
ID=31373917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12430188U Expired - Lifetime JPH059079Y2 (enrdf_load_stackoverflow) | 1988-09-22 | 1988-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059079Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-09-22 JP JP12430188U patent/JPH059079Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0245142U (enrdf_load_stackoverflow) | 1990-03-28 |
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