JPH0590433A - Method of forming metal side wall of electronic part package - Google Patents

Abstract

PURPOSE:To obtain an easy and speedy forming operation of a metal side wall by bending a band plate cut out from a metal plate in a framed shape and forming the metal side wall. CONSTITUTION:A band plate 10 is cut out from a metal plate made of kovar, 42 alloy, etc., by machinings such as etching, press, or wire cut electric discharge machining. Next, grooves 12 are formed inside the band plate 10 by such machining as half etching, press, or wire cut electric discharge machining. Elongated holes 20 having a cutout shape for mounting a ceramic terminal are formed in given positions on the surface of the band plate 10 by such machining as etching, press, or wire cut electric discharge machining. Then, the band plate 10 is bent inward along the grooves 12 and is formed into a square framed shape, and the opposite ends of the band plate 10 are airtightly joined by soldering. Further, a metal bottom plate 30 is airtightly joined to a bottom opening part of the band plate 10 bent into the square framed shape by soldering. Thus, a metal side wall of an electronic part package can easily and speedily be formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a metal wall of an electronic component package, which comprises forming a metal wall made of a metal of an electronic component package accommodating an electronic component such as a semiconductor chip.

[0002]

2. Description of the Related Art Conventionally, as a package for electronic parts, there is a package called a metal package having a peripheral wall made of metal.

Conventionally, the metal wall of this package is formed by the following first and second methods.

The first method is a method in which a metal wall is integrally machined from a metal block by machining.

The second method is to form a metal side wall by forming a metal side wall by cutting a rectangular metal cylinder into a predetermined width, or forming a hole for fitting a ceramic terminal in the metal cylinder. In this method, the lower end opening of the metal side wall is sealed with a metal bottom plate, and the metal bottom plate is hermetically brazed to the peripheral edge of the lower end opening of the metal side wall to form the metal wall.

[0006]

However, when the metal wall is formed by the first method, it takes a lot of time and labor to cut out the metal wall from the metal block.

Further, when the metal wall is formed by the second method, a hole for fitting a ceramic terminal or the like is formed in the metal cylinder for forming the metal sidewall by electric discharge machining or the like instead of press working or the like. It had to be done, and it took a lot of time and effort.

The present invention has been made in view of the above problems, and a method of forming a metal wall of a package for electronic parts (hereinafter, referred to as "metal wall forming method", which enables a metal wall to be formed easily and quickly without a great deal of trouble and time. It is intended to provide a metal wall forming method).

[0009]

In order to achieve the above object, a first metal wall forming method according to the present invention comprises a step of bending a metal side wall forming strip into a frame shape, and the frame body. The end portions of the strips bent in the shape of a butt and airtightly joined, the step of sealing the lower end opening of the strips bent in the shape of a frame with a metal bottom plate, and the metal bottom plate The step of airtightly joining to the peripheral edge of the lower end opening of the strip, and the ceramic terminal fitting, lead sealing or mounting on the band plate before bending into the frame shape or the metal bottom plate before sealing the lower end opening of the band plate. And a step of forming a hole for inserting an optical fiber or the like.

In the first metal wall forming method of the present invention, it is preferable that the groove is formed inside the bent portion of the band plate bent in a frame shape.

A second method of forming a metal wall according to the present invention is a strip for forming a metal side wall, in which a strip having a metal bottom plate continuously provided at a lower end side edge thereof except for the metal bottom plate is a frame body. -Shaped bending step, and bending the metal bottom plate in the direction of the band plate that bends into the frame shape, and sealing the lower end opening of the band plate bent into the frame shape with the metal bottom plate A step, a step of abutting both ends of the frame-shaped bent band plate to join them airtightly, and a step of airtightly bonding the metal bottom plate to the peripheral edge of the lower end opening of the frame-shaped bent plate plate And a step of providing a hole for ceramic terminal fitting, lead sealing or optical fiber insertion in the band plate before being bent into the frame shape or the bottom plate before being bent in the direction of the band plate. Is characterized by.

In the second method of forming a metal wall of the present invention, a groove is formed inside the bending portion of the strip that is bent like a frame or inside the bending portion that bends the metal bottom plate in the strip direction. It is preferable to do so.

In the first and second metal wall forming methods of the present invention, the end side edges of the strip bent in the shape of a frame are deleted and joined to the side edges of the abutting points at both ends of the strip. It is preferable to provide a material pool.

At the same time, it is preferable that both end portions of the strip plate, and the metal bottom plate and the peripheral edge of the lower end opening portion of the strip plate are airtightly joined by brazing.

[0015]

In the first and second metal wall forming methods including the above steps, the metal side wall is formed by bending the strip plate cut out from the metal plate into a frame shape. Therefore, as compared with the case where the metal side wall is cut out from the metal block or the metal cylindrical body is cut into pieces to form the metal side wall, the work of forming the metal side wall can be significantly facilitated and speeded up. At the same time, the metal side wall can be easily and quickly formed without discharging a large amount of waste metal scraps or incurring a large processing cost.

[0016] Further, the strip plate in a state of being broadly developed in a plane shape before being bent into a frame shape or the metal bottom plate in a state of being widely spread in a plane state before being bent in the direction of the strip plate. A hole for fitting a ceramic terminal, fitting a lead, or inserting an optical fiber is provided. Therefore, those holes can be provided easily and quickly without being disturbed by the strip or the metal bottom plate for forming the metal sidewalls around the holes.

Further, a groove is formed inside the bent portion of the band plate that is bent like a frame, or a groove is formed inside the bent portion where the metal bottom plate is bent toward the band plate. In the first and second metal wall forming methods, the strip plate can be easily and accurately bent along the groove provided at the bent portion inside the strip, or the metal bottom plate can be bent inside the bent portion. It can be easily and accurately bent along the provided groove in the strip direction.

Further, the first and second metals for removing the side edges of the band plate bent in the shape of a frame so as to form a pool of bonding material at the side edges of the abutting points of both ends of the band plate. In the wall forming method, when the both ends of the strip are butted against each other and airtightly joined, the joining material is formed into a joining material pool provided at the side edges of the butts at both ends of the strip using the surface tension action. It can be applied as a thick layer. Then, the bonding material layer attached to the bonding material reservoir can seal the leak passage of gas or the like that is likely to be formed at the bonding portion of the strip.

At the same time, the joining material for joining both ends of the strip is collected in the joining material reservoir by utilizing the surface tension action, and the joining material leaks to the outside of the joining portion of the strip and adheres to the surface around the joining portion. Can be prevented.

[0020]

Embodiments of the present invention will now be described with reference to the drawings. 1 to 6 show a preferred embodiment of the first metal wall forming method according to the present invention, and more specifically, are explanatory views of the forming process thereof. The method of forming the metal wall in this figure will be described below.

A strip 10 for forming a metal side wall is provided as shown in FIG.

The strip plate 10 is made of Kovar (Fe-Ni-Co alloy), 42, which is easily wet by a brazing material having a coefficient of thermal expansion matching that of a glass material for ceramic terminals or lead sealing.
A metal plate made of alloy (Fe-Ni alloy) or the like is cut out by etching, pressing, wire-cut electric discharge machining, or the like.

As shown in the enlarged cross-sectional views of FIGS. 2 and 3, the strip 10 has a U-shaped or V-shaped cross-section at several bending points (three in the figure) inside. A groove 12 having a groove is formed across the strip 10. These grooves 1
2 is formed on the inner side of the strip 10 by a half etching process, a press process, a wire cut electric discharge process or the like.

A notched hole-shaped horizontally long hole 20 for fitting a ceramic terminal is provided at a predetermined portion of the surface of the strip plate 10 by etching, pressing, wire cutting electric discharge, or the like.

In accordance with the structure of the metal wall to be formed using the strip plate 10, a hole for inserting an optical fiber or attaching a lead is used instead of the hole 20 for fitting the ceramic terminal. In addition to the holes 20 for fitting or attaching the ceramic terminals, holes for inserting an optical fiber or attaching leads may be provided.

These grooves 12 and holes 20 are provided at the same time when the strip 10 is cut out from the metal plate, at the same time as the inside of the bent portion of the strip 10 and at predetermined portions on the surface of the strip 10.

The groove 12 and the hole 20 may be provided in a predetermined part of the metal plate before cutting the band plate 10 from the metal plate, or after cutting the band plate 10 from the metal plate. 1
It may be set to 0.

Next, as shown in FIG. 4, the strip plate 10 is
The strip plate 10 is bent inward at right angles along the grooves 12 provided at several places inside the bent portion, and the strip plate 10 is bent in a rectangular frame shape as shown in FIG.

Then, the strip 1 bent in the shape of a rectangular frame.
The both ends of 0 are abutted, and the both ends are airtightly joined by brazing using a brazing material.

Both ends of the strip 10 may be airtightly joined by seam welding or an adhesive.

Along with that, the strip 1 bent into a rectangular frame shape
The bottom opening of 0 is sealed with a metal bottom plate 30.

The metal bottom plate 30 is made of copper having a high thermal conductivity so that the heat generated by the electronic components mounted on the metal bottom plate 30 can be efficiently dissipated to the outside through the metal bottom plate 30.
It is made of a metal such as a tungsten alloy. As shown in FIG. 1, for example, the metal bottom plate 30 is formed in a rectangular flat plate shape or the like in which screw holes 32 through which set screws for fixing a metal wall to a substrate or the like are inserted are provided on both sides thereof. The surface of the metal bottom plate 30 is plated with an undercoat (not shown) such as nickel plating for facilitating the wetting of the bottom plate by the brazing material.

Then, a brazing material such as silver brazing is used to hermetically bond the metal bottom plate 30 to the peripheral edge of the lower end opening of the strip plate 10 bent in a rectangular frame shape by brazing.

The metal bottom plate 30 may be hermetically bonded to the peripheral edge of the lower end opening of the strip plate 10 with an adhesive agent or a glass member.

Both end portions of the strip plate 10 and the metal bottom plate 30 and the peripheral edge of the lower end opening of the strip plate 10 are assembled by incorporating the strip plate 10 and the metal bottom plate 30 into a heat-resistant carbon jig (not shown). In the state where they are positioned and fixed to each other, their joints are simultaneously brazed in a high temperature furnace or the like.

It should be noted that both ends of the strip plate 10 and the metal bottom plate 30 and the peripheral edge of the lower end opening of the strip plate 10 are not simultaneously joined, but both ends of the strip plate 10 are joined by brazing or the like, and then the metal bottom plate is joined. 30 may be joined to the peripheral edge of the lower end opening of the strip plate 10 by brazing or the like.

Then, as shown in FIG. 6, Kovar,
42 a metal wall 40 made of an alloy or the like and a copper-tungsten alloy or the like, in which a hole 20 for fitting a ceramic terminal is provided in a predetermined portion of the surface of the metal side wall 42.
Forming 0.

The first metal wall forming method shown in FIGS. 1 to 6 comprises the above steps.

FIG. 7 shows another preferred embodiment of the first metal wall forming method of the present invention, and more specifically, a drawing explaining the forming process thereof. The method of forming the metal wall in this figure will be described below.

In the method of forming the metal wall shown in the figure, a large circular hole 24 for inserting an optical fiber is formed at a predetermined portion on the surface of the strip plate 10.
Is provided. A plurality of small circular holes 22 for attaching leads are provided at predetermined portions on the surface of the metal bottom plate 30. These holes 24, 22 are formed by a strip plate 10 in a state of being widely spread in a flat shape before being bent into a rectangular frame body and a lower end opening portion of the strip plate 10 bent in a rectangular frame body. It is provided on the surface of the metal bottom plate 30 which is in a widely expanded state such as a flat surface before being sealed with the bottom plate 30.

On the surface of the strip plate 10 and the surface of the metal bottom plate 30, instead of the hole 24 for inserting an optical fiber and the hole 22 for lead sealing, according to the structure of the metal wall to be formed using them, A hole for fitting a ceramic terminal may be provided, or a hole for fitting a ceramic terminal may be provided in addition to the hole 24 for inserting an optical fiber and the hole 22 for attaching a lead.

Others are the same as in the first metal wall forming method shown in FIGS. 1 to 6, and holes 24 for inserting an optical fiber and lead seals are provided at predetermined portions on the surface of the strip plate 10 and the surface of the metal bottom plate 30. The metal wall is formed with the wearing holes 22 respectively, and the same members are denoted by the same reference numerals and the description thereof is omitted.

FIGS. 8 to 13 show another preferred embodiment of the first metal wall forming method of the present invention, and more specifically, are explanatory views of the forming process thereof. The method of forming the metal wall in this figure will be described below.

In the method of forming the metal wall shown in the figure, as shown in FIG. 8, the side edges of the end portion of the strip plate 10 which is bent into a frame are removed. Specifically, as shown in FIG. 11 and FIG.
The inner edge of one end of the strip 10 is obliquely cut. Alternatively, as shown in FIG. 13, one end inner edge of the strip 10 is cut in a U-shape. And
When the both ends of the strip plate 10 bent in the shape of a rectangular frame are butted against each other and airtightly joined, a joining material reservoir 14 such as a brazing material or an adhesive agent is provided at the side edges of the butted portions at both ends of the strip plate 10. I am trying.

Next, as shown in FIG. 11, a joining material 18 such as a rod-shaped brazing material is fitted into the joining material reservoir 14 provided on the side edges of the abutting points of both ends of the strip 10 to raise the temperature. The joining material 18 is permeated between the abutting surfaces of both end portions of the strip plate 10 in a furnace or the like, and the both end portions of the strip plate 10 are hermetically sealed by the permeated joint material 18 as shown in FIG. 12 or FIG. Is joined to. Alternatively, a joining material (not shown) such as a thin brazing filler metal for joining the seal ring mounted on the periphery of the upper end opening of the strip 10 bent in the shape of a rectangular frame is provided in the high temperature furnace or the like.
Both ends of the strip plate 10 are permeated between the abutting surfaces of the both ends, and the both ends of the strip plate 10 are airtightly joined as shown in FIG. 12 or FIG. 13. In that case, strip 1
The bonding material 18 is attached thickly in layers in the bonding material reservoir 14 on the side edges of the abutting points at both ends of 0 by utilizing the surface tension effect. And the airtightness of the joint part of the strip 10 is ensured. At the same time, the bonding material 18 is collected in the bonding material reservoir 14 by utilizing the surface tension action, and the bonding material 18
Is prevented from flowing out and adhering to the peripheral surface of the joint portion of the strip 10.

By doing so, the airtightness of the joint portion of the strip 10 can be ensured for the following reason.

When the strip plate 10 is bent into a frame, all the bent portions are not bent at right angles to the side edges of the strip plate 10 but are bent at a slight angle or are distorted. It is often done. At the same time, the abutting surfaces at both ends of the strip 10 are
It is not always flat and often has irregularities at various places. In such a case, the strip 1 bent into a frame shape
When both ends of 0 are abutted, the abutting surfaces of both ends of the strip plate 10 are abutted in a line contact or a point contact state without abutting in a surface contact state without a gap. When the abutting surfaces of both ends of the strip plate 10 that are abutted in such a line contact or point contact state are joined using a joining material such as a brazing material, the abutting faces of both end portions of the strip plate 10 are joined together. The joint material does not evenly and evenly permeate into the sparsely. Then, voids (voids) are generated at various places between the abutting surfaces of both ends of the strip 10 joined by the joining material,
The voids are connected to form a leak passage (not shown) for gas or the like between the abutting surfaces of both ends of the strip 10. Then, the airtightness of the joint portion of the strip 10 is impaired.

In order to eliminate such a difficulty, the strip 1
It is conceivable to increase the amount of the joining material that joins the abutting surfaces of both ends of 0.

However, when the amount of the bonding material is increased,
The void itself generated between the abutting surfaces of both ends of the strip 10 cannot be eliminated, and a leaking path at the joint of the strip 10 is found by being obstructed by the bonding material that thickly covers the surface of the joint of the strip 10. It becomes difficult to do. In addition, the metal wall may be distorted due to the stress caused by the difference in thermal expansion coefficient between the wall and the bonding material, or the bonding material may flow out and adhere to the peripheral surface of the bonding portion of the strip plate 10.

On the other hand, as described above, the strip 1
If the joining material reservoir 14 is provided on the side edges of the abutting points of both ends of 0, when the both ends of the strip plate 10 bent into a frame shape are abutted and joined with a joining material such as a brazing material, The bonding material such as a bonding material is subjected to surface tension and adheres in a thick layer to the bonding material reservoir 14 provided at the side edges of the abutting locations at both ends of the strip 10. Then, the side surface of the joining portion at both ends of the strip 10 is covered with the joining material layer adhered to the joining material reservoir 14 without any gap. Then, the leak passage, which tends to be formed between the abutting surfaces of both ends of the strip plate 10, is reliably closed by the joining material layer attached to the joining material reservoir 14. This is because the airtightness of the joints at both ends of the strip plate 10 is accurately maintained.

Other than that, the metal wall is formed in the same manner as the first metal wall forming method shown in FIGS. 1 to 6, and the same members are denoted by the same reference numerals and the description thereof is omitted. ..

FIG. 14 shows a preferred embodiment of the second metal wall forming method of the present invention, and more specifically shows a drawing for explaining the forming process thereof. The method of forming the metal wall in this figure will be described below.

As shown in FIG. 14, there is provided a strip plate 100 similar to the strip plate 10 shown in FIG. 1 described above, which is provided with a metal bottom plate 300 continuously in the middle of the lower end side edge thereof. It is provided. On both sides of the metal bottom plate 300, a notched hole-shaped screw hole 320 for inserting a set screw for fixing the metal wall to the substrate or the like is provided. The strip plate 100 and the metal bottom plate 300 are integrally cut out from a metal plate such as Kovar or 42 alloy by press working, etching working or wire cut electric discharge working.

At several inner points (four points in the figure) corresponding to the bent portions of the strip plate 100, in the same manner as the strip plate 10 described above,
Grooves 120 having a U-shaped or V-shaped cross section are engraved across the strip plate 100, respectively. At the boundary between the metal bottom plate 300 and the strip plate 100, inside the bent portion of the metal bottom plate 300, a groove 340 having a U-shaped or V-shaped cross section is formed by cutting the boundary vertically. There is. These grooves 120,
340 is the inside of the strip 100 or the metal bottom plate 300 and the strip 1
It is provided on the inner side of the boundary with 00 by half etching or pressing.

A laterally long hole 200 for fitting a ceramic terminal is provided in a predetermined portion of the surface of the strip plate 100 by press working, etching working or the like.

Incidentally, in accordance with the structure of the metal wall to be formed using the strip plate 100, instead of the hole 200 for fitting the ceramic terminal, a hole for lead sealing or insertion of an optical fiber is formed. In addition to the holes 200 for mounting the ceramic terminals, holes for mounting the leads or inserting the optical fiber may be provided.

These grooves 120 and 340 and the hole 200 are provided at the same time as the inner part of the strip 100 or a predetermined portion of the surface of the strip 100 when the strip 100 is cut out together with the metal bottom plate 300 from the metal plate. ..

The grooves 120 and 340 and the hole 200 are
Before cutting the strip 100 from the metal plate together with the metal bottom plate 300, it is provided in advance at a predetermined portion of the metal plate, or after cutting the strip 100 from the metal plate together with the metal bottom plate 300, the predetermined portion of the strip 100. It may be provided inside the boundary between the strip 100 and the metal bottom plate 300.

Then, the strip 100 is bent at a right angle inward along the grooves 120 provided inside the bent portions of the several strips, and the strip 100 is removed except for the metal bottom plate 300. It is bent into a shape.

At the same time, the metal bottom plate 300 continuously provided in the middle of the lower edge side edge of the strip plate 100 is bent at a right angle to the strip plate 100 which is bent in the shape of a rectangular frame. Specifically, the metal bottom plate 300 is composed of the metal bottom plate 300 and the strip plate 10.
The strip 100 along the groove 340 provided on the inner side of the boundary with 0
It is bent at a right angle to the direction. Then, the lower end opening of the strip plate 100 bent in the shape of a rectangular frame is sealed by the metal bottom plate 300.

Next, both end portions of the strip plate 100 bent in the shape of a rectangular frame are butted against each other, and the both end portions are airtightly joined by brazing using a brazing material such as silver brazing.

Both ends of the strip 100 may be airtightly joined by seam welding or an adhesive.

At the same time, a brazing material such as silver brazing is used to hermetically join the metal bottom plate 300 to the peripheral edge of the lower end opening of the strip plate 100 which is bent in the shape of a rectangular frame.

The metal bottom plate 300 may be hermetically joined to the peripheral edge of the lower end opening of the strip plate 100 by seam welding or an adhesive.

Both ends of the strip 100 and the metal bottom plate 30
0 and the peripheral edge of the lower end opening of the strip 100 are incorporated in a heat-resistant carbon jig (not shown) together with the strip 100 and the metal bottom plate 300, and they are positioned and fixed to each other in the high temperature furnace. At the same time, they are joined by brazing.

It should be noted that both ends of the strip 100 and the metal bottom plate 300 and the lower end opening peripheral edge of the strip 100 are not simultaneously joined, but both ends of the strip 100 are joined by brazing or the like, and then the metal bottom plate is joined. 300 may be joined to the peripheral edge of the lower end opening of the strip 100 by brazing or the like.

Then, a metal wall made of Kovar, 42 alloy or the like is formed, in which a hole 200 for fitting a ceramic terminal is provided at a predetermined portion of the metal side wall surface.

The second metal wall forming method shown in FIG. 14 comprises the above steps.

FIG. 15 shows another preferred embodiment of the second metal wall forming method of the present invention, and more specifically shows a drawing for explaining the forming process thereof. The method of forming the metal wall in this figure will be described below.

In the method of forming the metal wall shown in the figure, the metal bottom plate 3
Before bending 00 into the strip 100 direction, the metal bottom plate 30
0 A small circle-shaped hole 22 for attaching a lead in a predetermined area on the surface
A plurality of 0s are provided. The surface of the strip 100 is not provided with holes for fitting ceramic terminals.

In accordance with the structure of the metal wall to be formed, the surface of the metal bottom plate 300 may be provided with a hole for inserting an optical fiber or for fitting a ceramic terminal, instead of the hole 220 for fitting the lead. In addition to the hole for attaching the lead, a hole for inserting an optical fiber or attaching a ceramic terminal may be provided.

Others are the same as the second metal wall forming method shown in FIG. 14, and the metal wall is formed by forming the lead insertion hole 220 in a predetermined portion of the surface of the metal bottom plate 300. The same members are designated by the same reference numerals, and the description thereof will be omitted.

FIGS. 16 to 22 show another preferred embodiment of the second metal wall forming method of the present invention, and more specifically, are explanatory views of the forming process thereof. The method of forming the metal wall in this figure will be described below.

In the metal wall forming method shown in the figure, the side edges of the end portion of the strip plate 100 which is bent into a rectangular frame shape are deleted in the same manner as the first metal wall forming method shown in FIGS. 8 to 13. is doing. Specifically, as shown in FIG. 18, FIG. 19 or FIG. 20, one or both end inner edges of the strip 100 are obliquely cut. Alternatively, FIG. 21 or FIG.
As shown in FIG. 2, one or both end inner edges of the strip 100 are cut in a U-shape. Then, when both ends of the strip plate 100 bent in the shape of a rectangular frame are butted against each other and airtightly joined, a joining material reservoir 140 such as a brazing material or an adhesive agent is provided on the side edges of the butted portions at both ends of the strip plate 100. Is provided.

Next, as shown in FIG. 18, a joining material 180 such as a rod-shaped brazing material is fitted into the joining material reservoir 140 provided at the side edges of the abutting points of both ends of the strip 100, and a high temperature is applied. In the furnace or the like, the bonding material 180 is permeated between the abutting surfaces of both ends of the strip 100, and the permeated bonding material 18
At 0, both ends of the strip plate 100 are airtightly joined. Or
A joint material (not shown) such as a thin brazing filler metal for sealing ring, which is mounted on the periphery of the upper end opening of the strip plate 100 bent in the shape of a rectangular frame, is applied to both end portions of the strip plate 100 in a high temperature furnace or the like. The strips 100 are permeated between the abutting surfaces, and both end portions of the strip 100 are hermetically joined by the permeated joining material. At this time, the bonding material 180 is thickly attached in layers in the bonding material reservoir 140 on the side edges of the abutting locations at both ends of the strip 100 by utilizing the surface tension effect. And the airtightness of the joining part of the strip 100 is ensured. Along with that, the bonding material 1
80 is collected in the bonding material reservoir 140 by utilizing the surface tension effect, and the bonding material 180 is prevented from flowing out and adhering to the peripheral surface of the bonding portion of the strip plate 100.

By doing so, it is possible to ensure the airtightness of the joint portion of the strip plate 100 in the first metal wall forming method shown in FIGS. 8 to 13. The reason is the same.

Other than that, the metal wall is formed in the same manner as the second metal wall forming method shown in FIG. 14 or FIG. 15, the same members are designated by the same reference numerals, and the description thereof will be omitted. ..

In the first and second metal wall forming methods described above, when the strips 10, 100 and the metal bottom plate 300 connected to the strips 100 are thick, etc., the bent portions of the strips 10, 100 in the middle thereof are bent. As shown by the broken lines in FIGS. 2 and 3, on the outside and also on the outside of the boundary between the strip 100 and the metal bottom plate 300,
Sub-grooves 16 with a shallow bottom are engraved to form a thin bent portion between the strips 10 and 100 and the boundary between the strip 100 and the metal bottom plate 300, and the strips 10 and 100 are bent. It is preferable that the strips 10 and 100 and the metal bottom plate 300 be easily bent inwardly of the strips 10 and 100 or toward the strip 100 along the location or the boundary between the strip 100 and the metal bottom plate 300.

When the strips 10, 100 or the metal bottom plate 300 connected to the strips 100 are thin and easily bent, the strips 10 and 100 inside the bent portion or the strip 1 are formed.
00 and the metal bottom plate 300 have grooves 12 and 12 inside the boundary.
0 or the groove 340 is not provided, and the strip plate 10, 100 or the metal bottom plate is formed by using a bending die or the like along the bent portion of the strip plate 10, 100 in the middle or along the boundary between the strip plate 100 and the metal bottom plate 300. 300 may be bent inside the strips 10, 100 or toward the strip 100.

Further, the strip plates 10 and 100 are, as shown in FIGS.
The ends of 0 may be bent so that they come to the corners of the strips 10 and 100 that are bent like a frame, or FIGS.
As shown in FIG. 7, both ends of the strips 10 and 100 may be bent so as to come to a flat portion between the corners of the strips 10 and 100 that are bent like a frame.

Further, as shown in FIG. 23, the strips 10,
The contact plates 50 may be applied to the insides of both end portions of the strip 100, and both end portions of the strip plates 10 and 100 may be joined together with the contact plate 50 reliably and airtightly.

Alternatively, as shown in FIG. 24, the strip plate 10,
Steps 60a and 60b facing the inside and the outside of the strips 10 and 100 are formed at the front end edges of both ends of 100 by half-etching or the like, respectively, and the steps 60a and 60b facing the opposite directions are superposed without a gap. With the
The both ends of the strips 10 and 100 may be widely and surely joined in a hermetic manner by brazing or the like.

Further, both ends of the strips 10 and 100 are temporarily joined in advance by spot welding or the like to accurately position both ends of the strips 10 and 100, and then both ends thereof are hermetically joined by brazing or the like. You may. And the strips 10, 1
The both ends of 00 may be joined by brazing or the like in a state where both ends are always accurately positioned and fixed.

In the first and second metal wall forming methods of the present invention, a metal for forming a metal side wall is formed by bending a strip plate into a polygonal frame shape such as a triangle, a hexagon, or an octagon. It can also be used as a wall forming method.

[0085]

As described above, according to the first and second metal wall forming methods of the present invention, the metal side wall of the electronic component package can be formed easily and quickly without taking time and labor. .. Along with that, when forming the metal side wall,
It is possible to easily and quickly form the metal side wall without discharging a large amount of waste metal scraps and incurring a large processing cost.

Further, in a state where the strip or the metal bottom plate for forming the metal wall is widely spread in a flat shape or the like, holes are formed in the strip or the metal bottom plate for fitting ceramic terminals, lead sealing, or inserting an optical fiber. , And can be easily and quickly provided by press working without being disturbed by the strip or the metal bottom plate for forming the metal side wall in the periphery thereof.

[Brief description of drawings]

FIG. 1 is a plan view showing a forming step of a first metal wall forming method of the present invention.

FIG. 2 is an enlarged cross-sectional view around the groove of FIG.

FIG. 3 is an enlarged cross-sectional view around the groove of FIG.

FIG. 4 is a perspective view showing a forming step of the first metal wall forming method of the present invention.

FIG. 5 is a perspective view showing a forming step of the first metal wall forming method of the present invention.

FIG. 6 is a perspective view of a metal wall formed by the first metal wall forming method of the present invention.

FIG. 7 is a plan view showing a forming step of the first metal wall forming method of the present invention.

FIG. 8 is a perspective view showing a forming step of the first metal wall forming method of the present invention.

FIG. 9 is a perspective view showing a forming step of the first metal wall forming method of the present invention.

FIG. 10 is a perspective view of a metal wall formed by the first metal wall forming method of the present invention.

FIG. 11 is an enlarged cross-sectional view of the vicinity of the joining portion of the strips according to the first metal wall forming method of the present invention.

FIG. 12 is an enlarged cross-sectional view of the vicinity of a joint portion of a strip plate according to the first metal wall forming method of the present invention.

FIG. 13 is an enlarged cross-sectional view of the vicinity of a joint portion of a strip plate according to the first metal wall forming method of the present invention.

FIG. 14 is a plan view showing a forming step of the second metal wall forming method of the present invention.

FIG. 15 is a plan view showing a forming step of a second metal wall forming method of the present invention.

FIG. 16 is a perspective view showing a forming step of a second metal wall forming method of the present invention.

FIG. 17 is a perspective view showing a forming step of the second metal wall forming method of the present invention.

FIG. 18 is an enlarged cross-sectional view of the vicinity of a joint portion of a strip plate according to the second metal wall forming method of the present invention.

FIG. 19 is an enlarged cross-sectional view around a joint portion of a strip plate according to the second metal wall forming method of the present invention.

FIG. 20 is an enlarged cross-sectional view of the vicinity of a joint portion of the strips according to the second metal wall forming method of the present invention.

FIG. 21 is an enlarged cross-sectional view of the vicinity of a joint portion of a strip plate according to the second metal wall forming method of the present invention.

FIG. 22 is an enlarged cross-sectional view of the vicinity of a joint portion of a strip plate according to the second metal wall forming method of the present invention.

FIG. 23 is a plan view showing the forming steps of the first and second metal wall forming methods of the present invention.

FIG. 24 is a plan view showing a forming step of the first and second metal wall forming methods of the present invention.

[Explanation of symbols]

 10 band plate 12 groove 14 bonding material reservoir 16 sub-groove 18 bonding material 20, 22, 24 holes 30 metal bottom plate 40 metal wall 42 metal sidewall 100 band plate 120 groove 140 bonding material pool 180 bonding material 200 hole 300 metal bottom plate 340 groove

Claims (6)

[Claims] 1. A step of bending a band plate for forming a metal side wall into a frame shape, a step of abutting both ends of the band plate bent into the frame shape and joining them in an airtight manner, and the frame shape. A step of sealing the lower end opening of the bent strip plate with a metal bottom plate, a step of hermetically joining the metal bottom plate to the peripheral edge of the lower end opening part of the strip plate, and a band before being bent into the frame shape. Plate or the metal bottom plate before sealing the lower end opening of the strip plate, the step of providing a hole for ceramic terminal fitting, lead sealing or optical fiber insertion, etc. Forming method. 2. The method for forming a metal wall of an electronic component package according to claim 1, wherein a groove is formed inside the bent portion of the band plate bent into a frame shape. 3. A band plate for forming a metal side wall, wherein a band plate having a metal bottom plate continuously provided at a lower end side edge thereof is bent into a frame shape except for the metal bottom plate, and the frame. Bending the metal bottom plate in the direction of the strip that bends into a body, and closing the lower end opening of the strip bent into the frame with the metal bottom plate; and bending into the frame Abutting both ends of the formed strip to join them airtightly, joining the metal bottom plate to the periphery of the lower end opening of the strip bent into the frame, and bending it into the frame Of the electronic component package, including the step of providing a ceramic terminal fitting attachment, lead sealing attachment or optical fiber insertion hole, etc. in the band plate before bending or in the metal bottom plate before bending in the direction of the band plate. Metal wall formation method. 4. The electronic component according to claim 3, wherein a groove is formed on the inside of the bent portion of the strip that is bent into a frame or inside the bent portion that bends the metal bottom plate in the strip direction. Method for forming metal wall of packaging. 5. The bonding material reservoir is provided on the side edges of the abutting points of both ends of the strip by removing the side edges of the strip bent into a frame shape. Alternatively, the method for forming a metal wall of a package for electronic parts according to item 4. 6. The electron according to claim 1, wherein both end portions of the strip plate and the metal bottom plate and the peripheral edge of the lower end opening of the strip plate are airtightly joined by brazing. Method of forming metal wall of component package.