JPH0590067U - Rotary micro valve - Google Patents

Abstract

(57) [Summary] [Objective] To provide a rotary microvalve that is easy to adjust and does not leak. [Structure] A first substrate (20) having a circular recess formed on one surface and a diaphragm (21) formed on the recess and the other surface.
And a circular rotary plate (22) with a flow path (28) formed on one surface and a linear magnet (23) formed through the center of the other surface.
A second substrate (24) having an inlet / outlet channel (25) fixed to the first substrate while covering the rotating plate in a state where the rotating plate is housed in the recess of the first substrate; A pressing means (26) for pressing the diaphragm of one substrate, a magnetic field generating means (29) provided in the thickness direction of the first and second substrates at a substantially equal distance from the vicinity of the center of the magnet, and the magnetic field The direction is switched in association with the pressing timing of the pressing means.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a microvalve which is suitable for use in gas channel switching of a micro gas chromatography formed on a silicon substrate, for example.

[0002]

[Prior Art]

 Conventionally, as this type of microvalve, there is known a microvalve having a structure shown in cross section in FIG. In FIG. 4, reference numeral 1 denotes a first substrate made of silicon, and a diaphragm having a mesa portion 6 in a central portion formed by etching is formed on the silicon substrate 1 and communicates with a concave portion forming the diaphragm. The groove 7 is formed. Reference numeral 2 is a second substrate made of pyrex glass. Through holes 9 and 10 serving as fluid inlets and outlets are formed at the positions of the mesa 6 and the groove 7, and the first and second substrates are anodes. It is formed by joining.

Reference numeral 4 denotes a support member having a U-shaped cross section, which covers the back surface of the mesa portion 6 formed on the first substrate 1 and is fixed by an adhesive. Reference numeral 5 denotes a piezoelectric actuator (hereinafter, simply referred to as an actuator). One end of the actuator 5 is arranged at the bottom of the support member 4, and the other end thereof is arranged at the back surface of the mesa portion 6 of the first substrate. Reference numeral 12 is a power supply for applying a voltage to the actuator.

The first substrate has a thickness of 0.3 mm, the second substrate has a gap D of about 6 μm, the actuator has a cross section of 4.2 mm ² , and a length of about 9 mm. Is displaced by about 8 μm.

According to the valve having the above configuration, when the power source 12 of the actuator 5 is off, the fluid flows from the through hole 9 to the through hole 10 side, and when the power source 12 is on, the actuator 5 extends. Since the outflow hole 10 is closed by the mesa portion 6, a normally open type valve can be realized.

[0006]

[Problems to be solved by the device]

 However, the conventional microvalve described above has a problem that adjustment is difficult because the extension distance of the piezoelectric actuator is extremely short. The present invention has been made to solve the above-mentioned problems of the prior art. The diaphragm pressing means functions as the fixing / releasing means of the rotary plate, and the switching of the flow path is performed by rotating the rotary plate. It is an object of the present invention to provide a microvalve that is easy to manufacture and does not leak.

[0007]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the present invention comprises a first substrate having a circular recess formed on one surface, a diaphragm formed on the recess and the other surface, and a channel formed on one surface. A circular rotary plate having a linear magnet formed through the center of the other surface, and a state where the rotary plate is housed in the recess of the first substrate, and the rotary plate is covered to the first substrate. A second substrate having a fixed inlet / outlet channel, a pressing means for pressing the diaphragm of the first substrate, and a thickness direction of the first and second substrates that are substantially equidistant from the center of the magnet. It is characterized in that the provided magnetic field generating means and the direction of the magnetic field are switched in association with the pressing timing of the pressing means.

[0008]

[Action]

 In the normal state, the diaphragm is pressed by the pressing means to restrict the movement of the rotary plate. When switching the flow paths, the pressing means is driven to release the regulation of the rotary plate, and when the magnetic field generating means generates a magnetic field, the rotary plate rotates 180 ° and the flow paths are switched. Then, the driving of the pressing means is released to fix the rotary plate.

[0009]

【Example】

 The present invention will be described below with reference to the drawings. FIG. 1 is a sectional view (a) showing an embodiment of the microvalve of the present invention, a view (b) taken along line XX of FIG. 1, a plan view and a bottom view of a rotary plate 22. In these figures, reference numeral 20 denotes a first substrate made of, for example, a silicon single crystal having a diameter of 5 mm and a thickness of about 0.5 mm, and one surface of the first substrate 20 has a concave portion formed by isotropic etching. A diaphragm 21 having a diameter of 2 mm and a thickness of about 0.1 μm is formed on the other surface.

Reference numeral 22 is a rotating plate made of, for example, a silicon single crystal having a diameter of 2 mm and a thickness of about 0.4 mm, and one surface has a depth of 0. A flow path 25 of about 1 mm is formed, and a linear magnet 23 made of Pt—Co is formed in the center on the other surface by sputtering or the like (this magnet portion is a flat surface of the rotating plate with the magnet formed). It is desirable to partially remove the surface of the rotating plate in advance so that it does not become convex.) Reference numeral 24 denotes a second substrate made of, for example, a silicon single crystal having a diameter of about 5 mm and a thickness of about 0.5 mm, and the second substrate has inlet / outlet channels 25a to 25c formed at three locations.

Note that the relationship between the concave portion of the first substrate and the rotary plate housed therein is processed so that it smoothly moves while the second substrate is fixed. Reference numeral 26 is a pressing means composed of a piezoelectric actuator arranged on the diaphragm 21. The pressing means 26 is fixed to the fixed plate 30 side, and the diaphragm is not pressed when the voltage is not applied, and presses the diaphragm 21 in the expanded state when the voltage is applied. In this case, the height of the fixed plate 30 is adjusted to adjust the regulation of the rotary plate 22, but the regulation can be easily adjusted by adjusting the height of the fixed plate with a screw. Further, this pressing means may be constructed as shown in the sectional view of FIG. 2, for example. That is, in FIG. 2, a cylindrical piezo actuator 26a having an inner diameter larger than the outer diameter of the diaphragm 21 is arranged so as to surround the diaphragm 21, and a column 26b having a diameter smaller than the diameter of the diaphragm is arranged at the center thereof. ing.

Then, the pillar 26b presses the diaphragm to restrict the movement of the rotary plate 22 without applying a voltage to the piezo actuator 26a, and when the voltage is applied to the actuator 26a, the pressing force is released by the extension of the actuator. Adjust so that the rotating plate becomes smooth. In this case, the adjustment can be performed by adjusting the plate thickness of the rotary plate, so that the processing is easy. Reference numeral 29 is a magnetic field generating means including a power source 29a, a coil 29b, and a load resistor 29c, which generates a magnetic field around the coil by energization.

In the above structure, when the actuator is first turned on to extend the actuator to release the regulation of the rotating plate and the magnetic field generating means is energized, a magnetic field is generated around the coil, and the tangential direction of the magnetic field is generated according to the right-hand screw law. The rotating plate rests according to the direction of the NS of the magnet. When the rotating plate comes to rest, the actuator is turned off to contract the actuator and regulate the movement of the rotating plate. In the flow path 25, for example, the inlet / outlet flow paths 25a and 25b communicate with each other while the rotary plate 22 is stationary. Next, when switching the flow paths, the same operation is performed to release the regulation of the rotary plate and switch the direction of the current flowing to the magnetic field generating means 29, whereby the rotary plate rotates 180 ° and the flow paths 25a and 25c Communicate. Fig. 3 shows a time chart of the actuator drive circuit system and the rotary circuit system. At ₁ hour after the actuator was turned on and the regulation of the rotary plate was released, the rotary circuit system was turned on and the rotary plate rotated 180 °. After Δt ₂ hours, the actuator turns off and regulates the rotating plate.

According to the above configuration, various flow passages can be switched by changing the shape of the flow passages and the number and positions of the input and output flow passages. Although the dimensions and materials of the micropump are shown in the above embodiment, various designs can be made if necessary. Also, the pressing means is not limited to the embodiment.

[0015]

[Effect of the device]

 According to the present invention, as described in detail with reference to the above-described embodiments, the flow path is switched by the rotating plate and is operated in association with the pressing timing of the pressing means. A valve can be realized.

[Brief description of drawings]

FIG. 1 is a cross-sectional view (a), an XX view (b) of FIG.

FIG. 2 is a cross-sectional configuration diagram showing an embodiment of a pressing means used in the present invention.

FIG. 3 is a diagram showing a time chart of an actuator drive circuit system and a rotary circuit system of the microvalve of the present invention.

FIG. 4 is a cross-sectional configuration diagram of a conventional microvalve.

[Explanation of symbols]

 20 First Substrate 21 Diaphragm 22 Rotating Plate 23 Magnet 24 Second Substrate 25 Inlet / Outlet Flow Path 26 Pressing Means 28 Flow Path 29 Magnetic Field Generating Means 30 Fixed Plate

Front page continuation (72) Inventor Atsuhiko Kambara 2-3-9 Nakamachi, Musashino City, Tokyo Yokogawa Electric Co., Ltd.

Claims (1)

[Scope of utility model registration request] 1. A first substrate having a circular recess formed on one surface and a diaphragm (21) formed on the recess and the other surface.
(20) and a circular rotary plate having a flow path (28) formed on one surface and a linear magnet (23) formed through the center of the other surface.
(22) and a second substrate (24) having an inlet / outlet channel (25) fixed to the first substrate while covering the rotor plate in a state where the rotor plate is housed in the recess of the first substrate, A pressing means (26) for pressing the diaphragm of the first substrate, and a magnetic field generating means (29) provided in the thickness direction of the first and second substrates at a substantially equal distance from the vicinity of the center of the magnet, A rotary microvalve wherein the direction of the magnetic field is switched in association with the pressing timing of the pressing means.