JPH0589799A - Picture display device and manufacture thereof - Google Patents

Picture display device and manufacture thereof

Info

Publication number
JPH0589799A
JPH0589799A JP24882291A JP24882291A JPH0589799A JP H0589799 A JPH0589799 A JP H0589799A JP 24882291 A JP24882291 A JP 24882291A JP 24882291 A JP24882291 A JP 24882291A JP H0589799 A JPH0589799 A JP H0589799A
Authority
JP
Japan
Prior art keywords
getter
vacuum
container
display device
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24882291A
Other languages
Japanese (ja)
Inventor
Kouji Katano
光詞 片野
Hirofumi Yamakita
裕文 山北
Kazuyoshi Kajita
和芳 梶田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP24882291A priority Critical patent/JPH0589799A/en
Publication of JPH0589799A publication Critical patent/JPH0589799A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent an abnormal getter flash induced by local deterioration in degree of vacuum by enforcing gas discharge of a getter by previous heating and baking so as to suppress discharge gas at a flash time to the minimum. CONSTITUTION:An electrode structure 2 consisting of an electron emitting source, a control electrode group accelerating, focusing, deflecting or modulating electrons, and a fluophor which emitts light by hitting of electrons is arranged inside a flat vacuum container 1. The vacuum container 1 consists of a glass- made front container 3 and a metallic rear container 4, while housing the electrode structure 2 and a getter 5 inside thereof, applying circular laser welding to the metallic junction member 7 and the rear container 4 previously glass- bonded to the front container 3, and then the inside of the glass container 11 is vacuum-exhausted and sealed-off. The getter 5 to be used is previously subjected to gas discharge in a vacuum or a specific gas atmosphere such as CO2 by heating and baking up to 600 to 700 deg.C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はゲッターにより管内を高
真空に維持するようにした電子管型の画像表示装置およ
びその製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron tube type image display device in which the inside of a tube is maintained in a high vacuum by a getter and a method for manufacturing the same.

【0002】[0002]

【従来の技術】近年、平板型画像表示装置として液晶を
用いる方式、プラズマ放電を発光に用いる方式のほか、
従来の陰極線管のように電子ビームを用いる方式が開発
されている。このうち電子ビームを用いる平板型画像表
示装置は、真空中の電子放出源と平面状電極群とにより
電子ビームを表容器に形成した蛍光面の所望の画素に射
突させ発光させるものである。
2. Description of the Related Art In recent years, in addition to a system using a liquid crystal as a flat panel image display device and a system using plasma discharge for light emission,
A method using an electron beam has been developed like a conventional cathode ray tube. Among them, the flat panel type image display device using an electron beam is one in which an electron beam is made to impinge on a desired pixel on a phosphor screen formed in a front container to emit light by an electron emission source in vacuum and a group of flat electrodes.

【0003】一般に電子管では、封止時に管内に残留す
る気体や封止後に管内の構成材料から放出される気体に
より管内の真空度が低下するのを防ぐため、ゲッターに
よりこれらの気体を吸着し管内を高真空に維持してい
る。
Generally, in an electron tube, in order to prevent a vacuum degree in the tube from being lowered by a gas remaining in the tube at the time of sealing or a gas released from a constituent material in the tube after sealing, the gas is adsorbed by a getter and the inside of the tube is absorbed. Is maintained at a high vacuum.

【0004】このゲッターには、真空中で管の内壁にフ
ラッシュすることにより蒸気と蒸着膜の両方の状態で機
能する蒸発型ゲッターと、金属材料に塗布するなどして
真空中で焼成することにより機能する非蒸発型ゲッター
とがあり、前者の材料としてはBa、Mg、Alなど、
後者の材料としてはZr、Ti、Thなどが知られてい
る。
The getter includes an evaporation type getter which functions in both a vapor state and a vapor-deposited film by flashing on the inner wall of the tube in a vacuum, and a getter in a vacuum applied to a metal material. There are non-evaporable getters that function, and the former materials include Ba, Mg, Al, etc.
Zr, Ti, Th and the like are known as the latter material.

【0005】これらのことは電子管の分野では公知であ
り、電子ビームを用いた平板型画像表示装置において
も、特開昭60−198044号公報、特開昭61−3
2336号公報などにその技術が開示されている。
These are well known in the field of electron tubes, and even in a flat panel image display device using an electron beam, JP-A-60-198044 and JP-A-61-3 are used.
The technique is disclosed in Japanese Patent No. 2336 or the like.

【0006】次に、従来の平板型画像表示装置について
図2により説明する。偏平なガラス容器11内に、電子
を放出する電子放出源と、放出された電子を加速、集
束、偏向、あるいは変調する制御電極郡と、電子が射突
する事によって発光する蛍光体からなる電極構体12を
配設している。ガラス容器11は表容器13と裏容器1
4とからなり、内部に電極構体12、ゲッター15を収
納したのち、両者を組み合せて封止接合する。ガラス容
器11の封止接合は一般に低融点ガラスにより450〜
500℃に加熱、焼成することによって行なう。しかる
のちガラス容器11の内部を真空排気し、封じ切る。
Next, a conventional flat panel image display device will be described with reference to FIG. In a flat glass container 11, an electron emission source that emits electrons, a control electrode group that accelerates, focuses, deflects, or modulates the emitted electrons, and an electrode made of a phosphor that emits light when the electrons collide with each other. The structure 12 is provided. The glass container 11 is a front container 13 and a back container 1.
4, the electrode structure 12 and the getter 15 are housed inside, and then both are combined and sealed and joined. The sealing and bonding of the glass container 11 is generally 450-
It is performed by heating to 500 ° C. and firing. After that, the inside of the glass container 11 is evacuated and sealed.

【0007】封じ切り前あるいは封じ切り後、内蔵した
ゲッター15を抵抗加熱によりフラッシュし、封じ切る
時に管内に残留する気体や封じ切った後に管内の構成材
料から放出される気体によって管内の真空度が低下する
のを防ぐ。この例ではBa合金ゲッターを用いており、
Ni粉末を添加したBa−Al合金15aを細長い金属
製ケース15bに充填しこのケース15bに電流を流し
てBa−Al合金15aを加熱することにより約800
℃でBa−Alが分解しNiと反応する。この反応は発
熱反応であり、この反応熱で1100〜1200℃まで
昇温しBaをフラッシュしガラス容器11の内壁にBa
膜16を蒸着する。
Before or after the seal is closed, the built-in getter 15 is flashed by resistance heating, and when the seal is cut off, the gas remaining in the pipe or the gas released from the constituent materials inside the pipe causes the degree of vacuum in the pipe to change. Prevent it from dropping. In this example, a Ba alloy getter is used,
The Ba-Al alloy 15a containing Ni powder is filled in a slender metal case 15b, and a current is passed through the case 15b to heat the Ba-Al alloy 15a to about 800.
Ba-Al decomposes and reacts with Ni at ℃. This reaction is an exothermic reaction, and the reaction heat raises the temperature to 1100 to 1200 ° C., flushes Ba, and causes Ba on the inner wall of the glass container 11.
The film 16 is deposited.

【0008】[0008]

【発明が解決しようとする課題】本発明者らは従来より
低融点ガラスを用いず、レーザー溶接などにより室温雰
囲気で真空容器を封止接合する容器構成を提案してい
る。しかしながらこのような構成では、ゲッターは45
0〜500℃という高温プロセスを経ないので脱ガスが
不十分となる。併せて平板型画像表示装置の場合は、C
RTと異なり構造上ゲッターをフラッシュする空間が狭
いのでフラッシュ時、ゲッターから大量のガスが放出さ
れ真空度が局所的に劣化するため正常なゲッターフラッ
シュができないという問題点を有していた。
The inventors of the present invention have proposed a container structure in which a vacuum container is sealed and joined in a room temperature atmosphere by laser welding or the like without using a low melting point glass. However, in such a configuration, the getter is 45
Degassing is insufficient because a high temperature process of 0 to 500 ° C. is not performed. In addition, in the case of a flat panel image display device, C
Since the space for flashing the getter is narrow due to the structure unlike RT, a large amount of gas is released from the getter at the time of flashing and the degree of vacuum is locally deteriorated, so that there is a problem that a normal getter flash cannot be performed.

【0009】本発明は上記問題点に鑑み、室温雰囲気で
真空容器を封止接合したばあいでも正常にゲッターフラ
ッシュできる画像表示装置を提供することを目的とす
る。
In view of the above problems, it is an object of the present invention to provide an image display device which can normally getter flash even when a vacuum container is sealed and joined in a room temperature atmosphere.

【0010】[0010]

【課題を解決するための手段】上記問題点を解決するた
めに本発明の画像表示装置は、少なくとも電子を放出す
る電子源と、電子ビームを制御する制御電極と、電子ビ
ームが射突して発光する蛍光表示部と、ゲッターとを備
え、これらを内蔵した真空容器を室温雰囲気で封止接合
した画像表示装置であって、前記ゲッターはあらかじめ
真空中あるいは特定の気体中で加熱、焼成したものであ
る。
In order to solve the above-mentioned problems, an image display device of the present invention has an electron source that emits at least an electron, a control electrode that controls the electron beam, and an electron beam that collides. An image display device comprising a fluorescent display unit that emits light and a getter, wherein a vacuum container containing these is sealed and joined in a room temperature atmosphere, and the getter is previously heated and baked in a vacuum or in a specific gas. Is.

【0011】[0011]

【作用】本発明は上記した構成によって以下のような作
用を有する。すなわち、ゲッターをあらかじめ真空中、
あるいは特定の気体中で加熱、焼成することによって含
有した不要成分をガスとして十分放出させることによ
り、ゲッターフラッシュ時のガス放出を抑制し、真空度
の劣化を防ぐこととなる。
The present invention has the following functions due to the above-mentioned structure. That is, the getter is previously vacuumed,
Alternatively, by heating and firing in a specific gas, the unnecessary components contained therein are sufficiently released as a gas, so that the release of gas during getter flash is suppressed and the deterioration of the degree of vacuum is prevented.

【0012】[0012]

【実施例】以下本発明の一実施例の画像表示装置につい
て、図面を参照しながら説明する。図1は本発明の実施
例における画像表示装置の断面模式図を示すものであ
る。偏平な真空容器1内に、電子を放出する電子放出源
と、放出された電子を加速、集束、偏向、あるいは変調
する制御電極郡と、電子が射突する事によって発光する
蛍光体からなる電極構体2を配設している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An image display device according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic sectional view of an image display device according to an embodiment of the present invention. In a flat vacuum container 1, an electron emission source for emitting electrons, a control electrode group for accelerating, focusing, deflecting, or modulating emitted electrons, and an electrode made of a phosphor that emits light when the electrons collide with each other. The structure 2 is arranged.

【0013】真空容器1は、ガラス製の表容器3と金属
製の裏容器4とからなり、内部に電極構体2、ゲッター
5を収納したのち、両者を組み合せて封止接合する。真
空容器1の封止接合は、あらかじめ表容器3に低融点ガ
ラスにより接合された金属製の接合部材7と裏容器4と
を全周レーザー溶接することにより行なう。しかるのち
ガラス容器11の内部を真空排気し、封じ切る。
The vacuum container 1 comprises a glass front container 3 and a metal back container 4. The electrode structure 2 and the getter 5 are housed inside, and then the two are combined and sealed and joined. Sealing and joining of the vacuum container 1 is performed by laser-welding the metal joining member 7 previously joined to the front container 3 with low-melting glass and the back container 4 all around. After that, the inside of the glass container 11 is evacuated and sealed.

【0014】ゲッター5は、あらかじめ真空中あるいは
CO2などの特定のガス雰囲気中で600〜700℃ま
で加熱、焼成したものを組み込んでおく。封じ切り前あ
るいは封じ切り後、内蔵したゲッター5を抵抗加熱によ
りフラッシュし、内壁にBa膜6を蒸着する。事前の加
熱、焼成によってゲッター5に含有した不要成分をガス
として十分放出させてあるので、この時放出するガスは
最低限に抑制することができる。
As the getter 5, a getter which is heated and baked to 600 to 700 ° C. in a vacuum or a specific gas atmosphere such as CO 2 is incorporated in advance. Before or after sealing, the built-in getter 5 is flashed by resistance heating to deposit a Ba film 6 on the inner wall. Since the unnecessary components contained in the getter 5 are sufficiently released as a gas by heating and firing in advance, the gas released at this time can be suppressed to the minimum.

【0015】以上のように本実施例よれば、少なくとも
電子を放出する電子源と、電子ビームを制御する制御電
極と、電子ビームが射突して発光する蛍光表示部と、ゲ
ッターとを備え、これらを内蔵した真空容器を室温で気
密封止した画像表示装置であって、前記ゲッターはあら
かじめ真空中あるいは特定の気体中で加熱、焼成したこ
とにより、ゲッターフラッシュ時のガス放出を抑制する
ことができ、しかして局所的な真空度の劣化が誘発する
異常なゲッターフラッシュを防止できる。
As described above, according to this embodiment, at least the electron source for emitting electrons, the control electrode for controlling the electron beam, the fluorescent display section for emitting the electron beam to emit light, and the getter are provided, An image display device in which a vacuum container containing these is hermetically sealed at room temperature, wherein the getter is heated in advance in a vacuum or in a specific gas to be fired, thereby suppressing gas release during getter flashing. It is possible to prevent abnormal getter flash caused by local deterioration of the degree of vacuum.

【0016】[0016]

【発明の効果】以上のように本発明は、少なくとも電子
を放出する電子源と、電子ビームを制御する制御電極
と、電子ビームが射突して発光する蛍光表示部と、ゲッ
ターとを備え、これらを内蔵した真空容器を室温で封止
接合した画像表示装置であって、前記ゲッターはあらか
じめ真空中あるいは特定の気体中で加熱、焼成したこと
により、ゲッターフラッシュ時のガス放出を抑制するこ
とができ、しかして局所的な真空度の劣化が誘発する異
常なゲッターフラッシュを防止することができる。
As described above, the present invention includes at least an electron source that emits electrons, a control electrode that controls the electron beam, a fluorescent display unit that emits light when the electron beam strikes, and a getter. An image display device in which a vacuum container containing these is sealed and bonded at room temperature, and the getter is capable of suppressing gas release during getter flash by heating and firing in advance in a vacuum or in a specific gas. Therefore, it is possible to prevent an abnormal getter flash caused by the local deterioration of the degree of vacuum.

【0017】したがってゲッターの能力を最大限発揮さ
せることが可能となり、長期間高真空を維持する信頼性
の高い画像表示装置を提供することができ、その工業的
価値は高いものである。
Therefore, it is possible to maximize the ability of the getter, and it is possible to provide a highly reliable image display device that maintains a high vacuum for a long period of time, and its industrial value is high.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の画像表示装置の実施例における断面模
式図
FIG. 1 is a schematic sectional view of an image display device according to an embodiment of the present invention.

【図2】従来の画像表示装置の断面模式図FIG. 2 is a schematic sectional view of a conventional image display device.

【符号の説明】[Explanation of symbols]

1 真空容器 2 電極構体 3 表容器 4 裏容器 5 ゲッター 7 接合部材 1 vacuum container 2 electrode structure 3 front container 4 back container 5 getter 7 joining member

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】少なくとも電子を放出する電子源と、電子
ビームを制御する制御電極と、電子ビームが射突して発
光する蛍光表示部と、ゲッターとを備え、これらを内蔵
した真空容器を室温雰囲気で封止接合した画像表示装置
であって、前記ゲッターはあらかじめ真空中あるいは特
定の気体中で加熱、焼成したことを特徴とする画像表示
装置。
1. A vacuum container having at least an electron source for emitting electrons, a control electrode for controlling an electron beam, a fluorescent display section for emitting an electron beam to emit light, and a getter. An image display device sealed and bonded in an atmosphere, wherein the getter is heated and baked in a vacuum or a specific gas in advance.
【請求項2】少なくとも電子を放出する電子源と、電子
ビームを制御する制御電極と、電子ビームが射突して発
光する蛍光表示部と、あらかじめ真空中あるいは特定の
気体中で加熱、焼成したゲッターとを真空容器内に収納
したのち、前記真空容器を室温雰囲気で封止接合したこ
とを特徴とする画像表示装置の製造方法。
2. An electron source which emits at least electrons, a control electrode which controls an electron beam, a fluorescent display portion which emits light by being bombarded by the electron beam, and is previously heated and baked in a vacuum or a specific gas. A method for manufacturing an image display device, comprising: storing a getter in a vacuum container, and sealingly bonding the vacuum container in a room temperature atmosphere.
JP24882291A 1991-09-27 1991-09-27 Picture display device and manufacture thereof Pending JPH0589799A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24882291A JPH0589799A (en) 1991-09-27 1991-09-27 Picture display device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24882291A JPH0589799A (en) 1991-09-27 1991-09-27 Picture display device and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH0589799A true JPH0589799A (en) 1993-04-09

Family

ID=17183935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24882291A Pending JPH0589799A (en) 1991-09-27 1991-09-27 Picture display device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH0589799A (en)

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