JPH0589426A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPH0589426A
JPH0589426A JP24967591A JP24967591A JPH0589426A JP H0589426 A JPH0589426 A JP H0589426A JP 24967591 A JP24967591 A JP 24967591A JP 24967591 A JP24967591 A JP 24967591A JP H0589426 A JPH0589426 A JP H0589426A
Authority
JP
Japan
Prior art keywords
thin film
magnetic
magnetic thin
thin films
flux density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24967591A
Other languages
Japanese (ja)
Inventor
Kazunori Takenouchi
一憲 竹之内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP24967591A priority Critical patent/JPH0589426A/en
Publication of JPH0589426A publication Critical patent/JPH0589426A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain the magnetic head which can maintain and improve recording and reproducing characteristics by forming intermediate magnetic thin films having the coefft. of thermal expansion higher than the coefft. of thermal expansion of nonmagnetic thin films and lower than the coefft. of thermal expansion of high-saturation magnetic flux density magnetic thin films. CONSTITUTION:This annular type magnetic head consists of a ferrite 1-high-saturation magnetic flux density magnetic thin film 3-intermediate magnetic thin film 4-nonmagnetic thin film 5-intermediate magnetic thin film 4'-high-saturation magnetic flux density magnetic thin film 3'-ferrite 1' as the structure near the gap of the magnetic head which executes recording and reproducing of a magnetic recording medium. The coefft. of thermal expansion of the intermediate magnetic thin films 4, 4' is set higher than the coefft. of thermal expansion of the nonmagnetic thin films 5, 5' and lower than the coefft. of thermal expansion of the high-saturation magnetic flux density magnetic thin films 3, 3'. The intermediate magnetic thin films 4, 4' interposed between the thin films 3, 3' and the thin films 5, 5' function as a buffer material. The residual stresses to be generate by a difference in the coefft. of thermal expansion to be maximized between the thin films 3, 3' and the nonmagnetic gap and a change in the crystal structure by heating are thereby decreased and the stable recording and reproducing characteristics are maintained and improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ハードディスクドライ
ブ、VTR、フロッピーディスクドライブ等に使用さ
れ、情報の記録・再生を行う磁気ヘッドに関するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used for a hard disk drive, a VTR, a floppy disk drive, etc. for recording / reproducing information.

【0002】[0002]

【従来技術】近年の磁気ヘッドにおいては、記録密度を
向上させるため単結晶、多結晶フェライトにより構成さ
れる磁気ヘッドの主ギャップ部近傍にセンダスト等の高
飽和磁束密度磁性薄膜を形成し、主ギャップ近傍の漏れ
磁界を急峻とする構造が採用されている。特に優れた性
能を示す主ギャップの両側に高飽和磁束密度磁性薄膜を
形成した構造(ダブルMIG構造と総称する)が多用さ
れている。
2. Description of the Related Art In recent magnetic heads, in order to improve the recording density, a high saturation magnetic flux density magnetic thin film such as sendust is formed in the vicinity of the main gap portion of a magnetic head composed of single crystal or polycrystalline ferrite to form a main gap. A structure that makes the leakage magnetic field in the vicinity steep is adopted. A structure in which a high saturation magnetic flux density magnetic thin film is formed on both sides of a main gap showing particularly excellent performance (generally referred to as a double MIG structure) is often used.

【0003】磁気ヘッドのMIG構造の基本的な考え方
は実公昭29-11642号公報に記載されている。
The basic idea of the MIG structure of the magnetic head is described in Japanese Utility Model Publication No. 29-11642.

【0004】ダブルMIG構造の磁気ヘッドは、第2図
に示すように、一対のフェライトより成るリング型の磁
気ヘッド101、101’の主ギャップ対向面102、
102’上に、センダスト、パーマロイ等の金属、また
はアモルファス等の高飽和磁束密度磁性薄膜103、1
03’がスパッタリング、蒸着、イオンプレーティング
等により被着され、さらに高飽和磁束密度磁性薄膜10
3、103’間に非磁性薄膜106が介在されるように
高飽和磁束密度磁性薄膜103、103’の少なくとも
一方上にSiO2 の単層膜又はSiO2−低融点ガラス
−SiO2 積層膜がスパッタリング、蒸着等により被着
されていた。この高飽和磁束密度磁性薄膜103、10
3’及び非磁性薄膜106が形成されたフェライト10
1、101’を当接し、加熱して接合していた。
As shown in FIG. 2, the magnetic head having the double MIG structure has a pair of ferrite ring-shaped magnetic heads 101, 101 'having main gap facing surfaces 102,
A high saturation magnetic flux density magnetic thin film 103, 1 such as a metal such as sendust or permalloy, or an amorphous material is provided on the 102 '.
03 'is deposited by sputtering, vapor deposition, ion plating, etc., and further has a high saturation magnetic flux density magnetic thin film 10
3,103 single-layer film of SiO 2 on at least one or 'high saturation magnetic flux density magnetic thin film 103, 103 as a non-magnetic thin film 106 is interposed between' SiO 2 - low-melting glass -SiO2 laminated film sputtering It was deposited by vapor deposition or the like. This high saturation magnetic flux density magnetic thin film 103, 10
Ferrite 10 on which 3'and the non-magnetic thin film 106 are formed
1, 101 'were brought into contact with each other and heated to bond them.

【0005】このようにMIG構造は主ギャップ部近傍
の磁束の飽和を改善し、記録時の発生磁界を急峻にし、
また高保磁力の記録媒体への記録再生を可能とし、記録
密度の高密度化を行うものである。
As described above, the MIG structure improves the saturation of the magnetic flux in the vicinity of the main gap and makes the generated magnetic field steep during recording,
In addition, recording / reproducing on a recording medium having a high coercive force is possible, and the recording density is increased.

【0006】[0006]

【発明が解決しようとする課題】しかしながらギャップ
部近傍に存在する応力により、ギャップ接合後の成形加
工中に非磁性薄膜106付近から剥離などの破損が起こ
り安定した性能が得られないという問題点があった。
However, the stress existing in the vicinity of the gap portion causes damage such as peeling from the vicinity of the non-magnetic thin film 106 during the molding process after the gap bonding, and stable performance cannot be obtained. there were.

【0007】これはMIG構造のギャップ近傍の構造、
即ちフェライト101−高飽和磁束密度磁性薄膜103
−非磁性薄膜106−高飽和磁束密度磁性薄膜103’
−フェライト101となり、非磁性ギャップである非磁
性薄膜106がSiO2 単層、又はSiO2 −低融点ガ
ラス−SiO2の積層膜であり、夫々異なる部材の熱膨
張率の差及び加熱による結晶構造の変化により発生する
ギャップ部近傍の残留応力を発生させているためであ
る。
This is a structure near the gap of the MIG structure,
That is, ferrite 101-high saturation magnetic flux density magnetic thin film 103
-Nonmagnetic thin film 106-High saturation magnetic flux density magnetic thin film 103 '
- ferrite 101, and the non-magnetic thin film 106 which is a non-magnetic gap is SiO 2 single layer, or a SiO 2 - is a laminated film having a low melting point glass -SiO 2, the crystal structure due to the difference and the heating coefficient of thermal expansion different from each member This is because residual stress near the gap is generated due to the change of

【0008】この現象の改善のため媒体対向面と反対側
のギャップ接合フェライト面の一部に切り欠きを入れて
ガラスで補強する特開平2−168406、またガラス
と高飽和磁束密度磁性薄膜は濡れ性が悪いためMo膜を
両者間に介在させ強固な接合をする特開平2−1666
05等の方法が提案されているが、充分な解決に至って
いない。
In order to improve this phenomenon, a part of the gap junction ferrite surface on the side opposite to the medium facing surface is provided with a notch to reinforce with glass, and the glass and the high saturation magnetic flux density magnetic thin film are wet. Since the property is poor, a Mo film is interposed between the two for strong bonding.
Methods such as 05 have been proposed, but they have not been fully resolved.

【0009】本発明は、上述の問題点に鑑みて案出され
たものであり、その目的は、熱膨張率の差、加熱による
結晶構造の変化がギャップ部近傍の残留応力を軽減し
て、ギャップ部での破損を防止する磁気ヘッドを提供す
るものである。
The present invention has been devised in view of the above problems, and an object thereof is to reduce the residual stress in the vicinity of the gap due to the difference in coefficient of thermal expansion and the change in crystal structure due to heating. The present invention provides a magnetic head that prevents damage at the gap.

【0010】[0010]

【課題を解決するための手段】本発明の磁気ヘッドは、
磁気記録媒体に記録・再生を行う磁気ヘッドのギャップ
近傍の構造がフェライト−高飽和磁束密度磁性薄膜−中
間磁性薄膜−非磁性薄膜−中間磁性薄膜−高飽和磁束密
度磁性薄膜−フェライトとなるリング型磁気ヘッドであ
って、前記中間磁性薄膜の熱膨張率が、非磁性薄膜の熱
膨張率より大きく、且つ高飽和磁束密度磁性薄膜の熱膨
張率より小さくしたことである。
The magnetic head of the present invention comprises:
A ring type structure in which the structure near the gap of a magnetic head for recording / reproducing on / from a magnetic recording medium is ferrite-high saturation magnetic flux density magnetic thin film-intermediate magnetic thin film-nonmagnetic thin film-intermediate magnetic thin film-high saturation magnetic flux density magnetic thin film-ferrite In the magnetic head, the coefficient of thermal expansion of the intermediate magnetic thin film is larger than that of the nonmagnetic thin film and smaller than that of the high saturation magnetic flux density magnetic thin film.

【0011】[0011]

【作用】上述の構成により、高飽和磁束密度磁性薄膜と
非磁性薄膜との間に介在した中間磁性薄膜が緩衝材とし
て作用して、特に高飽和磁束密度磁性薄膜−非磁性ギャ
ップ間が最大となる熱膨張率の差及び加熱による結晶構
造の変化により発生する残留応力を低減できる。このた
め、簡便な方法で製造を容易で、さらに安定した記録再
生特性の維持・向上が達成できる。
With the above-described structure, the intermediate magnetic thin film interposed between the high saturation magnetic flux density magnetic thin film and the non-magnetic thin film acts as a buffer material, and particularly the high saturation magnetic flux density magnetic thin film-non-magnetic gap is maximized. The residual stress generated due to the difference in the coefficient of thermal expansion and the change in the crystal structure due to heating can be reduced. Therefore, it is possible to easily manufacture by a simple method, and it is possible to achieve more stable maintenance and improvement of the recording / reproducing characteristics.

【0012】[0012]

【実施例】以下、本発明を図面に基づいて説明する。図
1は本発明の磁気ヘッドの構造を示す側面図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 is a side view showing the structure of the magnetic head of the present invention.

【0013】磁気ヘッドは、一対のフェライト1、1’
と該フェライト1、1’上に形成した高飽和磁束密度磁
性薄膜3、3’、中間磁性薄膜4、4’及び非磁性薄膜
5から構成されている。
The magnetic head comprises a pair of ferrites 1, 1 '.
And high saturation magnetic flux density magnetic thin films 3, 3 ', intermediate magnetic thin films 4, 4', and non-magnetic thin film 5 formed on the ferrites 1, 1 '.

【0014】一対のフェライト1、1’は、2つC字状
バー、又は一方がC字状バーのMn−Znフェライトな
どからなる。
The pair of ferrites 1 and 1'is composed of two C-shaped bars or one of the C-shaped Mn-Zn ferrites.

【0015】前記一対のフェライト1、1’が互いに当
接しあってリング型を成す際の対向面2、2’にはセン
ダスト、パーマロイ等の金属、またアモルファス金属な
どから成る高飽和磁束密度磁性薄膜3、3’が形成され
ている。具体的にはそれらの材料をスパッタリング、蒸
着、イオンプレーティング等の薄膜技法によって形成す
る。
A high saturation magnetic flux density magnetic thin film made of a metal such as sendust or permalloy, or an amorphous metal is formed on the facing surfaces 2 and 2'when the pair of ferrites 1 and 1'abut each other to form a ring shape. 3, 3'is formed. Specifically, those materials are formed by a thin film technique such as sputtering, vapor deposition, or ion plating.

【0016】前記高飽和磁束密度磁性薄膜3、3’上
に、さらにMn−ZnフェライトやNi−Znフェライ
ト、それらの合金フェライトからなる中間磁性薄膜4、
4’が形成されている。具体的にはそれらのフェライト
をターゲットとして、上述した薄膜技法によって形成す
る。
On the high saturation magnetic flux density magnetic thin films 3 and 3 ', an intermediate magnetic thin film 4 made of Mn-Zn ferrite, Ni-Zn ferrite, or their alloy ferrite,
4'is formed. Specifically, the ferrite is used as a target and is formed by the above-described thin film technique.

【0017】非磁性薄膜5は、SiO2 膜、又はSiO
2 −鉛ガラスなどの低融点ガラス層−SiO2 の積層膜
が形成されている。具体的には、中間磁性薄膜4、4’
上に夫々非磁性薄膜5の所定厚みの約半分のSiO
2 膜、SiO2 −鉛ガラス積層膜を形成する。尚、図1
においては非磁性薄膜5の単層構造で、図2では積層構
造で示す。
The nonmagnetic thin film 5 is a SiO 2 film or a SiO 2 film.
A laminated film of a low melting point glass layer such as 2 -lead glass and SiO 2 is formed. Specifically, the intermediate magnetic thin films 4, 4 '
The upper part of the non-magnetic thin film 5 is about half the predetermined thickness of SiO.
2 film, SiO 2 - to form a lead glass laminate film. Incidentally, FIG.
Shows a single layer structure of the non-magnetic thin film 5, and FIG. 2 shows a laminated structure.

【0018】このように高飽和磁束密度磁性薄膜3、
3’、中間磁性薄膜4、4’、非磁性薄膜5の一部が形
成されたフェライト1、1’を当接して、約540℃で
加熱することにより、非磁性薄膜5部分を溶融接合を行
う。これにより、ギャップ部近傍がフェライト1−高飽
和磁束密度磁性薄膜3−中間磁性薄膜4−非磁性薄膜5
−中間磁性薄膜4’−高飽和磁束密度磁性薄膜3’−フ
ェライト1’の構造を有する磁気ヘッドとなる。
Thus, the high saturation magnetic flux density magnetic thin film 3,
3 ', the intermediate magnetic thin films 4, 4', and the ferrites 1, 1'on which a part of the non-magnetic thin film 5 is formed are brought into contact with each other and heated at about 540 ° C. to melt-bond the non-magnetic thin film 5 part. To do. Thereby, near the gap, ferrite 1-high saturation magnetic flux density magnetic thin film 3-intermediate magnetic thin film 4-non-magnetic thin film 5
-A magnetic head having a structure of an intermediate magnetic thin film 4'-high saturation magnetic flux density magnetic thin film 3'-ferrite 1 '.

【0019】本発明によれば、特に中間磁性薄膜4、
4’の熱膨張率は、高飽和磁束密度磁性薄膜3、3’の
熱膨張率よりも小さく、非磁性薄膜5の熱膨張率よりも
大きく設定されている。また、中間磁性薄膜4、4’の
飽和磁束密度は、高飽和磁束密度薄膜の飽和磁束密度よ
り低く設定されている。
According to the invention, in particular the intermediate magnetic thin film 4,
The coefficient of thermal expansion of 4'is set to be smaller than that of the high saturation magnetic flux density magnetic thin films 3 and 3'and larger than that of the non-magnetic thin film 5. The saturation magnetic flux density of the intermediate magnetic thin films 4 and 4'is set to be lower than that of the high saturation magnetic flux density thin film.

【0020】前記高飽和磁束密度磁性薄膜3、3’の膜
厚は1〜5μm、中間磁性薄膜4、4’の膜厚は約0.
1μm、非磁性薄膜5の厚みが0.1〜0.3μm程度
に選定される。また、熱膨張率は、高飽和磁束密度磁性
薄膜3、3’としてセンダストを用いれば170×10
-7/℃となり、中間磁性薄膜4、4’としてMn−Zn
フェライトを用いると125×10-7/℃となり、非磁
性薄膜5であるSiO2 が4×10-7/℃、低融点ガラ
スの鉛ガラスが100×10-7/℃である。従って中間
磁性薄膜4、4’の熱膨張率は、高飽和磁束密度磁性薄
膜3、3’と非磁性薄膜5のSiO2 の熱膨張率の中間
に値するため、フェライト1、1’を接合するための加
熱接合時に、熱膨張の差、加熱による結晶構造の変化に
よる残留応力の発生を緩和できる。
The high saturation magnetic flux density magnetic thin films 3 and 3'have a thickness of 1 to 5 .mu.m, and the intermediate magnetic thin films 4 and 4'have a thickness of about 0.
The thickness of the non-magnetic thin film 5 is selected to be about 1 μm and about 0.1 to 0.3 μm. The coefficient of thermal expansion is 170 × 10 if Sendust is used as the high saturation magnetic flux density magnetic thin films 3 and 3 ′.
-7 / ° C, and Mn-Zn as the intermediate magnetic thin films 4 and 4 '
When ferrite is used, it becomes 125 × 10 −7 / ° C., the nonmagnetic thin film 5 has SiO 2 of 4 × 10 −7 / ° C., and the low melting point lead glass has 100 × 10 −7 / ° C. Therefore, the coefficient of thermal expansion of the intermediate magnetic thin films 4, 4'is intermediate between the coefficients of thermal expansion of SiO 2 of the high saturation magnetic flux density magnetic thin films 3, 3'and the non-magnetic thin film 5, so that the ferrites 1, 1'are joined. Therefore, at the time of heating and joining, the generation of residual stress due to the difference in thermal expansion and the change in crystal structure due to heating can be relaxed.

【0021】従来のMIG磁気ヘッドにおいては、加熱
接合のギャップ破損の発生率が10〜30%であったの
に対して、本発明の磁気ヘッドのギャップ破損の発生率
が5%以下と大きく低減できた。
In the conventional MIG magnetic head, the occurrence rate of gap breakage during heating and joining was 10 to 30%, whereas the occurrence rate of gap breakage in the magnetic head of the present invention was greatly reduced to 5% or less. did it.

【0022】また、磁気記録媒体の記録時には上述した
中間磁性薄膜4、4’は磁気飽和し、高飽和磁束密度磁
性薄膜3、3’間が磁気ギャップとして働き、再生時に
は中間磁性薄膜4、4’間の距離が磁気ギャップとして
働くため記録再生効率を向上させることができる。
Further, during recording on the magnetic recording medium, the above-mentioned intermediate magnetic thin films 4 and 4'are magnetically saturated, and the high saturation magnetic flux density magnetic thin films 3 and 3'act as a magnetic gap, and during reproduction, the intermediate magnetic thin films 4 and 4 '. Since the distance between the two 'acts as a magnetic gap, the recording / reproducing efficiency can be improved.

【0023】上述の構造を持つMIG型磁気ヘッドは単
体もしくは、スライダーなどの摺動材と接合されて、ハ
ードディスクドライブ、VTR、フロッピーディスクド
ライブに使用される。
The MIG type magnetic head having the above-mentioned structure is used alone or in a hard disk drive, a VTR or a floppy disk drive by being joined to a sliding member such as a slider.

【0024】[0024]

【発明の効果】本発明の磁気ヘッドによれば、ギャップ
近傍の構造がフェライト−高飽和磁束密度磁性薄膜−フ
ェライトなどの中間磁性薄膜−非磁性薄膜−フェライト
などの中間磁性薄膜−高飽和磁束密度磁性薄膜−フェラ
イトであるため、高飽和磁束密度磁性薄膜−非磁性薄膜
間が最大となる熱膨張率の差、加熱による結晶構造の変
化により発生する残留応力を両者間にその中間の熱膨張
率を持つフェライト等の中間磁性薄膜により低減でき、
簡単な方法で破損のない磁気ヘッドが達成される。ま
た、更に記録再生特性が維持・向上できる磁気ヘッドど
なる。
According to the magnetic head of the present invention, the structure near the gap is ferrite-high saturation magnetic flux density magnetic thin film-intermediate magnetic thin film such as ferrite-nonmagnetic thin film-intermediate magnetic thin film such as ferrite-high saturation magnetic flux density. Since it is a magnetic thin film-ferrite, the difference in the thermal expansion coefficient between the high saturation magnetic flux density magnetic thin film and the non-magnetic thin film is maximum, and the residual stress generated by the change in the crystal structure due to heating is caused by the intermediate thermal expansion coefficient between them. Can be reduced by an intermediate magnetic thin film such as ferrite with
A damage-free magnetic head is achieved in a simple manner. Further, the magnetic head can further maintain and improve the recording / reproducing characteristics.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の磁気ヘッドの構造を示す側面図。FIG. 1 is a side view showing the structure of a magnetic head of the present invention.

【図2】非磁性薄膜が積層構造のギャップ付近の拡大
図。
FIG. 2 is an enlarged view of a nonmagnetic thin film in the vicinity of a gap in a laminated structure.

【図3】従来の磁気ヘッドの構造を示す側面図。FIG. 3 is a side view showing the structure of a conventional magnetic head.

【符号の説明】[Explanation of symbols]

1、1’・・・フェライト 2、2’・・・対向面 3、3’・・・高飽和磁束密度磁性薄膜 4、4’・・・中間磁性薄膜 5、5’・・・非磁性薄膜 1, 1 '... Ferrite 2, 2' ... Opposing surface 3, 3 '... High saturation magnetic flux density magnetic thin film 4, 4' ... Intermediate magnetic thin film 5, 5 '... Non-magnetic thin film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 磁気記録媒体に記録・再生を行う磁気ヘ
ッドのギャップ部がフェライト−高飽和磁束密度磁性薄
膜−中間磁性薄膜−非磁性薄膜−中間磁性薄膜−高飽和
磁束密度磁性薄膜−フェライトからなるリング型磁気ヘ
ッドであって、前記中間磁性薄膜の熱膨張率が、非磁性
薄膜の熱膨張率より大きく、且つ高飽和磁束密度磁性薄
膜の熱膨張率より小さいことを特徴とする磁気ヘッド。
1. A gap of a magnetic head for recording / reproducing on / from a magnetic recording medium comprises ferrite-high saturation magnetic flux density magnetic thin film-intermediate magnetic thin film-nonmagnetic thin film-intermediate magnetic thin film-high saturation magnetic flux density magnetic thin film-ferrite. A magnetic head, wherein the coefficient of thermal expansion of the intermediate magnetic thin film is larger than that of the non-magnetic thin film and smaller than that of the high saturation magnetic flux density magnetic thin film.
JP24967591A 1991-09-27 1991-09-27 Magnetic head Pending JPH0589426A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24967591A JPH0589426A (en) 1991-09-27 1991-09-27 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24967591A JPH0589426A (en) 1991-09-27 1991-09-27 Magnetic head

Publications (1)

Publication Number Publication Date
JPH0589426A true JPH0589426A (en) 1993-04-09

Family

ID=17196537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24967591A Pending JPH0589426A (en) 1991-09-27 1991-09-27 Magnetic head

Country Status (1)

Country Link
JP (1) JPH0589426A (en)

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