JPH0587770B2 - - Google Patents
Info
- Publication number
- JPH0587770B2 JPH0587770B2 JP27419088A JP27419088A JPH0587770B2 JP H0587770 B2 JPH0587770 B2 JP H0587770B2 JP 27419088 A JP27419088 A JP 27419088A JP 27419088 A JP27419088 A JP 27419088A JP H0587770 B2 JPH0587770 B2 JP H0587770B2
- Authority
- JP
- Japan
- Prior art keywords
- display
- amount
- detector
- leakage
- leak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27419088A JPH02120635A (ja) | 1988-10-28 | 1988-10-28 | リークデテクタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27419088A JPH02120635A (ja) | 1988-10-28 | 1988-10-28 | リークデテクタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02120635A JPH02120635A (ja) | 1990-05-08 |
| JPH0587770B2 true JPH0587770B2 (OSRAM) | 1993-12-17 |
Family
ID=17538289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27419088A Granted JPH02120635A (ja) | 1988-10-28 | 1988-10-28 | リークデテクタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120635A (OSRAM) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004050762A1 (de) * | 2004-10-16 | 2006-04-20 | Inficon Gmbh | Verfahren zur Lecksuche |
| JP4967785B2 (ja) * | 2007-04-26 | 2012-07-04 | 富士電機株式会社 | 真空系統の空気漏れ検出方法 |
| NZ703966A (en) | 2010-07-30 | 2016-07-29 | Resmed Ltd | Methods and devices with leak detection |
| JP6425206B2 (ja) * | 2014-09-10 | 2018-11-21 | 島津エミット株式会社 | ヘリウムリークディテクタ |
| FR3047074B1 (fr) | 2016-01-21 | 2018-01-26 | Pfeiffer Vacuum | Dispositif d'aspersion et module de detection de fuites |
| DE102016205381B4 (de) * | 2016-03-31 | 2023-11-30 | Inficon Gmbh | Gaslecksuche mit einer Testgassprühvorrichtung |
-
1988
- 1988-10-28 JP JP27419088A patent/JPH02120635A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02120635A (ja) | 1990-05-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |