JPH058606Y2 - - Google Patents

Info

Publication number
JPH058606Y2
JPH058606Y2 JP1988170208U JP17020888U JPH058606Y2 JP H058606 Y2 JPH058606 Y2 JP H058606Y2 JP 1988170208 U JP1988170208 U JP 1988170208U JP 17020888 U JP17020888 U JP 17020888U JP H058606 Y2 JPH058606 Y2 JP H058606Y2
Authority
JP
Japan
Prior art keywords
tank
cup
chemical solution
constant temperature
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988170208U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0290844U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988170208U priority Critical patent/JPH058606Y2/ja
Publication of JPH0290844U publication Critical patent/JPH0290844U/ja
Application granted granted Critical
Publication of JPH058606Y2 publication Critical patent/JPH058606Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988170208U 1988-12-30 1988-12-30 Expired - Lifetime JPH058606Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988170208U JPH058606Y2 (enEXAMPLES) 1988-12-30 1988-12-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988170208U JPH058606Y2 (enEXAMPLES) 1988-12-30 1988-12-30

Publications (2)

Publication Number Publication Date
JPH0290844U JPH0290844U (enEXAMPLES) 1990-07-18
JPH058606Y2 true JPH058606Y2 (enEXAMPLES) 1993-03-03

Family

ID=31460954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988170208U Expired - Lifetime JPH058606Y2 (enEXAMPLES) 1988-12-30 1988-12-30

Country Status (1)

Country Link
JP (1) JPH058606Y2 (enEXAMPLES)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63119532A (ja) * 1986-11-07 1988-05-24 Mitsubishi Electric Corp 半導体製造におけるフオトレジスト塗布および現像装置
JPS63152123A (ja) * 1986-12-17 1988-06-24 Tokyo Electron Ltd 浸漬式の液処理装置

Also Published As

Publication number Publication date
JPH0290844U (enEXAMPLES) 1990-07-18

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